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Profilometers: Types and Advantages

A profilometer is a device for measuring surface morphological parameters such as thickness and roughness. There are two main types: contact profilometers, which use a stylus for measurement, and non-contact profilometers, which utilize optical methods for high resolution and speed. Each type has its advantages and disadvantages, with contact profilometers being more susceptible to damage and non-contact types offering better reliability and resolution.

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Anuja Ojha
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8 views14 pages

Profilometers: Types and Advantages

A profilometer is a device for measuring surface morphological parameters such as thickness and roughness. There are two main types: contact profilometers, which use a stylus for measurement, and non-contact profilometers, which utilize optical methods for high resolution and speed. Each type has its advantages and disadvantages, with contact profilometers being more susceptible to damage and non-contact types offering better reliability and resolution.

Uploaded by

Anuja Ojha
Copyright
© All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd

Optical

Profilometer
INTRODUCTION

 Definition

- A profilometer is a device used to measure the morphological


parameters like thickness of film, roughness of a surface ,etc.

- Gives difference between the high and low point of a surface


in nanometres.

 Types of Profilometers

➢ Non - Contact Profilometers


➢ Contact Profilometers
Contact Profilometer

• Radius of diamond stylus from 20 nm to 25 μm


• Horizontal resolution is controlled by the scan speed and
data signal sampling rate.
• Vertical Resolution is controlled by the recording the
movement of stylus in Z-direction
• Examples: Stylus Profilometer , AFM
Contact Profilometer
 Advantages & Disadvantages

➢ Acceptance & Easy to Use


➢ Surface Independence
➢ Resolution : The stylus tip radius can be as small as 20
nanometres
➢ Not suitable for very soft (or even liquid) and easily
damageable surface
➢ Very hard and damage surface can damage the
stylus
➢ Only 2D
Non - Contact
Profilometer

 Advantages of optical profilometer

 Good Resolution: Vertical resolution is usually in the nm


level

 High Speed

 Reliability : cannot be damaged by surface wear or


careless operators

 Spot size or lateral resolution ranges from a few


micrometers down to sub micrometers.
Michelson
Interferometer
Michelson Interferometer
Mirau
Interferometer
Silicon Etched
Standard
Sample

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