Understanding Semiconductor Physics
Understanding Semiconductor Physics
DEVICE
Farzana Alam
Lecturer
Southeast University
INTRODUCTION
In this chapter,
(i) You should be able to sketch the atomic arrangement of atoms in the cubic
lattices.
(ii) You should be able to calculate the area and volume density of atoms.
(iii) You should be able to identify the principal crystal directions and lattice
planes in the cubic lattices.
Integrated-Circuit Devices
Planar Process Technology
IC Technology Advancement
Benefit of Transistor Scaling
ample: Microprocessor Evolution
Q: Why study electronic devices?
A: They are the backbone of modern technology
1) Computers.
2) Scientific instruments.
3) Cars and airplanes (sensors and actuators).
4) Homes (radios, ovens, clocks, clothes dryers, etc.).
5) Public bathrooms (Auto-on sinks and toilets).
Elemental Compound
Group IV of periodic table Combinations of Group III and
Group V Elements
・ Silicon (Si) ・ Binary: GaAs, AlAs,AlP,GaN, GaP, InP etc.
・ Germanium (Ge) ・ Ternary: AlGaAs, InGaAs, InGaP etc.
・ Carbon (C)
III IV V Combinations of Group IV and
Group IV Elements
B C ・ SiC, SiGe etc.
Al Si P
Ga Ge As
In Sb Silicon is the most common material for ICs.
Periodic table 11
What is a Semiconductor?
In most semiconductor devices, the atoms are arranged in crystals. Again, this is because of the physical
properties of the material. The structures of solid materials are described with three main categories. (This
can and is further subdivided.) These categories are:
e. Amorphous (random arrangement of atoms. EG: Steel) [easy to manufacture and used in solar cells]
f. Poly crystalline (has regions of crystallinity separated by grain boundaries. EG: glass) [easy to
manufacture]
g. Crystalline (Repeating arrangement of atom. EG: salt, diamond)
To understand the distinction between these solid material types, we must first understand the concept of
order. Order can be described as the repetition of identical structures or identical placement of atoms. An
example of this would be an atom that has six nearby atoms, each 5 Å away, arranged in a pattern as such.
Compound Semiconductors
If one where to pick any other atom in the material and find
the same arrangement, then the material would be described
as having order. This order can be either Short Range Order,
SRO, or Long Range Order. Short-range order is typically
on the order of 100 inter atom distances or less, while long
range is over distance greater than 1000 inter atom
distances, with a transitional region in between.
Crystalline solids are such that the atoms have both SRO and LRO.
Polycrystalline solids are such that there are a large number of small crystals ‘pasted’
together to make the larger piece.
Types of Solids
Grain
Often primitive cells are not easy to work with and thus we often use slightly larger unit cells to
describe the crystal. There are four of very simple – basic – unit cells that are often seen in
crystalline structures.
Unit Cell
18
Types of Unit Cell
20
Space Lattices
・ The concern in this lecture will be the single crystal. A representative unit, or group of atoms, is repeated at regular intervals in each
of the three dimensions to form the single crystal.
・ The periodic arrangement of atoms in the crystal is called the lattice.
b4 D a3
b1 b1 C a4
a1 a1
Infinite two-dimensional lattice
Various possible two-dimensional lattice/ unit cell
21
・ We can see that single-crystal lattice is a periodic repetition of a group of atoms. Therefore, we do not need to consider the entire
lattice. We just need to consider a fundamental unit.
・ A unit cell is a small volume of the crystal that can be used to reproduce the entire crystal.
・ A primitive cell is the smallest unit cell that can be repeated to form the lattice.
・ In many cases, it is more convenient to use a unit cell that is not a primitive cell.
・ Unit cells may be chosen that have orthogonal sides, whereas the sides of a primitive
cell may be non-orthogonal.
・ This figure shows a generalized three-dimensional unit cell.
22
Basic Crystal Structures
(a) Simple cubic : (b) body-centered cubic (bcc) : (c) face-centered cubic (fcc) :
an atom located at each has an additional atom at the has additional atoms on each
corner. center of the cube. face plane
By knowing the crystal structure of a material and its lattice dimensions, we can determine
several characteristics of the crystal. For example, we can determine the volume density
of atoms.
23
These structures are:
1) Simple Cubic, SC
Here the ‘new’ atoms are at (a/2 + b/2), (b/2 + c/2), (a/2 + c/2), (a + b/2 + c/2), (a/2 + b + c/2),
(a/2 + b/2 + c).
Example 1.1:To find the volume density of atoms in a crystal that is a body-centered cubic
with a lattice constant a = 5 Å = 5 x 10-8 cm.
Solution:
A corner atom is shared by eight unit cells which meet at each corner so that each corner atom effectively contributes one-
eighth of its volume to each unit cell. The eight corner atoms then contribute an equivalent of one atom to the unit cell. If we add
the body-centered atom to the corner atoms, each unit cell contains an equivalent of two atoms.
2atoms
Density 1.6 x10 22 atoms / cm 3
5x10 8 3
Comment :
The volume density of atoms just calculated represents the order of magnitude of density for most materials. The actual
density is a function of the crystal type and crystal structure since the packing density – number of atoms per unit cell- depends
on crystal structure.
27
Crystal Planes and Miller Indices
Three basic planes that are commonly considered in a cubic crystal are shown below.
Fig.(a): The plane is parallel to the and axes so the intercepts are given as p=1, q=infinity and s=infinity.
Taking the reciprocal, we obtain the Miller indices as (1,0,0), so the plane is referred to as the (100) plane.
Note: Any plane parallel to the one shown in Fig.(a) and separated by an integral number of lattice constants
is equivalent and is referred to as the (100) plane.
One advantage to taking the reciprocal of the intercepts to obtain the Miller indices is that the use of infinity
is avoided when describing a plane that is parallel to an axis.
28
Now that we have described a few of the simple crystal types, we need to figure out how to describe a
location in the crystal. We could use our basis vectors, a, b and c, but it has been found that this is not the
most advantageous description. For that we turn to MILLER INDICES. Miller Indices define both planes in
the crystal and the direction normal to said plane. As we know, all planes are defined by three points. Thus,
one can pick three Lattice points in the crystal and hence define a plane. From these three points, we can find
an origin that is such that travel from the origin to each lattice point is only along one basis vector and the
distance is an integer multiple of that same basis vector. Thus our points are located at ia, jb and kc, where i, j
and k are integers.
To determine Miller Indices does the following:
1) Determine the proper origin and the associated integers, i, j k.
2) Invert i, j and k. Thus (i,j,k) => (1/i,1/j,1/k). In our picture above we find that (3,5,3) goes to
(1/3,1/5,1/3).
3) Next, one finds the least common multiple of i, j and k and use this to multiple the fractions.
In our picture above that multiple is 15. Thus we find (1/3,1/5,1/3) goes to (5,3,5). This is our
Miller Index.
If one of the integers is negative, it is denoted with a ‘bar’ over the number. Thus (-5,3,5) is
written ( 5,3,5).
Often, multiple planes are equivalent. These are denoted with curly brackets {}. In a SC lattice,
all faces appear to be the same. Thus {1,0,0} (1,0,0), (0,1,0), (0,0,1), ( 1,0,0), (0, 1,0), (0,0, 1).
In addition to the planes, we might also be interested in a vector, i.e. moving in a given direction
for a given distance. In this field, vectors are denoted with square brackets, []. Thus a vector V=
1.5a+1b => [1.5,1,0] or more commonly [3,2,0], since we always want to move from lattice point
to lattice point. Equivalent vectors are given with angle brackets, <>.
(110) (111)
(100)
Note: The brackets are used to designate direction as distinct from the parentheses used for the crystal planes.
In the simple cubic lattices, the [hkl] direction is perpendicular to the (hkl) plane. This perpendicularity may not be true in noncubic
lattices.
31
Crystallographic Notation
Diamond Lattice
The diamond lattice is fairly difficult to draw. However, it is very important as it is the typical
lattice found with Si, the leading material used in the semiconductor industry.
An important characteristic of the diamond lattice is that any atom within the diamond structure will have
four nearest neighboring atoms.
The diamond structure refers to the particular lattice in which all atoms are of the same species such as 34
silicon or germanium.
The Zincblende Structure
The zincblende structure differs from the diamond structure only in that there are two different types of atoms
in the lattice. Compound semiconductors, such gallium arsenide (GaAs) have the zincblende structure.
Note: The atoms in both the diamond and zincblende structures are joined together to form a tetrahedron.
Imperfections in Solids
(i) Lattice Vibrations : due to thermal energy which is a function of temperature.
Vacancy Interstitial
Effects of defects:
・ Disruption of the normal geometric periodicity of the lattice
and the ideal atomic bonds in the crystal.
・ The change of electrical properties of materials.
Impurities in Solids
Substitutional
Impurity
Interstitial
Impurity
45
GROWTH of SEMICONDUCTOR MATERIALS
Presently, Silicon, has concentrations of most impurities of less than 1 part in 10 billion.
To get high purity of semiconductor materials, we need;
(i) Extreme care in the growth processes, Container
(ii) High growth technologies,
Chuck
(iii) Extreme care at each step of the fabrication
processes.
Seed Tube
Crystal
(1) Growth from a Melt Melt
Heater
52
(2) Epitaxial Growth
Epitaxial growth is a process whereby a thin, single-crystal layer of material is grown on the surface of a single-
crystal substrate.
53
Summary
・ A few of the most common semiconductor materials were listed. Silicon is the most common
semiconductor material.
・ The properties of semiconductors and other materials are determined to a large extent by the
single-crystal lattice structure. The unit cell is a small volume of the crystal that is used to reproduce
the entire crystal. Three basic unit cells are the simple cubic, body-centered cubic (bcc) and face-
centered cubic (fcc).
・ Silicon has the diamond crystal structure. Atoms are formed in a tetrahedral configuration with four
nearest neighbor atoms. The binary semiconductors have a zincblende lattice, that is basically the
same as the diamond lattice.
・ Miller indices are used to describe planes in a crystal lattice. These planes may be used to describe
the surface of a semiconductor material. The Miller indices are also used to describe directions in a
crystal.
Compound semiconductor 57
Exercise 1 – Crystal Planes and Miller Indices
The vector of this three dimensional crystal is
given as
r pa qb sc
The intercept of the plane correspond to
p 3, q 2 and s 1
The reciprocals of the intercepts is
1 1 1
, ,
3 2 1
Multiply by the lowest common denominator,
6 to obtain (2, 3, 6). The plane is referred
as (236) plane
58
Exercise 2 – Crystal Planes and Miller Indices
Describe the lattice plane shown in Figure 1.7
r pa qb sc
The intercept of the plane correspond to
p 1, q 2 and s 2
The reciprocals of the intercepts is
1 1 1
, ,
1 2 2
Multiply by the lowest common denominator,
2 to obtain (2, 1, 1). The plane is referred
as (211) plane
59
Exercise 3 – Crystal Planes and Miller Indices
・ Determine the Miller indices for the planes shown below
The vector of this three dimensional crystal is
given as
r pa qb sc
The intercept of the plane correspond to
p 1, q 3 and s 1
The reciprocals of the intercepts is
1 1 1
, ,
1 3 1
Multiply by the lowest common denominator,
3 to obtain (3, 1, 3). The plane is referred
as (313) plane
60
Exercise 4 – Crystal Planes and Miller Indices
・ Determine the Miller indices for the planes shown below
The vector of this three dimensional crystal is
given as
r pa qb sc
The intercept of the plane correspond to
p 4, q 2 and s 4
The reciprocals of the intercepts is
1 1 1
, ,
4 2 4
Multiply by the lowest common denominator,
4 to obtain (1, 2, 1). The plane is referred
as (121) plane
61
Exercise 5 – Find the Surface Density at (110) plane
The number of atoms
per lattice plane is
1 4 x 4+1= 2
a1 = 5 x 10-10 m or 5 x 10-8cm
Volume of atom
Packing Density
Volume of unit cell
63
Diagonal
There are two types of diagonal used in the calculation
64
Make the atom expand
65
Exercise 6 – Find the packing density for Simple Cube
4 r 3
1 atom per cell, so atom vol 1
3
4 r 3
Volume of atom 3
Packing Density 100% 52.4%
Volume of unit cell 8r 3
66
Exercise 7 – Find the packing density for FCC
16
3
3
Unit cell vol a 2 2 r 2 r 3
4 r 3
4 atom per cell, so atom vol 4
3
4 r 3
4
Volume of atom 3
Packing Density 100% 74%
Volume of unit cell 16 2 r 3
67
Exercise 8 – Find the packing density for BCC
4 r 3
2
3
Packing Density 3
100% 68%
4r
3
68
Exercise 9 – Find the packing density for Diamond CC
69
Exercise 9 – Find the packing density for Diamond CC
70
Exercise 9 – Find the packing density for Diamond CC
8
Body diagonal BD 8r a 3 a r
3
3
3 8r
Unit cell vol a
3
4 r 3
8 atom per cell, so atom vol 8
3
4 r 3
8
Volume of atom 3
Packing Density 3
100% 34%
Volume of unit cell 8r
3
72
Summary
73
Exercise 10 – Find the surface density of atoms for (100) plane of face-centered-cubic
structure where a=4.25 A
1
Number of atoms per 100 plane 1 4 2
4
2 2
Surface Density 2
a 4.25 10
8 2
1.111015atom/cm 2
74
Exercise 11 – Find the surface density of atoms for (110) plane of face-centered-cubic
structure where a=4.25 A
1 1
Number of atoms per 110 plane 2 4 2
2 4
2 2
Surface Density
a a 2 4.25 10 2
8 2
7.83 1014atom/cm 2
75
he Photoelectric Effect
The photoelectric effect is the emission of electrons when electromagnetic radiation, such as light, hits a
material. Electrons emitted in this manner are called photoelectrons. The phenomenon is studied in
condensed matter physics, and solid state and quantum chemistry to draw inferences about the properties of
atoms, molecules and solids. The effect has found use in electronic devices specialized for light detection and
precisely timed electron emission.
What is Fermi Level in Semiconductors?
Fermi level (denoted by EF) is present between the valence and conduction bands. It
is the highest occupied molecular orbital at absolute zero. The charge carriers in this
state have their own quantum states and generally do not interact with each other.
When the temperature rises above absolute zero, these charge carriers will begin to
occupy states above Fermi level.
In a p-type semiconductor, there is an increase in the density of unfilled states. Thus,
accommodating more electrons at the lower energy levels. However, in an n-type
semiconductor, the density of states increases, therefore, accommodating more
electrons at higher energy levels.
Bond Model of Electrons and Holes