Scanning Electron
Microscope (SEM)
M A Samad Azad, ACCE, NSTU
M A Samad Azad, ACCE, NSTU
Contents:
Scanning Electron Microscope (SEM)
Principles of Scanning Electron Microscope
How does the Scanning Electron Microscope
Work?
Parts of a Scanning Electron Microscope
Advantages & Disadvantage of Scanning Electron
Microscope.
Limitations of Scanning Electron Microscope
Applications of Scanning Electron Microscope
M A Samad Azad, ACCE, NSTU
Scanning Electron Microscope
• A scanning electron microscope (SEM) is a
type of electron microscope that produces
images of a sample by scanning the surface
with a focused beam of electrons.
• The electrons interact with atoms in the
sample, producing various signals that contain
information about the surface topography and
composition of the sample
M A Samad Azad, ACCE, NSTU
Principles of SEM
The Scanning electron microscope works on the
principle of applying kinetic energy to produce
signals on the interaction of the electrons.
The electron beam follows a vertical path through
the microscope, which is held within a vacuum. The
beam travels through electromagnetic fields and
lenses, which focus the beam down toward the
sample.
Once the beam hits the sample, electrons and X-rays
are ejected from the sample.
M A Samad Azad, ACCE, NSTU
Working Principle of SEM
At the heart of a scanning electron microscope is a
high-energy electron source positioned above a
series of condenser lenses and apertures which
focus these electrons into a beam.
The position of this beam is altered by sets of
deflection or scanning coils before the final lens
aperture.
A sample is placed in the path of the electron
beam which is continuously deflected into a raster
scanning pattern by the deflection coils.
M A Samad Azad, ACCE, NSTU
Working principle of SEM (cont.)
When electrons impact on a surface, they generate
secondary and backscattered electrons (BSE), as well as x-
rays. BSE and x-ray detectors in the sample chamber
acquire these signals, which are characteristic of the
sample’s elemental composition, morphology, and
crystalline structure.
Scanning electron microscopy can subsequently be used
for imaging the elemental composition of a sample surface
and determining topographical sample features with a
significantly increased resolving power
M A Samad Azad, ACCE, NSTU
Working principle of SEM (cont.)
Scanning electron microscopy can generate 3D
chemical surface maps of a sample with a magnifying
capacity of up to 50,000x.
This offers high lateral resolution ranging from
millimeters to nanometres (>10nm), while energy
dispersive x-ray (EDX) analysis provides chemical
detection limits of 1000 – 3000 parts per million.
M A Samad Azad, ACCE, NSTU
Components of SEM:
Components in a SEM are listed-
Electron Source. Tungsten (W) electron filament.
Lanthanum hexaboride (LaB6) or Cerium
hexaboride (CeB6) Field Emission Gun (FEG)
Lenses.
Scanning Coil.
Sample Chamber.
Detectors. Backscattered electron detector (BSD)
Energy Dispersive Spectroscopy (EDS)
Secondary Electron Detector (SED
M A Samad Azad, ACCE, NSTU
M A Samad Azad, ACCE, NSTU
• It's wide array of application.
•
Advantages of SEM
The detailed three-dimensional and Disadvantages of SEM
topographical imaging.
• The versatile information generated • Expensive
from different detectors.
• Easy to operate with proper training. • Large
• It advances to computer technology.
• This instrument works fast. • It must be housed in an area
• Most SEM samples require minimal free of an possible
preparation actions.
• The technological advances in electric,magnetic or
modern SEM allows for the vibration interferences.
generation of data in digital form.
• Maintenance arrangement is
high
M A Samad Azad, ACCE, NSTU
Limitations.
Samples must be solid and they must fit into the
microscope chamber.
Maximum size in horizontal dimensions is usually on
the order of 10 cm, vertical dimensions are generally
much more limited and rarely exceed 40 mm.
For most instruments samples must be stable in a
vacuum on the order of 10-5 - 10-6 torr.
M A Samad Azad, ACCE, NSTU
• Application of SEM
• SEM is the most versatile technique and can be used to
image morphology of samples.
• Image compositional and some bonding differences.
• Examine wet and dry samples while viewing them.
• View frozen materials ( in a SEM with a cryostage).
• Generate x-rays from samples for microanalysis (EDS).
• View/map gain orientation /crystallographic orientation and
study related information like heterogeneity.
• Gunshot residue analysis.
M A Samad Azad, ACCE, NSTU
Trace comparison.
Scanning Electron Microscopes (SEMs) are used across a
number of industrial, commercial, and research
applications.
Examination of paint particles and fibers.
Examination of non conducting materials.
Counterfeit bank notes.
Precise measurement of very small objects down to 50 nm
in size is also accomplished by using SEM.
Back scatted electron images can be used for rapid
discrimination of phases in multiple sample.
M A Samad Azad, ACCE, NSTU
M A Samad Azad, ACCE, NSTU