INFICON CDG045D Operating Manual
INFICON CDG045D Operating Manual
CDG045D
Operating Manual
Incl. EU Declaration of Conformity
Further languages under [Link]
tina51e1-h (2020-07) 1
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Validity
This document applies to products of the CDG045D series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
2 tina51e1-h (2020-07)
tina51e1-h (2020-07) 3
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with D-Sub 15-pin connector
and DN 16 ISO-KF vacuum connection. They apply to the other
gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDG045D series are intended for absolute pressure
measurement of gases in their respective pressure ranges
(→ 2).
The gauges belong to the SKY® Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a com-
pensation of changes in the ambient conditions and a reduced
deposition of process products and by-products in process appli-
cations.
Trademarks
SKY® INFICON GmbH
VCR® Swagelok Marketing Co.
4 tina51e1-h (2020-07)
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge CDG045D
1× pin
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English
Contents
Product Identification 2
Validity 2
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 5
Scope of Delivery 5
1 Safety 7
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 8
1.4 Liability and Warranty 8
2 Technical Data 9
tina51e1-h (2020-07) 5
3 Installation 15
3.1 Vacuum Connection 15
3.2 Power Connection 18
3.2.1 D-Sub, 9-pin Connector 19
3.2.2 D-Sub, 15-pin Connector 20
4 Operation 21
4.1 Status Indication 21
4.2 Zeroing the Gauge 22
4.2.1 <ZERO> Adjustment 23
4.3 Switching Functions 27
4.4 Activating the Factory Setting (Factory Reset) 30
4.5 Diagnostic Port (RS232C Interface) 31
5 Deinstallation 32
6 Maintenance, Repair 34
7 Returning the Product 34
8 Disposal 35
9 Accessories 36
Further Information 36
ETL Certification 38
EU Declaration of Conformity 39
6 tina51e1-h (2020-07)
1 Safety
1.1 Symbols Used
DANGER
WARNING
Caution
Notice
Skilled personnel
tina51e1-h (2020-07) 7
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
8 tina51e1-h (2020-07)
2 Technical Data
Identification
Resistance RIdent 13.2 kΩ referenced to
Voltage supply common
≤5 V
1)
Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
2)
Increase 10 … 90 % F.S.R.
tina51e1-h (2020-07) 9
Remote Zero Adjust digital input for zero adjust-
ment with external switching
contact (→ 23)
External switching contact 30 V (dc) / <5 mA (dc)
Pulse >1 s … <5 s
Status relay
Relay contact 30 V (dc) / ≤0.5 A (dc)
connected to supply com-
mon (pin 5)
closed measurement mode
warning
open no supply voltage
warming up
error
RS232C interface
Transmission rate 9600 baud
Data format binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Power Connection"
10 tina51e1-h (2020-07)
Supply
DANGER
Electrical connection
3CC1-xxx-0xxx 9-pin D-sub, male
3CC1-xxx-2xxx 15-pin D-sub, male
Sensor cable for
3CC1-xxx-0xxx 9-pin plus shielding
3CC1-xxx-2xxx 15-pin plus shielding
3)
INFICON controllers fulfill this requirement.
tina51e1-h (2020-07) 11
Sensor cable 15-pin plus shielding
Cable length
Supply voltage 15 V ≤ 8 m (0.14 mm²/conductor)
≤15 m (0.25 mm²/conductor)
Supply voltage 24 V ≤43 m (0.14 mm²/conductor)
≤75 m (0.25 mm²/conductor)
Supply voltage 30 V ≤88 m (0.14 mm²/conductor)
≤135 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
(Rcable ≤1.0 Ω).
Admissible temperatures
Storage –40 °C … +65 °C
Operation +10 °C … +40 °C
Bakeout ≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40 °C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
12 tina51e1-h (2020-07)
Dimensions [mm]
tina51e1-h (2020-07) 13
Analog Measurement Signal vs. Pressure
Pressure p
1.1×F.S.
1.0×F.S.
0.9×F.S.
0.8×F.S.
0.7×F.S.
0.6×F.S.
0.5×F.S.
0.4×F.S.
0.3×F.S.
0.2×F.S.
0.1×F.S.
0.0×F.S.
0 1 2 3 4 5 6 7 8 9 10
Measuring signal Uout [V]
p = (Uout / 10 V) × p (F.S.)
Torr mbar 4)
Pa 4)
1013.25 / 760 = 101325 / 760 =
c 1.00
1.3332… 133.3224…
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
4)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
14 tina51e1-h (2020-07)
3 Installation
WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
DANGER
DANGER
tina51e1-h (2020-07) 15
DANGER
Protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution
Vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
16 tina51e1-h (2020-07)
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep conden-
sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi-
tion. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but-
tons can be accessed with a pin (→ 22).
Remove the protective lid and connect the product to the vac-
uum system.
Protective lid
Clamp
tina51e1-h (2020-07) 17
3.2 Power Connection
DANGER
5)
INFICON controllers fulfill this requirement.
18 tina51e1-h (2020-07)
3.2.1 D-sub, 9-pin Connector
If no sensor cable is available, make one according to the follow-
ing diagram (cable length and conductor cross-sections → 12).
tina51e1-h (2020-07) 19
3.2.2 D-sub, 15-pin Connector
If no sensor cable is available, make one according to the follow-
ing diagram (cable length and conductor cross-sections → 12).
20 tina51e1-h (2020-07)
4 Operation
Put the gauge into operation. If you are using an INFICON con-
troller (VGC4 series), define the measurement range (→ [1],
[2], [3], [4]).
A warm-up time of at least ½ hour should be allowed; for precise
pressure measurements a warm-up time of at least 2 hours is
required.
DIAG
I/O
1
SP
P2
US
S
AT
SP ZERO
ST
tina51e1-h (2020-07) 21
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→ "Calibration Test Report").
F.S. ∆U / 90°
1000 Torr/mbar ≈2 mV
100 Torr/mbar ≈10 mV
10 Torr/mbar ≈50 mV
1 Torr/mbar ≈300 mV
0.1 Torr/mbar ≈1.8 V
22 tina51e1-h (2020-07)
4.2.1 <ZERO> Adjustment
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the diagnostic port (→ [5]),
• the digital input "Remote Zero": Apply the supply
voltage to pin 10 (15-pin) or to pin 7 (9-pin),
pulse → 10,
• the RS232C interface (→ [5]),
• an INFICON Vacuum Gauge Controller (VGC series).
tina51e1-h (2020-07) 23
Operate the gauge for at least ¼ hour (until the signal is
stable).
24 tina51e1-h (2020-07)
It also permits to adjust an offset of the characteristic curve in
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 2% of the F.S. (+200 mV). At a
higher positive offset, the upper limit of the measurement range
is exceeded.
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached. The corresponding output signal is delayed by
about 1 s.
tina51e1-h (2020-07) 25
Keep the button depressed
max. ø1.1 mm
26 tina51e1-h (2020-07)
4.3 Switching Functions
The two switching functions can be set to any pressure within
the measurement range of the gauge (→ 14).
The current setpoint setting
• can be read/written via the diagnostic port,
• is output at the D-Sub connector instead of the measurement
signal (→ 20) and can be measured with a voltmeter after
the <SP> button is pressed, or
• can be read/written via the RS232C interface.
If the pressure is lower than the setpoint, the corresponding LED
(<SP1> or <SP2>) is lit solid and the corresponding relay
(→ 20) is energized.
Hysteresis
Setpoint
(1% F.S.)
Threshold value
tina51e1-h (2020-07) 27
4.3.1 Adjusting the Setpoints
The setpoints can be adjusted via
• the buttons on the gauge,
• the diagnostic port (→ [5]),
• the RS232C interface (→ [5]).
DANGER
Malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button the
measurement signal is suppressed and the cor-
responding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
malfunction cause.
Push the <SP> button with a pin (max. ø1.1 mm). The
gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).
28 tina51e1-h (2020-07)
Press the button
max. ø1.1 mm
tina51e1-h (2020-07) 29
Push the <ZERO> button again:
30 tina51e1-h (2020-07)
4.5 Diagnostic Port (RS232C Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at the
same time (→ [5]).
→ "Accessories"
tina51e1-h (2020-07) 31
5 Deinstallation
WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
DANGER
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
32 tina51e1-h (2020-07)
Caution
Remove the gauge from the vacuum system and install the
protective lid.
tina51e1-h (2020-07) 33
6 Maintenance, Repair
Under clean operating conditions, the product requires no main-
tenance.
WARNING
34 tina51e1-h (2020-07)
8 Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
WARNING
tina51e1-h (2020-07) 35
9 Accessories
Ordering number
Communication adapter (2 m) 6)
303-333
Further Information
[1] Operating Manual
Vacuum Gauge Controller VGC032
tinb02e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] Operating Manual
One, Two- & Three-Channel Measurement and Control
Unit VGC501, VGC502, VGC503
tina96e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[5] Communication protocol
RS232C Interface
tira49e1
INFICON AG, LI–9496 Balzers, Liechtenstein
6)
The diagnostic software (Windows NT, XP) can be downloaded from our
website.
36 tina51e1-h (2020-07)
[6] Communication protocol
DeviceNet™ CDG045D
tira51e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[7] Communication protocol
Profibus CDG045D
tira54e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[8] Communication protocol
EtherCAT CDG045D (ETG.5003.2080 S (R) V1.0.0)
tira68e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[9] Communication protocol
EtherCAT CDG045D (ETG.5003.2080 S (R) V1.3.0)
tirb45e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[10] Communication protocol
Profinet CDG045D
tirb62e1
INFICON AG, LI–9496 Balzers, Liechtenstein
tina51e1-h (2020-07) 37
ETL Certification
38 tina51e1-h (2020-07)
EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electromagnetic compatibility 2014/30/EU and the Directive on
the restriction of the use of certain hazardous substances in
electrical and electronic equipment 2011/65/EU.
Product
Capacitance Diaphragm Gauge
CDG045D
Standards
Harmonized and international/national standards and specifi-
cations:
• EN 61000-6-2:2005 (EMC: generic immunity standard)
• EN 61000-6-3:2007 + A1:2011 (EMC: generic emission
standard)
• EN 61010-1:2010 (Safety requirements for electrical equipment for
measurement, control and laboratory use)
• EN 61326:2013; Group 1, Class B (EMC requirements for elec-
trical equipment for measurement, control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
3 January 2017 3 January 2017
tina51e1-h (2020-07) 39
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina51d1-h (2020-04) reachus@[Link]
[Link]