GLOBALFOUNDRIES 22FDX PDK Release Notes
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zerotohero7979GLOBALFOUNDRIES 22FDX PDK Release Notes
Uploaded by
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TI
GLOBALFOUNDRIES
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22FDX
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Process Design Kit (PDK)
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Release Notes
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Version V0.6_0.0
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August 19, 2016
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GLOBALFOUNDRIES CONFIDENTIAL – Do Not Copy
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Page 1 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Table of Contents
V0.6_0.0..................................................................................................................................12
1.1. Cadence library...........................................................................................................13
1.2. DRC...........................................................................................................................14
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1.3. LVS ...........................................................................................................................14
1.3.1. Calibre ...................................................................................................................14
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1.4. LPE ...........................................................................................................................14
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1.4.1. Star-RCXT ...............................................................................................................14
1.4.2. QRC .......................................................................................................................15
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1.4.3. xRC........................................................................................................................15
1.5. Models ......................................................................................................................16
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1.6. Documentation...........................................................................................................17
1.7.
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SRAM bitcell kit (BCK) ..................................................................................................18
1.8. Others .......................................................................................................................18
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1.8.1. Digital router support...............................................................................................18
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1.8.2. Fill Generation ........................................................................................................18
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1.8.3. Metrology Structures ...............................................................................................19
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1.8.4. Apache Redhawk/Totem ..........................................................................................19
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1.8.5. VOLTUS_VOLTUS-FI .................................................................................................19
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1.8.6. Calibre PERC ...........................................................................................................19
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1.8.7. Reliability Calculator ................................................................................................19
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1.8.8. DFM ......................................................................................................................20
MAS ..........................................................................................................................20
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DPT...........................................................................................................................20
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YES ...........................................................................................................................20
DRC_PLUS..................................................................................................................20
DFM-POP ...................................................................................................................21
1.8.9. EAD .......................................................................................................................21
1.8.10. LDE........................................................................................................................21
Page 2 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.9. Resolved Bugs ............................................................................................................21
1.10. Known problems and limitations................................................................................21
V0.5_0.1..................................................................................................................................22
1.1. Cadence library...........................................................................................................22
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1.2. DRC...........................................................................................................................23
1.3. LVS ...........................................................................................................................24
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1.3.1. Calibre ...................................................................................................................24
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1.4. LPE ...........................................................................................................................24
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1.4.1. Star-RCXT ...............................................................................................................24
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1.4.2. QRC .......................................................................................................................24
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1.4.3. xRC........................................................................................................................24
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1.5. Models ......................................................................................................................24
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1.6. Documentation...........................................................................................................25
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1.7. SRAM bitcell kit (BCK) ..................................................................................................25
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1.8. Others .......................................................................................................................25
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1.8.1. Digital router support...............................................................................................25
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1.8.2. Fill Generation ........................................................................................................25
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1.8.3. Metrology Structures ...............................................................................................25
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1.8.4. Apache Redhawk/Totem ..........................................................................................26
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1.8.5. VOLTUS_VOLTUS-FI .................................................................................................26
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1.8.6. Calibre PERC ...........................................................................................................26
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1.8.7. Reliability Calculator ................................................................................................26
1.8.8. DFM ......................................................................................................................26
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MAS ..........................................................................................................................26
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DPT...........................................................................................................................26
YES ...........................................................................................................................26
DRC_PLUS..................................................................................................................26
DFM-POP ...................................................................................................................26
1.8.9. EAD .......................................................................................................................27
Page 3 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.10. LDE........................................................................................................................27
1.9. Resolved Bugs ............................................................................................................27
1.10. Known problems and limitations................................................................................27
V0.5_0.0..................................................................................................................................28
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1.1. Cadence library...........................................................................................................29
1.2. DRC...........................................................................................................................29
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1.3. LVS ...........................................................................................................................29
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1.3.1. Calibre ...................................................................................................................29
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1.4. LPE ...........................................................................................................................30
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1.4.1. Star-RCXT ...............................................................................................................30
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1.4.2. QRC .......................................................................................................................30
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1.4.3. xRC........................................................................................................................30
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1.5. Models ......................................................................................................................30
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1.6. Documentation...........................................................................................................32
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1.7. SRAM bitcell kit (BCK) ..................................................................................................32
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1.8. Others .......................................................................................................................32
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1.8.1. Digital router support...............................................................................................32
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1.8.2. Fill Generation ........................................................................................................33
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1.8.3. Metrology Structures ...............................................................................................33
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1.8.4. Apache Redhawk/Totem ..........................................................................................33
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1.8.5. VOLTUS_VOLTUS-FI .................................................................................................33
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1.8.6. Calibre PERC ...........................................................................................................34
1.8.7. Reliability Calculator ................................................................................................34
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1.8.8. DFM ......................................................................................................................34
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MAS ..........................................................................................................................34
DPT...........................................................................................................................35
YES ...........................................................................................................................35
DRC_PLUS..................................................................................................................36
DFM-POP ...................................................................................................................36
Page 4 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.9. EAD .......................................................................................................................37
1.8.10. LDE........................................................................................................................37
1.9. Resolved Bugs ............................................................................................................37
1.10. Known problems and limitations................................................................................37
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V0.4_1.0..................................................................................................................................38
1.1. Cadence library...........................................................................................................39
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1.2. DRC...........................................................................................................................39
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1.3. LVS ...........................................................................................................................39
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1.3.1. Calibre ...................................................................................................................39
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1.4. LPE ...........................................................................................................................40
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1.4.1. Star-RCXT ...............................................................................................................40
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1.4.2. QRC .......................................................................................................................40
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1.5. Models ......................................................................................................................40
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1.6. Documentation...........................................................................................................41
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1.7. SRAM bitcell kit (BCK) ..................................................................................................41
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1.8. Others .......................................................................................................................41
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1.8.1. Digital router support...............................................................................................41
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1.8.2. Fill Generation ........................................................................................................42
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1.8.3. Metrology Structures ...............................................................................................42
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1.8.4. Apache Redhawk/Totem ..........................................................................................42
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1.8.5. VOLTUS_VOLTUS-FI .................................................................................................42
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1.8.6. Calibre PERC ...........................................................................................................43
1.8.7. Reliability Calculator ................................................................................................43
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1.8.8. DFM ......................................................................................................................43
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MAS ..........................................................................................................................43
DPT...........................................................................................................................43
YES ...........................................................................................................................43
DRC_PLUS..................................................................................................................44
DFM-POP ...................................................................................................................44
Page 5 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.9. EAD .......................................................................................................................44
1.8.10. LDE........................................................................................................................45
1.9. Resolved Bugs ............................................................................................................45
1.10. Known problems and limitations................................................................................45
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V0.4_0.0..................................................................................................................................46
1.1. Cadence library...........................................................................................................46
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1.2. DRC...........................................................................................................................48
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1.3. LVS ...........................................................................................................................48
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1.3.1. Calibre ...................................................................................................................48
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1.4. LPE ...........................................................................................................................48
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1.4.1. Star-RCXT ...............................................................................................................48
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1.4.2. QRC .......................................................................................................................48
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1.5. Models ......................................................................................................................49
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1.6. Documentation...........................................................................................................50
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1.7. SRAM bitcell kit (BCK) ..................................................................................................50
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1.8. Others .......................................................................................................................50
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1.8.1. Digital router support...............................................................................................50
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1.8.2. Fill Generation ........................................................................................................50
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1.8.3. Metrology Structures ...............................................................................................51
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1.8.4. Apache Redhawk/Totem ..........................................................................................51
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1.8.5. Calibre PERC ...........................................................................................................51
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1.8.6. Reliability Calculator ................................................................................................51
1.8.7. DFM ......................................................................................................................51
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MAS ..........................................................................................................................51
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DPT...........................................................................................................................52
YES ...........................................................................................................................52
DRC_PLUS..................................................................................................................52
1.9. Resolved Bugs ............................................................................................................52
1.10. Known problems and limitations................................................................................52
Page 6 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
V0.3_0.0..................................................................................................................................54
1.1. Cadence library...........................................................................................................54
1.2. DRC...........................................................................................................................55
1.3. LVS ...........................................................................................................................55
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1.3.1. Calibre ...................................................................................................................55
1.4. LPE ...........................................................................................................................56
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1.4.1. Star-RCXT ...............................................................................................................56
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1.4.2. QRC .......................................................................................................................56
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1.5. Models ......................................................................................................................56
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1.6. Documentation...........................................................................................................57
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1.7. SRAM bitcell kit (BCK) ..................................................................................................57
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1.8. Others .......................................................................................................................57
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1.8.1. Digital router support...............................................................................................57
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1.8.2. Fill Generation ........................................................................................................57
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1.8.3. Metrology Structures ...............................................................................................57
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1.8.4. Apache Redhawk/Totem ..........................................................................................57
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1.8.5. Calibre PERC ...........................................................................................................57
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1.8.6. Reliability Calculator ................................................................................................58
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1.8.7. DFM ......................................................................................................................58
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MAS ..........................................................................................................................58
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DPT...........................................................................................................................58
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YES ...........................................................................................................................58
DRC_PLUS..................................................................................................................58
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1.9. Resolved Bugs ............................................................................................................58
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1.10. Known problems and limitations................................................................................58
V0.2_0.0..................................................................................................................................59
1.1. Cadence library...........................................................................................................59
1.2. DRC...........................................................................................................................60
1.3. LVS ...........................................................................................................................60
Page 7 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.3.1. Calibre ...................................................................................................................60
1.4. LPE ...........................................................................................................................61
1.4.1. Star-RCXT ...............................................................................................................61
1.4.2. QRC .......................................................................................................................61
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1.5. Models ......................................................................................................................61
1.6. Documentation...........................................................................................................63
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1.7. SRAM bitcell kit (BCK) ..................................................................................................63
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1.8. Others .......................................................................................................................63
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1.8.1. Digital router support...............................................................................................63
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1.8.2. Fill Generation ........................................................................................................63
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1.8.3. Metrology Structures ...............................................................................................64
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1.8.4. Apache Redhawk/Totem ..........................................................................................64
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1.8.5. Calibre PERC ...........................................................................................................64
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1.8.6. Reliability Calculator ................................................................................................64
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1.8.7. DFM ......................................................................................................................64
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MAS ..........................................................................................................................64
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DPT...........................................................................................................................64
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YES ...........................................................................................................................64
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DRC_PLUS..................................................................................................................64
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1.9. Resolved Bugs ............................................................................................................64
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1.10. Known problems and limitations................................................................................64
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V0.1_1.0..................................................................................................................................65
1.1. Cadence library...........................................................................................................65
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1.2. DRC...........................................................................................................................65
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1.3. LVS ...........................................................................................................................66
1.3.1. Calibre ...................................................................................................................66
1.4. LPE ...........................................................................................................................66
1.4.1. Star-RCXT ...............................................................................................................66
1.4.2. QRC .......................................................................................................................66
Page 8 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.5. Models ......................................................................................................................66
1.6. Documentation...........................................................................................................67
1.7. SRAM bitcell kit (BCK) ..................................................................................................67
1.8. Others .......................................................................................................................67
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1.8.1. Digital router support...............................................................................................67
1.8.2. Fill Generation ........................................................................................................67
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1.8.3. Metrology Structures ...............................................................................................68
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1.8.4. Apache Redhawk/Totem ..........................................................................................68
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1.8.5. Calibre PERC ...........................................................................................................68
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1.8.6. Reliability Calculator ................................................................................................68
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1.8.7. DFM ......................................................................................................................68
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MAS ..........................................................................................................................68
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DPT...........................................................................................................................68
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YES ...........................................................................................................................68
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DRC_PLUS..................................................................................................................68
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1.9. Resolved Bugs ............................................................................................................68
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1.10. Known problems and limitations................................................................................68
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V0.1_0.0..................................................................................................................................69
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1.1. Cadence library...........................................................................................................69
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1.2. DRC...........................................................................................................................69
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1.3. LVS ...........................................................................................................................70
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1.3.1. Calibre ...................................................................................................................70
1.4. LPE ...........................................................................................................................70
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1.4.1. Star-RCXT ...............................................................................................................70
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1.4.2. QRC .......................................................................................................................70
1.5. Models ......................................................................................................................70
1.6. Documentation...........................................................................................................71
1.7. SRAM bitcell kit (BCK) ..................................................................................................71
1.8. Others .......................................................................................................................71
Page 9 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.1. Digital router support...............................................................................................71
1.8.2. Fill Generation ........................................................................................................71
1.8.3. Metrology Structures ...............................................................................................71
1.8.4. Apache Redhawk/Totem ..........................................................................................71
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1.8.5. Calibre PERC ...........................................................................................................72
1.8.6. Reliability Calculator ................................................................................................72
TI
1.8.7. DFM ......................................................................................................................72
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MAS ..........................................................................................................................72
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DPT...........................................................................................................................72
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YES ...........................................................................................................................72
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DRC_PLUS..................................................................................................................72
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1.9. Resolved Bugs ............................................................................................................72
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1.10. Known problems and limitations................................................................................72
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V0.06_0.0 ................................................................................................................................73
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1.11. Cadence library .......................................................................................................73
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1.12. DRC .......................................................................................................................73
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1.13. LVS ........................................................................................................................73
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1.13.1. Calibre ...................................................................................................................73
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1.14. LPE ........................................................................................................................74
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1.14.1. Star-RCXT ...............................................................................................................74
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1.14.2. QRC .......................................................................................................................74
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1.15. Models ..................................................................................................................74
1.16. Documentation .......................................................................................................74
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1.17. SRAM bitcell kit (BCK)...............................................................................................74
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1.18. Others ...................................................................................................................74
1.18.1. Digital router support...............................................................................................74
1.18.2. Fill Generation ........................................................................................................74
1.18.3. Metrology Structures ...............................................................................................74
1.18.4. Apache Redhawk/Totem ..........................................................................................74
Page 10 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.18.5. Calibre PERC ...........................................................................................................75
1.18.6. Reliability Calculator ................................................................................................75
1.18.7. DFM ......................................................................................................................75
MAS ..........................................................................................................................75
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DPT...........................................................................................................................75
YES ...........................................................................................................................75
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DRC_PLUS..................................................................................................................75
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1.19. Resolved Bugs .........................................................................................................75
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1.20. Known problems and limitations................................................................................75
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Page 11 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDX – V0.6_0.0
Tool Version
Cadence Virtuoso ICADV12.2‐64b.500.2
Mentor Calibre 2016.2_18.12
DRC/LVS/FILL/PERC/xRC/MAS/YES
Synopsys Hspice 2016.06
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Cadence Spectre (MMSIM) 15.10.548
Synopsys Star-RCXT 2014.12-SP3
Cadence QRC 15.22.000
TI
DFM-CalibrePM 2016.2_26.21
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DFM-ICVPM 2015.12-SP2a
DFM-MVSPM MVS16.1
Cadence EDI innovus/15.23.000
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Synopsys ICC/ICC2 icc/2015.06-SP5, icc2/2016.03-SP1
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Tlu+ 2014.12‐SP3
Apache Totem 13.2.3
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Apache RedHawk 13.2.3
Cadence VOLTUS_VOLTUS-FI CadenceSSV 15.22
Mentor CalibrePOP
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2016.2_18.12
Cadence MVSPOP
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MVS16.1
Synopsys ICVPOP 2015.12-SP2a
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Cadence EAD 12.20.704
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Cadence LDE 15.21.002
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V0.6_0.0
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This is a 22FDX full PDK release.
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Supported Metal Stacks:
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Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
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Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
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Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
Option 2 – 6M_2Mx_3Cx_1Ix_LB (thick LB)
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Option 7 – 9M_2Mx_5Cx_2Jx_LB (thick LB)
Option 8 – 10M_2Mx_4Cx_2Bx_2Jx_LB (thick LB)
Option 9 - 8M_2Mx_5Cx_1Jx_LB (thick LB)
Option 10 - 6M_2Mx_3Cx_1Ix_LB__VZ (700nm LB thickness)
Option 11 - 9M_2Mx_5Cx_1Jx_1Ox_LB (thick LB)
Option 12 - 10M_2Mx_4Cx_2Bx_1Jx_1Ox_LB (thick LB)
Page 12 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Option 13 - 7M_2Mx_3Cx_1Ix_1Ox_LB (thick LB)
[Link] library
General
The library components in this revision are built and tested with
Cadence/Virtuoso ICADV12.2-64b.500.4
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Core Library
General
TI
added "m" support for all devices
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FETs
added elvt FETs
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removed hyb* FETs from library (no longer supported)
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LDFETs
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updated layout of 3.3V and 5V LDFETs.
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ESD Library
Removed esdfet device from library.
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Added esdfet_soi device.
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Updated RC Clamp Layout:
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Resistors have 2 rows of CB.
Enable ZGNCAP and EGNCAP selection for SG type of Fets.
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Changed Length of HVT type to 70n from 32n to avoid DRC
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violations in inverter.
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RF Library
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Updated symindp pcell:
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Increased terminal spacing from 5um to 16um when center tap is
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present unless center tap is on a Cx layer.
FETs: Two new CDF parameters were added in the v0.5 release (dummyPolyMode
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and minGateContSpace) that default to values of "auto" and "t", respectively.
Cellviews created in a previous version, when opened with v0.5 or later, may show an
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inconsistency between other parameters that are controlled by these parameters (e.g.,
number of left/right dummy poly parameters are calculated when dummyPolyMode is
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set to "auto"). The user can use the following script on the cellview in v0.4_1.0 to
add properties to the instance that will properly set the state when opened in v0.5 or
later.
Also, please refer to the file:
cdslib/doc/22FDX_CDSLIB_UserGuide.pdf
Page 13 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
cdslib/doc/[Link]
cdslib/doc/[Link]
cdslib/doc/RELEASE_NOTES.txt
[Link]
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SLMPAD Golden cells violations caused by the superstack version is now fixed in
this release.
False violations flags on the LDFET MOS device are addressed in the next PDK
TI
release.
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The false flags of the Via spacing on wide metal rules are fixed in this release.
Added a rule to prohibit the existence of the CB on RX directly.
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Also, please refer to the file:
FI
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Calibre/DRC/22FDSOI_V0.6_0.[Link]
Calibre/DRC/22FDSOI_V0.6_0.[Link]
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[Link]
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1.3.1. Calibre
Removed <filename> from “LVS PUSH DEVICES SEPARATE
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PROPERTIES YES” command
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Also, please refer to the file:
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Calibre/LVS/doc/[Link].rel_notes.pdf
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Calibre/LVS/doc/[Link].rel_notes.pdf
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[Link]
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1.4.1. Star-RCXT
Added support for opt 13 BEOL STACK and aligned updates toprocess
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assumptions/design manual
Aligned to PEX methodology of making diffusion width minimum equal to
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polysilicon/gate space minimum and diffusion. space minimum equal to
polysilicon/gate width minimum that increases gate to contact capacitance
( ~10%)
Modified GATE_TO_CONTACT_SMIN to accomodate for worst case selective
timing bias improving accuracy for gate to contact.
Added Vx and Ax ULK DAMAGE that improves BEOL cap accuracy slightly
( ~ 0.5 % total cap)
Page 14 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Corrected CRT1 for VZ via for BEOL_STACK opt 10. This corrects the
resistance extract for VZ via wrt to temperature change.
[Link] and [Link] files were updated mapping to layers and device
changes in LVS
[Link] files have been made BEOL_STACK dependent and these have been
moved from StarRC to StarRC/<BEOL_STACK> dir
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Also, please refer to the file:
TI
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
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1.4.2. QRC
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Added stack option 13.
Updated ICT as per PA V0.8 and re-generated techfiles.
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Corrected path on [Link].
Also, please refer to the file: O
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QRC/doc/22fdsoi_QRC_release_notes.txt
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1.4.3. xRC
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New metal stack added (Option 13: 7M_2Mx_3Cx_1Ix_1Ox_LBthick)
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[Link].* files were updated
FEOL updated
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To improve gate-to-contact capacitance which will result in the
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increase of capacitance values
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D_CAOX thickness corrected
PC & RX SMIN updated
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GATE_TO_CONTACT_SMIN value updated
diffusion statements updated
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To improve the contact resistance
"min_length" added for contact
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"trim = no" added for contact/via
BEOL updated
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Vx and Ax ULK DAMAGE LAYER added to improve the
BEOL cap accuracy slightly ( ~0.5% of total cap)
Tool version for calibration changed
[Link] mapping files updated
Resistance of some contact layers are not to be extracted. This is
corrected by "IGNORE RESISTANCE VIANAME" statements added
[Link]
Page 15 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
To control the calculation of the gate resistance of MOS devices, "PEX
EXTRACT RGATE" statement added
PEX UNMAP warning messages are suppressed
Updated to address double counting of parasitics
hcell_list
hcell list is corrected
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xcell_list
Additional flags (-I & -INTRINSIC) are added
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lpe_config_file
Location changed. Moved to Calibre/xRC/template/
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[Link] updated
Have become BEOL_STACK dependent. Moved to a new directory,
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Calibre/xRC/calview/
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Also, please refer to the file:
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Calibre/xRC/doc/22fdsoi_CalibrexRC_Release_Notes.txt
[Link] O
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FET model update
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Add/Update LOD, OSEx, OSEy, CPP and PC past Rx Local Layout
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effects for SG/EG/ZG
Add new LLE feature to model Jog on Rx using 6 new LVS instance
R
parameters
D
(lle_sa_top/lle_sa_bot/lle_sb_top/lle_sb_bot/sa_jog_h/sb_jog_h)
N
Update Temp dep for ZG models
Update Vt and performance for LDMOS models
U
Add UHVT/LLHVT/ELVT, Only base band models are supported for
O
these devices, target based RF model will be supported for ELVT in
LF
V1.0_0.0.
Support speculative, target based Relxpert models for
BA
ZG/UHVT/LLHVT/ELVT
Update prelayout model based on latest PEX
Support SoA model for LDMOS devices
LO
Update 1/f Noise model (SGn ~ 2x, EGn ~ 6%, EGp ~ 40% lower
w.r.t v0.5_0.0)
G
Passive model update
Update well diodes based on latest HW
Add 1/f Noise model for reopnpcres device
Update wireRC model
Update BEOL model based on latest PA and support stack # 13
SRAM model update
Page 16 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Updated Vt, Vdd, Vbs, Temperature dependence for PFET based on
latest Si
Constant current based Vth support in Hspice/Spectre
New hspice/Spectre tool versions that support constant current Vt
measurement using .option statement in netlist (Refer to Model
Reference Guide 1.2.5)
AL
Also, please refer to the file:
TI
Model_doc/ESD_Reference_Guide.pdf
EN
Model_doc/FET_and_SRAM_Electrical_Parameter_LDMOS.pdf
Model_doc/FET_and_SRAM_Electrical_Parameter_shOFF.pdf
D
Model_doc/FET_and_SRAM_Electrical_Parameter_shON.pdf
FI
Model_doc/Model_Reference_Guide.pdf
Model_doc/Model_Reference_Guide_RF.pdf
N
Model_doc/Model_Release_Notes.pdf
O
Model_doc/Passive_Electrical_Parameter.pdf
C
[Link]
S
IE
Documentation included in this release:
R
doc/[Link] (this document)
D
doc/Calibre_DRC/22FDSOI_V0.6_0.[Link]
doc/Calibre_DRC/22FDSOI_V0.6_0.[Link]
N
doc/Calibre_FILL_gen/22FDX-FillReleaseNotes_0.6_0.[Link]
U
doc/Calibre_LVS/[Link].release_notes.pdf
O
doc/Calibre_LVS/[Link].rel_notes.pdf
LF
doc/Calibre_PERC/[Link].rel_notes.pdf
doc/Calibre_xRC/22fdsoi_CalibrexRC_Release_Notes.txt
BA
doc/cdslib/RELEASE_NOTES.txt
doc/chipkit_PADSET/22FDX_Test_Macro_Padsets.pdf
LO
doc/DFM_CalibrePM/22FDX_CalibrePM_S00_V0.6_0.0_ReleaseNotes.pdf
doc/DFM_CalibrePOP/22FDX_CalibrePOP_S00_V0.6_0.0_ReleaseNotes.pdf
G
doc/DFM_ICVPM/22FDX_ICVPM_S00_V0.6_0.0_ReleaseNotes.pdf
doc/DFM_ICVPOP/22FDX_ICVPOP_S00_V0.6_0.0_ReleaseNotes.pdf
doc/DFM_MAS/releaseNotes
doc/DFM_MVSPM/22FDX_MVSPM_S00_V0.6_0.0_ReleaseNotes.pdf
doc/DFM_MVSPOP/22FDX_MVSPOP_S00_V0.6_0.0_ReleaseNotes.pdf
doc/DFM_YES/RELEASE_NOTES.txt
Page 17 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
doc/EAD/22fdsoi_EAD_release_notes.txt
doc/LDE/[Link].rel_notes.pdf
doc/Model_doc/Model_Release_Notes.pdf
doc/QRC/22fdsoi_QRC_release_notes.txt
doc/RedhawkTotem/22FDSOI_RedhawkTotem_Release_notes.txt
AL
doc/SAPR/Release_notes.txt
doc/SRAM_BCK/22FDSOI_SRAM_BCK_V0.6.0.0_ReleaseNotes.pdf
TI
doc/StarRC/22fdsoi_StarRC_Release_Notes.txt
doc/VOLTUS_VOLTUS-FI/22fdsoi_Voltus_VoltusFi_Release_notes.txt
EN
[Link] bitcell kit (BCK)
D
No changes from V0.5. All BCKs are identical to V0.5 . Only the alpha IP is
FI
updated to reflect the PDK version.
N
Also, please refer to the file:
O
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.6.0.0_ReleaseNotes.pdf
C
[Link]
S
1.8.1. Digital router support
IE
EDI, ICC, ICC2
R
Bug fixes and update to DRM 0.6_0.0 (e.g. Voltage rule values, Nose
D
rules) within techfiles and NDR files
N
corrected icc mapping of NW and Pwell label
U
add stacks (option 13)
O
Also, please refer to the file:
LF
SAPR/Release_notes.txt
BA
1.8.2. Fill Generation
Added metal stack option 13.
LO
Deleted layer BLING from cell [Link].
Updated fill region definition for INDEM layer.
G
Updated exclusion for LVT and NBIP layers.
Added exclusion to SLMPAD for BEOL fill.
Updated density pre-scan for BEOL fill.
Improved density for Cx, Ix, Jx, OI fill layers.
Allow fill placement inside NPLUS/PPLUS.
Added pre-scan for existing PCI markers.
Page 18 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Also, please refer to the file:
Calibre/FILL_gen/22FDX-FillReleaseNotes_0.6_0.[Link]
Calibre/FILL_gen/README
1.8.3. Metrology Structures
Updated
AL
Also, please refer to the file:
TI
chipkit/PADSET/doc/22FDX_Test_Macro_Padsets.pdf
EN
1.8.4. Apache Redhawk/Totem
Added EMIR implementation for 1 new BEOL_STACK. Aligned to updated
D
design manual and ITF.
FI
Also, please refer to the file:
N
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
1.8.5. VOLTUS_VOLTUS-FI
O
C
1. Updated EM rules for PC and Irms rules for all metal layers in EM only
S
ICT files.
IE
2. Added stack options 13.
R
Also, please refer to the file:
D
VOLTUS_VOLTUS-
FI/doc/22fdsoi_Voltus_VoltusFi_Release_notes.txt
N
U
1.8.6. Calibre PERC
O
Added rules ESDEC7, ESDEC11
Value changes to the following rules: ESDEA1a, ESDEA2a, ESDEW2Pb,
LF
ESDEW1, ESDEW3
New Rule set added for all ESDEB (2kv) checking
BA
New Rule added: ESDEW5
Modified Rule: ESDEW4
LO
Fixed ESDEC6 to meet all footnote requirements
ESDNFET is now ESDNFET_SOI pcell
G
Also, please refer to the file:
Calibre/PERC/doc/[Link].rel_notes.pdf
1.8.7. Reliability Calculator
Not available at this time.
Page 19 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.8. DFM
MAS
Removed the symlink pointing to the svrf as it is not needed
anymore.
Removed the unused Calibre ENVs from mas_parameters.config
AL
Added the count of single via as property to the Via redundancy
rule.
TI
EN
Also, please refer to the file:
DFM/MAS/releaseNotes
DFM/MAS/22FDX_MAS_UserGuide.pdf
D
FI
DPT
N
Not available at this time.
YES
O
C
No updates.
S
DRC_PLUS
IE
CalibrePM
Updated CalibrePM tool version.
R
D
Also, please refer to the file:
N
CalibrePM/doc/22FDX_CalibrePM_S00_V0.6_0.
U
0_ReleaseNotes.pdf
O
ICVPM
LF
ICV tool version update.
BA
Also, please refer to the file:
DFM/ICVPM/doc/22FDX_ICVPM_S00_V0.6_0.
LO
0_ReleaseNotes.pdf
MVSPM
G
Updated Level 2 [Link].C.1 definition
Qualified new MVS tool version.
Also, please refer to the file:
DFM/MVSPM/doc/22FDX_MVSPM_S00_V0.6_
0.0_ReleaseNotes.pdf
Page 20 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
DFM-POP
CalibrePOP
Updated.
Also, please refer to the file:
DFM/CalibrePOP/doc/22FDX_CalibrePOP_S00_V0.6_
AL
0.0_ReleaseNotes.pdf
MSVPOP
TI
Update for MVS tool version.
EN
Also, please refer to the file:
DFM/MVSPOP/doc/22FDX_MVSPOP_S00_V0.6_0.0_
D
[Link]
FI
ICVPOP
N
Updated for ICV tool release
O
C
Also, please refer to the file:
DFM/ICVPOP/doc/22FDX_ICVPOP_S00_V0.6_0.0_Re
S
[Link]
IE
1.8.9. EAD
R
EAD Techfiles have been updated to align to BEOL and FEOL updates
D
and Design Manual
N
Also, please refer to the file:
U
EAD/doc/22fdsoi_EAD_release_notes.txt
O
1.8.10. LDE
LF
Updated for RX-jog parameter and to V0.6_0.0 models and specs.
BA
Also, please refer to the file:
LDE/[Link].rel_notes.pdf
LO
LDE/LDE_Techfile_Application_Note.pdf
LDE/README
G
[Link] Bugs
See release notes for each tool.
1.10. Known problems and limitations
See release notes for each tool.
Page 21 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDX – V0.5_0.1
Tool Version
Cadence Virtuoso ICADV12.2‐64b.500.2
Mentor Calibre LVS 2016.2_18.12
Synopsys Hspice 2016.03‐1
Cadence Spectre (MMSIM) 15.10.466
AL
Cadence EDI 14.24‐s039_1
Synopsys ICC/ICC2 2015.06-SP2
Tlu+ 2014.12‐SP3
TI
EN
V0.5_0.1
D
FI
This is a 22FDX PDK patch release. This release needs to be installed
over V0.5_0.0.
N
Supported Metal Stacks:
O
C
Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
S
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
IE
Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
R
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
D
Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
N
Option 2 – 6M_2Mx_3Cx_1Ix_LB (thick LB)
U
Option 7 – 9M_2Mx_5Cx_2Jx_LB (thick LB)
Option 8 – 10M_2Mx_4Cx_2Bx_2Jx_LB (thick LB)
O
Option 9 - 8M_2Mx_5Cx_1Jx_LB (thick LB)
LF
Option 10 - 6M_2Mx_3Cx_1Ix_LB__VZ (700nm LB thickness)
Option 11 - 9M_2Mx_5Cx_1Jx_1Ox_LB (thick LB)
BA
Option 12 - 10M_2Mx_4Cx_2Bx_1Jx_1Ox_LB (thick LB)
LO
[Link] library
General
G
The library components in this revision are built and tested with
Cadence/Virtuoso ICADV12.2-64b.500.4
Core Library
Updated CDF/simInfo termMapping of fets for spectre and hSpice to
remedy current probing issues:
Page 22 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Spectre: MMSIM [Link].isr5 issue - probing current on d, s,
b terminals always show zero current. A workaround is to use
analogLib/iprobe instances to measure current. This issue has
already been communicated to Cadence.
HSPICE: current probe on d, g, s and b terminals work on
AL
Cadence/Virtuoso ICADV12.2-64b.500.4 in combination with
HSPICE L-2016.06. It does not work with HSPICE L-
TI
2016.03-1.
FETs
EN
Updated layout to reduce size of Vt layer for devices that have
a p-type well. Previous size was larger than required by design
D
rules (B-042147)
FI
Added trigger to recalculate ad/as/pd/ps when dummy poly and
N
SDB options are modified (B-042148)
O
Updated default values for cpp and gateContSpace to eliminate
issue seen when swtiching between ruleSets MIN, ROTDEV,
C
and DFM (B-042149)
S
Added missing params to netlisting views
IE
SRAM
Added missing params to netlisting views
R
Varactors
D
Fixed bug in callback that caused failure when using C, w to
N
calculate l
U
Update maximum w value to 18u to match design rule
O
Added missing params to netlisting view for ZG caps
LF
Also, please refer to the file:
BA
cdslib/doc/22FDX_CDSLIB_UserGuide.pdf
LO
cdslib/doc/[Link]
cdslib/doc/[Link]
G
cdslib/doc/RELEASE_NOTES.txt
[Link]
No updates.
Page 23 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
[Link]
1.3.1. Calibre
Updated skip_pcell list
Updated document for PEX run, the run must be done in hierarchy mode for
skip_pcell
AL
Also, please refer to the file:
TI
EN
Calibre/LVS/doc/[Link].rel_notes.pdf
Calibre/LVS/doc/[Link].rel_notes.pdf
D
[Link]
FI
1.4.1. Star-RCXT
N
No updates.
O
C
1.4.2. QRC
S
No updates.
IE
R
1.4.3. xRC
D
No updates.
N
[Link]
U
Passive model update
O
VPNP Hspice model updated for mismatch variation to align with Spectre
LF
model
Passive_Electrical_Parameter.pdf updated for v0.5_0.0 model updates
BA
FET_and_SRAM_Electrical_Parameter support for SelfHeating ON and OFF
FET_and_SRAM_Electrical_Parameter_OFF.pdf
FET_and_SRAM_Electrical_Parameter_ON.pdf
LO
AFS version updated to 2016_Q2_update1 to address ZGNCAP simulation
issue (Mentor Graphics BUG ~ dts0101207296)
G
Hspice (hspiceD) version updated to 2016.06 to address FET (BSIM-IMG)
current probing issue in Cadence ADE.
Also, please refer to the file:
Model_doc/ESD_Reference_Guide.pdf
Model_doc/FET_and_SRAM_Electrical_Parameter_shOFF.pdf
Page 24 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Model_doc/FET_and_SRAM_Electrical_Parameter_shON.pdf
Model_doc/Model_Reference_Guide.pdf
Model_doc/Model_Reference_Guide_RF.pdf
Model_doc/Model_Release_Notes.pdf
Model_doc/Passive_Electrical_Parameter.pdf
AL
[Link]
TI
Documentation included in this release:
EN
doc/[Link] (this document)
D
[Link] bitcell kit (BCK)
FI
No updates.
N
O
[Link] C
1.8.1. Digital router support
S
EDI
IE
Updated
Also, please refer to the file:
R
D
SAPR/Release_notes.txt
N
ICC
U
Updated
O
Also, please refer to the file:
LF
SAPR/Release_notes.txt
BA
ICC2
Initial release
LO
Also, please refer to the file:
G
SAPR/Release_notes.txt
1.8.2. Fill Generation
No updates.
1.8.3. Metrology Structures
No updates.
Page 25 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.4. Apache Redhawk/Totem
No updates.
1.8.5. VOLTUS_VOLTUS-FI
No updates.
AL
TI
1.8.6. Calibre PERC
No updates.
EN
1.8.7. Reliability Calculator
D
Not available at this time.
FI
1.8.8. DFM
N
O
MAS
No updates.
C
S
DPT
Not available at this time.
IE
R
YES
No updates.
D
N
DRC_PLUS
U
CalibrePM
No updates.
O
LF
ICVPM
No updates.
BA
MVSPM
LO
No updates.
G
DFM-POP
CalibrePOP
No updates.
MSVPOP
No updates.
Page 26 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
ICVPOP
No updates.
1.8.9. EAD
No updates.
AL
1.8.10. LDE
TI
No updates.
EN
[Link] Bugs
D
FI
See release notes for each tool.
N
1.10. Known problems and limitations
O
See release notes for each tool. C
S
IE
R
D
N
U
O
LF
BA
LO
G
Page 27 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDX – V0.5_0.0
Tool Version
Cadence Virtuoso ICADV12.2‐64b.500.2
Mentor Calibre 2016.2_18.12
AL
DRC/LVS/FILL/PERC/xRC/MAS/YES
Synopsys Hspice 2016.03‐1
Cadence Spectre (MMSIM) 15.10.466
TI
Synopsys Star-RCXT 2014.12-SP3
EN
Cadence QRC 15.22.000
DFM-CalibrePM 2016.2_18.12
DFM-ICVPM ICV2015.12SP2
D
DFM-MVSPM MVS15.22
FI
Cadence EDI 14.24‐s039_1
Synopsys ICC 2015.06-SP2
N
Tlu+ 2014.12‐SP3
Apache Totem 13.2.3
Apache RedHawk 13.2.3
O
Cadence VOLTUS_VOLTUS-FI
C
CadenceSSV 15.13
Mentor CalibrePOP 2016.2_18.12
S
Cadence MVSPOP MVS15.22
IE
Synopsys ICVPOP 2015.12SP2
Cadence EAD 12.20.702
R
Cadence LDE 15.21.002
D
N
U
V0.5_0.0
O
This is a 22FDX full PDK release.
LF
Supported Metal Stacks:
BA
Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
LO
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
G
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
Option 2 – 6M_2Mx_3Cx_1Ix_LB (thick LB)
Option 7 – 9M_2Mx_5Cx_2Jx_LB (thick LB)
Option 8 – 10M_2Mx_4Cx_2Bx_2Jx_LB (thick LB)
Option 9 - 8M_2Mx_5Cx_1Jx_LB (thick LB)
Page 28 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Option 10 - 6M_2Mx_3Cx_1Ix_LB__VZ (700nm LB thickness)
Option 11 - 9M_2Mx_5Cx_1Jx_1Ox_LB (thick LB)
Option 12 - 10M_2Mx_4Cx_2Bx_1Jx_1Ox_LB (thick LB)
[Link] library
General
AL
A large number of rules were updated or added in the design manual
for this version. These include the addition of voltage-based metal
TI
spacing rules, updates to implant enclosure values, etc. The PCells
EN
were updated accordingly to meet the rules; many footprint changes
will result.
D
Also, please refer to the file:
FI
N
cdslib/doc/22FDX_CDSLIB_UserGuide.pdf
O
cdslib/doc/[Link] C
cdslib/doc/[Link]
cdslib/doc/RELEASE_NOTES.txt
S
IE
[Link]
There were some missing SRAM waivers which were added to the deck.
R
Nose via rules (i.e Ax.C.15, Ax.C.16, WT.C.14, WT.C.15, WT.C.16, WT.C.18,
D
WT.C.19, WT.C.20, YX.C.14, YX.C.15, YX.C.16, YZ.C.14, YZ.C.15, YZ.C.16,
N
JQ.C.15, JQ.C.16, JQ.C.17) discussions are finalized the wording and the code has
U
been updated accordingly.
O
Also, please refer to the file:
LF
Calibre/DRC/22FDSOI_V0.5_0.[Link]
BA
Calibre/DRC/22FDSOI_V0.5_0.[Link]
[Link]
LO
1.3.1. Calibre
G
Added extraction support for RX JOG devices
Added apmom devices (see section 6 for complete list)
Also, please refer to the file:
Calibre/LVS/doc/[Link].rel_notes.pdf
Calibre/LVS/doc/[Link].rel_notes.pdf
Page 29 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
[Link]
1.4.1. Star-RCXT
Added support for opt 3 BEOL STACK and aligned updates toprocess
assumptions/design manual
[Link] and [Link] files were updated mapping to layers and device
AL
changes in LVS
TI
Also, please refer to the file:
EN
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
D
1.4.2. QRC
FI
Added stack option 10, 11 & 12.
Updated lpe_confile to take care of pre_layout_local_rd/rg/rs terminal parasitics.
N
Updated ICT as per PA V0.7 and re-generated techfiles.
O
Added support for zgfncap and apmom4v_rf.
C
Renamed layer_setup_file to layer_setup for Voltus-flow.
S
Also, please refer to the file:
IE
QRC/doc/22fdsoi_QRC_release_notest.txt
R
D
1.4.3. xRC
N
Initial release
Also, please refer to the file:
U
O
xRC/doc/22fdsoi_CalibrexRC_Release_Notes.txt
LF
[Link]
BA
FET model update
SGP ~ - 4% drive at same leakage, Vt Vs W flat
EGN ~ +8% Ion Vs Ioff, Vt increase by 50mV
LO
EGP ~ -12% Ion Vs Ioff, Vt decrease 120mV
EGP GIDL floor reduced ~ 10x
G
EG T-dep fit to HW
ZG-RVT Tox increased and Vt recentred, Updated Vt Vs L
Added ZG-SLVT
Added IDDQ model support (iddquplift)
Confirm mismatch for large area device
SG AVTlin lowered by 10%, No change to AVTsat
Align tolerance for FEOL/MOL process assumption
Page 30 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Add variability for non-reference layout (SASB, CPP) ~ gvar_lod
SG 1/f noise reduced by ~ 10x
EG 1/f noise increased by ~ 30x
ZG 1/f noise reduced by ~ 2x
Thermal noise model/targets confirmed
FET LLE model update
AL
Confirm no WPE effect
No update to LoD effect, Global variation added to SASB (gvar_lod)
TI
Add PC Pitch effect
EN
Add PC-past-RX effect
Add Rx jog under active PC (Rx corner rounding)
No change for Rx jog in LoD (SASB jog), add an option to assess design
D
exposure (glle_rxjog, gvar_rxjog)
FI
SRAM model update
Lowered Igate
N
AVT improved for NFET and PFET
HD cell Vnom lowered to 0.8v
O
C
LDMOS model update
Preliminary 3.3V and 5V LDMOS dc baseband models are added for
S
evaluation purpose.
IE
Model dc specs reflect experimental silicon and subject to change in future
R
revision.
Model ac specs are not validated.
D
Model usage is limited only to gate length (PC on RX) to 0.6um.
N
Models also have following additional limitations
U
Fixed corner and monte-carlo models are not included
O
Flicker noise model is not calibrated
Self-heating is not modeled and disabled
LF
Gate, impact ionization, GIDL, junction and other leakage
components are not modeled
BA
Aging models
Updated based on new targets
LO
Passive model update
Wire RC model is enabled for all BEOL options (yet V0.5 p-cell supports
G
BEOL option# 3 only).
BEOL option #11 & #12 are added.
Enabled “# of contact rows” flexibility for all resistors.
Removed “sw_tighter_drsh” switch from resistors as default variation specs
are tightened.
Calibrated 1/f noise in opnpcres (reopnpcres calibration is deferred to the
next release due to absence of the data as structure design was changed
Page 31 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Corrected parasitic cap of poly resistors (reduced by 10x)
oppdres is added
vpnp, vnpn, efuse, resistors, and mosvar target and tolerance adjustments
diffusion diode capacitance and IV fit to silicon
Also, please refer to the file:
AL
Model_doc/ESD_Reference_Guide.pdf
TI
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
EN
Model_doc/Model_Reference_Guide.pdf
Model_doc/Model_Reference_Guide_RF.pdf
Model_doc/Model_Release_Notes.pdf
D
Model_doc/Passive_Electrical_Parameter.pdf
FI
[Link]
N
Documentation included in this release:
O
C
doc/[Link] (this document)
S
[Link] bitcell kit (BCK)
IE
Removed P180 bitcell from the offering.
R
D
Also, please refer to the file:
N
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.5_0_ReleaseNotes.pdf
U
O
[Link]
LF
1.8.1. Digital router support
BA
Bug fixes and update to DRM 0.5_0.0 (e.g. 3 fat metal extension constraints
are reduced to just one rule)
add stacks (option 10, 11, 12) and related layer (VZ)
LO
add differential voltage rule support for [Link] (EDI)
add voltage limit layer support for ICC (tf and gds mapping files)
G
removed ICC mw_prep.tf files (no separation required with 2015 tool chain)
Also, please refer to the file:
SAPR/Release_notes.txt
Page 32 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.2. Fill Generation
Added metal stack options 10,11,12.
Updated exclusion for FEOL fill.
Updated fill space inside IND layer.
Added fill for INDEM layer.
AL
Added cell [Link] for PCI marker placement.
Updated swap marker for cell EQ_CFILL.oas.
TI
Added user option to select NPLUS for FEOL fill (NPCFILL and
EN
NPCFILLOPC instead of PPCFILL and PPCFILLOPC).
Added user option to place only BEOL fill.
D
Added user option to set effort level for BEOL CFILLOPC.
FI
Updated BEOL CFILLOPC to improve density.
Added option for FILL_DIAGNOSTICS.
N
O
Also, please refer to the file: C
Calibre/FILL_gen/22FDSOI-FillReleaseNotes_0.5_0.[Link]
S
Calibre/FILL_gen/README
IE
1.8.3. Metrology Structures
R
Updated and found in chipkit folder.
D
N
1.8.4. Apache Redhawk/Totem
U
Added EMIR implementation for 3 new BEOL_STACKS. Aligned to updated
design manual and ITF.
O
LF
Also, please refer to the file:
BA
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
1.8.5. VOLTUS_VOLTUS-FI
LO
Added EM rules for CA/CB, corrected Lswitch for Mx, added missing rule for
WT/WA, updated Irms rules for all metal layers in EM only ICT files.
G
Corrected mapping for CA in lefdef mapping file.
Added stack options 10, 11 & 12.
Removed 22fdsoi_<BEOL_STACK>_RCX2ICT2DFII.map as this is not
needed for Voltus.
Also, please refer to the file:
Page 33 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
VOLTUS_VOLTUS-FI/doc/22fdsoi_Voltus_VoltusFi_Release_notes.txt
1.8.6. Calibre PERC
Initial creation of deck
Rules NOT coded are ESDEC7, ESDEC11, ESDEW2Pa. These rules will be
coded/tested in the next release (TBD).
AL
Also, please refer to the file:
TI
Calibre/PERC/doc/[Link].rel_notes.pdf
EN
1.8.7. Reliability Calculator
Not available at this time.
D
1.8.8. DFM
FI
N
MAS
Rule updates as per 0.5 DM.
O
PC.S.1b is moved from P1 to P2.
C
[Link].1, RR value updated to 0.02um from
S
0.03um. Higher FR for PFET compared to NFET.
IE
[Link].2_V1 [Link].1_V1, RR value
updated to 0.06um from 0.063um.
R
[Link].S.1b, Exemptions for Special CnRX_CB
D
Constructs. Higher FR for PFET compared to NFET.
N
[Link].1,[Link].1,[Link].
U
1 added.
O
[Link].1,[Link].1,[Link].
LF
[Link].1,[Link].1 retired.
Updated Failure Rate for [Link].1.
BA
DESIGN_TYPE Switch to support "Standard Cell" and "Block"
level. Defaults to "CHIP" level
LO
In "Block" Mode and additional report, named
<topCell>__ProjectedChipScoreReport.csv is generated. It
G
reports Best Possible Block Score at Chip Level and
Minimum Required Score from rest of the Chip Area to
meet Chip level Criteria.
In "Standard Cell" Mode Scores reported are based upon
the User selected Cell Type i.e
<COMBINATIONAL_LOGIC|SEQUENTIAL_LOGIC|C
Page 34 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
OMPLEX_LOGIC|UD_LOGIC> which internally
determines the pre-defined % area utilizations.
Updated PotFix for [Link].1 to exempt special constructs CA.
Enhanced Error reporting for PotFix Errors.
Removed the [Link].1 rule as this rule was intended only
AL
to be in the ENG version released to Invecas.
Updated the Area rules for all layers to exempt the shapes
TI
interacting (instead of "subtracting") with cellsnr from checking -
addressing to the bug reported by the customer.
EN
Updated the Enclosure rules for all layers upto C1 to use the full
metal shapes interacting (instead of "subtracting") with cellsnr to
D
remove the false errors.
FI
Updated the [Link].S.1b rule to ignore the errors when flagged
N
on PC tab touching half CB at the cell boundary in Cell mode as
O
this half CB will become full CB when the cells are abutted later.
C
Fine tuned scoring models.
S
Also, please refer to the file:
IE
DFM/MAS/releaseNotes
R
DFM/MAS/22FDX_MAS_UserGuide.pdf
D
N
DPT
Not available at this time.
U
O
YES
LF
New interface for running YES in auto mode (no yes
configurations or drc environment settings required)
BA
Support for running MAS before and after and generate an MAS
Comparison report
YES is metal stack independant - Virtually supporting all metal
LO
stacks
G
Also, please refer to the file:
DFM/YES/doc/[Link]
DFM/YES/doc/RELEASE_NOTES.txt
DFM/YES/doc/yes_ug.pdf
Page 35 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
DRC_PLUS
CalibrePM
Added New Level 2 PM [Link].C.1
Also, please refer to the file:
DFM/CalibrePM/doc/22FDX_CalibrePM_S00_V0.5_0.0
AL
_ReleaseNotes.pdf
TI
ICVPM
Added New Level 2 PM [Link].C.1
EN
Also, please refer to the file:
D
ICVPM/doc/22FDX_ICVPM_S00_V0.5_0.0_ReleaseNot
FI
[Link]
N
MVSPM
Updated.
O
C
Also, please refer to the file:
S
IE
o DFM/MVSPM/doc/22FDX_MVSPM_S00_V0.5_
0.0_ReleaseNotes.pdf
R
D
DFM-POP
CalibrePOP
N
Updated.
U
O
Also, please refer to the file:
LF
CalibrePOP/doc/22FDX_CalibrePOP_S00_V0.5_0.0_Re
[Link]
BA
MSVPOP
Update for [Link] Level2 rule
LO
Also, please refer to the file:
G
MVSPOP/doc/22FDX_MVSPOP_S00_V0.5_0.0_Releas
[Link]
ICVPOP
Initial release.
Also, please refer to the file:
Page 36 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
ICVPOP/doc/22FDX_ICVPOP_S00_V0.5_0.0_ReleaseN
[Link]
1.8.9. EAD
EAD Techfiles have been updated to align to BEOL and FEOL updates
AL
and Design Manual
File structure has been updated and env variables have been included in
TI
config files.
EN
Also, please refer to the file:
D
EAD/doc/22fdsoi_EAD_release_notes.txt
FI
1.8.10. LDE
N
Updated for new devices.
Also, please refer to the file:
O
C
S
LDE/[Link].rel_notes.pdf
IE
LDE/LDE_Techfile_Application_Note.pdf
LDE/README
R
D
[Link] Bugs
N
See release notes for each tool.
U
1.10. Known problems and limitations
O
See release notes for each tool.
LF
BA
LO
G
Page 37 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.4_1.0
Tool Version
Cadence Virtuoso ICADV12.2‐64b.78
Mentor Calibre DRC/LVS/FILL/PERC/MAS 2015.2_36.27
AL
Synopsys Hspice 2015.06‐SP2
Mentor Calibre YES 2016.1_14.11
Cadence Spectre (MMSIM) 14.10.896
TI
Synopsys Star-RCXT 2014.12-SP3
EN
Cadence QRC 15.14.000
DFM-CalibrePM v2015.1_26.16
DFM-ICVPM v2015.06‐SP2
D
DFM-MVSPM MVS15.2
FI
Cadence EDI 14.24‐s039_1
Synopsys ICC 2014.09‐SP5‐2
N
Tlu+ 2014.12‐SP3
Apache Totem 13.2.3
Apache RedHawk 13.2.3
O
Cadence VOLTUS_VOLTUS-FI
C
CadenceSSV 15.13
Mentor CalibrePOP 2015.4_33.23
S
Cadence MVSPOP MVS15.2
IE
Cadence EAD 12.20.078
Cadence LDE 15.21.002
R
D
N
V0.4_1.0
U
This is a 22FDSOI PDK patch release. This release needs to be installed
O
over V0.2_1.0, V0.2_1.1, V0.2_1.2 V0.3_0.0 and V0.4_0.0.
LF
Supported Metal Stacks:
BA
Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
LO
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
G
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
Option 2 – 6M_2Mx_3Cx_1Ix_LB (thick LB)
Option 7 – 9M_2Mx_5Cx_2Jx_LB (thick LB)
Option 8 – 10M_2Mx_4Cx_2Bx_2Jx_LB (thick LB)
Option 9 - 8M_2Mx_5Cx_1Jx_LB (thick LB)
Page 38 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
[Link] library
General
This release is built and tested with Cadence/Virtuoso ICADV12.2-
64b.78.
AL
This release does not include 32bit context files. Hence, only the 64bit
Virtuoso executable are supported.
TI
Added support for metal stack option 7, 8 and 9:
EN
9M_2Mx_5Cx_2Jx_LB, 10M_2Mx_4Cx_2Bx_2Jx_LB and
8M_2Mx_5Cx_1Jx_LB
D
Also, please refer to the file:
FI
N
cdslib/doc/22FDX_CDSLIB_UserGuide.pdf
O
cdslib/doc/[Link] C
cdslib/doc/[Link]
cdslib/doc/RELEASE_NOTES.txt
S
IE
[Link]
The density rules with exclusion were producing confusing RDB results.
R
The LUP rules LUP.C.2b/LUP.C.4b were causing missed and false violations.
D
The SRAM Waivers are coded in this PDK release to waive violations that were seen
N
in v0.4_1_ENG release
U
The Efuse Cell DRC checks were updated in this PDK release to overcome the false
violations that were seen in v0.4_1_ENG PDK.
O
LF
Also, please refer to the file:
BA
Calibre/DRC/22FDSOI_V0.4_1.[Link]
Calibre/DRC/22FDSOI_V0.4_1.[Link]
LO
[Link]
G
1.3.1. Calibre
Added ESD devices, SRAM devices.(see Section 6 for complete list)
Added new stacks.
Also, please refer to the file:
Calibre/LVS/doc/[Link].rel_notes.pdf
Page 39 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Calibre/LVS/doc/[Link].rel_notes.pdf
[Link]
1.4.1. Star-RCXT
Added support for opt 2 BEOL STACK and aligned updates toprocess
AL
assumptions/design manual
Most issues with StarRC warnings were fixed after aligning to diffusion contact
TI
splits in LVS in calLVS mapping files
[Link] and [Link] files were updated mapping to layers and device
EN
changes in LVS
D
Also, please refer to the file:
FI
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
N
1.4.2. QRC
Added 2 new stacks.
O
C
Updated via resistance and PC/RX resistances.
S
Added lpe_confile to take care of pre_layout_local parameter setting.
IE
Also, please refer to the file:
R
D
QRC/doc/22fdsoi_QRC_release_notest.txt
N
[Link]
U
FET model update
O
No update to SG/EG models
STB devices supported (using p_la instance parameter)
LF
Default As/Ad estimation added to FET/SRAM sub-ckt
BA
SRAM model update
Added new two port SRAM cell TP246SL (TPD)
SRAM models updated for Vdd dependence
LO
Aging models
Target based aging models supported for SG/EG/SRAM using RelXpert tool.
G
Only 64bit version of URI code is supported for Relxpert models, Please
contact Modeling team for 32bit version of URI code.
Passive model update
Added vnpn, oppdres and npcres models.
Added two stacks to BEOL and made corrections to Ix/Jx.
Updated egncap based on targets.
Fixed bug for mismatch equation in Spectre version of NWRES
Page 40 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Updated APMOM based on latest Silicon
ESD model update
Added ESD high current simulation capability to following models
esdpdnw_sti, esdndsx_sti, esdvnpn_sti, esdegpdnw_poly, esdegndsx_poly,
esdegvnpn_poly
DC, CV, BEOL R and C were remain unchanged since previous release.
AL
All ESD models should be considered Target level models as the extracted
model parameters have limited influence from hardware. The model behavior
TI
may change substantially in future release once the models are calibrated
with the latest grade hardware.
EN
Aligned HSPICE low current IV corners with Spectre
D
Also, please refer to the file:
FI
Model_doc/ESD_Reference_Guide.pdf
N
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
Model_doc/Model_Reference_Guide.pdf
O
C
Model_doc/Model_Release_Notes.pdf
Model_doc/Safe_Operating_Area.pdf
S
[Link]
IE
R
Documentation included in this release:
D
doc/[Link] (this document)
N
U
[Link] bitcell kit (BCK)
O
Internal cell updates to all the bitcells. Modified M1, CA over Hybrid, CAREC
LF
for all cells
Updated the WL contact size for P110 bitcell.
BA
Also, please refer to the file:
LO
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.4_1_ReleaseNotes.pdf
G
[Link]
1.8.1. Digital router support
Bug fixes and update to DRM 0.4_1.0 (e.g. upper default enclosure of AY
vias changed from 0/35 to 0/34)
add CA layer to help PGView generation
[Link].1 spacing changed to 20nm
Page 41 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Also, please refer to the file:
SAPR/Release_notes.txt
1.8.2. Fill Generation
Added metal stack options 7, 8, 9.
AL
Added PPCFILL (or option for NPCFILL) over RXCFILL and PCCFILL
layers.
TI
Updated FEOL fill inside IND so that it is the same fill pattern as outside IND
EN
(to increase density).
Added density pre-scan for BEOL CFILLOPC.
D
Added option for PCI marker placement.
FI
Updated equalizer cell name.
Updated run_calibre script.
N
Also, please refer to the file:
O
C
Calibre/FILL_gen/22FDSOI-FillReleaseNotes_0.4_1.[Link]
S
Calibre/FILL_gen/README
IE
1.8.3. Metrology Structures
R
Updated and found in chipkit folder.
D
N
1.8.4. Apache Redhawk/Totem
U
Design Manual misses EM information on BB and JB layers. Therefore, these
techfiles were not validated using design manual.
O
LF
Also, please refer to the file:
BA
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
1.8.5. VOLTUS_VOLTUS-FI
LO
Initial release.
The EM specs for stack options (7 and 8) are unofficial and currently not
G
supported by the Design Manual.
Also, please refer to the file:
VOLTUS_VOLTUS-FI/doc/22fdsoi_Voltus_VoltusFi_Release_notes.txt
Page 42 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.6. Calibre PERC
Initial release.
Support for this tool is currently experimental.
Also, please refer to the file:
AL
Calibre/PERC/doc/[Link].rel_notes.pdf
TI
1.8.7. Reliability Calculator
EN
Not available at this time.
1.8.8. DFM
D
FI
MAS
Updated CELLSNR exemption for layers uptill C1
N
Updated TYPE/GROUP for Stacked Via rules *.C.1 to BEOL
from BEOL_Redundancy
O
C
PC.S.1b updated to exempt PC_tab interacting with cnrxCB_Full
PC_tab under CT layer is partially penalized in Scoring.
S
Enabled Potential Fixing Guidance for P1 Enc Rules. These Fixing
IE
Guides are not gauranteed to be 100% DRC clean
R
Turn On POTFIX_GUIDE switch to trigger Potential
D
Fixing Guidance, only available in DFM Mode.
N
Also, please refer to the file:
U
O
DFM/MAS/releaseNotes
LF
DFM/MAS/22FDX_MAS_UserGuide.pdf
BA
DPT
Not available at this time.
LO
YES
Match DFM RR Values for spacing constrains, giving higher
G
priority to spacing rules
Added enhancements improving insertion rates (Dependancy on
Calibre version 2016.1 for Via Redundancy Enhancement Module)
Also, please refer to the file:
DFM/YES/doc/[Link]
Page 43 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
DFM/YES/doc/RELEASE_NOTES.txt
DFM/YES/doc/yes_ug.pdf
DRC_PLUS
CalibrePM
No Updates.
AL
ICVPM
TI
No Updates.
EN
MVSPM
Updated.
D
FI
Also, please refer to the file:
N
o DFM/MVSPM/doc/22FDX_MVSPM_S00_V0.4_
O
1.0_ReleaseNotes.pdf
C
DFM-POP
S
CalibrePOP
Initial release.
IE
R
Also, please refer to the file:
D
CalibrePOP/doc/22FDX_CalibrePOP_S00_V0.4_1.0_Re
N
[Link]
U
CalibrePOP/doc/[Link]
O
MSVPOP
Initial release.
LF
Also, please refer to the file:
BA
MVSPOP/doc/22FDX_MVSPOP_S00_V0.4_1.0_Releas
LO
[Link]
1.8.9. EAD
G
Initial release.
Support for this tool is currently experimental.
Also, please refer to the file:
EAD/doc/22fdsoi_EAD_release_notes.txt
Page 44 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.10. LDE
Initial release.
Support for this tool is currently experimental.
Also, please refer to the file:
AL
LDE/[Link].rel_notes.pdf
LDE/LDE_Techfile_Application_Note.pdf
TI
LDE/README
EN
[Link] Bugs
See release notes for each tool.
D
FI
1.10. Known problems and limitations
N
See release notes for each tool.
O
C
S
IE
R
D
N
U
O
LF
BA
LO
G
Page 45 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.4_0.0
Tool Version
Cadence Virtuoso ICADV12.2‐64b.78
Mentor Calibre DRC/LVS/FILL/MAS/YES 2015.2_36.27
AL
Synopsys Hspice 2015.06‐3
Cadence Spectre (MMSIM) 14.10.765
Synopsys Star-RCXT 2014.12-SP3
TI
Cadence QRC 15.13 EHF3
EN
DFM-CalibrePM v2015.1_26.16
DFM-ICVPM v2015.06‐SP2
DFM-MVSPM MVS15.2
D
Cadence EDI 14.24‐s039_1
FI
Synopsys ICC 2014.09‐SP5‐2
Tlu+ 2014.12‐SP3
N
Apache Totem 13.2.3
Apache RedHawk 13.2.3
O
C
S
V0.4_0.0
IE
This is a 22FDSOI PDK patch release. This release needs to be installed
R
over V0.2_1.0, V0.2_1.1, V0.2_1.2 and V0.3_0.0.
D
N
Supported Metal Stacks:
U
Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
O
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
LF
Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
BA
Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
LO
[Link] library
G
General
This release is built and tested with Cadence/Virtuoso ICADV12.2-
64b.78.
This release does not include 32bit context files. Hence, only the 64bit
Virtuoso executable are supported.
Added support for metal stack option 2: 6M_2Mx_3Cx_1Ix_LB
Page 46 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Technology Library
Add new purposes needed for Encounter and Innovus
Updated constraints
Add pitch and direction for routing layers
Add antenna models section for routing layers
AL
Core Library
crackstop:
TI
Pcell updated to draw M1:drawing with locked color
assignment under ICADV12.x and M1:e1/M1:e2 under IC6.x.
EN
'enableColoring' option must be set when exporting to
GDSII/OASIS under ICADV12.x.
D
Updated fill patterns in MOB_GA
FI
diodes:
N
Updated min value for Width to 120n.
O
Updated Hybrid drawing to meet DRC rules.
C
RF Library
apmom_rf: the default value for toplev parameter is changed from 6 to
S
3.
IE
ESD Library
R
Preliminary data on the current esdnfet device doesn't exhibit good
ESD performance. We expect the design to change significantly and it
D
should not be used in its current form.
N
Added following new base devices:
U
esdvnpn_sti, esdegndsx_poly, esdegpdnw_poly and
O
esdegvnpn_poly.
LF
Added following new hierarchical devices:
esdnfet, esd_series_diode and esd_double_diode.
BA
Added symbol and schematic for RC_Clamp.
For esdndsx_sti and esdpdnw_sti
LO
Disable option to turn ON/OFF guardRing. GuardRing will be
always ON.
G
Diable guardRing to core device option. It is fixed at 1u.
Updated min GuardRing width to 0.4u.
Updated Hybrid and ESD_HBM layer [Link] Diodes
Also, please refer to the file:
cdslib/doc/[Link]
Page 47 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
cdslib/doc/[Link]
cdslib/doc/RELEASE_NOTES.txt
[Link]
For the rule EGLVTN.S.5, there is an escape for some singular cases in its flags but it
is covered by another rule “EGLVTN.S.2”.
AL
The rule “LUP.C.5” is causing false flags and this will be fixed in the next PDK
release.
TI
There is an issue related to incorrect voltage priority assignment for NW connected to
EN
substrate contact for LUP rules. This is also going to be fixed in the next PDK release.
Also, please refer to the file:
D
FI
Calibre/DRC/22FDSOI_V0.4_0.[Link]
Calibre/DRC/22FDSOI_V0.4_0.[Link]
N
O
[Link] C
1.3.1. Calibre
S
Added ESD devices
IE
Also, please refer to the file:
R
D
Calibre/LVS/doc/[Link].rel_notes.pdf
N
Calibre/LVS/doc/[Link].rel_notes.pdf
U
[Link]
O
1.4.1. Star-RCXT
LF
Added support for opt 2 BEOL STACK and aligned updates toprocess
BA
assumptions/design manual
Most issues with StarRC warnings were fixed after aligning to diffusion contact
splits in LVS in calLVS mapping files
LO
[Link] and [Link] files were updated mapping to layers and device
changes in LVS
G
Also, please refer to the file:
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
1.4.2. QRC
Added support for 6M stack
Page 48 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
M1/M2 CATOPC update
Added support for EGZVTPFET and ESD device suite.
Also, please refer to the file:
QRC/doc/22fdsoi_QRC_release_notest.txt
AL
[Link]
TI
FET model update
EG FET Tox centered to 35A. Vt increased 50-80mV to align with
EN
GLOBALFOUNDRIES gate stack/oxide integration. LVT more closely
aligned to SLVT. Cov variations increased for montecarlo/corner alignment.
D
SG NFET Cinv is decreased. Cov TT is TBD. Cov variations increased for
FI
montecarlo/corner alignment.
pre_layout model
N
Add Vertical componenet of gate resistances
O
Add variation to pre_layout estimates for R & C to capture
cmin/cmax/rcmin/rcmax beol pex corners.
C
Passive model update
S
Resistor:
IE
Normal OP N+ Poly : dW (0.02 -> -0.05um), TCRn1 (2.42E-3 ->
0 °C^-1), TCRs1 (3.19E-4 -> 6.22E-5 °C^-1), TCRs2 (1.73E-7 ->
R
0 °C^-1)
D
Hi-R OP N+ Poly : dW (0.02 -> -0.05um), TCRn1 (0 -> -1.1E-2 °C^-
1), TCRs1 (3.98E-4 -> 2.35E-4 °C^-1)
N
OP N+ Diff : Rsh (124 -> 160 Ω/sq), dW (0.0761 -> 0um), Local
U
Matching Coefficient (0.75 -> 1.5 %-um)
O
N-Well : Rsh (814 -> 980 Ω/sq), Rend (225 -> 200 Ω*um), dW (0.32
-> 0.4 um)
LF
Varactors:
BA
EG NCap: Cmax decreased (1
BJT
LO
Additional devices
G
eFuse: Rfresh (125Ohm), Iprog(8mA)
APMOM: M1-C4=5.9fF/um^2
ESD model update
Added esdeg*_poly devices
Added esdvnpn_sti
Added esdnsh.
Added esdndres (copy from opndres).
Page 49 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Added nfet_esd, egnfet_esd (dummy devices for ESDNFET construction).
Also, please refer to the file:
AL
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
TI
Model_doc/Model_Reference_Guide.pdf
Model_doc/Model_Release_Notes.pdf
EN
Model_doc/Safe_Operating_Area.pdf
D
[Link]
FI
Documentation included in this release:
N
O
doc/[Link] (this document) C
[Link] bitcell kit (BCK)
S
Added P180, TP185L and TP185SL BCKs.
IE
Internal updates to P152 bitcell.
R
Also, please refer to the file:
D
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.4_ReleaseNotes.pdf
N
U
[Link]
O
1.8.1. Digital router support
LF
Bug fixes and update to DRM 0.4_0.0 (e.g. upper default enclosure of Ax vias
changed from 0/30 to 0/32)
BA
removed slight pessimism in enclosure_end rules (e.g. [Link].2) -
side-length constraint supported now (ICC)
LO
add new via definitions to get better pin connection with various std-cell
designs (V1)
G
Also, please refer to the file:
SAPR/Release_notes.txt
1.8.2. Fill Generation
Integrated FEOL and BEOL into single fill deck.
Page 50 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Changed Mx fill to colored fill.
Updated MxCFILLOPC to SmartFill.
Updated CFILLOPC for BEOL to improve fill density.
Updated exclusion to existing fill inside IND for BEOL.
Updated to allow additional use case where IND marker is outside
AL
GUARDEDG (or boundary) layer.
TI
Also, please refer to the file:
EN
Calibre/FILL_gen/22FDSOI-FillReleaseNotes_0.4_0.[Link]
Calibre/FILL_gen/README
D
1.8.3. Metrology Structures
FI
Updated and found in chipkit folder.
N
1.8.4. Apache Redhawk/Totem
O
This is first time EMIR implementation for all BEOL_STACKS. Aligned to
C
updated design manual and ITF.
S
Please use "DISABLE_MINILVS 1" in GDS configuration file as multiple FEoL
IE
connects from ITF are mapped to CA/CB.
R
Also, please refer to the file:
D
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
N
U
1.8.5. Calibre PERC
O
Not available at this time.
LF
1.8.6. Reliability Calculator
Not available at this time.
BA
1.8.7. DFM
LO
MAS
G
Initial release of the 22FDX MAS Kit.
Also, please refer to the file:
DFM/MAS/releaseNotes
DFM/MAS/22FDX_MAS_UserGuide.pdf
Page 51 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
DPT
Not available at this time.
YES
Via Redundancy Enhancement
Via Enclosure Enhancement
AL
Metal Area Enhancement
Also, please refer to the file:
TI
DFM/YES/doc/[Link]
EN
DFM/YES/doc/RELEASE_NOTES.txt
DFM/YES/doc/yes_ug.pdf
D
DRC_PLUS
FI
CalibrePM
N
Initial release.
O
Also, please refer to the file:
C
DFM/CalibrePM/install/GF22FDX_REL0.4_0.0/doc/2
S
2FDX_CalibrePM_S00_V0.4_0.0_ReleaseNotes.pdf
IE
ICVPM
R
Initial release.
D
Also, please refer to the file:
N
DFM/ICVPM/doc/22FDX_ICVPM_S00_V0.4_0.0_Rel
U
[Link]
O
MVSPM
LF
Initial release.
Also, please refer to the file:
BA
DFM/MVSPM/install/GF22FDX_REL0.4_0.0/doc/22FDX
LO
_MVSPM_S00_V0.4_0.0_ReleaseNotes.pdf
DFM/MVSPM/install/GF22FDX_REL0.4_0.0/doc/release.
G
txt
[Link] Bugs
See release notes for each tool.
1.10. Known problems and limitations
See release notes for each tool.
Page 52 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
AL
TI
EN
D
FI
N
O
C
S
IE
R
D
N
U
O
LF
BA
LO
G
Page 53 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.3_0.0
Tool Version
Cadence Virtuoso ICADV12.1.500.2
Mentor Calibre DRC/LVS/FILL 2014.3_39.30
Synopsys Hspice 2015.06-3
Cadence Spectre (MMSIM) 14.10.765
AL
Synopsys Star-RCXT 2014.12-SP3
Cadence QRC 14.22.000
TI
EN
V0.3_0.0
D
This is a 22FDSOI PDK patch release. This release needs to be installed
FI
over V0.2_1.0, V0.2_1.1 and V0.2_1.2.
N
Supported Metal Stacks:
O
C
Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
S
Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
IE
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
R
Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
D
N
[Link] library
U
Technology Library
O
Add ZG* layers and the constraints for it
LF
Updated constraints
Core Library
BA
FET
Added ZG FET devices (hybrid and SOI). These devices are currently
LO
experimental
Added stretch handles to gate extensions at top/bottom of device.
G
Updated default value for gate to contact spacing for EG FETs to
eliminate DRC violation of PC-PC spacing.
RF Library
apmom
Page 54 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Updated definition of "length" for device to inner edges of metal bars
at top/bottom of device. This will cause a change in the footprint of
the device
Updated calculation for estimated capacitance to reflect latest paper
models. Also fix bug that prevented calculation of value when
AL
top/bottom metal layers were changed.
Inductors: changed M1 width in shield to 0.5um to eliminate DRC violation
TI
(B-030745)
ESD Library
EN
STI Diodes
Removed RXTUCK, device sized will be changed.
D
RX Width(c and cw) will be changed due to removal of
FI
dummy PC over RX.
N
Also, please refer to the file:
O
C
cdslib/doc/[Link]
cdslib/doc/[Link]
S
cdslib/doc/RELEASE_NOTES.txt
IE
R
[Link]
D
Fixing issues with the Boolean equations for the layers BN/BP and updated the
generation equations for NV and PG layers.
N
For antenna rules: Added a fix for the “divide by zero” issue and enabled the
U
outputting of the RDB files for some more antenna rules.
O
Fixed the false flags for the rule “[Link]”.
LF
Also, please refer to the file:
BA
Calibre/DRC/22FDSOI_V0.3_0.[Link]
Calibre/DRC/22FDSOI_V0.3_0.[Link]
LO
[Link]
G
1.3.1. Calibre
Added ZG devices
Added SRAM. (see Section 6 for complete list)
Also, please refer to the file:
Page 55 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Calibre/LVS/doc/[Link].rel_notes.pdf
[Link]
1.4.1. Star-RCXT
Issues with StarRC warnings were fixed after aligning to diffusion contact splits
AL
in LVS in calLVS mapping files
[Link] and [Link] files were updated mapping to layers and device
TI
changes in LVS
EN
Also, please refer to the file:
D
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
FI
1.4.2. QRC
N
qrctechfiles were updated to synch in updates to diffusion contact splits and new
O
devices additions
[Link] files were updated to align to LVS updates
C
S
Also, please refer to the file:
IE
QRC/doc/22fdsoi_QRC_release_notest.txt
R
[Link]
D
FET model update
N
BSIM-IMG version updated to 102.61 for FET/SRAM models, there is no
U
change in DC electrical performance of the devices due to this update.
O
W.r.t BSIM-IMG 102.60 the following changes are made in BSIM-IMG
102.61 (v0.3_0.0)
LF
NF scaling of Noise model – This is a bug fix in the BSIM-IMG
model
BA
Thermal Noise Vds sensitivity – This is a bug fix in the BSIM-IMG
model, this update will not affect the 1/f noise simulations but
LO
Thermal Noise simulations. Thermal noise model in this release are
default BSIM-IMG model, Thermal noise model to be updated based
G
on measurement from Si in future releases.
Additional DC operating point parameters (except Vth parameter)
added to BSIM-IMG model.
Target based statistical 1/f noise model feature is added.
Instance parameter (p_vta) is parameterized to enable global Vth shift by
device type.
Passive model update
Page 56 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Updated EGNCAP to fix bug in fixed corner CV characteristics
Also, please refer to the file:
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
Model_doc/Model_Reference_Guide.pdf
AL
Model_doc/Model_Release_Notes.pdf
Model_doc/Safe_Operating_Area.pdf
TI
[Link]
EN
Documentation included in this release:
D
FI
doc/[Link] (this document)
N
[Link] bitcell kit (BCK)
O
No updates. C
[Link]
S
1.8.1. Digital router support
IE
No updates.
R
1.8.2. Fill Generation
D
Added metal stack option 2: 6M_2Mx_3Cx_1Ix.
N
Updated exclusion from RXCFILLOPC and PCCFILLOPC to HYBRID.
U
Added exclusion from C6CFILL and C6CFILLOPC to IND.
O
Added exclusion from MxCFILL inside IND to colored fill or drawn shapes.
LF
Added exclusion from M1CFILLOPC to existing fill shapes.
BA
Also, please refer to the file:
LO
Calibre/FILL_gen/22FDSOI-FillReleaseNotes_0.3_0.[Link]
1.8.3. Metrology Structures
G
Not available at this time.
1.8.4. Apache Redhawk/Totem
No updates.
1.8.5. Calibre PERC
Not available at this time.
Page 57 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.6. Reliability Calculator
Not available at this time.
1.8.7. DFM
MAS
AL
Not available at this time.
TI
DPT
Not available at this time.
EN
YES
D
Not available at this time.
FI
DRC_PLUS
N
Not available at this time.
[Link] Bugs
O
C
See release notes for each tool.
S
1.10. Known problems and limitations
IE
Initial release.
R
D
N
U
O
LF
BA
LO
G
Page 58 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.2_0.0
Tool Version
Cadence Virtuoso ICADV12.1.500.14
Mentor Calibre DRC/LVS/FILL 2014.3_39.30
AL
Synopsys Hspice 2015.06
Cadence Spectre (MMSIM) 14.10.708
Synopsys Star-RCXT 2014.12-SP3
TI
Cadence QRC 14.2.2
EN
Cadence EDI 14.24-s039_1
Synopsys ICC I-2014.09-SP5
Apache Redhawk/Totem 13.2.3
D
FI
N
V0.2_0.0
This is a 22FDSOI full PDK release.
O
C
Supported Metal Stacks:
S
IE
Option 1 - 8M_2Mx_4Cx_1Bx_1Ix_LB (thick LB)
R
Option 3 - 10M_2Mx_6Cx_2Ix_LB (thick LB)
D
Option 4 - 7M_2Mx_4Cx_1Ox_LB (thick LB)
N
Option 5 - 9M_2Mx_6Cx_1Ox_LB (thick LB)
U
Option 6 - 10M_2Mx_6Cx_1Ix_1Ox_LB (thick LB)
O
LF
[Link] library
Technology Library
BA
Removed "lrg" and "bar" layers and purposes
Add new layers according to Design Manual
LO
Updated constraints
RF Library
G
Added RF library consisting of FETs, varactors, resistors, apmom.
Core Library
FET
Added auto-abutment for fets
Updated min spacing for gate length >= 70 to 130nm from 120nm per
DM.
Page 59 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Added RVT, HVT, egu* devices per spec
Added ability to turn on/off CA/M1 on source, drain
Added functionality to use only minimum enclosure values for
implants, VT layers, etc.; when selected, device will fail DRC. User is
responsible for drawing layers to satisfy DRC.
AL
reopnpcres
device added to library
TI
SRAMs
Updated/added SRAMs per scope
EN
Added crackstop pcell
Added chiptext pcell
D
Added fluid guard rings.
FI
Also, please refer to the file:
N
cdslib/doc/[Link]
O
C
cdslib/doc/[Link]
S
cdslib/doc/RELEASE_NOTES.txt
IE
[Link]
R
Fixing issues with the Boolean equations for the layers BN/BP and updated the
D
generation equations for NV and PG layers.
For antenna rules: Modified CONNECT statements for previous vias, Replaced hard-
N
coded rx multipliers values in [Link]* and [Link]* rules with
U
variables, and Added 0.001 tolerance value to all rules.
O
Also, please refer to the file:
LF
Calibre/DRC/22FDSOI_V0.2_0.[Link]
BA
Calibre/DRC/22FDSOI_V0.2_0.[Link]
LO
[Link]
1.3.1. Calibre
G
Added RF devices, additional SRAM devices, and passives.(see Section 6 for
complete list)
Added extraction for case when AUXPC gate touches 2 S/D. This will issue error
during comparison.
Added VT mixing over AUXPC3.
Issues with APMOM and RF FETs pcells.
Page 60 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Also, please refer to the file:
Calibre/LVS/doc/[Link].rel_notes.pdf
[Link]
AL
1.4.1. Star-RCXT
TI
Aligned PEX to FEoL and BEoL process changes and LVS updates for new
devices.
EN
Also, please refer to the file:
D
FI
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
N
1.4.2. QRC
O
Initial version
Mapping files to support OA extracted view are provided as a template to be
C
modified by the customer as required and may not work as-is.
S
Also, please refer to the file:
IE
R
QRC/doc/22fdsoi_QRC_release_notest.txt
D
[Link]
N
Safe Operating Area (SOA) supported by model
U
SOA is supported in HSPICE using “.biaschk” option
O
SOA is supported in Spectre using “assert” option
FET model specifics:
LF
SGNFET (SLVTNFET, LVTNFET, RVTNFET, HVTNFET)
Improved NFET behavior over extended bias range to improve
BA
convergence (Vtsat change is <2mV, Idsat change is <2% from
previous release.)
LO
EGLVTPFET, EGVLVTPFET
Front gate work function similar to EGSLVTP, model updated based
G
on new target.
EGUSLVTNFET, EGUSLVTPFET, EGULVTNFET, EGULVTPFET
New target base model
Corner, Mote Carlo, LLE and noise models were added.
SRAM
Page 61 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
New bitcell models were added; two 6T bitcells – ULL and ULV
SRAMs and two Two port cells (TP185L (Low-Vt read port) and
TP185SL (SLVT read port) )
Models are based on single gate work function and single well based
integration scheme for both SRAM NFETs and PFETs
The uplift=1 switch in the SRAM models reflects average leakage
AL
from SRAM arrays.
PFET Mismatch model mainly in L<0.15 region were updated.
TI
Corner, Monte Carlo model results were updated according to
Mismatch model
EN
Pre-layout model
Mode updated based on latest PEX. Additional parasitic (M1
D
connecting Gate fingers and M1 connecting alternate S/D) included
for a multi-finger FET to cover PC-M1, M1-M1 and endPC to BG
FI
capacitances.
N
New Instance parameter par_nf
O
Par_nf=m*nf is extracted by LVS. It is used to scale the local
variation of fixed corner model and 1/f noise corner model. In this
C
release fixed corner model scaling is enabled, noise corner scaling
will be enabled in future release.
S
NF scaling of Cdg and Csb capacitance
IE
There was a bug in BSIM-IMG model for NF scaling of Cdb and Csb
R
(BOX) capacitance. To address this issue these capacitance have been
turned OFF in the core model and added through sub-ckt equations.
D
Passive model specifics:
N
ESDNDSX_STI and ESDPDNW_STI:
U
Node order of ESDPDNW_STI changed to pd-nw.
O
Spectre models updated to match HSPICE model results.
Zero bias capacitance calculation was updated.
LF
DIODEPNW/TDPDNW and EGDIODEPNW/EGTDPDNW:
A small series resistance added to avoid current blowup.
BA
DIODEPWTW, DIODETWX, DIODENWX:
Well diodes were upgraded to JUNCAP2 models.
LO
OPNPCRES and REOPNPCRES:
Fixed bug for misnamed length parameter.
REOPNPCRES:
G
New speculative, paper model
BEOL:
RIE lag calculation was updated.
Also, please refer to the file:
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
Model_doc/Model_Reference_Guide.pdf
Page 62 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Model_doc/Model_Release_Notes.pdf
Model_doc/Safe_Operating_Area.pdf
[Link]
Documentation included in this release:
AL
doc/[Link] (this document)
TI
[Link] bitcell kit (BCK)
EN
Final P110,P124 and P152 BCK release.
D
Also, please refer to the file:
FI
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.2_ReleaseNotes.pdf
N
[Link]
O
C
1.8.1. Digital router support
S
Bug fixes and update to DRM 0.2_0.0
IE
Also, please refer to the file:
R
SAPR/Release_notes.txt
D
N
1.8.2. Fill Generation
U
[Link].1 (Fill Deck): RXCFILL space to HYBRID can be less
O
than 100nm.
LF
[Link].1b (Fill Deck): TRANSISTORCELL space to some ING layers
may be less than 650nm.
BA
[Link].S.2 (Fill Deck): TJ space may be less than 180nm is some cases.
BOOL.3PL.S.2 (Fill Deck): 3PL minimum space may be less than 180nm in
LO
some cases.
NPCFILLOPC in halo fill may overlap PPLUS (Fill Deck).
G
PPCFILLOPC in halo fill may overlap NPLUS (Fill Deck).
IBCFILL size and placement
XACFILL size and placement
CFOIx.S.1: IxCFILLOPC minimum space
Also, please refer to the file:
Page 63 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Calibre/FILL_gen/22FDSOI-FillReleaseNotes_0.2_0.[Link]
1.8.3. Metrology Structures
Not available at this time.
1.8.4. Apache Redhawk/Totem
AL
Aligned to updated design manual and ITF.
TI
Also, please refer to the file:
EN
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
D
1.8.5. Calibre PERC
FI
Not available at this time.
N
1.8.6. Reliability Calculator
O
Not available at this time. C
1.8.7. DFM
S
MAS
IE
Not available at this time.
R
DPT
D
Not available at this time.
N
U
YES
O
Not available at this time.
LF
DRC_PLUS
Not available at this time.
BA
[Link] Bugs
LO
See release notes for each tool.
1.10. Known problems and limitations
G
Initial release.
Page 64 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.1_1.0
Tool Version
Cadence Virtuoso ICADV12.1.500.10
Mentor Calibre DRC/LVS/FILL 2014.3_39.30
Synopsys Hspice 2014.09-SP2-2
Cadence Spectre (MMSIM) 14.10.527
AL
Synopsys Star-RCXT 2014.06-SP3
Cadence EDI 14.24-s039_1
Synopsys ICC I-2014.09-SP5
TI
Apache Redhawk/Totem 13.2.3
EN
D
V0.1_1.0
FI
This is a 22FDSOI full PDK release.
N
[Link] library
O
C
FETs
S
Updated device pitch to 104n for 20n, 24n gate lengths.
IE
Bipolar
Added PC/AUXPC fill structures in emitter of device to help avoid PC.C.5
R
errors.
D
Many false errors relating to OP layer usage in bipolar have been eliminated
N
by update of design rules, DRC deck.
U
Guardring
O
Added guardring utility device.
LF
Also, please refer to the file:
BA
cdslib/doc/[Link]
cdslib/doc/[Link]
LO
cdslib/doc/RELEASE_NOTES.txt
G
[Link]
The rule “M1.S.12” and “Mx.S.12” had some false flags due to a code bug.
For the rules “[Link].1”, “[Link].1a”, and “[Link].2”, the code is not
aligned with the rule wording as the wording was not clear
The rules “[Link].S.1” and “[Link].S.1” have false flags due to a bug in the code.
The rule “ING.C.1” has false flags because of the rule of duplicate definition of the
orientation layers.
Page 65 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Also, please refer to the file:
Calibre/DRC/22FDSOI_V0.1_1.[Link]
Calibre/DRC/22FDSOI_V0.1_1.[Link]
AL
[Link]
1.3.1. Calibre
TI
Added 2 new stacks.
EN
Bug fixes for parasitic diodes.
D
Also, please refer to the file:
FI
Calibre/LVS/doc/[Link].rel_notes.pdf
N
[Link]
O
C
1.4.1. Star-RCXT
S
Added LBthick BEOL_STACK OPT 5 and 6
Added support for double-patterning based extract for all BEOL Stacks.
IE
R
Also, please refer to the file:
D
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
N
U
1.4.2. QRC
O
Not available at this time.
LF
[Link]
RVTFET & HVTFET:
BA
New target base model
Corner, Monte Carlo, LLE and noise models were added
LO
LVTFET, SLVTPFET:
PFET Idoff corner values were updated.
G
EGSLVTFET, EGVSLVTFET, EGZVTFET
PFET Mismatch model mainly in L<0.15 region were updated.
Corner, Monte Carlo model results were updated according to Mismatch
model.
Also, please refer to the file:
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
Page 66 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Model_doc/Model_Reference_Guide.pdf
Model_doc/Model_Release_Notes.pdf
[Link]
Documentation included in this release:
AL
doc/[Link] (this document)
TI
[Link] bitcell kit (BCK)
EN
No change of the preliminary SRAM Bitcell kits for 22FDSOI technology.
D
Also, please refer to the file:
FI
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.1_0.0_ReleaseNotes.pdf
N
[Link]
O
C
1.8.1. Digital router support
S
VIA enclosure changed as per DRM updates
IE
Bug fixes
2 new stacks added
R
MW FRAM view (re)generation required.
D
N
Also, please refer to the file:
U
SAPR/Release_notes.txt
O
LF
1.8.2. Fill Generation
Changed fill deck filename to fill_fdsoi22.[Link]
BA
Corrected exclusion from PCCFILL to NW.
Updated exclusion from EQUALIZER to ING layers.
LO
Added exclusion from via fill to EXCLUD and CRITEXCL layers.
Corrected PCCFILLOPC minimum width and space in halo fill.
G
Corrected minimum space from PCCFILLOPC to CTCFILLOPC in halo fill.
Corrected minimum space from PCCFILLOPC to RXCFILLOPC in halo fill.
Corrected CTCFILLOPC minimum space in halo fill.
Corrected hierarchy issue in halo fill.
Also, please refer to the file:
Page 67 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Calibre/FILL_ge n/22FDSOI-FillReleaseNotes_0.1_1.[Link]
1.8.3. Metrology Structures
Not available at this time.
1.8.4. Apache Redhawk/Totem
AL
This is first time IR drop implementation for two new BEOL Stacks
9M_2Mx_6Cx_1Ox_LBthick and 10M_2Mx_6Cx_1Ix_1Ox_LBthick.
TI
Double Patterning corners are added for all stacks.
EN
Also, please refer to the file:
D
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
FI
1.8.5. Calibre PERC
N
Not available at this time.
1.8.6. Reliability Calculator
O
C
Not available at this time.
S
1.8.7. DFM
IE
R
MAS
Not available at this time.
D
N
DPT
U
Not available at this time.
O
YES
LF
Not available at this time.
BA
DRC_PLUS
Not available at this time.
LO
[Link] Bugs
See release notes for each tool.
G
1.10. Known problems and limitations
Initial release.
Page 68 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.1_0.0
Tool Version
Cadence Virtuoso ICADV12.1.500.10
Mentor Calibre DRC/LVS/FILL 2014.3_39.30
AL
Synopsys Hspice 2014.09-SP2-2
Cadence Spectre (MMSIM) 14.10.527
Synopsys Star-RCXT 2014.06-SP3
TI
Cadence EDI 14.21
EN
Synopsys ICC I-2014.09-SP3
Apache Redhawk/Totem 13.2.3
D
FI
V0.1_0.0
N
This is a 22FDSOI initial PDK release.
O
C
[Link] library
S
Initial release.
IE
R
Also, please refer to the file:
D
cdslib/doc/[Link]
N
cdslib/doc/[Link]
U
cdslib/doc/RELEASE_NOTES.txt
O
[Link]
LF
Density rules for the FEOL/BEOL layers: Accordingly, the following switches were
BA
added.
DENSITY_RESULTS
DENSITY_RULES
LO
DECOMP functionality for M1-M2 layers: Accordingly, the following switches were
added.
G
DP_GENERATION_TOOL_ALL
DP_CHECK_DESIGN_ALL
DP_LAYOUT_OUT
DP_OFF_ALL
Boolean module functionality added: Accordingly, the following switches were added.
BOOLEAN_DEBUG
GEN_DEBUG
Page 69 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Also, please refer to the file:
Calibre/DRC/22FDSOI_V0.1_0.[Link]
Calibre/DRC/22FDSOI_V0.1_0.[Link]
AL
[Link]
1.3.1. Calibre
TI
Added AUXPC3 layer as marker for cnrx devices.
EN
Also, please refer to the file:
D
FI
Calibre/LVS/doc/[Link].rel_notes.pdf
N
[Link]
1.4.1. Star-RCXT
O
C
Added LBthick BEOL_STACK OPT 1,2, and 4
S
Removed LBthin BEOL_STACK OPT 1,2, and 4
The current StarRC version, 2014.06-SP3 shows degradation of resistance
IE
extraction for Cx ( x = 1 to 6 ). A case has been filed with Synopsys and is
R
currently under investigation by them.
D
Also, please refer to the file:
N
U
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
O
1.4.2. QRC
LF
Not available at this time.
BA
[Link]
SPICE Models released in this PDK are built based on BSIM-IMG 102.6 models
LO
built-in Hspice and Spectre. Customer should use below mentioned Hspice/Spectre
versions, without this or higher versions model simulation will fail.
G
Hspice : 2014.09-SP2-2
Spectre: 14.10.527
Also, please refer to the file:
Model_doc/FET_and_SRAM_Electrical_Parameter.pdf
Model_doc/Model_Reference_Guide.pdf
Page 70 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Model_doc/Model_Release_Notes.pdf
[Link]
Documentation included in this release:
AL
doc/[Link] (this document)
[Link] bitcell kit (BCK)
TI
This release contains the preliminary SRAM Bitcell kits for 22FDSOI technology.
EN
Also, please refer to the file:
D
FI
SRAM_BCK/doc/22FDSOI_SRAM_BCK_V0.1_0.0_ReleaseNotes.pdf
N
[Link]
1.8.1. Digital router support
O
C
Initial release.
S
Also, please refer to the file:
IE
R
SAPR/Release_notes.txt
D
1.8.2. Fill Generation
N
This is the initial release of the fill deck for 22nm FDSOI. This version has
U
BEOL metal stack options 1,3,4,5,6. For this release, only options 1, 3, and 4
O
have been qualified. Options 5 and 6 are an engineering release only.
LF
Also, please refer to the file:
BA
Calibre/FILL_gen/22FDSOI-FillReleaseNotes_0.1_0.[Link]
LO
1.8.3. Metrology Structures
Not available at this time.
G
1.8.4. Apache Redhawk/Totem
Initial release.
Also, please refer to the file:
RedhawkTotem/doc/22FDSOI_RedhawkTotem_Release_notes.txt
Page 71 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.8.5. Calibre PERC
Not available at this time.
1.8.6. Reliability Calculator
Not available at this time.
AL
1.8.7. DFM
TI
MAS
Not available at this time.
EN
DPT
D
Not available at this time.
FI
YES
N
Not available at this time.
DRC_PLUS
O
C
Not available at this time.
S
[Link] Bugs
IE
Initial release.
R
1.10. Known problems and limitations
D
Initial release.
N
U
O
LF
BA
LO
G
Page 72 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
Supported tool versions for 22FDSOI – V0.06_0.0
Tool Version
Cadence Virtuoso IC6.[Link]
Mentor Calibre DRC 2014.2_33.25
AL
Mentor Calibre LVS 2014.3_39.30
Synopsys Hspice 2013.12-SP2
Cadence Spectre (MMSIM) 13.11.420
TI
Synopsys Star-RCXT 2014.06-SP3
EN
D
V0.06_0.0
FI
This is a 22FDSOI initial PDK release.
N
1.11. Cadence library
O
C
Initial release.
S
Also, please refer to the file:
IE
R
cdslib/doc/[Link]
D
1.12. DRC
N
Initial release.
U
O
Also, please refer to the file:
LF
Calibre/DRC/22FDSOI_V0.06_0.[Link]
BA
1.13. LVS
LO
1.13.1. Calibre
Initial release.
G
Also, please refer to the file:
Calibre/LVS/doc/[Link].rel_notes.pdf
Page 73 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.14. LPE
1.14.1. Star-RCXT
Initial release.
Also, please refer to the file:
AL
StarRC/doc/22fdsoi_StarRC_Release_Notes.txt
TI
1.14.2. QRC
EN
Not available at this time.
D
1.15. Models
FI
Initial release.
N
Also, please refer to the file:
O
C
Model_doc/Model_Release_Notes.pdf
1.16. Documentation
S
IE
Documentation included in this release:
R
D
doc/[Link] (this document)
N
1.17. SRAM bitcell kit (BCK)
U
Not available at this time.
O
1.18. Others
LF
1.18.1. Digital router support
BA
Not available at this time.
LO
1.18.2. Fill Generation
Not available at this time.
G
1.18.3. Metrology Structures
Not available at this time.
1.18.4. Apache Redhawk/Totem
Not available at this time.
Page 74 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
1.18.5. Calibre PERC
Not available at this time.
1.18.6. Reliability Calculator
Not available at this time.
AL
1.18.7. DFM
TI
MAS
Not available at this time.
EN
DPT
D
Not available at this time.
FI
YES
N
Not available at this time.
DRC_PLUS
O
C
Not available at this time.
S
1.19. Resolved Bugs
IE
Initial release.
R
1.20. Known problems and limitations
D
Initial release.
N
U
O
LF
BA
LO
G
Page 75 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
The information contained herein is confidential and is the property of GLOBALFOUNDRIES and/or its
licensors. GLOBALFOUNDRIES reserves all proprietary, design, manufacturing, reproduction, use,
sales and other rights in the information herein, in its products and services, and to any article or
process utilizing such information, except to the extent that rights are expressly granted to others.
AL
TI
This document is for informational purposes only, is current only as of the date of publication and is
EN
subject to change by GLOBALFOUNDRIES at any time without notice. While precautions have been
taken in the preparation of the information herein, it may contain technical inaccuracies, omissions
D
and typographical errors. GLOBALFOUNDRIES is under no obligation to update or otherwise correct
FI
this information.
N
All information contained herein is provided “AS IS.” GLOBALFOUNDRIES MAKES NO
O
REPRESENTATIONS AND DISCLAIMS ALL WARRANTIES OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING
C
WITHOUT LIMITATION ANY IMPLIED WARRANTIES OF NONINFRINGEMENT, MERCHANTABILITY OR
FITNESS FOR A PARTICULAR PURPOSE, WITH RESPECT TO THE INFORMATION CONTAINED HEREIN.
S
IE
Terms and conditions applicable to the purchase, quality and use of GLOBALFOUNDRIES' products and
services are as set forth in your organization’s signed agreement with GLOBALFOUNDRIES or in
R
GLOBALFOUNDRIES’ Standard Terms and Conditions of Sale. Unless otherwise authorized in a signed
D
agreement with GLOBALFOUNDRIES, GLOBALFOUNDRIES’ products and services are NOT intended for
N
use in applications such as implantation, life support, or other hazardous uses where malfunction
U
could result in death, bodily injury, or catastrophic property damage.
O
GLOBALFOUNDRIES, the GLOBALFOUNDRIES logo and combinations thereof are trademarks of
LF
GLOBALFOUNDRIES Inc. in the United States and/or other jurisdictions. Other produc t or service
names are for identification purposes only and may be trademarks or service marks of their respective
BA
owners.
LO
© GLOBALFOUNDRIES Inc. 2016. Unless otherwise indicated, all rights reserved. Do not copy or
redistribute except as expressly permitted by GLOBALFOUNDRIES.
G
Page 76 of 76
GLOBALFOUNDRIES 22FDX Release Notes V0.6_0.0
Date: August 19, 2016
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