Quick Guide to Precision Measuring Instruments

Microscopes
■ Numerical Aperture (NA) ■ Infinity Optical System
The NA figure is important because it indicates the resolving power An optical system where the objective forms its image at infinity and a
of an objective lens. The larger the NA value the finer the detail that tube lens is placed within the body tube between the objective and the
can be seen. A lens with a larger NA also collects more light and will eyepiece to produce the intermediate image. After passing through the
normally provide a brighter image with a narrower depth of focus than objective the light effectively travels parallel to the optical axis to the
one with a smaller NA value. tube lens through what is termed the `infinity space’ within which auxil-
iary components can be placed, such as differential interference contrast
NA=n·Sinθ (DIC) prisms, polarizers, etc., with minimal effect on focus and aberration
The formula above shows that NA depends on n, the refractive index corrections.
of the medium that exists between the front of an objective and the Objective lens
specimen (for air, n=1.0), and angle θ, which is the half-angle of the Image forming (tube) lens
maximum cone of light that can enter the lens. A point-source on
the specimen Light from point source is focused
at the intermediate image plane

f1 f2 Magnification of the objective = f2/f1

■ Resolving Power (R) Infinity space

The minimum detectable distance between two image points,
representing the limit of resolution. Resolving power (R) is determined
by numerical aperture (NA) and wavelength (λ) of the illumination.
■ Finite Optical System
An optical system that uses an objective to form the intermediate image
R=l/2·NA (µm) at a finite position. Light from the workpiece passing through the objec-
l=0.55μm is often used as the reference wavelength tive is directed toward the intermediate image plane (located at the front
focal plane of the eyepiece) and converges in that plane.

Objective lens
■ Working Distance (W.D.) A point-source on Light from point source is focused
the workpiece at the intermediate image plane
The distance between the front end of a microscope objective and the
surface of the workpiece at which the sharpest focusing is obtained.
L1 L2 Magnification of the objective = L2/L1

■ Parfocal Distance
The distance between the mounting position of a microscope objective
and the surface of the workpiece at which the sharpest focusing is ■ Focal Length (f) unit: mm
obtained. Objective lenses mounted together in the same turret should The distance from the principal point to the focal point of a lens: if
have the same parfocal distance so that when another objective is f1 represents the focal length of an objective and f2 represents the
brought into use the amount of refocussing needed is minimal. focal length of an image forming (tube) lens then magnification is
determined by the ratio between the two. (In the case of the infinity-
correction optical system.)
Working distance
Objective magnification = Focal length of the image-forming
(tube) lens/Focal length of the objective
Examples: 1X=200/200
10X=200/20
Parfocal distance

■ Real Field of View unit: mm

(1)Diameter of surface observed through eyepiece

Real field of view = Eyepiece field number/Objective magnification
Example: Real field of view of 10X lens (ø2.4 eyepiece)=24/10=2.4
(2)Diameter of surface observed on video monitor
Real field of view=Size(length x width) of CCD camera pickup device/
Objective magnification
*Size (length x width) of 1/2-inch CCD camera pickup device=4.8x6.4
Example: Real field of view of 1X lens (length x width)=4.8x6.4
Real field of view of 10X lens (length x width)=0.48X0.64

Quick Guide to Precision Measuring Instruments 34

■ Focal Point ■ Principal Ray
Light rays from an object traveling parallel to the optical axis of a A ray considered to be emitted from an object point off the optical
converging lens system and passing through that system will converge axis and passing through the center of an aperture diaphragm in a lens
(or focus) to a point on the axis known as the rear focal point, or image system.
focal point.

■ Aperture Diaphragm
An adjustable circular aperture which controls the amount of light
passing through a lens system. It is also referred to as an aperture stop
■ Depth of Focus (DOF) unit: µm
and its size affects image brightness and depth of focus.
Also known as ‘depth of field’, this is the distance (measured in the
direction of the optical axis) between the two planes which define the
limits of acceptable image sharpness when the microscope is focused
on an object. As the numerical aperture (NA) increases, the depth of ■ Field Stop
focus becomes shallower, as shown by the expression below:
DOF= l/2·(NA)2 l = 0.55μm is often used as the reference A stop which controls the field of view in an optical instrument.
wavelength
Example: For an M Plan Apo 100X lens (NA = 0.7), and light
wavelength of 0.55μm, the depth of focus of this objective is 0.55/(2
x 0.72) = 0.6μm. ■ Telecentric System
An optical system where the light rays are parallel to the optical
axis in object and/or image space. This means that magnification is
nearly constant over a range of working distances, therefore almost
eliminating perspective error.

■ Bright-field Illumination and Dark-

field Illumination
In brightfield illumination a full cone of light is focused by the objective ■ Erect Image
on the specimen surface. This is the normal mode of viewing with an An image in which the orientations of left, right, top, bottom and
optical microscope. With darkfield illumination, the inner area of the moving directions are the same as those of a workpiece on the
light cone is blocked so that the surface is only illuminated by light from workstage.
an oblique angle. Darkfield illumination is good for detecting surface
scratches and contamination.

■ Field Number
The field of view size (diameter) of an eyepiece, expressed in millimeters.

■ Apochromat Objective and Achromat

Objective
An apochromat objective is a lens corrected for chromatic aberration
(color blur) in three colors (red, blue, yellow).
An achromat objective is a lens corrected for chromatic aberration in ■ Precautions in Using a Microscope for
two colors (red, blue). YAG Laser Machining
Laser machining with a microscope is used on thin films such as
semiconductors and liquid crystals, but high-power laser radiation
cannot be transmitted through a normal objective lens. Therefore, if
using a YAG laser, limit the laser power output as follows:
YAG laser wavelength Irradiation energy density (output) Pulse width Applicable objective
■ Magnification 1064nm
532nm
0.2J/cm2
0.1J/cm2
10ns
10ns
M Plan NIR
M Plan NUV
The ratio of the size of a magnified object image created by an 355nm 0.05J/cm2 10ns
optical system to that of the object. Magnification commonly refers to 266mm 0.04J/cm2 10ns M Plan UV
lateral magnification although it can mean lateral, vertical, or angular * If the pulse width of a laser becomes shorter, the irradiation energy density is reduced by the root
magnification. of the ratio of the pulse widths.
Example: If the pulse width decreases to 1/4, the energy density is reduced to approximately 1/2.
Note: When intending to use a laser with a microscope, contact the nearest Mitutoyo Sales Center
beforehand to prevent unexpected damage to equipment and materials.

35 Quick Guide to Precision Measuring Instruments