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Arrhenius Coefficients in Oxidation

The document outlines homework problems related to chemical processes for micro- and nanofabrication, focusing on the determination of Arrhenius coefficients for oxidation processes under different conditions. It includes calculations for oxidation times required for specific oxide thicknesses and discusses the transition between linear and parabolic oxidation regimes. The results are presented in tabular form, detailing the parameters used and the findings for both dry and wet oxidation scenarios.

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6 views2 pages

Arrhenius Coefficients in Oxidation

The document outlines homework problems related to chemical processes for micro- and nanofabrication, focusing on the determination of Arrhenius coefficients for oxidation processes under different conditions. It includes calculations for oxidation times required for specific oxide thicknesses and discusses the transition between linear and parabolic oxidation regimes. The results are presented in tabular form, detailing the parameters used and the findings for both dry and wet oxidation scenarios.

Uploaded by

s-mohamed.ghalwash
Copyright
© All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd

CHE323/384 Chemical Processes for Micro- and Nanofabrication

Chris Mack, University of Texas at Austin

Homework #3

1. Given the parameters in Table 4.1 and the activation energies in Figures 4.2 and 4.3 of
the Campbell textbook (also found in the Lecture 12 notes), determine the Arrhenius
coefficients for B and B/A for both wet (640 torr) and dry oxidation.

I used Excel to fit the data in Table 4.1 to the Arrhenius equation. Taking the log of the
EA
Arrhenius equation for B, as an example, ln( B)  ln( Ar )  . Thus, if I plot ln(B) versus 1/kT the
kT
slope will -EA and the intercept will be ln(Ar), where Ar is the Arrhenius coefficient I am looking
for. Here are the results, in table form.

Dry B Dry B/A Wet B Wet B/A


(m2/hr) (m/hr) (m2/hr) (m/hr)

Ar 1298 7.98X106 189 5.79X107

EA (eV) 1.29 2.02 0.71 1.93

Alternately, if I fix the activation energy to be the value found in Campbell figures 4.2 and 4.3,
I’ll get a slightly different result for Ar. These results are in the following table.

Dry B Dry B/A Wet B Wet B/A


(m2/hr) (m/hr) (m2/hr) (m/hr)

Ar 850 6.64X106 197 7.39X107

EA (eV) 1.24 2.0 0.71 1.96

2. Does the oxide thickness at which there is a transition from linear to parabolic rates
change if we perform an oxidation at a pressure of 20 atmospheres rather than at 1
atmosphere?

The transition from linear to parabolic regimes occurs at a thickness of A/2. Since A is not a
function of pressure, there will be no change in the thickness at which the transition occurs when
the pressure is changed.

3. A certain technology requires a gate oxide of 95 nm, and this oxidation will be carried
out in dry O2 at 1000 C. There is no initial oxide on the (111) wafer. What oxidation
time is required? Does this oxidation process end in the linear regime, the parabolic
regime, or in between?

From Table 4.2, A = 0.165 m, B = 0.0117 m2/hr,  = 0.37. Solving the Deal-Grove equation
for tox,

tox  Atox 0.0952  (0.165)(0.095)


2
tox  Atox  B (t   ) , t     0.37  1.74 hr
2

B 0.0117

Note: one could also use the graphs in Campbell to read off the values of A and B at this
temperature.

Since tox is about the same as A/2, this oxidation process is in between the linear and parabolic
regime.

4. Repeat problem 3 for wet oxidation.

From Table 4.2, A = 0.226 m, B = 0.287 m2/hr,  = 0. Solving the Deal-Grove equation for
tox,

tox  Atox 0.0952  (0.226)(0.095)


2
tox  Atox  B (t   ) , t     0.11 hr
2

B 0.287

(Note that a 6 minute oxidation time is too fast to control!!) Since t ox is about the same as A/2,
this oxidation process is in between the linear and parabolic regime.

5. Repeat problem 3 for the case where the wafer already contains a 45-nm thick oxide film.

to  Ato 0.0452  (0.165)(0.045)


2
Calculating     0.81 hr . Thus,
B 0.0117

tox  Atox 0.0952  (0.165)(0.095)


2
t    0.81  1.30 hr
B 0.0117

Alternately, one could calculate how long it would take to grow a 45-nm thick oxide film, and
subtract that time from the answer to problem 3.

tox  Atox 0.0452  (0.165)(0.045)


2
t 45nm     0.37  0.44 hr
B 0.0117

t  t95 nm  t 45 nm  1.74  0.44  1.30 hr

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