MICROCORD

LEGEX Series

MEASURING MACHINES
Ultra-high Accuracy CNC Coordinate Measuring Machine

COORDINATE

Bulletin No. 2182(2)

 The culmination of 80 years of Mitutoyo technology.
Recognized as the world's ultimate high-accuracy
measurement technology.

1
 LEGEX 574

World's leading measurement accuracy of

E 0,MPE =0.28+L/1000 is achieved.*

LEGEX 776

LEGEX 9106

* World's leading measurement accuracy specification as established by Mitutoyo in October 2014.

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 Evolving technology
Thorough analysis and elimination of error factors Part 1

BASE DESIGN
High rigidity
The base of the LEGEX is made from special spheroidal graphite
ductile cast iron to a sealed-structure design that provides high ri-
gidity and vibration attenuating characteristics. Mitutoyo engineers
used FEM analysis during the design phase to optimize the final
configuration and ensure outstanding geometric accuracy by mini-
mizing deformations caused by normal machine operation.

FEM structural analysis simulation

*Spheroidal graphite ductile cast iron*

Cast iron is an alloy of iron, carbon, silicon, manganese, phospho-
rus, sulfur, and traces of other elements, and exhibits characteristic
properties due to the carbon being distributed throughout the
metal in the form of graphite.
Ductile cast iron is created by spheroidiz-
ing the graphite by adding magnesium
alloy to the melt. Compared with normal
cast iron, it has great tensile strength, is
relatively tough, and has excellent ma-
chinability and wear resistance. Ductile
cast iron is thus used for components
such as automotive parts.
LEGEX employs FCD600 ductile cast iron
but made in such a way as to eliminate
blow holes and pin holes (defects) of
0.1mm or larger.

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 Integrated Y-axis guide rail

Integrated Y-axis guide rail

To further increase rigidity and thermal stability, the Y-axis guide rail
is integrated with the main unit base.

Ceramic plasma spraying for each axis

sliding section
Ceramic plasma spraying is applied to sliding sections for the Y-axis
guide rail, X-axis beam, and Z-axis spindle, creating surfaces suitable
for highly accurate air-bearing operation.
It also produces excellent corrosion resistance.

0.6
0.08s ζ=0.028 Vibration attenuation
0.4
The LEGEX structure quickly attenuates traverse-induced
0.2 vibrations and so reduces any adverse effect on measurements.
This characteristic also allows ultra-high scanning accuracy to be
m/s2

-0
realized.
-0.2

-0.4

-0.6
0.5 0.6 0.7 0.8 0.9
Time (s)

WORKTABLES
Ceramic Coated is standard US product

Ceramic-coated worktable

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 Evolving technology
Thorough analysis and elimination of error factors Part 2

Fixed-bridge type structure

Moving-bridge type structure

CONSTRUCTION
The centre of gravity of a moving bridge
moves according to the X-axis motion. Pitch and yaw errors practically eliminated
This movement of the bridge center of
The LEGEX uses a fixed-bridge type structure. This is the ideal CMM
gravity changes the load distribution and
therefore alters the consequential defor- architecture and virtually eliminates pitch and yaw errors. Most oth-
mations. er CMMs use a moving-bridge design with a single drive unit under
the column, which tends to cause yawing and pitching during slide
movements.

DYNAMIC ACCURACY
X- and Y-axis independence and a ‘center
of gravity’ type drive system
Z spindle Drive axis
The fixed-bridge design of the LEGEX allows the axes to operate
totally independently. Movement of the X-axis slide does not change Air bearing
the loading on the Y-axis slide, and so does not cause deformation.
Also, the ‘center of gravity’ type drive system places the drive units Drive axis
near the center of gravity of each slide. This feature allows very high
speed, highly accurate measurements by reducing inertia-induced
deflections during acceleration and deceleration.

X beam

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 VIBRATION CONTROL
Isolating floor vibration
The LEGEX is hardened against floor induced vibration by use of
‘air-damped spring isolators’ with an auto-leveling function. This
virtually eliminates factory floor vibrations from the entire machine
structure.

Air-damped spring isolaters

Installation positions

Floating mechanism reduces internal

vibration
To reduce the effects of internally generated vibration, the LEGEX
uses a special floating mechanism to couple each ballscrew to its
guide block. This isolates the slide from the servo motor as it turns Ball screw Pulse generator
the ballscrew and thus prevents transmission of motor vibrations,
especially during acceleration and deceleration.
Servo motor

Floating mechanism
Guide block

Sliding nut
Special floating mechanism

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 Evolving technology
Thorough analysis and elimination of error factors Part 3
LENGTH STANDARD TEMPERATURE COMPENSATION
Linear glass scales with virtually zero Effective over the 18ºC to 22ºC (64.4ºF to
thermal expansion coefficient 71.6ºF) temperature range
The LEGEX is equipped with crystallized-glass scales with a While conventional very high accuracy CMMs require fairly strict
resolution of 0.01μm and an ultra-low linear expansion coefficient temperature controlled environments, the LEGEX has been designed
of 0.01 x 10-6/K. This virtually zero thermal expansion coefficient to improve the thermal stability of each component to minimize
means the LEGEX can maintain its extreme accuracy in spite of deformation. In addition, temperature sensors on each axis and for
thermal changes. the workpiece itself detect temperature changes in real time and
The scales are also mounted in a unique new way that reduces the are used to compensate back to size at 20ºC.
hysteresis error to 1/5 that of previous models. The graphs below
show the reduction in hysteresis error that results from this new
mounting method.
STATE-OF-THE-ART CONTROL
Our proprietary control unit has been upgraded with sophisticated
control technology that uses a new algorithm. A newly developed
high-resolution linear encoder is also used to achieve higher
accuracy.

Standard glass scale

15∞C
20∞C-1
0 20∞C-2
25∞C
Error ( m)

Scales mounted by the new method

0 50 100 150 200 250 300 350 400 450 500

Position (mm)

15∞C
20∞C-1
0 20∞C-2
25∞C
Error ( m)

Scales mounted by the conventional method

0 100 200 300 400 500 600 700 800 900 1000
Position (mm)

Hysteresis comparison between the conventional and the new scale mounting methods

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 ZERO CERA BLOCK (GAUGE
LOW EXPANSION CERAMIC
BLOCK )
(An optional accuracy checking accessory)
Mitutoyo offers a special check standard that matches the
characteristics of the LEGEX scales. This optional accessory uses
ultra-low-expansion ceramic gauge blocks with a thermal expansion
coefficient in the temperature range 20±1ºC less than 1/500 that of
steel (0±0.02×10-6/K(20ºC)). Using this ZERO CERA BLOCK standard
provides a customer with the means to check the measuring
accuracy of their LEGEX at any time, and so gain insight into how
often their machine should be calibrated and adjusted by Mitutoyo.
All gauge blocks in the standard are measured by interferometer
to 0.00001mm resolution in Mitutoyo’s Accredited Calibration
Laboratory (JCSS No. 0030).

TEMPERATURE STABILIZED
(An optional accuracy enhancing accessory)
Generally speaking, temperature compensation and thermally in-
sensitive materials can widen the usable range of ambient tempera-
ture and gradients. To eliminate a common source of temperature
variation, the LEGEX incorporates a special air-server. In addition
to the standard air cleaning and drying functions, this air server
stabilizes the temperature of air drawn from the factory air supply
to 20ºC±0.1ºC. In combination with the machine-enclosure design
and thermally insensitive glass scales, temperature-stabilized air sup-
plied to the air bearings can produce the exceptional thermal isola-
tion needed for low measuring uncertainties. This air supply is also
used for the MPP-300 probe to provide stabilized scanning.

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 Program

Mitutoyo

Controlled

Open
MCOSMOS
– Mitutoyo Controlled Open System for
System Modular Operation Support –

A wide variety of software modules for each manufacturing step,

from design to production and to inspection, are available. In
addition to a quality assurance module, they also include modules
for that support various types of CAD data processing, in-line
measurement, data feedback, and process management.

Modular

Operation

Support

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System performance from every viewpoint
Performance features of standard software modules
MCOSMOS has three module configurations, from the basic MCOSMOS 1 to the advanced MCOSMOS 3. This enables a choice of appropriate
functionality for your current measurement applications now with the ability to expand, if needed, in the future.

Module configurations MCOSMOS 1 MCOSMOS 2 MCOSMOS 3

Manual

CNC

PART MANAGER
The control center from which the
software package is initialized, and
individual part programs are managed.

GEOPAK
F o r ( o n l i n e / o ff l i n e ) p a r t p r o g r a m
creation, using the measurement of
geometric elements. Extensive tolerance
comparisons and output functions are
included.

CAT1000P
F o r ( o n l i n e / o ff l i n e ) p a r t p r o g r a m
creation, using the measurement of
geometric elements directly from the
CAD model, with automatic collision
avoidance.

CAT1000S
CAD model-based generation of surface
measurement points, and comparison
of actual/nominal data, with graphical
output.

SCANPAK
For the scanning and evaluation of
workpiece contours, and 3D digitizing of
surfaces.

Other optional software modules

A wide variety of optional software packages that meet customer needs is available, including MAFIS Express for evaluating
the shape of an airfoil, GEARPAK for evaluating gear measurements, FORMPAK-CMM, ROUNDPAK-CMM, and the MeasurLink
statistical processing program.

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 Probes and accessories
MPP-310Q (Ultra High-Accuracy Scanning)
The MPP-310Q is a multi-functional probe designed for CNC coordinate
measuring machines. It can not only perform a continuous path contact-
type scanning measurement [a measurement method that implements a
collection of a large amount of coordinate data while traveling along a
continuous path in contact with the workpiece] at V2≤0.3μm*, but also
high-accuracy point measurement of ≤0.1μm, and data collection from
a centering point measurement.
* V2 (VDI2617) filtering is used with a standard stylus: 20°C, reference displacement:
0.25mm, measurement speed: 3mm/sec, using a ø45 ring gage

Omni-directional scanning
The MPP-310Q has internal high-accuracy scales with a resolution of
0.01μm in each direction (X, Y, and Z axes), which makes it possible to
read the stylus displacement in any direction.
The air bearing employed in the sliding section of each axis helps provide
this probe with minimum directionality.

High speed scanning measurement Point measurement Low measuring force

MPP-310Q can reduce its measuring force to a minimum of 0.03N so
that it can even measure elastic workpieces such as resins, etc., without
damaging them at all.

Fast scanning
MPP-310Q can perform fast scanning at 120mm/s. For example, it
completes a measurement in just a few seconds even if it is required to
measure an inside diameter of 100 mm using 1000 measurement points.
In addition, measurement can be pursued effectively while changing the
scanning speed, depending on the measurement accuracy required.

Specifications
Measurement range ±1mm
Resolution 0.01μm
Spring rate 0.2N/mm

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 Probes
LEGEX 500/700/900 LEGEX 500/700/900

PH10MQ

TP7M
High-accuracy SurfaceMeasure606T
Touch-trigger Probe Non-contact Line-Laser Probe
SP80 SurfaceMeasure606/610/1010
SP25M Non-contact Line-Laser Probe
High-accuracy Scanning Probe Compact High-accuracy
Can Use Very Long Styli Scanning Probe QVP
Quick Vision Probe

SP80 Scanning Probe QVP SurfaceMeasure606T

120m/s scanning speed and 500mm long stylus

SP80 Scanning Probe Requires Special Quotation.

MRT320 Rotary table

The LEGEX can be used with the MRT320 rotary table as the 4th axis. It Specifications
is very efficient for gear, cylinder cam and impeller measurements. Resolution 1/10000 degree (0.36 seconds)
Indexing accuracy 2"
Accuracy Deflection of rotation center 1mm
Deflection of table 2mm
Maximum table load Horizontal orientation 100kg
Diameter ø320mm
Table
Height 200mm

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 Technical Data
Dimensions
LEGEX 500/700/900
H
C
B

A
W D

Model Height (H) Width (W) Depth (D) A B C

LEGEX 574 103.6" 57.9" 94.5" 35.5" 23.7" 51.7"
LEGEX 774 103.6" 65.8" 119.3" 43.3" 23.7" 57.6"
LEGEX 776 120.1" 65.8" 94.5" 51.2" 23.7" 51.7"
LEGEX 9106 115.4" 73.7" 94.5" 43.3" 28.4" 57.6"

Floor layout (reference)

Model A B C D E F G
LEGEX 574 168.0" 62.5" 164.0" 100.0" 14.5" 54.75" 35.0"
LEGEX 774 180.0" 74.5" 189.0" 125.0" 15.0" 55.5" 43.25"
LEGEX 776 185.5" 80.0" 166.0" 102.0" 15.0" 55.5" 43.25"
LEGEX 9106 180.0" 74.5" 166.0" 102.0" 16.5" 70.625" 52.625"

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 SPECIFICATIONS
Model LEGEX 574 LEGEX 774 LEGEX 776 LEGEX 9106
Items
X axis 19.68'' (500mm) 27.55'' (700mm) 35.43'' (900mm)
Measuring
Y axis 27.55'' (700mm) 39.36'' (1000mm)
range
Z axis 17.71'' (450mm) 23.62'' (600mm)
Measurement method Ultrahigh-precision linear encoder
Maximum speed 7.8''/s (200mm/s)
Maximum acceleration 0.1G (980mm/s2)
Resolution 0.00000039'' (0.00001mm)
Guide method Air bearing
Material Cast iron w/Ceramic coating
Measuring
Size 21.65'' x 29.52'' (550×750mm) 29.52'' x 29.52'' (750×750mm) 37.40'' x 41.33'' (950×1050mm)
table
Tapped insert M8×1.25mm (for workpiece clamping)
Maximum workpiece height 27.59'' (701mm) 33.85'' (860mm)
Table loading
Maximum table loading 551 lbs. (250kg) 1,102 lbs. (500kg) 1,763 lbs. (800kg)
Mass (main unit) 7,716 lbs. (3500kg) 11,023 lbs. (5000kg) 11,243 lbs. (5100kg) 14,330 lbs. (6500kg)
Pressure 72.5 PSI (0.5MPa)
Air supply
Consumption 4.23 CFM (120L/min under normal conditions) air source: 5.65 CFM (160L/min or more)

Main unit accuracy Unit: µm Installation temperature environment

Length measurement error Temperature environment 1 Temperature environment 2
Probe
ISO 10360-2:2009 (JIS B 7440-2:2013) Temperature range 19 - 21°C (66.2 - 69.8°F) 18 - 22°C (64.4 - 71.6°F)
E 0,MPE = (0.28 + L/1000)μm (Temperature environment 1) Rate of change 0.5°C (0.9°F)
MPP310Q
E0,MPE = (0.3 + L/1000)μm (Temperature environment 2)
Gradient 1.0°C (1.8°F)
* L = measured length (mm)
* Table at right defines temperature environments 1 and 2

Introduction to LEGEX12128
Main Specifications
Model LEGEX12128
Items
X axis 47.24'' (1200mm)
Measuring Y axis 47.24'' (1200mm)
range
Z axis 31.49'' (800mm)
Resolution 0.00000039'' (0.00001mm)
Guide method Air bearing
Length measurement error (0.6 + 1.5L/1000) µm
(Probe MPP310Q) E0,MPE
Maximum workpiece height 41.57'' (1056 mm)
Table capacity
Maximum table loading 2,204 lbs. (1000kg)
Mass (main unit) 23,148 lbs. (10500kg)
* L = measured length (mm)
* This is a custom-order product.
* Measurement error guaranteed at
18 - 22°C (64.4 - 71.6°F)

Note: This machine incorporates a main unit Startup system (relocation detection system), which disables
operation when an unexpected vibration is applied or the machine is relocated. Be sure to contact your
nearest Mitutoyo Sales Office prior to relocating this machine after initial installation.

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 © 2016 Mitutoyo America Corporation
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challenges in-house on a sub-contract basis.

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1.5M 0415-01 • Printed in USA • Rev. Aug. 2021