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Microfabrication Process Overview

The document provides an overview of microfabrication processing steps for integrated circuits. It outlines the main steps which include oxidation, photolithography, etching, chemical vapor deposition, diffusion, ion implantation, and evaporation and sputtering. These steps are used to deposit and pattern thin films, dope materials, and fabricate features on silicon wafers to create integrated circuits.

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Essam Radwan Berikaa
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8 views3 pages

Microfabrication Process Overview

The document provides an overview of microfabrication processing steps for integrated circuits. It outlines the main steps which include oxidation, photolithography, etching, chemical vapor deposition, diffusion, ion implantation, and evaporation and sputtering. These steps are used to deposit and pattern thin films, dope materials, and fabricate features on silicon wafers to create integrated circuits.

Uploaded by

Essam Radwan Berikaa
Copyright
© All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd

Microfabrication Processing Overview

Processing Overview

Materials IC Fab

Dielectric Test
Metalization CMP
deposition
Wafers

Thermal Etch Packaging


Implant
Processes PR strip
PR strip
Masks

Photo- Final Test


lithography

Design

Hong Xiao, Ph. D, [Link]/HongXiao/[Link]


Processing Overview

Main Processing steps:


 Oxidation
 Photolithography
 Etching
 Chemical Vapor Deposition
 Diffusion
 Ion Implantation
 Evaporation and Sputtering

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