.

c n
om
[Link]

m.c
. s p
ww
w
CANTILEVERS
& TEST STRUCTURES
MikroMasch
mikromasch catalog 2007
Narva mnt. 13, 10151 Tallinn, Estonia
toll-free 8000-SPMTIPS (776-8477)
tel: +372 614 3117
fax: +372 614 3118
e-mail: sales@[Link]
 CONTENTS
SPM PROBES . . . . . . . . . . . . . . . . . . . . . . .2

. c n
m
High Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

o
General Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

.c
Large Scans . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Wear-Resistant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Conducting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Magnetic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

m
Tipless cantilevers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

p
SPM TEST STRUCTURES . . . . . . . . . . . . . 42

s
Porous Aluminum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

.
HOPG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

Calibration gratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

w
HOW TO CHOOSE PROBES BY . . . . . . . . 50

w
INDEX OF PRODUCTS . . . . . . . . . . . . . . . 70

w CONTACTS . . . . . . . . . . . . . . . . . . . . . . . . 88
 SPM PROBES
Resolution First Probes are grouped by the resolution they can provide.

. c n
m
High Resolution High Resolution

o
Hi’RES-C (Original Hi’RES) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Rtip < 1 nm Hi’RES-W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

.c
Scan size 150 nm.
Diameter of spherical molecules is 9 nm. Resolution down to 1 nm*.
Height image of carbosilane dendrimers in a Recommended for scanning small
dense film. Courtesy of S. Sheiko (UNC-CH) 50 nm areas below 250 nm at 512 sampling
and D. Ivanov (ULB).
points.

m
General Purpose General Purpose

p
GP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Scan size 800 nm.
Rtip < 10 nm
STING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Diameter of spherical molecules about 40 nm.

s
NSC/CSC, one-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Topography AFM images of the nanocomposite
NSC, three-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

.
film on the basis of poly(p-xylylene) matrix and General purpose probes ensure
nanoparticles of MoO3 and TiO2. resolution of 10 nm.* Scan size CSC, three-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Courtesy of Dr. Radmir Gaynutdinov 250 nm increase up to 1 µm at 512 sampling NSC/CSC, triangular . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
(A.V. Shubnikov Institute of crystallography). points does not affect the resolution.

w
Large Scans Large Scans

w
LS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Rtip < 30 nm Si3N4-coated NSC/CSC, one-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Si3N4-coated NSC, three-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Scan size 3 µm. Large scan probes provide accurate Si3N4-coated CSC, three-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

w
Diameter of spherical molecules 150 nm. resolution of surface features that are
Si3N4-coated NSC/CSC, triangular . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
larger than 30 nm in diameter.* Scan
Height image of polystyrene latex spheres. Conducting NSC/CSC, one-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
1 µm size up to 3 µm at 512 sampling points
Courtesy of S. Magonov (Veeco).
without loss of resolution. Conducting NSC, three-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Conducting CSC, three-lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Conducting NSC/CSC, triangular . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
* Data on minimum size of resolved surface features are calculated from the formula
Magnetic NSC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
which is derived using Rayleigh's criterion.
Here resolution d is a minimum separation between resolved asperities on surface, p is a step size between scan sampling points, r and
Rtip are radii of asperities and the probe tip respectively when approximated as semi-spheres. Recommendations relate to adjacent semi-
spheres on surface; distant asperities of smaller size can also be resolved.
Tipless cantilevers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

2 3
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 1 nm. Recommended for scanning small areas

c
below 250 nm at 512 sampling points.

.
CANTILEVERS

Hi’RES-C Series Cantilever Cantilever Cantilever Thickness,

Length, Width,
l±5, µm w±3, µm
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
(Original Hi-RES) DP14/Hi’RES-C/AlBS
DP15/Hi’RES-C/AlBS
125
125
35
35
min
1.5
3.5
typical
2
4
max
2.5
4.5
min
110
250
typical
160
300
max
220
350
min
1.5
20
typical
5
40
max
12.5
75

o
DP16/Hi’RES-C/AlBS 230 40 6.5 7 7.5 150 170 190 25 40 60
DP17/Hi’RES-C/AlBS 460 50 1.5 2 2.5 8.5 12 15 0.05 0.15 0.3

.c
DP18/Hi’RES-C/AlBS 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5
DP19/Hi’RES-C/AlBS 125 35 0.7 1.0 1.3 52 80 113 0.17 0.6 1.7

100
DP16/Hi'RES-C/AlBS

DP15/Hi'RES-C/AlBS

m
10
DP18/Hi'RES-C/AlBS
20 µm DP14/Hi'RES-C/AlBS

Force constant, N/m

p
SEM image of silicon cantilever and Schematic drawing of silicon chip for Hi’RES-C probe. 1
probe for Hi’RES-C.

s
DP19/Hi'RES-C/AlBS

.
Hi'RES-C probe has extremely sharp diamond-like spikes on the apex of the 0.1 DP17/Hi'RES-C/AlBS
100 nm
Silicon tip. There can be additional smaller (satellite) spikes near the main one;
however, the longest spike determines the resolution.

w
Typical spike curvature radius . . . . . . . . . . . . . . . . . . . . . less than 1 nm
0.01
Typical spike height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100..200 nm 10 100 1000
Total probe tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm Resonant frequency, kHz

w
Material of the spikes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . hydrophobic,
non-conducting, wear-resistant
Hi’RES-C probe suffers less contamination than Silicon probe and provides
obtaining many high-resolution scans, while it requires special care in use.

w
Advantages of Hi’RES-C are noticeable on scans less than 200 nm in size. Due
to the small tip curvature radius, the tip-sample attraction force is minimized. SEM micrograph of Hi’RES-C extra tips
grown on the apex of Silicon probe.
HR-advantages are noticeable when scanning smaller areas (<250 nm) and
flat samples (Ra<1 nm). On larger images, the resolution is similar to those
by general purpose probes. Corrugated samples may result in multiple features BACKSIDE COATINGS
due to the satellite spikes.
AlBS - Cantilever backside has 30-nm Aluminum coating.
Maximum recommended height of surface features . . . . . . . . . . . 20 nm

PART NUMBER 14, 15, 16, 17, 18, 19 series

DP * / Hi’RES-C /AlBS/ * 5, 15 quantity

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

4 5
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 1 nm. Recommended for scanning small areas

c
below 250 nm at 512 sampling points.

.
CANTILEVERS

Hi’RES-W Series Cantilever Cantilever Cantilever Thickness,

Length, Width,
l±5, µm w±3, µm
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
min typical max min typical max min typical max
DP14/Hi’RES-W/AlBS 125 35 1.5 2 2.5 110 160 220 1.5 5 12.5
DP15/Hi’RES-W/AlBS 125 35 3.5 4 4.5 250 300 350 20 40 75

o
DP16/Hi’RES-W/AlBS 230 40 6.5 7 7.5 150 170 190 25 40 60
100
DP16/Hi'RES-W/AlBS
DP16/HI'RES-W/AlBS

.c
DP15/HI'RES-W/AlBS
DP15/Hi'RES-W/AlBS

10

DP14/Hi'RES-W/AlBS
DP14/HI'RES-W/AlBS

Force constant, N/m

m
1

20 µm

p
SEM image of silicon cantilever and Schematic drawing of silicon chip for Hi’RES-W probe.
probe for Hi’RES-W. 0.1

. s
Hi'RES-W probe has a single spike on the end of the Silicon tip.
200 nm 0.01
Typical spike curvature radius . . . . . . . . . . . . . . . 1 nm (range 0.5..3 nm) 10 100 1000

Typical spike height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100..500 nm Resonant frequency, kHz

w
Total probe tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm
Material of the spike . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Tungsten
Due to the nanometer tip curvature radius, Hi'RES-W probe provides high

w
resolution for scans less than 200 nm in size and minimum tip-sample
attraction force.
Hi'RES-W is not conducting from the chip holder to the spike.

w
SEM micrograph of Hi’RES-W extra tip
grown on the apex of Silicon probe.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.

PART NUMBER 14, 15, 16 series

DP * / Hi’RES-W /AlBS/ * 5, 15 quantity

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

6 7
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 10 nm. Recommended for scanning small

c
areas below 250 nm at 512 sampling points.

.
CANTILEVERS

GP Series Cantilever
Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
min typical max min typical max min typical max
DP14/GP 125 35 1.5 2 2.5 110 160 220 1.5 5 12.5
DP15/GP 125 35 3.5 4 4.5 250 300 350 20 40 75

o
DP16/GP 225 35 6.5 7 7.5 150 170 190 25 40 60
DP17/GP 450 35 0.5 1 1.5 16 20 24 0.3 0.9 2.4

.c
DP18/GP 225 35 3.5 4 4.5 75 100 125 2.0 3.5 5.5

10-15 µm
2 µm
100
30° 4° DP16/GP

DP15/GP

10

m
DP18/GP

Force constant, N/m

DP14/GP
10 µm

p
1

SEM image of GP silicon cantilever and Schematic drawing of silicon chip for GP probe. DP17/GP
probe.

. s
0.1
GP is a single-crystal Silicon AFM probe with tetrahedral tip. The tip is inclined
and located at the very end of the cantilever for easier positioning of the tip into 5 µm

the area of interest using video camera.

w
0.01
Typical tip radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm 10 100 1000
Tip inclivation angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19.5° Resonant frequency, kHz
Tip aspect ratio . . . . . . . . . . . . . . . . . . . . . . more than 3:1 (4:1 typical)
Calibration of Force Constant

w
Tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15±2.5 µm
One-lever probes of the NSC/CSC series can be individually calibrated at the facility using the non-destructive method
Probe material . . . . . . . . . . . . . . . . . . . . . . p-type silicon (boron doped) of force constant determination by John E. Sader, (Univ. of Melbourne). ** Uncertainty of the calibrated force constant
Probe bulk resistivity* . . . . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm value shown in the individual cantilever specification is about 10%.

w
*The surface of Silicon has a native oxide layer that makes the probe non- ** [Link]., 70, 3967 (1999).
conducting. The thickness of the native oxide film is 1..4 nm. SEM micrograph of GP probe tip.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
PART NUMBER 14, 15, 16, 17, 18 series
NoAL - No backside coating
DP * -F / GP / * / * 15, 50 quantity
AlBS, no Al coating
calibrated force constant

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

8 9
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 10 nm. Recommended for scanning small

c
areas below 250 nm at 512 sampling points.

.
CANTILEVERS

STING Series Cantilever Cantilever

Length, Width,
l±5, µm w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
min typical max min typical max min typical max
DP14/STING/AlBS 125 35 1.5 2 2.5 110 160 220 1.5 5 12.5
DP15/STING/AlBS 125 35 3.5 4 4.5 250 300 350 20 40 75

o
DP16/STING/AlBS 230 40 6.5 7 7.5 150 170 190 25 40 60
DP17/STING/AlBS 460 50 1.5 2 2.5 8.5 12 15 0.05 0.15 0.3

.c
DP18/STING/AlBS 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5
DP19/STING/AlBS 125 35 0.7 1.0 1.3 52 80 113 0.17 0.6 1.7

100
DP16/STING/AlBS

DP15/STING/AlBS

m
10
DP18/STING/AlBS
DP14/STING/AlBS

Force constant, N/m

20 µm

p
1
SEM image of silicon cantilever and Schematic drawing of silicon chip for STING probe.
probe for STING.

s
DP19/STING/AlBS

.
STING probe features additional narrow and long conical spike grown by 0.1 DP17/STING/AlBS
means of Electron Beam Deposition (EBD) technique on the apex of
conventional Silicon tip. The spike is tilted in respect to the axis of the Silicon

w
tip for precise vertical positioning of the spike over the sample surface.
0.01
Typical tip radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 nm 10 100 1000
Aspect ratio of the spike . . . . . . . . . . . . . . . . . . . . . . . . . . . . at least 4:1 Resonant frequency, kHz
Spike height* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400..600 nm

w
Tilt angle* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10..15°
Tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 200 nm
Tip properties . . . . . . . . . . . . . non-conducting, hydrophobic, amorphous

w
* Other heights and tilt angles are possible by request.
SEM photo of STING extra tip grown on
the apex of Silicon probe.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.

PART NUMBER 14, 15, 16, 17, 18, 19 series

DP * / STING / AlBS / * 5, 15 quantity

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

10 11
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 10 nm. Recommended for scanning small

c
areas below 250 nm at 512 sampling points.

.
CANTILEVERS

NSC/CSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
one-lever NSC14
NSC15
125
125
35
35
min
1.5
3.5
typical
2
4
max
2.5
4.5
min
110
250
typical
160
300
max
220
350
min
1.5
20
typical
5
40
max
12.5
75

o
NSC16 230 40 6.5 7 7.5 150 170 190 25 40 60
CSC17 460 50 1.5 2 2.5 8.5 12 15 0.05 0.15 0.3

.c
NSC18 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5
NSC19 125 35 0.7 1.0 1.3 52 80 113 0.17 0.6 1.7

100
NSC16

NSC15

m
10
NSC18
NSC14

Force constant, N/m

100 µm

p
1
SEM image of NSC18 silicon cantilever Schematic drawing of one-lever silicon chip, NSC/CSC probe.
and probe.

s
NSC19

.
Silicon etched probe tip of the NSC/CSC series has a conical shape. 0.1 CSC17
20 nm
Typical tip radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
Full tip cone angle* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°

w
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 0.01
10 100 1000
Probe material . . . . . . . . . . . . . . . . . n-type silicon (phosphorus doped)
Resonant frequency, kHz
Probe bulk resistivity** . . . . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm

w
Calibration of Force Constant
*The full cone angle may be less than 40° at the last 200 nm of the tip end.
One-lever probes of the NSC/CSC series can be individually calibrated at the facility using non-destructive method of
**The surface of Silicon has a native oxide layer that makes the probe non-
force constant determination by John E. Sader, (Univ. of Melbourne). *** Uncertainty of the calibrated force constant
conducting. The thickness of the native oxide film is 1..4 nm.
value shown in the individual cantilever specification is about 10%.

w
*** [Link]., 70, 3967 (1999).
SEM micrograph of Silicon etched probe
tip end.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
PART NUMBER 14, 15, 16, 17, 18, 19 series
Cr-AuBS - Cantilever backside 30-nm Au coating with 20-nm Cr sublayer, not available for certain cantilever series, see
NSC/CSC * -F / * / * 15, 50 quantity Index of Products for details.
AlBS, Cr-AuBS, no Al coating NoAl - No backside coating.
calibrated force constant

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

12 13
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 10 nm. Recommended for scanning small

c
areas below 250 nm at 512 sampling points.

.
CANTILEVERS

NSC Series Cantilever

Length,
l±5, µm
Cantilever
width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
three-lever NSC35
lever A 110 35
min

1.7
typical

2.0
max

2.3
min

165
typical

210
max

240
min

3.5
typical

7.5
max

12.5

o
lever B 90 35 1.7 2.0 2.3 240 315 405 6.5 14 27.5
lever C 130 35 1.7 2.0 2.3 120 150 190 2.5 4.5 8.5

.c
NSC36
lever A 110 35 0.7 1.0 1.3 65 105 150 0.25 0.95 2.5
lever B 90 35 0.7 1.0 1.3 95 155 230 0.45 1.75 5.0
lever C 130 35 0.7 1.0 1.3 50 75 105 0.15 0.6 1.5

100

m
NSC35 B
100 µm 10 A

p
C

Force constant, N/m

SEM image of silicon cantilevers and Schematic drawing of three-lever silicon chip.
B
probe tips of the NSC35 series.

s
1 A
C

.
Each chip of the three-lever NSC series has short rectangular cantilevers A, B NSC36
20 nm
and C of different normal spring constant and resonant frequency with silicon
etched probe tips. 0.1

w
Typical tip radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
Full tip cone angle* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 0.01

w
10 100 1000
Probe material . . . . . . . . . . . . . . . . . n-type silicon (phosphorus doped)
Resonant frequency, kHz
Probe bulk resistivity** . . . . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm
*The full cone angle may be less than 40° at the last 200 nm of the tip end.

w
**The surface of Silicon has a native oxide layer that makes the probe non-
conducting. The thickness of the native oxide film is 1..4 nm. SEM micrograph of Silicon etched probe
tip end.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
Cr-AuBS - Cantilever backside 30-nm Au coating with 20-nm Cr sublayer, not available for certain cantilever series, see
PART NUMBER 35, 36 series Index of Products for details.
NSC * / * / * 15, 50 quantity NoAl - No backside coating.
AlBS, Cr-AuBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

14 15
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 10 nm. Recommended for scanning small

c
areas below 250 nm at 512 sampling points.

.
CANTILEVERS

CSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
three-lever CSC37
lever A 250 35
min

1.7
typical

2.0
max

2.3
min

33
typical

41
max

49
min

0.35
typical

0.65
max

1.2

o
lever B 350 35 1.7 2.0 2.3 17 21 24 0.1 0.3 0.4
lever C 300 35 1.7 2.0 2.3 23 28 34 0.2 0.35 0.7

.c
CSC38
lever A 250 35 0.7 1.0 1.3 14 20 28 0.02 0.08 0.2
lever B 350 35 0.7 1.0 1.3 7 10 14 0.01 0.03 0.08
lever C 300 35 0.7 1.0 1.3 9.5 14 19.0 0.01 0.05 0.1

100

m
100 µm 10

p
Force constant, N/m
SEM image of silicon cantilevers and Schematic drawing of three-lever silicon chip.
probe tips of the CSC37 series.

s
1
CSC37

.
The there-lever chips of the CSC series contain long cantilevers A, B and C
20 nm
for contact mode measurements.
Typical tip radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm 0.1

w
Full tip cone angle* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°
CSC38
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm
Probe material . . . . . . . . . . . . . . . . . n-type silicon (phosphorus doped) 0.01

w
10 100 1000
Probe bulk resistivity** . . . . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm
Resonant frequency, kHz
*The full cone angle may be less than 40° at the last 200 nm of the tip end.
**The surface of Silicon has a native oxide layer that makes the probe non-

w
conducting. The thickness of the native oxide film is 1..4 nm.
SEM micrograph of Silicon etched probe
tip end.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 37, 38 series
CSC * / * / * 15, 50 quantity
AlBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

16 17
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Resolution down to 10 nm. Recommended for scanning small

c
areas below 250 nm at 512 sampling points.

.
CANTILEVERS

NSC/CSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
triangular NSC11
lever A 200 40
min

1.7
typical

2.0
max

2.3
min

45
typical

60
max

75
min

1.5
typical

3.0
max

5.0

o
lever B 90 60 1.7 2.0 2.3 260 330 420 23 48 9
NSC21

.c
lever A 290 40 1.7 2.0 2.3 20 25 30 0.5 1.0 1.5
lever B 110 40 1.7 2.0 2.3 164 210 265 8.5 17.5 33
CSC11
lever A 200 40 0.7 1.0 1.3 20 28 40 0.1 0.35 0.9
lever B 90 40 0.7 1.0 1.3 100 155 235 1.5 6.0 16.5
CSC21

m
lever A 290 40 0.7 1.0 1.3 8 12 17 0.03 0.12 0.3
lever B 110 40 0.7 1.0 1.3 67 105 150 0.6 2.0 6.0
100 µm
100

p
B

SEM image of silicon cantilever and tip of Schematic drawing of silicon chip with 2 triangular cantilevers. NSC11
ÑSC21 series. B

s
10 NSC21

.
B
NSC11
Silicon etched probes of the NSC11, NSC21, CSC11 and CSC21 series are CSC11

Force constant, N/m

20 nm A
mounted on triangular cantilevers. Each chip contains two probes A and B of NSC21
B
different spring constant and resonant frequency located on the opposite sides. 1 A CSC21

w
Typical tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
A
Full tip cone angle* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40° CSC11
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm A
0.1
CSC21

w
Probe material . . . . . . . . . . . . . . . . . n-type silicon (phosphorus doped)
Probe bulk resistivity** . . . . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm
*The full cone angle may be less than 40° at the last 200 nm of the tip end.
0.01

w
**The surface of Silicon has a native oxide layer that makes the probe non- 10 100 1000
conducting. The thickness of the native oxide film is 1..4 nm. Resonant frequency, kHz
SEM micrograph of Silicon etched probe
tip end.

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
Cr-AuBS - Cantilever backside 30-nm Au coating with 20-nm Cr sublayer, not available for certain cantilever series, see
PART NUMBER 11, 21 series Index of Products for details.
NSC/CSC * / * / * 15, 50 quantity NoAl - No backside coating.
AlBS, Cr-AuBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

18 19
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

LS Series Cantilever Cantilever

Length, Width,
l±5, µm w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
min typical max min typical max min typical max
DP14/LS/AlBS 125 35 1.5 2 2.5 110 160 220 1.5 5 12.5
DP15/LS/AlBS 125 35 3.5 4 4.5 250 300 350 20 40 75

o
DP16/LS/AlBS 230 40 6.5 7 7.5 150 170 190 25 40 60
DP17/LS/AlBS 460 50 1.5 2 2.5 8.5 12 15 0.05 0.15 0.3
DP18/LS/AlBS 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5

.c
DP19/LS/AlBS 125 35 0.7 1.0 1.3 52 80 113 0.17 0.6 1.7

100
DP16/LS/AlBS

DP15/LS/AlBS

m
10
DP18/LS/AlBS
DP14/LS/AlBS

Force constant, N/m

20 µm

p
1
SEM image of silicon cantilever and Schematic drawing of LS probe silicon chip.
probe of LS series.

s
DP19/LS/AlBS

.
Silicon etched probe tip of the LS series has a conical shape. The probe is 0.1 DP17/LS/AlBS
50 nm
coated by special wear-resistant coating to increase its durability and lifetime.
Typical tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 nm

w
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°
0.01
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 10 100 1000

Coating material . . . . . . . . . . . . wear-resistant, insulating, hydrophobic Resonant frequency, kHz

w
Probe material . . . . . . . . . . . . . . . . . n-type silicon (phosphorus doped)
Probe bulk resistivity . . . . . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm

w
SEM photo of LS probe tip end

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.

PART NUMBER 14, 15, 16, 17, 18, 19 series

DP * / LS / AlBS / * 15, 50 quantity

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

20 21
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

NSC/CSC with Si3N4 coating, Series Cantilever Cantilever

Length, Width,
l±5, µm w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
one-lever NSC14/Si3N4
NSC15/Si3N4
125
125
35
35
min
1.5
3.5
typical
2
4
max
2.5
4.5
min
110
250
typical
160
300
max
220
350
min
1.5
20
typical
5
40
max
12.5
75

o
NSC16/Si3N4 230 40 6.5 7 7.5 150 170 190 25 40 60
CSC17/Si3N4 460 50 1.5 2 2.5 8.5 12 15 0.05 0.15 0.3

.c
NSC18/Si3N4 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5
NSC19/Si3N4 125 35 0.7 1.0 1.3 52 80 113 0.17 0.6 1.7

100
NSC16/Si3N4

NSC15/Si3N4

m
10
NSC18/Si3N4
NSC14/Si3N4

Force constant, N/m

100 µm

p
1
SEM image of NSC18 silicon cantilever Schematic drawing of one-lever silicon chip, NSC/CSC probe.
and probe.

s
NSC19/Si3N4

.
Silicon etched one-lever probes of the NSC/CSC series are available with the 0.1 CSC17/Si3N4
wear-resistant Si3N4 coating.
Typical tip curvature radius before coating . . . . . . . . . . . . . . . . . . 10 nm

w
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40° 0.01
10 100 1000
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm
Resonant frequency, kHz

w
The Si3N4 coating is hard, wear-resistant, insulating, hydrophobic, chemically
inert.
Coating thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm

w
Resulting tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 nm

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 14, 15, 16, 17, 18, 19 series
NSC/CSC * /Si3N4/ * / * 15, 50 quantity
AlBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

22 23
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

NSC with Si3N4 coating, Series Cantilever

Length,
l±5, µm
Cantilever
width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
three-lever NSC35
lever A 110 35
min

1.7
typical

2.0
max

2.3
min

165
typical

210
max

240
min

3.5
typical

7.5
max

12.5

o
lever B 90 35 1.7 2.0 2.3 240 315 405 6.5 14 27.5
lever C 130 35 1.7 2.0 2.3 120 150 190 2.5 4.5 8.5

.c
NSC36
lever A 110 35 0.7 1.0 1.3 65 105 150 0.25 0.95 2.5
lever B 90 35 0.7 1.0 1.3 95 155 230 0.45 1.75 5.0
lever C 130 35 0.7 1.0 1.3 50 75 105 0.15 0.6 1.5

100

m
NSC35/Si3N4 B
100 µm 10 A

p
C

Force constant, N/m

SEM image of silicon cantilevers and Schematic drawing of three-lever silicon chip.
B
probes of the NSC35 series.

s
1 A
C

.
Three-lever probes of the NSC series are available with the wear-resistant NSC36/Si3N4
Si3N4 coating. The cantilevers feature different spring constant and resonant
frequency. 0.1

w
Typical tip radius before coating . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 0.01

w
10 100 1000
Resonant frequency, kHz
The Si3N4 coating is hard, wear-resistant, insulating, hydrophobic, chemically
inert.

w
Coating thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
Resulting tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 nm

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 35, 36 series
NSC * / Si3N4 / * / * 15, 50 quantity
AlBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

24 25
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

CSC with Si3N4 coating, Series Cantilever

Length,
l±5, µm
Cantilever
width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
three-lever CSC37
lever A 250 35
min

1.7
typical

2.0
max

2.3
min

33
typical

41
max

49
min

0.35
typical

0.65
max

1.2

o
lever B 350 35 1.7 2.0 2.3 17 21 24 0.1 0.3 0.4
lever C 300 35 1.7 2.0 2.3 23 28 34 0.2 0.35 0.7

.c
CSC38
lever A 250 35 0.7 1.0 1.3 14 20 28 0.02 0.08 0.2
lever B 350 35 0.7 1.0 1.3 7 10 14 0.01 0.03 0.08
lever C 300 35 0.7 1.0 1.3 9.5 14 19.0 0.01 0.05 0.1

100

m
100 µm 10

p
Force constant, N/m
SEM image of silicon cantilevers and Schematic drawing of three-lever silicon chip.
probes of the CSC37 series.

s
1
CSC37/Si3N4

.
Three-lever probes for contact mode imaging of the CSC series are available
with the wear-resistant Si3N4 coating. Each chip contain probes A, B and C of
different force constant. 0.1

w
Typical tip radius before coating . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
CSC38/Si3N4
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 0.01

w
10 100 1000
Resonant frequency, kHz
The Si3N4 coating is hard, wear-resistant, insulating, hydrophobic, chemically
inert.
Coating thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm

w
Resulting tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 nm

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 37, 38 series
CSC * / Si3N4 / * / * 15, 50 quantity
AlBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

26 27
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

NSC/CSC with Si3N4 coating, Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
triangular NSC11
lever A 200 40
min

1.7
typical

2.0
max

2.3
min

45
typical

60
max

75
min

1.5
typical

3.0
max

5.0

o
lever B 90 60 1.7 2.0 2.3 260 330 420 23 48 9
NSC21

.c
lever A 290 40 1.7 2.0 2.3 20 25 30 0.5 1.0 1.5
lever B 110 40 1.7 2.0 2.3 164 210 265 8.5 17.5 33
CSC11
lever A 200 40 0.7 1.0 1.3 20 28 40 0.1 0.35 0.9
lever B 90 40 0.7 1.0 1.3 100 155 235 1.5 6.0 16.5
CSC21

m
lever A 290 40 0.7 1.0 1.3 8 12 17 0.03 0.12 0.3
lever B 110 40 0.7 1.0 1.3 67 105 150 0.6 2.0 6.0
100 µm
100

p
B

SEM image of silicon cantilever and tip of Schematic drawing of silicon chip with 2 triangular cantilevers. NSC11/Si3N4
NSC21 series. B

s
10 NSC21/Si3N4

.
NSC11/Si3N4 B
Probe series with triangular cantilevers are available with the wear-resistant CSC11/Si3N4

Force constant, N/m

A
Si3N4 coating. Each chip contain two probes A and B of different force constant NSC21/Si3N4 B
and resonant frequency located on the opposite sides. 1 A CSC21/Si3N4

w
Typical tip radius before coating . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
A
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40° CSC11/Si3N4
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm A
0.1

w
CSC21/Si3N4

The Si3N4 coating is hard, wear-resistant, insulating, hydrophobic, chemically

inert.
0.01
Coating thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm

w
10 100 1000
Resulting tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 nm Resonant frequency, kHz

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 11, 21 series
NSC/CSC * /Si3N4/ * / * 15, 50 quantity
AlBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

28 29
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

Conducting NSC/CSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
one-lever NSC14
NSC15
125
125
35
35
min
1.5
3.5
typical
2
4
max
2.5
4.5
min
110
250
typical
160
300
max
220
350
min
1.5
20
typical
5
40
max
12.5
75

o
NSC16 230 40 6.5 7 7.5 150 170 190 25 40 60
CSC17 460 50 1.5 2 2.5 8.5 12 15 0.05 0.15 0.3

.c
NSC18 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5
NSC19 125 35 0.7 1.0 1.3 52 80 113 0.17 0.6 1.7

100
NSC16/Pt
NSC19/Ti-Pt
NSC19/Cr-Au NSC15/Pt
NSC15/Ti-Pt

m
10 NSC15/Cr-Au
NSC18/Pt
NSC14/Pt

Force constant, N/m

20 µm NSC18/Ti-Pt
NSC14/Ti-Pt

p
NSC18/Cr-Au
NSC14/Cr-Au
1
SEM image of silicon cantilever and tip of Schematic drawing of silicon chip with 1 rectangular
NSC14 series. cantilever.

s
NSC19/Pt
NSC19/Ti-Pt

.
NSC19/Cr-Au
One-lever series of probes are available with conducting coatings for 0.1 CSC17/Pt
100 nm NSC17/Ti-Pt
measurements of electric properties of materials in appropriate operation
NSC17/Cr-Au
modes of AFM.

w
Typical tip radius before coating . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
0.01
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40° 10 100 1000

Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm Resonant frequency, kHz

w
CONDUCTIVE COATINGS
The conducting coatings are continuous from the tip end to the bulk of the
Silicon chip.

w
Pt - Conductive wear-resistant 10..15 nm-thick Pt coating on tip side. TEM micrograph of the tip with 10-nm
Backside has no coating. Resulting tip radius 20..25 nm. thick wear-resistant Pt coating.
Ti-Pt - Overall tip side and back side 10-nm Pt coating with
20-nm Ti sublayer. Resulting tip radius 40 nm. BACKSIDE COATINGS (only for Pt-coated probes)
Cr-Au - Overall tip side and backside 20-nm Au coating with 20-nm
Cr sublayer. Resulting tip radius 50 nm. AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 14, 15, 16, 17, 18, 19 series
NSC/CSC * / * / * 15, 50 quantity
Pt/AlBS, Pt/no Al, Ti-Pt, Cr-Au coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

30 31
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

Conducting NSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
three-lever NSC35
lever A 110 35
min

1.7
typical

2.0
max

2.3
min

165
typical

210
max

240
min

3.5
typical

7.5
max

12.5

o
lever B 90 35 1.7 2.0 2.3 240 315 405 6.5 14 27.5
lever C 130 35 1.7 2.0 2.3 120 150 190 2.5 4.5 8.5

.c
NSC36
lever A 110 35 0.7 1.0 1.3 65 105 150 0.25 0.95 2.5
lever B 90 35 0.7 1.0 1.3 95 155 230 0.45 1.75 5.0
lever C 130 35 0.7 1.0 1.3 50 75 105 0.15 0.6 1.5

100
NSC35/Pt

m
NSC35/Ti-Pt
NSC35/Cr-Au B
100 µm 10 A

p
C

Force constant, N/m

SEM image of silicon cantilever and tip of Schematic drawing of silicon chip with 3 rectangular
B
NSC21 series. cantilevers.

s
1 A

.
C
NSC36/Pt
Three-lever series of probes with conducting coatings for electric AFM modes
100 nm NSC36/Ti-Pt
are available. The three probes on each chip have slightly different spring NSC36/Cr-Au
constant and resonant frequency. 0.1

w
Typical tip radius before coating . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm 0.01

w
10 100 1000
Resonant frequency, kHz
CONDUCTIVE COATINGS
The conducting coatings are continuous from the tip end to the bulk of the
Silicon chip.

w
Pt - Conductive wear-resistant 10..15 nm-thick Pt coating on tip side. TEM micrograph of the tip with 10-nm
Backside has no coating. Resulting tip radius 20..25 nm. thick wear-resistant Pt coating.
Ti-Pt - Overall tip side and back side 10-nm Pt coating with
20-nm Ti sublayer. Resulting tip radius 40 nm. BACKSIDE COATINGS (only for Pt-coated probes)
Cr-Au - Overall tip side and backside 20-nm Au coating with 20-nm
Cr sublayer. Resulting tip radius 50 nm. AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 35, 36 series
NSC * / * / * 15, 50 quantity
Pt/AlBS, Pt/no Al, Ti-Pt, Cr-Au coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

32 33
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

Conducting CSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
three-lever CSC37
lever A 250 35
min

1.7
typical

2.0
max

2.3
min

33
typical

41
max

49
min

0.35
typical

0.65
max

1.2

o
lever B 350 35 1.7 2.0 2.3 17 21 24 0.1 0.3 0.4
lever C 300 35 1.7 2.0 2.3 23 28 34 0.2 0.35 0.7

.c
CSC38
lever A 250 35 0.7 1.0 1.3 14 20 28 0.02 0.08 0.2
lever B 350 35 0.7 1.0 1.3 7 10 14 0.01 0.03 0.08
lever C 300 35 0.7 1.0 1.3 9.5 14 19.0 0.01 0.05 0.1

100

m
100 µm
10

p
Force constant, N/m
SEM image of silicon cantilever and tip of Schematic drawing of silicon chip with 3 rectangular
CSC37 series. cantilevers.

s
CSC37/Pt
1 CSC37/Ti-Pt
CSC37/Cr-Au

.
Low-frequency three-lever probes measurements with conducting coatings for
100 nm
contact electric AFM modes are available. The three probes A, B and C on the
chip are slightly different in force constant. 0.1

w
Typical tip radius before coating . . . . . . . . . . . . . . . . . . . . . . . . . . 10 nm
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40° CSC38/Pt
CSC38/Ti-Pt
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm CSC38/Cr-Au
0.01

w
10 100 1000
Resonant frequency, kHz
CONDUCTIVE COATINGS
The conducting coatings are continuous from the tip end to the bulk of the
Silicon chip.

w
Pt - Conductive wear-resistant 10..15 nm-thick Pt coating on tip side. TEM micrograph of the tip with 10-nm
Backside has no coating. Resulting tip radius 20..25 nm. thick wear-resistant Pt coating.
Ti-Pt - Overall tip side and back side 10-nm Pt coating with
20-nm Ti sublayer. Resulting tip radius 40 nm. BACKSIDE COATINGS (only for Pt-coated probes)
Cr-Au - Overall tip side and backside 20-nm Au coating with 20-nm
Cr sublayer. Resulting tip radius 50 nm. AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 37, 38 series
CSC * / * / * 15, 50 quantity
Pt/AlBS, Pt/no Al, Ti-Pt, Cr-Au coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

34 35
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

Conducting NSC/CSC Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
triangular NSC11
lever A 200 40
min

1.7
typical

2.0
max

2.3
min

45
typical

60
max

75
min

1.5
typical

3.0
max

5.0

o
lever B 90 60 1.7 2.0 2.3 260 330 420 23 48 9
NSC21

.c
lever A 290 40 1.7 2.0 2.3 20 25 30 0.5 1.0 1.5
lever B 110 40 1.7 2.0 2.3 164 210 265 8.5 17.5 33
CSC11
lever A 200 40 0.7 1.0 1.3 20 28 40 0.1 0.35 0.9
lever B 90 40 0.7 1.0 1.3 100 155 235 1.5 6.0 16.5
CSC21

m
lever A 290 40 0.7 1.0 1.3 8 12 17 0.03 0.12 0.3
lever B 110 40 0.7 1.0 1.3 67 105 150 0.6 2.0 6.0
100 µm
100

p
B NSC11/Pt
NSC11/Ti-Pt
SEM image of silicon cantilever and tip of Schematic drawing of silicon chip with 2 triangular cantilevers.
B NSC11/Cr-Au
ÑSC21 series.

s
NSC11/Pt NSC21/Pt
10
NSC11/Ti-Pt NSC21/Ti-Pt

.
B
NSC21/Pt NSC11/Cr-Au NSC21/Cr-Au
Triangular probes with conducting coatings can be used for electric AFM

Force constant, N/m

A CSC11/Pt
100 nm NSC21/Ti-Pt CSC11/Ti-Pt
modes. Each chip contains two probes A and B of different force constant and NSC21/Cr-Au
B
CSC11/Cr-Au
resonant frequency on the opposite sides. 1 A CSC21/Pt
CSC21/Ti-Pt

w
Typical tip curvature radius before coating . . . . . . . . . . . . . . . . . . 10 nm CSC21/Cr-Au
A
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40° CSC11/Pt
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm A CSC11/Ti-Pt
0.1 CSC11/Cr-Au
CSC21/Pt

w
CSC21/Ti-Pt
CSC21/Cr-Au
CONDUCTIVE COATINGS
The conducting coatings are continuous from the tip end to the bulk of the 0.01
Silicon chip.

w
10 100 1000

Pt - Conductive wear-resistant 10..15 nm-thick Pt coating on tip side. Resonant frequency, kHz
TEM micrograph of the tip with 10-nm
Backside has no coating. Resulting tip radius 20..25 nm. thick wear-resistant Pt coating.
Ti-Pt - Overall tip side and back side 10-nm Pt coating with
20-nm Ti sublayer. Resulting tip radius 40 nm. BACKSIDE COATINGS (only for Pt-coated probes)
Cr-Au - Overall tip side and backside 20-nm Au coating with 20-nm
Cr sublayer. Resulting tip radius 50 nm. AlBS - Cantilever backside has 30-nm Aluminum coating.
NoAl - No backside coating.
PART NUMBER 11, 21 series
NSC/CSC * / * / * 15, 50 quantity
Pt/AlBS, Pt/no Al, Ti-Pt, Cr-Au coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

36 37
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS
Accurate resolution of surface features that are larger than 30 nm in

c
diameter.* Scan size up to 3 um at 512 sampling points without
loss of resolution.

.
CANTILEVERS

Magnetic NSC Series Cantilever Cantilever

Length, Width,
l±5, µm w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
min typical max min typical max min typical max
NSC18/Co-Cr 230 40 2.5 4 4.5 75 100 125 2.0 3.5 5.5

o
100

.c
10
NSC18/Co-Cr

Force constant, N/m

1

m
100 µm

p
0.1

SEM image of NSC18 silicon cantilever Schematic drawing of one-lever silicon chip, NSC probe.
and probe.

. s
0.01
Magnetic probe tip of the NSC18 of a conical shape coated by magnetic 10 100 1000

coating for MFM is available. The coating consists of 60-nm Co layer on both Resonant frequency, kHz
tip side and backside protected from oxidation by 20-nm Cr film.

w
Typical tip curvature radius before coating . . . . . . . . . . . . . . . . . . 10 nm
Full tip cone angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40°

w
Total tip height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20..25 µm

Thickness of magnetic coating . . . . . . . . . . . . . . . . . . . . . . . . . . . 80 nm

w
Resulting tip curvature radius . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 nm
Coercitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 300..400 Oe

PART NUMBER NSC 18 / Co-Cr / * 15, 50 quantity

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

38 39
 SPM PROBES

n
HIGH RESOLUTION GENERAL PURPOSE LARGE SCANS TIPLESS CANTILEVERS

. c
CANTILEVERS

Tipless Series Cantilever

Length,
l±5, µm
Cantilever
Width,
w±3, µm
Cantilever Thickness,
µm
Resonant Frequency,
kHz
Force Constant,
N/m

m
6-lever NSC12
lever A 110 35
min

1.7
typical

2.0
max

2.3
min

165
typical

210
max

240
min

3.5
typical

7.5
max

12.5

o
lever B 90 35 1.7 2.0 2.3 240 315 405 6.5 14 27.5
100 µm lever C 130 35 1.7 2.0 2.3 120 150 190 2.5 4.5 8.5

.c
lever D 300 35 1.7 2.0 2.3 23 28 34 0.2 0.35 0.7
lever E 350 35 1.7 2.0 2.3 17 21 24 0.1 0.3 0.4
lever F 250 35 1.7 2.0 2.3 33 41 49 0.35 0.65 1.2
CSC12
lever A 110 35 0.7 1.0 1.3 65 105 150 0.25 0.95 2.5
lever B 90 35 0.7 1.0 1.3 95 155 230 0.45 1.75 5.0

m
lever C 130 35 0.7 1.0 1.3 50 75 105 0.15 0.6 1.5
lever D 300 35 0.7 1.0 1.3 9.5 14 19 0.01 0.05 0.1
lever E 350 35 0.7 1.0 1.3 7.0 10 14 0.01 0.03 0.08

p
lever F 250 35 0.7 1.0 1.3 14 20 28 0.02 0.08 0.2

SEM image of 3 short silicon cantilevers Schematic drawing of three-lever silicon chip. 100
on 6-lever chip of the NSC12 series.

. s
B
Cantilever material . . . . . . . . . . . . . . n-type silicon (phosphorus doped) 10 A
Cantilever bulk resistivity* . . . . . . . . . . . . . . . . . . . . 0.01..0.05 Ohm*cm C

Force constant, N/m

*The surface of Silicon has a native oxide layer that makes the probe non- NSC12

w
conducting. The thickness of the native oxide film is 1..4 nm.
1 A
F C
D
E

w
CSC12
0.1 F
D
E

w
0.01
10 100 1000
Resonant frequency, kHz

BACKSIDE COATINGS
AlBS - Cantilever backside has 30-nm Aluminum coating.
PART NUMBER CSC, NSC type
NoAl - No backside coating.
* 12 / * / * 15, 50 quantity
AlBS, no Al coating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

40 41
 SPM TEST STUCTURES
POROUS ALUMINUM HOPG

. c n
om
.c
PA01 HOPG Porous Aluminum . . . . . . . . . . . . . . . . . . . . . . . . . . . . .44

m
CALIBRATION GRATINGS
HOPG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .45

p
Calibration gratings

. s
TGZ Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .46

TGX Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .47

TGF11 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .48

w
TGG01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .49
TGZ SERIES TGF11

w wTGX SERIES TGG01

42 43
 SPM TEST STRUCTURES

n
PA01 HOPG TGZ SERIES TGX SERIES TGG01 TGF11 PA 01 HOPG TGZ SERIES TGX SERIES TGG01 TGF11

Porous Aluminium HOPG

. c
m
The form of the scanning probe tip is very important for obtaining AFM images Highly Ordered Pyrolytic Graphite (HOPG) belongs to lamellar materials and

o
of high quality. As new AFM tips with nanometer curvature radius become consists of identical staked planes (Fig. 3.8). Carbon atoms within a single
widespread, new tip characterizers that have surface features of the same plane interact much stronger than with those from adjacent planes. That

.c
sharpness should be used to estimate parameters of the tip. explains lamellar behavior of graphite. Each atom within a single plane has
A thin film of porous aluminum consists of hexagonal hollow cells with the three nearest neighbors. Network of carbon atoms connected by shortest
following parameters: bonds looks like honeycomb. This two-dimensional and single-atom thick
plane is called "graphene".
The thickness of the sample foil . . . . . . . . . . . . . . . . . . . . . . . . . 500 nm.
Graphite exhibits quite imperfect structure due to plenty of defects and
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5x5 mm.
inclusions. A number of technologies are developed for preparation of perfect

m
Effective area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3x3 mm. graphite samples to take advantage of its unique structure. Pyrolysis of organic
compounds is the most common and effective one.
Typical STM image of HOPG surface.
Pore depth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ~ 400 nm. AFM image of PA01. Some physical properties of graphite are listed below:

p
Corresponding fragment of graphene
Pitch between the pores . . . . . . . . . . . . . . . . . . . . . . . . . . . 100±10 nm. Density: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2,266 g/cm3 structure is superimposed.
Thickness of the partitions between the pores . . . . . . . . . . . . . . ~5 nm. Thermal conductivities:

s
Curvature radius of the spikes formed at the along C axis (0001): . . . . . . . . . . . . . . . . . . . . . . 8±2 Watt/mK

.
intersections of the partition . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2..3 nm. along surface plane: . . . . . . . . . . . . . . . . . 1800±200 Watt/mK
HOPG as a perfect substrate for Scanning Probe Microscopy

APPLICATION NOTES HOPG terminated with graphene layer can serve as an ideal atomically flat

w
surface to be used as a substrate or standard for STM investigation.
PA01 are intended for 3-D visualization of the scanning tip, determination of tip
shape parameters (aspect ratio and curvature radius), and contamination
control. HOPG GRADES

w
In order to not break off the probe tip and spikes of the sample, you should use There are several grades of HOPG. We use notations developed by Advanced
Tapping Mode when scanning. Ceramics Corporation, the leading company in HOPG production.
ZYA Grades: 0.4°±0.1° Mosaic Spread. This is the most perfect HOPG, lateral
grain size is typically up to about 10 mm. Thus, it is the best "cleavable"

w
material exhibiting the smoothest surface that is needed for crucial SPM
measurements.
ZYB Grades: 0.8°±0.2° Mosaic Spread. Slightly less highly ordered. The
lateral grain size is up to 1mm.
ZYH Grades: 3.5°±1.5° Mosaic Spread. It has a grain size in the range of 30-
40 nm.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

44 45
 SPM TEST STRUCTURES

n
PA 01 HOPG TGZ SERIES TGX SERIES TGG01 TGF11 PA 01 HOPG TGZ SERIES TGX SERIES TGG01 TGF11

TGZ Series TGX Series

. c
m
Calibration gratings of the TGZ series are 1-D arrays of rectangular SiO2 steps Silicon calibration grating of the TGX model is a chess board-like array of

o
on a Si wafer. The structure is coated by 10-nm Si3N4 layer to prevent Si from square pillars with sharp undercut edges of <110> orientation.
oxidation. The step height value is calibrated over the whole active area.

.c
Actual step height is shown in the individual specifications. Step height
accuracy is a standard deviation calculated over the whole active area.

1.0 µm

m
10 µm

SEM image of TGZ02 grating Part number Pitch Step height Step length* SEM image of TGX01 grating

p
TGX01 . . . . . . . . . . . . . . . . 3.0 µm 1 µm 1 µm
TGX11 . . . . . . . . . . . . . . . 10.0 µm 2 µm 5 µm

s
Part number Step height* Height accuracy Pitch*
Active area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 x 3 mm array
TGZ01 . . . . . . . . . . . . . . 18..26 nm ± 1 nm 3.0 µm

.
Edge curvature radii . . . . . . . . . . . . . . . . . . . . . . . . . . . . . less than 5 nm
TGZ02 . . . . . . . . . . . . . 94..106 nm ± 1.5 nm 3.0 µm
Pitch accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ±0.25%
TGZ03 . . . . . . . . . . . . 490..520 nm ± 1% 3.0 µm
Chip dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 x 5 x 0.45 mm
TGZ04 . . . . . . . . . 1000 nm ±10% ± 1% 3.0 µm

w
* approximate values; given for information only.
TGZ11 . . . . . . . . . 1350 nm ±10% ± 1% 10.0 µm
Active area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3 x 3 mm (all models) The pitch of TGX01 grating is certified at Danish Institute of Fundamental a
Chip dimensions . . . . . . . . . . . . . . . . . . . . . 5 x 5 x 0.45 mm (all models) Metrology (DFM certificate number N0301). MikroMasch guarantees the pitch

w
uncertainty of TGX01 gratings within ±8 nm range.
Note: the dimensions marked * are given for information only.

APPLICATION NOTES APPLICATION NOTES

w
TGZ calibration gratings are intended for vertical calibration of SPM scanners. Using several calibration gratings with TGX calibration gratings are intended for lateral calibration of SPM scanners.
different nominal step height you can compensate for vertical non-linearity. You can also use the gratings for:
- detection of lateral non-linearity, hysteresis, creep, and
NIST certification and calibration cross-coupling effects;
There are TGZ01, TGZ02, and TGZ03 NIST traceable gratings, which are individually controlled and certified. The height - determination of the tip aspect ratio. b
of the steps is measured with an AFM calibrated using the Step Height Reference Standards. The reference standards The right pictures present the example of lateral nonlinearity correction with
are three samples of ULTRASHARP gratings that were measured and certified by NIST (NIST Reports 821/261141-99 TGX01 grating.
and 821/265166-01). a) 20x20 µm image of TGX01 grating
before the correction of nonlinearity.
Measurement and calibration techniques are based on NIST modified ISO step height determination algorithm (ISO5436). b) 20x20 µm image of TGX01 grating
NIST traceable TGZ01, TGZ02, and TGZ03 gratings are available in TGS01C, TGS02C and TGS03C sets. after the correction of nonlinearity.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

46 47
 SPM TEST STRUCTURES

n
PA 01 HOPG TGZ SERIES TGX SERIES TGG01 TGF11 PA 01 HOPG TGZ SERIES TGX SERIES TGG01 TGF11

TGG01 TGF11
. c
m
The TGG01 series of silicon calibration gratings is a 1-D array of triangular Silicon calibration gratings of the TGF11 model is a 1-D array of trapezoidal

o
steps having precise linear and angular dimensions defined by the steps with a 10 µm pitch and height of approximately 1.75 µm. The lateral
crystallography of Silicon (111) planes and maintained with high accuracy. The faces of the steps have an inclination angle with respect to the horizontal plane

.c
edges of the triangular steps have curvature radii less than 10nm. of precisely arctan sqrt(2)=54°44'. This angle is defined by the
crystallography of silicon (111 plane) and is maintained with high accuracy.

1.8 µm *
1.0 µm

m
10 µm

54° 44' Z
SEM image of TGG01 grating Y SEM image of TGF11 grating

p
10.0 µm
X
Active area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 x 3 mm
Edge curvature radii . . . . . . . . . . . . . . . . . . . . . . . . . . . . less than 10 nm

s
Note: the dimension marked * is given for information only.
Pitch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3.0 µm ± 5 nm

.
Chip dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 x 5 x 0.45 mm Active area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 x 3 mm array
Edge angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54° 44'
Note: the dimension marked * is given for information only.
Pitch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 µm ± 5 nm

w
APPLICATION NOTES Chip dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 x 5 x 0.45 mm
You can use TGG01 grating for 2-D tip
characterization in contact mode, especially for APPLICATION NOTES

w
cantilevers with high force constant. The triangular TGF11 grating is intended for lateral force calibration in atomic force
steps of TGG01 grating are much more robust than microscopy. You can use this grating for calibration of conventional Si probes,
the spikes of PA01. and cantilevers with attached colloidal particle with any radius of curvature up
The TGG01 calibration grating is also applicable for: to 2 m. Direct calibration of the lateral force can be obtained by analyzing the

w
- lateral calibration of SPM scanners; contact response measured on flat and sloped facets. This method has been
described by M. Varenberg, I. Etsion and G Halperin in Rev. Sci. Instrum., 74
- detection of lateral and vertical scanner
(2003) 3362-3367
nonlinearity;
- detection of angular distortions.

6x6 µm image of TGG01 grating

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

48 49
 HOW TO CHOOSE PROBES BY...
Type of experiment Type of experiment

. c n
m
AFM is a powerful technique that can be used for measuring different local materials Topography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
properties such as adhesion, friction, wear, hardness, viscoelasticity as well as
Mechanical properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

o
thermal, electric and magnetic that can be mapped to topography scans. Each type of
experiment impose specific requirements to the choice of the probes and cantilevers.
Electric properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Topography

.c
Mechanical properties Magnetic properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Electric properties 100 nm
Magnetic properties
Magnetic image of Co mono domain
particle obtained in Lift Mode.
Scan size 300 x 300 nm.
Courtesy of Prof. V. Shevyakov, MIET.

m
Resolution Resolution

p
Resolution is one of the primary characteristics in microscopy. It is directly High Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
connected to the tip radius and the step size between scan sampling points. The

s
right choice of the cantilever and imaging mode is also important due to the General Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
limitations imposed by the chosen probe tip.

.
Large Scans . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
High resolution Rtip ~1 nm
General purpose Rtip ~ 10 nm
Large scans Rtip ~ 30 nm 5 nm

w
Tapping Mode height images of liquid
crystalline nanotexture of polypeptide with
mini-dendritic groups.
Scan size 15 x 15 nm.

w
Image courtesy of Dr. S. Magonov (Veeco).

Surface Strength Surface Strength

w
Non-destructive imaging of topography and different physical properties of Soft, fragile and near-liquid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
robust samples may be easily achieved using AFM. The same experiments for
soft, fragile and near-liquid surfaces require specific precautions to be taken, Robust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
which start from the right choice of the cantilever, probe type and imaging mode.

Robust
Soft, fragile and near-liquid
100 nm

Images of liquid crystalline nanotexture of

polypeptide with mini-dendritic groups.
Scan size 200 x 200 nm.
Images are courtesy of Dr. S. Magonov
(Veeco).

50 51
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Topography

c
CONTACT MODE

.
Contact mode is a high-speed AFM technique, which is mainly used to image hard surfaces when the presence of lateral
forces is not expected to modify the morphological features. Conventional Contact mode cantilever for using in air has
a normal spring constant of 0.9 N/m and Aluminum coating on the backside. The choice of resolution is limited to GP
Topography imaging at the nanoscale is one of the main scopes of AFM. Analysis of chemical composition and and LS tips.
structure of various blends, block-copolymers, fibres, crystallites and single molecules is primarily based on

m
visualization of topography data. Different processes like crystallizing/melting, wetting/dewetting, diffusion, LS GP
adsorption, self-assembly and chemical reactions can also be visualized using topography scans.
PART NUMBER DP17/LS/AlBS DP17/GP/AlBS

o
T=28°C T=40°C T=52°C
Though the backside coating is stable in air and some fluids like water and ethanol, it dissolves readily in caustic alkali

.c
solutions to give aluminum hydroxide. Uncoated probes or probes with overall chemically inert Cr-Au coating having
larger tip radius about 50 nm are recommended for using in aggressive liquid media.

No AL Cr-Au
PART NUMBER DP17/GP/NoAL CSC17/Cr-Au

m
NON-CONTACT MODE

p
Topographic tapping mode AFM images (13*13 µm2) show the morphological evolution of a single crystal of PDPS as a function In non-contact mode the tip-sample interaction is minimized. Ultrahigh vacuum conditions are essential in this mode as
of temperature. Concurrently measured electron-diffraction patterns demonstrate the transformation of the pseudotetragonal R small amplitudes of oscillation and small tip-sample distance are used to enhance the sensitivity to short-range tip-
phase of PDPS into the hexagonal columnar mesophase. (* R.I Gearba, et. all., Macromolecules 39, 978-987 (2006))
sample forces. High spring constant of 20..100 N/m is required to avoid tip sticking to surface at small amplitudes.

s
Images are courtesy of Dr. S. Sheiko, UNC-CH. Cantilevers with higher resonant frequency are preferable as they are faster and less noisy, use low-frequency probes

.
only if your system does not support probes with short lever arms.
Basically, there are three different AFM modes used for topography imaging, which are Non-contact mode, Contact mode
PART NUMBER DP15/GP/NoAL
and Tapping mode.

w
TAPPING MODE
Topography imaging Tapping mode is widespread for its ability of non-destructive high-resolution imaging of soft and fragile samples in
ambient conditions. In many cases, one can use moderately stiff cantilevers of the DP14 series (~1 N/m) and General

w
Purpose tips with radius ~10nm, which provide good-quality images for a broad variety of samples.
Contact mode Tapping Mode
The choice of the probe tip is determined by the resolution needed in the experiment.
Non-contact

w
mode LS GP Hi'RES
PART NUMBER DP14/LS/AlBS DP14/GP/AlBS DP14/Hi'RES/AlBS

Tapping mode in liquid requires cantilevers with a relatively low resonant frequency. It is generally recommended to use
uncoated cantilevers in liquids or probes with overall chemically stable Cr-Au coating having tip radius about 50 nm.

No AL Cr-Au
PART NUMBER DP18/GP/NoAL NSC18/Cr-Au
We appreciate your feedback, contact us if you have any questions or comments.
Our technical support may be helpful when choosing the right probe for your experiment by providing more information or test samples.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

52 53
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Material properties

c
LATERAL FORCE MICROSCOPY

.
LFM may require Large Scan tips because they present a larger tip-sample interaction area producing a stronger lateral
deflection of the cantilever. The larger cantilever deflection must be balanced against the lower lateral resolution delivered
by the blunter tip.
In addition to the surface topography, AFM allows probing different mechanical properties of materials such as
adhesion, friction, wear, hardness, viscoelasticity. It is challenging to measure these properties qualitatively. This LS GP

m
type of experiment can be utilized to enhance imaging contrast of topography scans and to map the materials of PART NUMBER DP17/LS/AlBS DP17/GP/AlBS
heterogeneous samples.

o
FORCE MODULATION

.c
To get a high-contrast image in Force Modulation, cantilever and sample should be matched in terms of stiffness.
Height (a) and phase (b) images of
biaxially oriented high density
Different cantilevers can be used to find the best match. For samples with unknown mechanical properties, it is
polyethylene film obtained in the tapping recommended using a probe of the DP18 series which features an intermediate spring constant of ~5 N/m. Between
mode. two cantilevers with the same normal spring constant the thicker and longer one provides higher stability to lateral forces.
Scan size 400 x 400 nm. Cantilever C of Resolution of the scans depends on the type of the probe tip.
the CSC37 series.
Unknown sample

m
Image courtesy of Dr. Sergei Magonov
(Digital Instruments / Veeco Metrology DP17 DP18 DP16
200 nm 200 nm
Group).
LS GP

p
PART NUMBER DP17/LS/AlBS DP17/GP/AlBS
Mapping of mechanical properties can be conducted in Contact and Tapping mode. In Contact mode, one usually DP18/LS/AlBS DP18/GP/AlBS

s
employs two imaging modes: Lateral Force Microscopy (LFM) to probe local friction and Force modulation to map DP16/LS/AlBS DP16/GP/AlBS
material elasticity. Phase imaging is one of the imaging modes of Tapping mode AFM, which is sensitive to local

.
viscoelasticity, adhesion, and friction properties of a sample.
PHASE IMAGING
"Hard" tapping (larger amplitudes and higher set points) is usually required to achieve strong material-sensitive contrast

w
Mechanical in Phase mode. To maximize the material contrast, you should match cantilever and surface in terms of stiffness. For
properties samples with unknown mechanical properties, it is recommended using a probe of the DP14 which features an
mapping intermediate spring constant of ~5 N/m.

w
Contact mode Tapping mode The choice of the probe tip depends on resolution needed.
Unknown sample
LFM Force modulation Phase imaging DP17 DP19 DP14 DP15

w
LS GP Hi'RES
PART NUMBER DP15/LS/AlBS DP15/GP/AlBS DP15/Hi'RES/AlBS
DP14/LS/AlBS DP14/GP/AlBS DP14/Hi'RES/AlBS
DP17/LS/AlBS DP17/GP/AlBS DP17/Hi'RES/AlBS
DP19/Hi'RES/AlBS

If you have any specific question not described here, contact us. Our support team may help you choosing the right probe or offer you a test sample.
Any other comments and suggestions on how to choose AFM probes will be appreciated.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

54 55
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Electric properties

c
CONTACT MODE

.
Contact electric techniques generally require absence of the gap between the tip and the sample and sufficient area for
ohmic or capacitive contact, which is connected to higher tip-sample forces and cantilever spring constants ( up to 50
N/m) than in regular Contact mode. Relatively soft (0.03..0.3 N/m) conducting cantilevers are optimal for high lateral
AFM is capable of mapping different electric properties of materials to topography images. These data can be used resolution Cantilevers with higher spring constant are better for quantitative measurements.
for analysis of the structure and composition of heterogeneous samples as well as for quantitative characterization

m
The measured currents can lie in the range from 100 fA for Tunneling AFM to 1A for SSRM. However, it is generally not
of individual grains or defects on surface.
recommended to exceed the 200-nA current limit for the coated probe tips. Pt coating offers the highest resistance to
wear and electromigration firmness as well as minimum tip radius of 20..25 nm. The coating is applied to tip side only,

o
cantilever backside may be coated by Al for better reflectance of the laser beam.

CSC38 CSC17 CSC37 NSC18 NSC35 NSC16

.c
(left) Surface topography of p-doped PART NUMBER CSC38/Pt/AlBS; CSC17/Pt/AlBS; CSC37/Pt/AlBS; NSC18/Pt/AlBS; NSC35/Pt/AlBS, NSC16/Pt/AlBS
single wall carbon nanotube.
(right) SGM image of the same area.
A number of defects are clearly seen on
the SGM image of the nanotube. TWO-PASS TECHNIQUES
Images are courtesy of Sergei V. Kalinin, Two-pass technique measures topography during the first pass and another electric or magnetic property of the sample

m
Marcus Freitag, AT. Johnson, Dawn A. during the second pass. This minimizes interference between the two kinds of data. The spring constant and resonant
500 nm 500 nm Bonnell, Universiiy of Pennsylvania.
frequency of the cantilever should be chosen to provide stability in Tapping mode and high sensitivity to weaker forces
on the second pass. In most cases NSC18 series is good to start.

p
Electric properties of a sample can be mapped using probes with conducting coatings, when AC or DC bias is applied Among the conducting coatings, Pt coating offers the minimum tip radius of 20..25 nm and the highest resistance to
between the tip and the sample. Contact mode or two-pass operation technique can be used for this purpose. wear. The coating is applied to tip side only, cantilever backside may be coated by Al for better reflectance of the laser

s
beam.
PART NUMBER NSC18/Pt/AlBS

w .
w w Contact our technical support for more details on how to choose or a test sample.
We'd also appreciate your comments to our information.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

56 57
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Magnetic properties

c
Cantilevers with magnetic Co-Cr coating should be used for MFM research. The coating is formed on both sides of
cantilever to prevent the bending from the intrinsic stress and increase the reflection of the laser beam.

.
The spring constant and resonant frequency of cantilever should be chosen to provide stability in Tapping mode as well
as high sensitivity to weak magnetic forces during the second pass.
The ongoing reduction of sizes of all the materials and modules involved in the process of magnetic recording Though the cantilevers are magnetized at the facility, you may need a magnetizer to magnetize them additionally. It is
implies severe requirements to the perfection of the disk surface and magnetic head. Mapping of magnetic forces recommended to keep the probes in a dessicator to prolong the shelf life of the probes, which is limited to approximately

m
to topography AFM scans can be used to characterize the domain structure of the magnetic materials as well as 6 months. Low or absent magnetic signal implies that the coating is oxidized by air humidity.
for visualization of information bits recorded to magnetic media.
Note that the structure of "soft" magnetic samples like Permalloy or garnet films can be significantly changed by the field

o
of the Co-Cr coated probe that has a relatively high coercitivity of 300..400 Oe.
PART NUMBER NSC18/Co-Cr

.c
Topography (left) and magnetic (right)
images of Co mono domain particle
obtained in Lift Mode using cantilever of
the NSC36 series with Co-Cr coating.
Scan size 300 x 300 nm.

m
Image courtesy of Prof. V. Shevyakov,
MIET.
100 nm 100 nm

p
AFM technique for the characterization of both hard disk and read/write head is known as Magnetic Force Microscopy

s
(MFM). This is a two-pass mode, where surface topography is measured in tapping mode during the first pass and

.
magnetic forces are mapped on the second pass with regard of the topography data.

w
Topography (left) and magnetic (right)
images of Co mono domain particle
obtained in Lift Mode using cantilever of

w
the NSC36 series with Co-Cr coating.
Scan size 300 x 300 nm.
Image courtesy of Prof. V. Shevyakov,
MIET.

w
100 nm 100 nm

Our technical support team may help you further choosing the right probe by providing more information or a test sample.
Thank you for your questions and comments.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

58 59
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

High Resolution

c
CONTACT MODE

.
The High Resolution on hard samples can be obtained in Contact mode using regular GP probes mounted on soft
cantilevers.
PART NUMBER DP17/GP/AlBS
Since true atomic resolution has been achieved by Scanning Tunnelling Microscope (STM), various AFM techniques
were developed to visualize atomic structure of non-conducting surfaces. However, up to now this goal remains to

m
be very challenging. A periodic lattice visualized by AFM does not imply that true atomic resolution has been
achieved. For true atomic resolution, lattice defects, such a single missing atom, must be detectable. NON-CONTACT MODE
However, AFM is capable of visualizing various atomic assemblies such as molecules and clusters. Even

o
To improve resolution in Non-contact mode, one needs to enhance the sensitivity to short-range tip-sample forces. For
submolecular resolution can be achieved using AFM. In figure below, the left-hand scan demonstrates the periodic this reason, small amplitudes of oscillation and small tip-sample distance are usually used, which requires the absence
structure of the surface only, while the right-hand scan makes obvious true molecular resolution1, 2) with surface of surface contamination and fine control of the resonant frequency. This is the reason why Non-contact mode is mostly

.c
defects clearly visible. used in ultrahigh vacuum.
High-frequency cantilevers with General Purpose tip can be used to obtain the High Resolution in Non-contact mode.
PART NUMBER DP17/GP/AlBS
Tapping Mode height images of liquid
crystalline nanotexture of polypeptide with
mini-dendritic groups, conventional silicon
TAPPING MODE

m
etched probe NSC14 (left) and HI'RES tip
(right). Dimension 5000 AFM. Image on
In Tapping mode, the High Resolution can be achieved when using Hi'RES-C probe tips with subnanometer radius. The
the left shows periodic lattice only, while
advantages of Hi'RES-C probes are noticeable when scanning areas smaller than 250 nm by 250 nm. On larger images,

p
image on the right exhibits true molecular
resolution. the resolution is similar to those by General Purpose probes with radius about 10 nm.
Image courtesy of Dr. S. Magonov (Veeco Hi'RES-C probe can be used in Tapping mode only. Here, scanning at the so called "light tapping" conditions is preferable

s
Instruments). Sample courtesy of Prof. V. to avoid sample indentation by the sharp tips. This recommendation implies:
5 nm 5 nm
Percec (University of Pennsylvania,

.
Philadelphia, USA). 1. Low resonance amplitude ranging from 0.2 V to 1 V.
2. The set point ratio should be of about 0.9 (i.e. set point is 90% of the free amplitude) or closer to 1.
The lateral resolution in AFM is affected by probe tip radius, the sharpness of the surface features and also the image 3. Scan rate should start at below 1 Hz.
step size between scan sampling points (scan size to quantity of sampling points ratio). Currently, the High Rresolution

w
4. Scan size should start out at 50 nm x 50 nm.
is only possible when scanning topography and mapping mechanical properties on phase images in tapping mode, not 5. Recommended RMS surface roughness is below 1 nm.
for mapping electrical or magnetic properties.
In addition to the main longest spike, Hi'RES-C tips contain additional smaller satellite spikes near the main one; however,
the longest spike determines the resolution. Due to multiple spikes Hi'RES-C tips should be used on flat samples.

w
Corrugated surfaces may interact with the satellite spikes on HI'RES-C probe resulting in doubled or multiple features in
the images with a 50..200-nm pitch.
Also using "hard tapping" (high amplitudes and low set-point ratios) can result in the imaging artifacts. This occurs due

w
to deformation and contamination of the probe. It is also important to prevent damaging of the spike during tip
engagement. Therefore, using HI'RES probes with soft cantilevers is preferable. When imaging hard surfaces (e.g.
silicon substrates), this prevents fracture of the tip spike. When imaging soft surfaces, this helps to avoid sample
damaging by the sharp spike.

DP19 DP18 DP14

PART NUMBER DP19/Hi'RES-C/AlBS DP18/Hi'RES-C/AlBS DP19/Hi'RES-C/AlBS
1)
D. Klinov, S. Magonov, Appl. Phys. Lett. 84, 2697 (2004).
2)
[Link]/hires/scans/
Advice from our technical support or a test sample may also be helpful when choosing the right probe.
Contact us if you have any questions or comments.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

60 61
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

General Purpose

c
General Purpose probes having tips with a radius of about 10-nm provide good-quality images for a broad variety of
samples. The best resolution is achieved when scanning spherical particles that are hard and exhibit weak attraction to

.
the tip. Note that the resolution of AFM images larger than 1µm by 1µm may be more determined by the density of
sampling points ratio than the General Purpose tip radius.
The resolution in AFM depends on the shape of surface features, mechanical properties of the sample, and its General recommendations apply to the cantilever choice. Contact mode needs probes with small spring constant below
interaction with the tip. There are many of AFM applications where the size of the surface features to resolve is in 1N/m, Non-contact mode requires high-frequency probes, while cantilevers with intermediate spring constant and

m
the 10..150-nm range; thus not requiring tips with a radius smaller than 10 nm. Figures below demonstrate clear resonant frequency are optimal for most of samples in Tapping mode.
resolution of large macromolecules along with submolecular features such as branches.
Tapping mode

o
DP17 DP18 DP14 DP16 DP15
PART NUMBER DP17/GP/AlBS DP18/GP/AlBS DP14/GP/AlBS DP16/GP/AlBS DP15/GP/AlBS

.c
Height image of single star-like TAPPING MODE
macromolecules on mica.
GP probes have high aspect ratio of 4:1 (typically). This parameter is further improved in STING probes that feature a
Scan size 300 nm. long spike grown by means of Electron Beam Deposition (EBD). The high aspect ratio makes the STING probes suitable
Image courtesy of S. Sheiko (University of

m
for Tapping mode imaging deep, narrow surface features such as trenches. For obtaining higher lateral resolution on
North Caroline at Chapel Hill). STING, slower scanning rate and higher set point are recommended to reduce the load exerted on tip.
STING probes are more durable and less contaminating than Silicon probes, which also positively affects the resolution.

p
100 nm
GP STING
PART NUMBER DP14/GP/AlBS DP14/STING/AlBS

s
DP15/GP/AlBS DP15/STING/AlBS

.
High resolution may not be attainable when imaging real-time processes such as molecular diffusion, DP16/GP/AlBS DP16/STING/AlBS
crystallization, and wetting. This depends on the characteristic process rates in relation to the scanning rate and DP17/GP/AlBS DP17/STING/AlBS
DP18/GP/AlBS DP18/STING/AlBS
the distance between the scan sampling points. Moreover, sharp probes needed for high resolution imaging require
special care in use, which leads to further reduction of the scanning speed. 10-nm resolution offered by General

w
Purpose tips may be a compromise in this case.

Generap Purpose probes are uncoated silicon tips that can be usually used in Contact, Non-contact or Tapping mode for

w
imaging topography and mapping mechanical properties without significant limitations.
General Purpose probes for measuring electric and magnetic properties are not available yet as these applications
require tips with special coatings, which increase the radius and decrease the resolution.

62
w Your additions and comments to the information above will be appreciated.
Should you have any questions, do not hesitate to contact us for more information or test sample.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

63
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Large Scans

c
CONTACT MODE

.
Large Scans probes offer larger tip-sample contact area resulting in higher loads exerted to sample. However, these
probes can still be used in Contact mode on hard samples.
PART NUMBER DP17/LS/AlBS
There are many AFM applications where the scan size exceeds 10 µm while characteristic size of the surface
features is larger than 30 nm. For these applications, the lateral resolution is of less importance compared to other

m
characteristics of AFM probes such as mechanical durability and ability of contamination . Furthermore, many AFM
applications require blunt tips to allow quantitative measurements of various physical properties of the sample Contact electric techniques may require cantilevers with higher spring constants than in regular Contact mode (up to
(friction, indentation, adhesion). 50 N/m). Relatively soft (0.03..0.3 N/m) conducting cantilevers are optimal for higher lateral resolution. Cantilevers with

o
higher spring constant are better for quantitative measurements. Pt coating offers the highest resistance to wear and
electromigration firmness as well as minimum tip radius of 20..25 nm. The coating is applied to tip side only, cantilever
backside may be coated by Al for better reflectance of the laser beam.

.c
CSC38 CSC17 CSC37 NSC18 NSC35 NSC16
PART NUMBER CSC38/Pt/AlBS; CSC17/Pt/AlBS; CSC37/Pt/AlBS; NSC18/Pt/AlBS; NSC35/Pt/AlBS, NSC16/Pt/AlBS
Height image of polystyrene-polybutadiene-
polystyrene triblock copolymer.
Scan size 1 µm.

m
Image courtesy of S. Magonov (Veeco TAPPING MODE
Instuments). The choice of LS probe tips with a radius of 30-nm radius is reasonable for routine surface investigations of large
surface areas (>10 µm) with surface features larger than 30-nm in size. Here, LS probe provides resolution comparable

p
to GP and HI'RES-C probes. LS probes also allow long-term experiments due to the enhanced mechanical durability.
500 nm PART NUMBER DP14/LS/AlBS

. s
For imaging in liquids, one can choose probes with chemically stable overall Cr-Au coating. The tip radius with the
T=110°C T=115°C
coating is about 50 nm.

w
PART NUMBER NSC18/Cr-Au

To image electric properties of materials using two-pass techniques, one needs probes with conducting coatings. The

w
coatings may increase the probe tip radius up to 20..50 nm. Pt coating giving a tip radius of 20..25 nm is the best choice
in terms of both resolution and durability. The coating is applied to tip side only, cantilever backside is not coated. For
better reflectance, one can choose probes with overall Ti-Pt coating.
PART NUMBER NSC18/Pt/AlBS

w
2 µm 2 µm

Height images of dry single crystals of polyethylene measured at 110°C temperature and after 1.5 The probe tip radius with Co-Cr magnetic coating is 90 nm. As the size of magnetic domains is usually more than
hr annealing at 115°C. Height histograms corresponding to AFM show the evolution of lamellar 50 nm, this is usually enough for MFM.
thickness after annealing at different temperatures. (D.A. Ivanov, et all, Macromolecules, 35, 9813-
PART NUMBER NSC18/Co-Cr
9818 (2002).)
Image courtesy of S. Sheiko (UNC-CH).

You can get more information or test sample from our technical support team.
Just contact us with your questions, comments, and suggestions.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

64 65
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Soft, fragile and near-liquid

c
TAPPING MODE

.
Hi'RES-C probes (Rtip<1nm) mounted on soft cantilever with a spring constant of 5 N/m and lower are recommended
for scanning delicate samples in Tapping mode. "Light" tapping conditions including small free cantilever amplitudes
(0.1..0.2V) and high setpoint ratios (0.8..0.95) provide stable imaging. Under light tapping conditions, Hi'RES-C probes
Since its very discovery, AFM has held the great promise as a technique of choice for non-destructive surface do not break and remain clean during long-term measurements.
measurements. To achieve this goal, one need to decrease to a minimum the tip-sample interaction force. The

m
strong interaction force can bring about deformation and/or destruction of the surface of soft, fragile, liquid and However, extra attention should be paid to engagement of Hi'RES probe. Scan rate should start at below 1 Hz. Scan size
weakly adhering samples. should start out at 50nm x 50nm.
Note that there can be additional smaller (satellite) spikes near the main one. Therefore, Hi'RES-C probes can be used

o
on flat samples only with RMS surface roughness is below 1 nm. Corrugates surfaces may interact with satellite spikes
on HI'RES-C probe resulting in double or multiple features.

.c
PART NUMBER DP19/Hi'RES-C/AlBS

NON-CONTACT MODE
Non-destructive surface imaging is also attainable in non-contact mode under ultra high vacuum conditions using

m
regular GP probes. Cantilevers of DP15 series having high spring constant of 20..100 N/m and high resonant frequency
over 300 kHz are usually used in this mode.

p
PART NUMBER DP15/GP/AlBS
100 nm 100 nm

s
Conventional silicon probe NSC14 strongly When imaging with DP14/Hi'RES probe it was
deforms the surface; RMS roughness value possible to adjust imaging conditions to

.
reduces to 0.18 nm. visualize the not-deformed nanostructure of
the sample. RMS roughness 0.51 nm.

Images of liquid crystalline nanotexture of polypeptide with mini-dendritic groups. Images are
obtained in tapping mode on Veeco Dimension 5000 AFM. Images are courtesy of Dr. S. Magonov

w
(Veeco). Sample courtesy of Prof. V. Percec, (University of Pennsylvania, Phyladelphia, USA).

w
Soft and fragile samples can be imaged in Non-contact and Tapping modes only. Contact mode AFM is characterized by
the presence of uncontrollable shear forces able to modify the morphological features.
To avoid sample deformation due to mechanical contact with an AFM tip in Tapping mode, one needs to decrease to a

w
minimum the tip-sample interaction force by using sharp tips, soft cantilevers, smaller amplitudes, and higher set-point
ratios. High resolution images of soft samples can be obtained by regular General Purpose tips; however, a better
performance was achieved using Hi'RES probes.

Thank you for any feedback.

If you have further questions on how to chose probes, contact us for a test sample or advice.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

66 67
 HOW TO CHOOSE PROBES BY...

n
TYPE OF EXPERIMENT RESOLUTION SURFACE STRENGTH

Robust

c
CONTACT MODE

.
Long cantilevers having relatively low spring constant below are usually used in Contact mode. The choice between GP
or LS tip depends on resolution needed.

When the sample is relatively robust, i.e. hard and strongly adhering, this allows imaging without tip-induced LS GP
deformation in a broad range of tip-sample interaction force. One may choose using both softer cantilevers to PART NUMBER DP17/LS/AlBS DP17/GP/AlBS

m
obtain true surface topography and stiff cantilevers to ensure high topographic and phase contrast.
When in liquid, one can use cantilevers without backside coating or probes with overall chemically inert Cr-Au coating
having tip radius about 50 nm.

o
DP17/GP/No Al CSC17/Cr-Au

.c
PART NUMBER DP17/GP/No Al CSC17/Cr-Au
DP17/GP/AlBS DP17/LS/AlBS

SEBS60 block-copolymer sample with

a cryomicrotomed surface was imaged
by Tapping Mode AFM under light (top)
and hard (bottom) tapping conditions. TAPPING MODE

m
The light tapping provide true
The tip-sample interaction force depends on the adhesive properties of material, the sharpness of the probe tip and the
topography (left), while hard tapping
allows better material contrast in phase scanning mode. If the experimental conditions permit, one should avoid using stiff cantilevers that may cause severe
deformation and even damaging of the sample. Softer cantilevers usually show better and more reproducible results.

p
images (right).
Image courtesy of Dr. Sergei Magonov However, in some experiments, e.g. very hard and/or sticky samples, stiff cantilevers are required. For unknown physical
(Digital Instruments / Veeco Metrology properties of the domains it is recommended using a probe of the DP14 series that features an intermediate spring

s
Group). constant of ~5 N/m.

.
Sharper tips provide higher lateral resolution. This advantage should be balanced against the scanning speed.
DP17 DP14 DP15

LS GP Hi'RES

w
PART NUMBER DP14/LS/AlBS DP14/GP/AlBS DP14/Hi'RES/AlBS
DP15/LS/AlBS DP15/GP/AlBS DP15/Hi'RES/AlBS
DP17/LS/AlBS DP17/GP/AlBS DP17/Hi'RES/AlBS

w
The harder the surface, the wider the choice of AFM techniques can be used for it investigation. Contact mode technique
For imaging in liquids, the choice of the probe is usually limited to those having resonant frequency of 50-70 kHz in air.
is still the speediest and roughest among the others.
It is generally recommended to use uncoated cantilevers in liquids or probes with overall chemically stable Cr-Au coating
When in Tapping mode, "hard" tapping conditions are usually used to obtain good material sensitive contrast in phase having tip radius about 50 nm.
imaging, while "light" tapping keep maximum of topography data (see figure above).

w
DP18/GP/No AL NSC18/Cr-Au
"Light" tapping conditions imply lower free amplitudes and higher setpoint values.
PART NUMBER DP18/GP/No AL NSC18/Cr-Au

NON-CONTACT MODE
Cantilevers having high spring constant of 20..100 N/m and highest possible resonant frequency are usually used in non-
contact mode.
Thank you for choosing our probes. If you have more questions, contact our technical support team that can give you more information or provide you with a PART NUMBER DP15/GP/AlBS
test sample. And we'd appreciate any your comments and suggestions on how to choose probes.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

68 69
 INDEX OF PRODUCTS

. c n
m
MikroMasch silicon cantilevers are

o
supplied in quantities of 5, 15 and
50 chips per package.

m.c
p
Index of Cantilevers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

. s
Index of Gratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85

ww
70
w 71
72
INDEX OF PRODUCTS

Index of SPM probes

Cantilever Part Tip Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
Number Radii (Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz

w
Side) Side) (typical) (range) (typical) (range)

HIGH RESOLUTION
PART NUMBER 14, 15, 16, 17, 18, 19 series
DP * / Hi’RES-C /AlBS/ * 5, 15 quantity

w
Hi’RES-C probes

DP14/Hi’RES-C/AlBS/5 1 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/dp14/hires/

DP14/Hi’RES-C/AlBS/15
DP15/Hi’RES-C/AlBS/5 1 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/dp15/hires/
DP15/Hi’RES-C/AlBS/15
DP16/Hi’RES-C/AlBS/5 1 nm no Al 230 40 7.0 45 25-60 170 150-190 [Link]/dp16/hires/
DP16/Hi’RES-C/AlBS/15

w
DP17/Hi’RES-C/AlBS/5 1 nm no Al 460 50 2.0 0.15 0.05-0.3 12 8.5-15 [Link]/dp17/hires/
DP17/Hi’RES-C/AlBS/15
DP18/Hi’RES-C/AlBS/5 1 nm no Al 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/dp18/hires/

.
DP18/Hi’RES-C/AlBS/15
DP19/Hi’RES-C/AlBS/5 1 nm no Al 125 35 1.0 0.63 0.17-1.7 80 52.0-113.0 [Link]/dp18/hires/
DP19/Hi’RES-C/AlBS/15

s p
14, 15, 16 series
PART NUMBER
5, 15 quantity
m
DP * / Hi’RES-W /AlBS/ *
Hi’RES-W probes

DP14/Hi’RES-W/AlBS/5 1 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/dp14/hires-w/

DP14/Hi’RES-W/AlBS/15
DP15/Hi’RES-W/AlBS/5 1 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/dp15/hires-w/
DP15/Hi’RES-W/AlBS/15
DP16/Hi’RES-W/AlBS/5 1 nm no Al 230 40 7.0 45 25-60 170 150-190 [Link]/dp16/hires-w/
DP16/Hi’RES-W/AlBS/5
.c

GENERAL PURPOSE
PART NUMBER 14, 15, 16, 17, 18 series
15, 50 quantity
o

DP * / GP / * / *
AlBS, no Al coating
GP probes

DP14/GP/AlBS/15 10 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/dp14/gp/albs/

DP14/GP/AlBS/50
DP14/GP/no Al/15 10 nm no no 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/dp14/gp/noal/
DP14/GP/no Al/50
DP15/GP/AlBS/15 10 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/dp16/gp/albs/
DP15/GP/AlBS/50
m

DP15/GP/no Al/15 10 nm no no 125 35 4.0 46 20-75 325 265-400 [Link]/dp16/gp/noal/

DP15/GP/no Al/50
DP16/GP/AlBS/15 10 nm no Al 230 35 7.0 45 25-60 170 150-190 [Link]/dp16/gp/albs/
.

DP16/GP/AlBS/50
DP16/GP/no Al/15 10 nm no no 230 35 7.0 45 25-60 170 150-190 [Link]/dp16/gp/noal/
DP16/GP/no Al/50
DP17/GP/AlBS/15 10 nm no Al 450 35 1.0 0.9 0.3-2.4 20 16-24 [Link]/dp17/gp/albs/
DP17/GP/AlBS/50
c

DP17/GP/no Al/15 10 nm no no 450 35 1.0 0.9 0.3-2.4 20 16-24 [Link]/dp17/gp/noal/

DP17/GP/no Al/50
DP18/GP/AlBS/15 10 nm no Al 230 35 4.0 3.5 2.0-5.5 75 60-90 [Link]/dp18/gp/albs/
DP18/GP/AlBS/50
DP18/GP/no Al/15 10 nm no no 230 35 4.0 3.5 2.0-5.5 75 60-90 [Link]/dp18/gp/noal/
DP18/GP/no Al/50
n

73
74
INDEX OF PRODUCTS

Cantilever Part Tip Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
Number Radii (Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz
Side) Side) (typical) (range) (typical) (range)

PART NUMBER 14, 15, 16, 17, 18, 19 series

DP * / STING / AlBS / * 5, 15 quantity
STING probes

w
DP14/STING/AlBS/5 2..4 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/dp14/sting/
DP15/STING/AlBS/5 2..4 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/dp16/sting/
DP16/STING/AlBS/5 2..4 nm no Al 230 40 7.0 45 25-60 170 150-190 [Link]/dp16/sting/
DP17/STING/AlBS/5 2..4 nm no Al 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/dp17/sting/
DP18/STING/AlBS/5 2..4 nm no Al 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/dp18/sting/
DP19/STING/AlBS/5 2..4 nm no Al 125 35 1.0 0.63 0.17-1.7 80 52.0-113.0 [Link]/dp18/sting/

w
PART NUMBER 14, 15, 16, 17, 18, 19 series
NSC/CSC * / * / * 15, 50 quantity
AlBS, Cr-AuBS, no Al coating
NSC/CSC probes (one lever)

NSC14/AlBS/15 10 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/al-bs/

NSC14/AlBS/50

w
NSC14/no Al/15 10 nm no no 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/noal/
NSC14/no Al/50
NSC14/Cr-AuBS/15 10 nm no Cr-Au 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/cr-au/

.
NSC14/Cr-AuBS/50
NSC15/AlBS/15 10 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/al-bs/
NSC15/AlBS/50
NSC15/no Al/15 10 nm no no 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/noal/
NSC15/no Al/50

s
NSC15/Cr-AuBS/15 10 nm no Cr-Au 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/cr-au-bs/
NSC15/Cr-AuBS/50
NSC16/AlBS/15 10 nm no Al 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/al-bs/
NSC16/AlBS/50
p
NSC16/no Al/15 10 nm no no 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/noal/
NSC16/no Al/50
NSC16/Cr-AuBS/15 10 nm no Cr-Au 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/cr-au-bs/
m
NSC16/Cr-AuBS/50
CSC17/AlBS/15 10 nm no Al 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/al-bs/
CSC17/AlBS/50
CSC17/no Al/15 10 nm no no 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/noAl/
CSC17/no Al/50
CSC17/Cr-AuBS/15 10 nm no Cr-Au 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/noAl/
CSC17/Cr-AuBS/50
NSC18/AlBS/15 10 nm no Al 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/al-bs/
.c

NSC18/AlBS/50
NSC18/no Al/15 10 nm no no 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/noal/
NSC18/no Al/50
NSC18/Cr-AuBS/15 10 nm no Cr-Au 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/cr-au-bs/
NSC18/Cr-AuBS/50
NSC19/AlBS/15 10 nm no Al 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/al-bs/
o

NSC19/AlBS/50
NSC19/no Al/15 10 nm no no 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/noal/
NSC19/no Al/50
NSC19/Cr-AuBS/15 10 nm no Cr-Au 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/cr-au-bs/
NSC19/Cr-AuBS/50

PART NUMBER 35, 36 series

NSC * / * / * 15, 50 quantity
m

AlBS, Cr-AuBS, no Al coating

NSC probes (three-lever)
.

NSC35/AlBS/15 (A,B,C) 10 nm no Al 110; 90; 35 2.0 7.5; 14; 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/al-bs/
NSC35/AlBS/50 (A,B,C) 130 4.5 2.5-8.5 120-190
NSC35/no Al/15 (A,B,C) 10 nm no no 110; 90; 35 2.0 7.5; 14; 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/noal/
NSC35/no Al/50 (A,B,C) 130 4.5 2.5-8.5 120-190
NSC35/Cr-AuBS/15 (A,B,C) 10 nm no Cr-Au 110; 90; 35 2.0 7.5; 14; 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/cr-au-bs/
c

NSC35/Cr-AuBS/50 (A,B,C) 130 4.5 2.5-8.5 120-190

NSC36/AlBS/15 (A,B,C) 10 nm no Al 110, 90, 35 1.0 0.95; 1.75; 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/al-bs/
NSC36/AlBS/50 (A,B,C) 130 0.60 0.15-1.5 50-105
NSC36/no Al/15 (A,B,C) 10 nm no no 110, 90, 35 1.0 0.95; 1.75; 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/noAl/
NSC36/no Al/50 (A,B,C) 130 0.60 0.15-1.5 50-105
NSC36/Cr-AuBS/15 (A,B,C) 10 nm no Cr-Au 110, 90, 35 1.0 0.95; 1.75; 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/cr-au-bs/
n

NSC36/Cr-AuBS/50 (A,B,C) 130 0.60 0.15-1.5 50-105

75
76
INDEX OF PRODUCTS
Cantilever Part Tip Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
Number Radii (Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz
Side) Side) (typical) (range) (typical) (range)

PART NUMBER 37, 38 series

CSC * / * / * 15, 50 quantity
AlBS, Cr-AuBS, no Al coating

w
CSC probes (three-lever)

CSC37/AlBS/15 (A,B,C) 10 nm no Al 300; 350; 35 2.0 0.35; 0.3; 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/al-bs/
CSC37/AlBS/50 (A,B,C) 250 0.65 0.35-1.2 33-49
CSC37/no Al/15 (A,B,C) 10 nm no no 300; 350; 35 2.0 0.35; 0.3; 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/noAl/
CSC37/no Al/50 (A,B,C) 250 0.65 0.35-1.2 33-49
CSC37/Cr-AuBS/15 (A,B,C) 10 nm no Cr-Au 300; 350; 35 2.0 0.35; 0.3; 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/cr-au-bs/
CSC37/Cr-AuBS/15 (A,B,C) 250 0.65 0.35-1.2 33-49
CSC38/AlBS/15 (A,B,C) 10 nm no Al 300; 350; 35 1.0 0.05; 0.03; 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/al-bs/

w
CSC38/AlBS/50 (A,B,C) 250 0.08 0.02-0.20 14-28
CSC38/no Al/15 (A,B,C) 10 nm no no 300; 350; 35 1.0 0.05; 0.03; 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/noAl/
CSC38/no Al/50 (A,B,C) 250 0.08 0.02-0.20 14-28
CSC38/Cr-AuBS/15 (A,B,C) 10 nm no Cr-Au 300; 350; 35 1.0 0.05; 0.03; 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/cr-au-bs/
CSC38/Cr-AuBS/15 (A,B,C) 250 0.08 0.02-0.20 14-28

PART NUMBER 11, 21 series

w
NSC/CSC * / * / * 15, 50 quantity
AlBS, Cr-AuBS, no Al coating

.
NSC/CSC probes (triangular)

NSC11/AlBS/15 (A,B) 10 nm no Al 200; 90 40; 60 2.0 3.0; 48 1.5-5.0; 23-91 60; 330 45-75; 260-420 [Link]/nsc11/al-bs/
NSC11/AlBS/50 (A,B)
NSC11/no Al/15 (A,B) 10 nm no no 200; 90 40; 60 2.0 3.0; 48 1.5-5.0; 23-91 60; 330 45-75; 260-420 [Link]/nsc11/noal/NSC11/no
NSC11/noAl/50 (A,B)

s
NSC21/AlBS/15 (A,B) 10 nm no Al 290, 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/nsc21/al-bs/
NSC21/AlBS/50 (A,B)
NSC21/no Al/15 (A,B) 10 nm no no 290, 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/nsc21/noal/
NSC21/no Al/50 (A,B)
p
CSC11/AlBS/15 (A,B) 10 nm no Al 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/al-bs/
CSC11/AlBS/50 (A,B)
CSC11/no Al/15 (A,B) 10 nm no no 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/noal/
m
CSC11/no Al/50 (A,B)
CSC21/AlBS/15 (A,B) 10 nm no Al 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/al-bs/
CSC21/AlBS/50 (A,B)
CSC21/no Al/15 (A,B) 10 nm no no 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/noal/
CSC21/no Al/50 (A,B)

LARGE SCANS
.c

PART NUMBER 14, 15, 16, 17, 18, 19 series

DP * / LS / AlBS / * 15, 50 quantity
LS probes

DP14/LS/AlBS/15 30 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/dp14/ls/

DP14/LS/AlBS/50
o

DP15/LS/AlBS/15 30 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/dp16/ls/

DP15/LS/AlBS/50
DP16/LS/AlBS/15 30 nm no Al 230 35 7.0 45 25-60 170 150-190 [Link]/dp16/ls/
DP16/LS/AlBS/50
DP17/LS/AlBS/15 30 nm no Al 460 35 2.0 0.15 0.05-0.3 12 8.5-15 [Link]/dp17/ls/
DP17/LS/AlBS/50
DP18/LS/AlBS/15 30 nm no Al 230 35 4.0 3.5 2.0-5.5 75 60-90 [Link]/dp18/ls/
DP18/LS/AlBS/50
DP19/LS/AlBS/15 30 nm no Al 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/al-bs/
m

DP19/LS/AlBS/50
.

PART NUMBER 14, 15, 16, 17, 18, 19 series

NSC/CSC * / Si3N4 / * / * 15, 50 quantity
AlBS, no Al coating
NSC/CSC probes with Si3N4 coating (one-lever)
c

NSC14/Si3N4/AlBS/15 30 nm no Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/si3n4/al-bs/

NSC14/Si3N4/AlBS/50
NSC14/Si3N4/no Al/15 30 nm no no 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/si3n4/noal/
NSC14/Si3N4/no Al/50
NSC15/Si3N4/AlBS/15 30 nm no Al 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/si3n4/al-bs/
NSC15/Si3N4/AlBS/50
n

77
78
INDEX OF PRODUCTS
Cantilever Part Tip Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
Number Radii (Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz
Side) Side) (typical) (range) (typical) (range)

NSC15/Si3N4/no Al/15 30 nm no no 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/si3n4/noal/

NSC15/Si3N4/no Al/50
NSC16/Si3N4/AlBS/15 30 nm no Al 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/si3n4/al-bs/
NSC16/Si3N4/AlBS/50
NSC16/Si3N4/no Al/15 30 nm no no 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/si3n4/noal/
NSC16/Si3N4/no Al/50

w
CSC17/Si3N4/AlBS/15 30 nm no Al 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/si3n4/al-bs/
CSC17/Si3N4/AlBS/50
CSC17/Si3N4/no Al/15 30 nm no no 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/si3n4/noAl/
CSC17/Si3N4/no Al/50
NSC18/Si3N4/AlBS/15 30 nm no Al 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/si3n4/al-bs/
NSC18/Si3N4/AlBS/50
NSC18/Si3N4/no Al/15 30 nm no no 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/si3n4/noal/
NSC18/Si3N4/no Al/50

w
NSC19/Si3N4/AlBS/15 30 nm no Al 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/si3n4/al-bs/
NSC19/Si3N4/AlBS/50
NSC19/Si3N4/no Al/15 30 nm no no 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/si3n4/noal/
NSC19/Si3N4/no Al/50

PART NUMBER 35, 36 series

15, 50 quantity

w
NSC * / Si3N4 / * / *
AlBS, no Al coating
NSC probes with Si3N4 coating (three-lever)

.
NSC35/Si3N4/AlBS/15 (A,B,C) 30 nm Si3N4 Si3N4+Al 110; 90; 130 35 2.0 7.5; 14; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/si3n4/
NSC35/Si3N4/AlBS/50 (A,B,C) 2.5-8.5 120-190
NSC35/Si3N4/no Al/15 (A,B,C) 30 nm Si3N4 Si3N4 110; 90; 130 35 2.0 7.5; 14; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/si3n4/noal/
NSC35/Si3N4/no Al/50 (A,B,C) 2.5-8.5 120-190
NSC36/Si3N4/AlBS/15 (A,B,C) 30 nm no Al 110, 90, 35 1.0 0.95; 1.75; 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/al-bs/

s
NSC36/Si3N4/AlBS/50 (A,B,C) 130 0.60 0.15-1.5 50-105
NSC36/Si3N4/no Al/15 (A,B,C) 30 nm no no 110, 90, 35 1.0 0.95; 1.75; 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/noAl/
NSC36/Si3N4/no Al/50 (A,B,C) 130 0.60 0.15-1.5 50-105
p
PART NUMBER 37, 38 series
15, 50 quantity
m
CSC * / Si3N4 / * / *
AlBS, no Al coating
CSC probes with Si3N4 coating (three-lever)

CSC37/Si3N4/AlBS/15 (A,B,C) 30 nm Si3N4 Si3N4+Al300; 350; 250 35 2.0 0.35; 0.3; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/si3n4/
CSC37/Si3N4/AlBS/50 (A,B,C) 0.35-1.2 33-49
CSC37/Si3N4/no Al/15 (A,B,C) 30 nm Si3N4 Si3N4 300; 350; 250 35 2.0 0.35; 0.3; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/si3n4/noal/
CSC37/Si3N4/no Al/50 (A,B,C) 0.35-1.2 33-49
CSC38/Si3N4/AlBS/15 (A,B,C) 30 nm no Al 300; 350; 35 1.0 0.05; 0.03; 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/al-bs/
.c

CSC38/Si3N4/AlBS/50 (A,B,C) 250 0.08 0.02-0.20 14-28

CSC38/Si3N4/AlBS/15 (A,B,C) 30 nm no no 300; 350; 35 1.0 0.05; 0.03; 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/noAl/
CSC38/Si3N4/no Al/50 (A,B,C) 250 0.08 0.02-0.20 14-28

PART NUMBER 37, 38 series

o

NSC/CSC * / Si3N4 / * / * 15, 50 quantity

AlBS, no Al coating
NSC/CSC probes with Si3N4 coating (triangular)

NSC11/Si3N4/AlBS/15 (A,B) 30 nm Si3N4 Si3N4+Al 200; 90 40, 60 2.0 3.0; 48 1.5-5.0; 23-91 60; 330 45-75; 260-420 [Link]/nsc11/si3n4/
NSC11/Si3N4/AlBS/50 (A,B)
NSC11/Si3N4/noAl/15 (A,B) 30 nm Si3N4 Si3N4 200; 90 40, 60 2.0 3.0; 48 1.5-5.0; 23-91 60; 330 45-75; 260-420 [Link]/nsc11/si3n4/noal/
NSC11/Si3N4/noAl/50 (A,B)
NSC21/Si3N4/AlBS/15 (A,B) 30 nm Si3N4 Si3N4+Al 290; 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/csc21/si3n4/
m

NSC21/Si3N4/AlBS/50 (A,B)
NSC21/Si3N4/noAl/15 (A,B) 30 nm Si3N4 Si3N4 290; 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/csc21/si3n4/noal/
NSC21/Si3N4/noAl/50 (A,B)
.

CSC11/Si3N4/AlBS/15 (A,B) 30 nm Si3N4 Si3N4+Al 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/si3n4/
CSC11/Si3N4/AlBS/50 (A,B)
CSC11/Si3N4/no Al/15 (A,B) 30 nm Si3N4 Si3N4 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/si3n4/noal/
CSC11/Si3N4/no Al/50 (A,B)
CSC21/Si3N4/AlBS/15 (A,B) 30 nm Si3N4 Si3N4+Al 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/si3n4/
c

CSC21/Si3N4/AlBS/50 (A,B)
CSC21/Si3N4/noAl/15 (A,B) 30 nm Si3N4 Si3N4 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/si3n4/noal/
CSC21/Si3N4/no Al/50 (A,B)
n

79
80
INDEX OF PRODUCTS
Cantilever Part Tip Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
Number Radii (Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz
Side) Side) (typical) (range) (typical) (range)

PART NUMBER 14, 15, 16, 17, 18, 19 series

NSC/CSC * / * / * 15, 50 quantity
Pt/AlBS, Pt/no Al, Ti-Pt, Cr-Au coating
Conducting NSC/CSC probes (one-lever)

w
NSC14/Pt/AlBS/15 20-25 nm Pt Al 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/pt/albs/
NSC14/Pt/AlBS/50
NSC14/Pt/no Al/15 20-25 nm Pt no 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/pt/
NSC14/Pt/no Al/50
NSC14/Ti-Pt/15 40 nm Ti-Pt Ti-Pt 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/ti-pt/
NSC14/Ti-Pt/50
NSC14/Cr-Au/15 50 nm Cr-Au Cr-Au 125 35 2.0 5.7 1.8-12.5 160 110-220 [Link]/nsc14/cr-au/
NSC14/Cr-Au/50

w
NSC15/Pt/AlBS/15 20-25 nm Pt Al 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/pt/albs/
NSC15/Pt/AlBS/50
NSC15/Pt/no Al/15 20-25 nm Pt no 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/pt/
NSC15/Pt/no Al/50
NSC15/Ti-Pt/15 40 nm Ti-Pt Ti-Pt 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/ti-pt/
NSC15/Ti-Pt/50
NSC15/Cr-Au/15 50 nm Cr-Au Cr-Au 125 35 4.0 46 20-75 325 265-400 [Link]/nsc15/cr-au/
NSC15/Cr-Au/50

w
NSC16/Pt/AlBS/15 20-25 nm Pt Al 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/pt/albs/
NSC16/Pt/AlBS/50

.
NSC16/Pt/no Al/15 20-25 nm Pt no 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/pt/
NSC16/Pt/no Al/50
NSC16/Ti-Pt/15 40 nm Ti-Pt Ti-Pt 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/ti-pt/
NSC16/Ti-Pt/50
NSC16/Cr-Au/15 50 nm Cr-Au Cr-Au 230 40 7.0 45 25-60 170 150-190 [Link]/nsc16/cr-au/
NSC16/Cr-Au/50

s
CSC17/Pt/AlBS/15 20-25 nm Pt Al 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/pt/albs/
CSC17/Pt/AlBS/50
CSC17/Pt/no Al/15 20-25 nm Pt no 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/pt/
CSC17/Pt/no Al/50 p
CSC17/Ti-Pt/15 40 nm Ti-Pt Ti-Pt 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/ti-pt/
CSC17/Ti-Pt/50
CSC17/Cr-Au/15 50 nm Cr-Au Cr-Au 460 50 2.0 0.15 0.05-0.30 12 8.5-15 [Link]/csc17/cr-au/
m
CSC17/Cr-Au/50
NSC18/Pt/AlBS/15 20-25 nm Pt Al 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/pt/albs/
NSC18/Pt/AlBS/50
NSC18/Pt/no Al/15 20-25 nm Pt no 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/pt/
NSC18/Pt/no Al/50
NSC18/Ti-Pt/15 40 nm Ti-Pt Ti-Pt 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/ti-pt/
NSC18/Ti-Pt/50
NSC18/Cr-Au/15 50 nm Cr-Au Cr-Au 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/cr-au/
.c

NSC18/Cr-Au/50
NSC19/Pt/AlBS/15 20-25 nm Pt Al 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/pt/albs/
NSC19/Pt/AlBS/50
NSC19/Pt/no Al/15 20-25 nm Pt no 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/pt/
NSC19/Pt/no Al/50
NSC19/Ti-Pt/15 40 nm Ti-Pt Ti-Pt 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/ti-pt/
o

NSC19/Ti-Pt/50
NSC19/Cr-Au/15 50 nm Cr-Au Cr-Au 125 35 1.0 0.63 0.17-1.7 80 52-113 [Link]/nsc19/cr-au/
NSC19/Cr-Au/50

PART NUMBER 35, 36 series

NSC * / * / * 15, 50 quantity
Pt/AlBS, Ti-Pt, Cr-Au coating
Conducting NSC probes (three-lever)
m

NSC35/Pt/AlBS/15 (A,B,C) 20-25 nm Pt Al 110; 90; 130 35 2.0 7.5; 14; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/pt/albs/
NSC35/Pt/AlBS/50 (A,B,C) 2.5-8.5 120-190
.

NSC35/Pt/no Al/15 (A,B,C) 20-25 nm Pt no 110; 90; 130 35 2.0 7.5; 14; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/pt/
NSC35/Pt/no Al/50 (A,B,C) 2.5-8.5 120-190
NSC35/Ti-Pt/15 (A,B,C) 40 nm Ti-Pt Ti-Pt 110; 90; 130 35 2.0 7.5; 14; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/ti-pt/
NSC35/Ti-Pt/50 (A,B,C) 2.5-8.5 120-190
NSC35/Cr-Au/15 (A,B,C) 50 nm Cr-Au Cr-Au 110; 90; 130 35 2.0 7.5; 14; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc35/cr-au/
NSC35/Cr-Au/50 (A,B,C) 2.5-8.5 120-190
c

NSC36/Pt/AlBS/15 (A,B,C) 20-25 nm Pt Al 110, 90, 130 35 1.0 0.95; 1.75; 0.60 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/pt/albs/
NSC36/Pt/AlBS/50 (A,B,C) 0.15-1.5 50-105
NSC36/Pt/no Al/15 (A,B,C) 20-25 nm Pt no 110, 90, 130 35 1.0 0.95; 1.75; 0.60 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/pt/
NSC36/Pt/no Al/50 (A,B,C) 0.15-1.5 50-105
NSC36/Ti-Pt/15 (A,B,C) 40 nm Ti-Pt Ti-Pt 110, 90, 130 35 1.0 0.95; 1.75; 0.60 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/ti-pt/
NSC36Ti-Pt/50 (A,B,C) 0.15-1.5 50-105
n

81
82
INDEX OF PRODUCTS
Cantilever Part Tip Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
Number Radii (Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz
Side) Side) (typical) (range) (typical) (range)

NSC36/Cr-Au/15 (A,B,C) 50 nm Cr-Au Cr-Au 110, 90, 130 35 1.0 0.95; 1.75; 0.60 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/nsc36/cr-au/
NSC36/Cr-Au/50 (A,B,C) 0.15-1.5 50-105

PART NUMBER 37, 38 series

CSC * / * / * 15, 50 quantity

w
Pt/AlBS, Pt/AlBS, Ti-Pt, Cr-Au coating
Conducting CSC probes (three-lever)

CSC38/Pt/AlBS/15 (A,B,C) 20-25 nm Pt Al 300; 350; 250 35 1.0 0.05; 0.03; 0.08 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/pt/albs/
CSC38/Pt/AlBS/50 (A,B,C) 0.02-0.20 14-28
CSC38/Pt/no Al/15 (A,B,C) 20-25 nm Pt no 300; 350; 250 35 1.0 0.05; 0.03; 0.08 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/pt/
CSC38/Pt/no Al/50 (A,B,C) 0.02-0.20 14-28

w
CSC38/Ti-Pt/15 (A,B,C) 40 nm Ti-Pt Ti-Pt 300; 350; 250 35 1.0 0.05; 0.03; 0.08 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/ti-pt/
CSC38/Ti-Pt/50 (A,B,C) 0.02-0.20 14-28
CSC38/Cr-Au/15 (A,B,C) 50 nm Cr-Au Cr-Au 300; 350; 250 35 1.0 0.05; 0.03; 0.08 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14; [Link]/csc38/cr-au/
CSC38/Cr-Au/50 (A,B,C) 0.02-0.20 14-20
CSC37/Pt/AlBS/15 (A,B,C) 20-25 nm Pt Al 300; 350; 250 35 2.0 0.35; 0.3; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/pt/albs/
CSC37/Pt/AlBS/50 (A,B,C) 0.35-1.2 33-49
CSC37/Pt/no Al/15 (A,B,C) 20-25 nm Pt no 300; 350; 250 35 2.0 0.35; 0.3; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/pt/
CSC37/Pt/no Al/50 (A,B,C) 0.35-1.2 33-49

w
CSC37/Ti-Pt/15 (A,B,C) 40 nm Ti-Pt Ti-Pt 300; 350; 250 35 2.0 0.35; 0.3; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/ti-pt/
CSC37/Ti-Pt/50 (A,B,C) 0.35-1.2 33-49
CSC37/Cr-Au/15 (A,B,C) 50 nm Cr-Au Cr-Au 300; 350; 250 35 2.0 0.35; 0.3; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24; [Link]/csc37/cr-au/

.
CSC37/Cr-Au/50 (A,B,C) 0.35-1.2 33-49

PART NUMBER 11, 21 series

NSC/CSC * / * / * 15, 50 quantity
Pt/AlBS, Pt/no Al, Ti-Pt, Cr-Au coating

s
Conducting NSC/CSC probes (triangular)

NSC11/Pt/AlBS/15 (A,B)
NSC11/Pt/AlBS/50 (A,B)

NSC11/Pt/no Al/15 (A,B)

20-25 nm

20-25 nm
Pt

Pt
Al

no
p 200; 90

200; 90
40, 60

40, 60
2.0

2.0
3.0; 48

3.0; 48
1.5-5.0; 23-91

1.5-5.0; 23-91
60; 330

60; 330
45-75; 260-420

45-75; 260-420
[Link]/nsc11/pt/albs/

[Link]/nsc11/pt/
NSC11/Pt/no Al/50 (A,B)
NSC11/Ti-Pt/15 (A,B) 40 nm Ti-Pt Ti-Pt 200; 90 40, 60 2.0 3.0; 48 1.5-5.0; 23-91 60; 330 45-75; 260-420 [Link]/nsc11/ti-pt/
m
NSC11/Ti-Pt/50 (A,B)
NSC11/Cr-Au/15 (A,B) 50 nm Cr-Au Cr-Au 200; 90 40, 60 2.0 3.0; 48 1.5-5.0; 23-91 60; 330 45-75; 260-420 [Link]/nsc11/cr-au/
NSC11/Cr-Au/50 (A,B)
NSC21/Pt/AlBS/15 (A,B) 20-25 nm Pt Al 290; 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/csc21/pt/albs/
NSC21/Pt/AlBS/50 (A,B)
NSC21/Pt/no Al/15 (A,B) 20-25 nm Pt no 290; 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/csc21/pt/
NSC21/Pt/no Al/50 (A,B)
NSC21/Ti-Pt/15 (A,B) 40 nm Ti-Pt Pt 290; 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/csc21/ti-pt/
.c

NSC21/Ti-Pt/50 (A,B)
NSC21/Cr-Au/15 (A,B) 50 nm Cr-Au Cr-Au 290; 110 40 2.0 1.0; 17.5 0.5-1.5; 8.5-33.0 25; 210 20-30; 164-265 [Link]/nsc21/cr-au-bs/
NSC21/Cr-Au/50 (A,B)
CSC11/Pt/AlBS/15 (A,B) 20-25 nm Pt Al 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/pt/albs/
CSC11/Pt/AlBS/50 (A,B)
CSC11/Pt/no Al/15 (A,B) 20-25 nm Pt no 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/pt/
o

CSC11/Pt/no Al/50 (A,B)

CSC11/Ti-Pt/15 (A,B) 40 nm Ti-Pt Ti-Pt 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/ti-pt/
CSC11/Ti-Pt/50 (A,B)
CSC11/Cr-Au/15 (A,B) 50 nm Cr-Au Cr-Au 200; 90 40, 60 1.0 0.35; 6.0 0.10-0.90; 1.5-16.5 28, 155 20-40; 100-235 [Link]/csc11/cr-au/
CSC11/Cr-Au/50 (A,B)
CSC21/Pt/AlBS/15 (A,B) 20-25 nm Pt Al 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/pt/albs/
CSC21/Pt/AlBS/50 (A,B)
CSC21/Pt/no Al/15 (A,B) 20-25 nm Pt no 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/pt/
CSC21/Pt/no Al/50 (A,B)
m

CSC21/Ti-Pt/15 (A,B) 40 nm Ti-Pt Ti-Pt 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/ti-pt/
CSC21/Ti-Pt/50 (A,B)
CSC21/Cr-Au/15 (A,B) 50 nm Cr-Au Cr-Au 290; 110 40 1.0 0.12, 2.0 0.03-0.30; 0.6-6.0 12, 105 8-17; 67-150 [Link]/csc21/cr-au/
.

CSC21/Cr-Au/50 (A,B)

PART NUMBER NSC 18 / Co-Cr / * 15, 50 quantity

Magnetic NSC probes
c

NSC18/Co-Cr/15 90 nm Co-Cr Co-Cr 230 40 3.0 3.5 2.0-5.5 75 60-90 [Link]/nsc18/co-cr/

NSC18/Co-Cr/50
n

83
84
INDEX OF PRODUCTS
Cantilever Part Number Coating Coating Lentgh, Width, Thickness, Force Constant, Resonant Frequency, Web
(Tip (Back ±5 µm ±3 µm ±0.5 µm N/m kHz
Side) Side) (typical) (range) (typical) (range)

PART NUMBER CSC, NSC type

15, 50 quantity
* 12 / * / *
AlBS, no Al coating
Tipless NSC/CSC probes (6-lever)

w
NSC12/tipless/AlBS/15 no Al
(short) (A,B,C) 110; 90; 130 35 2.0 7.5; 14.0; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc12/tipless/al-bs/
2.5-8.5 120-190
(long) (D,E,F) 300; 350; 250 35 2.0 0.35; 0.30; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24;
0.35-1.2 33-49
NSC12/tipless/AlBS/50
NSC12/tipless/no Al/15 no no
(short) (A,B,C) 110; 90; 130 35 2.0 7.5; 14.0; 4.5 3.5-12.5; 6.5-27.5; 210; 315; 150 165-240; 240-405; [Link]/nsc12/tipless/noal/

w
2.5-8.5 120-190
(long) (D,E,F) 300; 350; 250 35 2.0 0.35; 0.30; 0.65 0.2-0.7; 0.1-0.4; 28; 21; 41 23-34; 17-24;
0.35-1.2 33-49
NSC12/tipless/no Al/50
CSC12/tipless/AlBS/15 no Al
(short) (A,B,C) 110, 90, 130 35 1.0 0.95; 1.75; 0.6 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/csc12/tipless/al-bs/
0.15-1.5 50-105
(long) (D,E,F) 300; 350; 250 35 1.0 0.05; 0.03; 0.08 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14

w
0.02-0.2 14-28
CSC12/tipless/AlBS/50
CSC12/tipless/no Al/15 no no

.
(short) (A,B,C) 110, 90, 130 35 1.0 0.95; 1.75; 0.6 0.25-2.5; 0.45-5.0; 105; 155, 75 65-150; 95-230; [Link]/csc12/tipless/noal/
0.15-1.5 50-105
(long) (D,E,F) 300; 350; 250 35 1.0 0.05; 0.03; 0.08 0.01-0.1; 0.01-0.08; 14; 10; 20 9.5-19; 7.0-14
0.02-0.2 14-28
CSC12/tipless/no Al/50

s p m
Index of Test structures
Part Number Application Step Height Pitch Pitch Active area Edge Chip dimensions Web
Accuracy curvature radii
Porous aluminum
PA01 Tip characterization Porous aluminum test structure for characterization of AFM tip [Link]/products/pa/
.c

Part Number Quality Nominal dimensions Quantity Web

HOPG
HOPG ZYH 1/5 ZYH 1x10x10 mm. 5 pcs. [Link]
HOPG ZYH 2/5 ZYH 2x10x10 mm. 5 pcs. [Link]
o

HOPG ZYB 1/3 ZYB 1x10x10 mm. 3 pcs. [Link]

HOPG ZYB 2/3 ZYB 2x10x10 mm. 3 pcs. [Link]
HOPG ZYA 1 ZYA 1x10x10 mm. 1 pc. [Link]
HOPG ZYA 2 ZYA 2x10x10 mm. 1 pc. [Link]

Part Number Application Step Height Pitch Pitch Active area Edge Chip dimensions Web
m

Accuracy curvature radii

Calibration Gratings
.

TGG01 Tip characterization 1.8 µm* 3.0 µm 5 nm 3 x 3 mm less than 10 nm 5x5x0.45 mm [Link]/products/tgg/
in Contact Node
TGF11 Lateral and vertical 1.8 µm* 10 µm 5 nm 3 x 3 mm 5x5x0.45 mm [Link]/products/tgf/
calibration
TGX01 Lateral calibration less than 1 µm 3.0 µm 5 nm 3 x 3 mm array less than 5 nm 5x5x0.45 mm [Link]/products/tgx/
c

TGX11 Lateral calibration less than 2 µm 10.0 µm 5 nm 3 x 3 mm array less than 5 nm 5x5x0.45 mm [Link]/products/tgx/
TGZ01 Vertical calibration 20..25 nm ± 1 nm 3.0 µm 3 x 3 mm 5x5x0.45 mm [Link]/products/tgz/
TGZ02 Vertical calibration 90..104 nm ± 1.5 nm 3.0 µm 3 x 3 mm 5x5x0.45 mm [Link]/products/tgz/
TGZ03 Vertical calibration 496..503 nm ± 1% 3.0 µm 3 x 3 mm 5x5x0.45 mm [Link]/products/tgz/
TGZ04 Vertical calibration 1000 nm ± 1% 3.0 µm 3 x 3 mm 5x5x0.45 mm [Link]/products/tgz/
n

TGZ11 Vertical calibration 1350 nm ± 1% 10.0 µm 3 x 3 mm 5x5x0.45 mm [Link]/products/tgz/

85
 INDEX OF PRODUCTS

n
ORDERING PACKAGING AND QUANTITY FOR CANTILEVERS

c
MikroMasch welcomes the opportunity to serve your inquiries, orders, and any questions. You can pick and choose from For packaging, we use GELPAKTM containers. All chips are precleaved, quality-tested, and placed on gelfilm for 100%

.
the following ways to reach (or contact) us. success and ease of use.
MikroMasch silicon cantilevers are supplied in quantities of 15 and 50 chips per package. Cantilevers with STING tips
1) You can reach us via website or e-mail. are supplied in quantities of 5 chips, Hi’RES tips - of 5 and 15 chips per package.

m
For ordering: [Link]/ordering/
MIX & MATCH!
For questions: info@[Link]
For AFM probes packaged by 50 chips, MikroMasch offers a discounted price when ordering more than one box.
Within North and South American countries, john@[Link]

o
Within European countries, spain@[Link] Quantity of boxes Price discount
2 (100 chips) 8%

.c
3 (150 chips) 15%
2) You can call us at our toll-free number. 4 (200 chips) 22%
In USA, 866-SPMTIPS (776-8477) 5 (250 chips) 28%
6 (300 chips) 34%
In Europe, 8000-SPMTIPS (776-8477)
7 (350 chips) 39%
8 (400 chips) 44%

m
3) You can call or fax our offices or distributors in your nearest region.
Even more, MikroMasch offers the discounts on the Mix & Match basis.
Please refer to our contact information on the website [Link]/contacts/
This means that if you mix any number of different products having this sign in the datasheet, you will still have them
Our mission is to offer the best solutions possible for our customers at all times. Please feel free to contact us for any at discounted price. The discount you get in this case matches the discount you would get if all the products were of

p
necessary information. the same type.

s
AVAILABILITY

.
Most of the products are available in stock and can be delivered overnight or within three business days depending on PACKAGING AND QUANTITY FOR TEST STRUCTURES
your location. Due to wide assortment of probes, cantilevers, and coatings, you may still need to contact your nearest
distributor for availability. Delivery of custom design products such as special tips, coatings, customized gratings For packaging, we use GELPAKTM containers. All chips are precleaved, quality-tested, and placed on gelfilm for 100%
requires 4 to 8 weeks. success and ease of use.

w
PRICING Sets of calibration gratings
Are you wondering about our pricing? Don't be surprised!!! There are 3 sets of calibration gratings (TGS01, TGS02, and TGS03), which are grouped by applications. Z-calibration

w
gratings are NIST-traceable in the TGS01C and TGS02C sets.
You will find a very affordable pricing by visiting our website [Link] or by contacting one of our offices or
distributors.
Grating Set TGS01 TGS01C TGS02 TGS02C TGS03
Shipping charge will be added to your invoice unless any specific shipping instruction is given. Local customer duties
TGX01 (lateral calibration) I I I

w
are not included in the pricing.
MikroMasch products are shipped CPT (according to Incoterms) by Express Service Worldwide. PA01 (tip characterization) I I I

The due amount for MikroMasch products can be paid in US Dollars or Euros within 30 days after the receipt of goods. TGG01 (linear distortions) I I I
MikroMasch offices or distributors may require prepayment method depending on territories. TGZ01 (vertical calibration, 20 nm) I C I C
If you find products to be defective you can claim a free replacement within 6 month from purchase date. TGZ02 (vertical calibration, 100 nm) I C I C
TGZ03 (vertical calibration, 500 nm) I C I C

I - The calibration grating is included in the set.

C - The calibration grating is included in the set with individual MikroMasch calibration certificate,
NIST-traceable.

[Link] TOLL-FREE PHONE NUMBER: USA: 1-866-SPMTIPS (776-8477) / EU: +8000-SPMTIPS (776-8477)

86 87
 n
CONTACTS
You are welcome to our website: [Link]

. c
m
You can contact us by e-mail: info@[Link]
call us at our toll-free numbers USA: 1-866-SPMTIPS (776-8477)

o
Europe: +8000-SPMTIPS (776-8477)

.c
EU office USA office

m
Narva mnt. 13 9755 SW Commerce Cir, Suite B-1
10151 Tallinn, Estonia Wilsonville, OR 97070, USA
tel: +372 614 3117

p
tel: 503 598-9828
fax: +372 614 3118 fax: 503 598-9721
e-mail: europe@[Link] e-mail: usa@[Link]

s
[Link] Contact: Sonia Kuzmin

.
Contact: Tatjana Berezina

ww
w 88
MikroMasch Spain
Calle Miguel de Unamuno 7, Portal 2 - 1B,
28660 Boadilla del Monte, Madrid, Spain
tel: +34 916 33 52 19
fax: +34 916 32 50 31
e-mail: europe@[Link]
MikroMasch USA
9755 SW Commerce Cir, Suite B-1,
Wilsonville, OR 97070, USA
tel: 503 598-9828
fax: 503 598-9721
e-mail: usa@[Link]
MikroMasch Eesti
Narva mnt. 13 10151 Tallinn, Estonia
tel: +372 614 3117
fax: +372 614 3118
e-mail: info@[Link]
[Link]