Process Matching/Installation and Qualification (IQ)
Course ID:
Revision:
Intel Confidential
Course Prerequisites
• Familiarity with white papers and statistical hypothesis testing.
• PCCB Training (Course ID: XXXX)
• DOE 1 (Course ID: 00010164)
• Binomial Methods (Course ID: 00010045)
You need to install JMP 11.1.1 and SOS 3.6.1 (or later)
Intel Confidential DASM – Data Analytics and Statistical Methods Group 2
JMP Pre-requisites
• Before proceeding, install JMP software version 11 (or greater) and the SOS scripts.
• JMP software (1-5 minutes)
• Go to the Intel Software Market app on your Intel laptop.
• Search for “JMP” and click “Install”
• Open JMP after installation.
• SOS scripts (30 seconds)
• Go to the installation page: [Link]
• On the left hand side menu click “Install/Uninstall”
• Click the Install Link
• SOS should appear in the JMP menu bar.
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Process Matching/Install Qual (IQ) Overview
• This course describes the methodology used in Assembly and Test to demonstrate
matching between tools, sites, processes or manufacturing lines.
• The methodology and examples provided in this course will be with respect to
Installation and Qualification (IQ) of a new tool or link as well as process matching
for a change to Plan Of Record (POR).
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Process Matching/IQ Overview
• This course does NOT cover metrology equipment matching.
• For equipment matching, please refer to Metrology Capability Analysis or MCA
course material.
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Course Objectives
After completing this course, you will be able to:
• Understand how to properly conduct process/IQ matching, including CE!
methodology.
• Apply statistical methods for matching as well investigation techniques when
processes are not matched.
• Be able to correctly document Process or IQ matching experiments and results in
White Papers (Preliminary and Final).
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Course Outline
Module 1: Introduction to the IQ Methodology
Module 2: Design an IQ/Matching Experiment
Module 3: Analyze an IQ/Matching Experiment
Module 4: Identify Commonality
Homework Exercises
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Module 1
Introduction to the IQ Methodology
Intel Confidential
Intro to IQ Methodology
At the end of this lesson you should be able to:
Understand how Install Qual activities are embedded within Intel’s CE! Methodology.
Describe the different levels of CE!
Describe the 5M+E checklist and its importance in the IQ process.
Understand the importance of statistical matching.
Intel Confidential DASM – Data Analytics and Statistical Methods Group 9
What is IQ?
Installation and Qualification (IQ) is a process used to install a new piece of equipment
(tool) on the manufacturing floor and qualify it to produce output equivalent to the
existing fleet of tools.
= = = =
What would happen to our final product if our process output was not the same for
similar tools on the floor?
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Phases – IQ Methodology
The IQ Methodology encompasses all activities from equipment selection through
release of all equipment to manufacturing.
De-install Ship Install Qual
Matching is part of the Qual Phase & includes: :
Metrology matching
Level 1 and 2 matching
Matching
– 5M + E CE! Checklist
Level 3 and 4 matching
– All output variables of the process are matched statistically to
the reference tool
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CE! and IQ Process
Installation and Qualification (IQ) is part of the CE! Methodology.
CE! is necessary to ensure equivalent output between tools across VF.
Quality
Same Same Same
Tools Process Results
Copy Exactly! (CE!) is the practice of applying identical
systems, equipment, software, processes and
methodologies across tools and factories.
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Importance of CE!
Efficient and quick process transfers.
Fast, flawless start-ups for Assembly/Test.
Equivalent yields as factories come up into production.
Equivalent product quality regardless of production factories.
Quick troubleshooting of problems across sites.
Greater profits for Intel and higher customer satisfaction.
Just as you’d expect the same experience at any McDonald’s across the world, Intel’s customers
expect the same quality and performance from products manufactured at any of Intel’s locations
across the world.
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CE! Levels
There are 4 levels of CE!
Level Description
Level 1: Process Inputs Setup of tools. (Recipes, process set
points, equipment configurations)
Level 2: Equipment Fingerprint Independent measurements of setup
values.
Level 3: Process Characteristics Attributes of a single process step or
tool.
Level 4: Product Characteristics Attributes of the product as a whole.
IQ elements are embedded in all CE! levels.
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CE! Levels: Examples
CE! Level 1 CE! Level 2 CE! Level 3 CE! Level 4
Process Inputs Equipment Fingerprint Process Characteristics Product Characteristics
Tool model Actual sealing temp at IHS Flux thickness Assembly yield
Set-up procedure Actual DEK print pressure Laser scribe depth Coplanarity
Process recipe Oven temperature Epoxy fillet height TRES
Voiding
Recipe Check Out (RCO) SOT delta Pin true position
Test temperature Tj rise
DUT voltage Vcc Module induced yield loss
DIE/IHS press force Icc Module induced K-lot %
Test bin fallouts
Fmax
Intel Confidential DASM – Data Analytics and Statistical Methods Group 15
Chocolate Cup Cake Example
Suppose you had been invited to have coffee at your friend’s
house. Along with coffee, your friend served chocolate cup cakes.
They were so delicious that you asked your friend for this
exclusive recipe. You hoped that you could prepare similar cup
cakes to impress somebody else with their great taste, nice texture
and beautiful appearance.
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Chocolate Cup Cake Example
• Before you leave your
CUP CAKE RECIPE friend’s house you ask
him to share the recipe
INGREDIENTS
• 2 cups flour
• 1 tsp baking with you.
soda
• 2 cups sugar • ¾ cup milk
• Dash of salt • ¾ cup water
• ½ tsp baking • 2 eggs
• You go home and try to
powder • 4 oz chocolate replicate the same
PREPARATION delicious cup cakes
Combine all ingredients into large following your friend’s
mixing bowl. Mix at high speed for 3 recipe.
minutes. Bake 20 to 25 minutes
Sadly… your cup cakes were not as good
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Chocolate Cup Cake Example
Due to unsuccessful results with the cup cake recipe you decide to
visit your friend again in order to find out what you did differently.
What additional information would you
ask your friend?
- Is it necessary to pre heat the oven?
- What temperature?
- Any specific brand for sugar, flour …?
- Special procedures?
- What type of pan, size …?
- What else …?
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Chocolate Cup Cake Example
• There could be an extensive list
• Bring all ingredients to room temperature of missing information from the
before mixing cupcake batter. original recipe.
• Cook only one pan of cupcakes at a time
• Preheat oven to 350 degrees
• Mix at low speed for 30 seconds • General instructions could lead to
• Mix at high speed for 3 minutes.
multiple interpretations.
• Bake 20 to 25 minutes or until toothpick
inserted in center comes out clean.
• In addition, ingredient brands, pan sizes
• Cool 10 minutes in pans then remove from and oven brands could influence the
pan, and place on wire racks to cool outcome.
completely.
Cupcakes are best eaten the same day they Let’s apply the 4 CE! Levels to the new
are made
chocolate cup cake recipe.
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Chocolate Cup Cake Example
LEVEL 1. Process Inputs
ORIGINAL RECIPE ADDITIONAL INFORMATION
Ingredients: Additional specifications:
• 2 cups flour • Chocolate brand (Nestle)
• 2 cups sugar • Type of milk (skim)
• 1/2 teaspoon baking powder • Brand of oven (GE)
• Dash of salt • Shelf in oven (middle)
• 1 teaspoon baking soda • Mixer type (electric)
• 3/4 cup water • Type of cupcake pan (tin)
• 2 eggs • Size of eggs (large)
• 3/4 cup milk • Amount of salt (1 tsp)
• 4 ounces chocolate
Considering just the original inputs will lead to more variation in the
final results. BUT with the additional specifications, we are more
likely to obtain equivalent results.
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Chocolate Cup Cake Example
LEVEL 2. Fingerprinting
ORIGINAL RECIPE ADDITIONAL INFORMATION
INFORMATION
None. Independent Measurements:
• Oven temperature (set at 350 F)
- Confirmed measurement = 352.5 F
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Chocolate Cup Cake Example
LEVEL 3. Process Characteristics
Quality Characteristic Measurement Method Ideal Target
Cupcake prebake weight Scale 6 oz
Batter mixing time Stopwatch 10 minutes
Baking time Oven Timer 22 minutes
LEVEL 4. Product Characteristics
Quality Characteristic Measurement Ideal Target
Method
Cupcake taste rating Human 10/10
Cupcake appearance rating Human 10/10
Cupcake weight Scale 5 oz
Cupcake height Micrometer 2.5 inches
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CE! Levels
Level 1: Level 2: Level 3: Process Level 4: Product
Process Inputs Equipment Fingerprint Characteristics Characteristics
Example
Physical setting on tool Acceptable Range Measured Output & Matching Reported Characteristic Goal
(example) Target Criteria (example)
CAM Flux DEK Print Speed
+/- 5% 148.7 mm/sec
Flux Thick
SE to target 0.88 mils
Print 150mm/sec 0.65mils
CAM Yield >99.5%
Bin15 electrical opens <0.1%
CAM BTU Zone1 Temp 125 Peak temp 227
+/- 5 degC 128.4 degC SE to target 229.3 degC
Reflow Oven degC degC
Test Temperature IB97
SOT Delta <0.01%
Class Test Set Point +/- 5˚C 104.6˚C
0˚C
SE to target 1.2˚Cs Module induced yield
<0.5%
105˚C loss
5M + E IQ Statistical Methodology
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5M+E CE! Checklist
5M+E is a checklist document that categorizes all process input parameters
needed to set up each tool to ensure CE!.
It contains POR/BKM values for all process input parameters (Level 1) that
directly or indirectly impact the process.
It also ensures the actual values match the setting values or are within the defined
range (Level 2).
Machine Includes the tool hardware and software
Software: All software features/parameters
Hardware: Physical settings based on process characterization
5M = Manpower Certified people to operate the tool
Material Required direct and indirect materials to operate the tool
Measurement Tools used to measure the process parameters
Method All the required procedures to run and maintain the tool
+ Environment The facilities requirements for tool operation:
temperature, humidity, particle levels, etc.
E=
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5M+E Benefits
The 5M+E captures and documents the actual values at the point of
qualification of the tool/process, and:
Provides future data reference in the event that the process drifts or
changes.
Identifies sources of tool-to-tool variation from what the product
experiences during processing.
Establishes link between Process Inputs (Level 1) and Process
Characteristics (Level 3).
Reinforces Level 1 CE!.
In order to achieve statistical matching at Level 3, Levels 1 and
2 must be matched first.
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For Additional Information
Central web site for all things "CE!" in Assembly and Test
5M+E library
CE! Training material
CE! Team sites
GOTO/ASSEMBLYCE
GOTO/TESTCE
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CE! Positive Examples
A few case studies illustrating the benefits of CE!
Scenario Result
CR IHS - Link had a high reject rate for The dispense time was set to the 5M+E values
“stringers.” The MT performed a CE! and with some minor troubleshooting the issue
audit and found the Asymtek dispense was resolved.
time was not CE!.
KM CAM – Link had a high reject rate The CE! nozzle size was installed and the issue
for dropped die and intermittent pick was resolved.
errors. The MT performed a CE! audit
and found that the wrong nozzle size was
used.
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Statistical Matching
Statistical matching occurs after CE! Level 1 and 2 matching are demonstrated.
Statistical matching is used to demonstrate CE! for Levels 3 and 4.
Module 2 will explain how to design experiments for statistical matching.
Module 3 will show how to analyze the matching experiments.
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Checkpoint 1: True or False?
1. 5M + E document contains POR/BKM values for all process input parameters.
(incorrect options: SOS JMP Addin, Class III PWP, xccb meta data)
2. CE! Audit of 5M + E document & Statistical Matching is sufficient to
demonstrate complete matching. (incorrect options: 5M + E document, Statistical
Matching, Technical Equivalence)
3. Statistical matching is applied to all 4 levels of CE!
4. CE! is necessary to ensure equivalent output between tools across the VF.
5. Assembly yield is an example of a Level 3 process characteristic. (incorrect
options: Level 1 Process Inputs, Level 2 Equipment Fingerprinting, Level 4 Product
Characteristics)
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Data Analytics and Statistical Methods Group
Intel Confidential