COLOR 3D Laser

Scanning Microscope
-

COLOR 3D Laser Confocal Microscope

18000x Magnification & 0.001 µm 3D Measurement

The easiest way to perform ultra-precision advanced analysis

 NEW
COLOR 3D Laser Scanning Microscope
VK-9700/9710

Simply put an object on the stage

No preprocessing
No evaporation coating, cutting, or any other
preprocessing of objects is necessary.
Examine and measure objects as they are.

2
The VK-9700 combines the convenience of an optical
microscope, SEM and roughness gauge analyses features
Compare microscopes and
realize what the VK-9700 can do.
Laser Scanning
Optical Roughness
SEM Microscope
microscope gauge VK-9700

No
preprocess- OK NG OK OK Optical microscope SEM Roughness gauge
ing
Convenience High definition and ultra-depth Shape measurement
High
definition NG OK NG OK
ultra-depth
examination

Color
examination OK NG NG OK

3D dimensional NG NG Possible OK
measurement

*Comparison with commonly used optical microscope, SEM and roughness gauge. COLOR 3D Laser Scanning Microscope

Only the Laser Scanning Microscope can

achieve a high level of examination and analysis.
Sharpness comparable to SEMs High definition with real color images High accuracy resolution of 0.00004 Mil
(0.001 µm)
High definition and ultra-depth Examination in real color Noncontact 3D measurement

Laser intensity ultra-depth images HEPA filter (1000x) HD real color ultra-depth images Surface of color printing (1000x) 3D image + cross sectional profile Optical sheet (1000x)

Employs a short waveform violet laser. Combining a short waveform laser and a The laser provides 3D data over the field
As well as enabling 18000x high white light source has enabled of the microscope. It not only measures
definition magnification, the VK-9700 examination based on the HD real color any type of object, noncontact 3D
examines objects based on an ultra-depth ultra-depth image technique. This measurement enables high accuracy 3D
image technique that focuses over the provides high definition images with analyses.
entire field of the microscope. color information.

3
 Variety of 3D measurements
Profile measurement
Measures height, width,
dimensions, shape, angle and
Height, Width and Cross-section measurement Angle and R measurement
R of cross-sectional profiles
of any lines or curves drawn
on the screen.

Since the measurement point

appears on the screen, high
precision measurement results for
any microscopic point can be
easily obtained.

Electronic component (3000x) Prism sheet (1000x)

Roughness measurement
Measures roughness of any
lines or curves drawn on the
Line roughness measurement Surface roughness measurement
screen or plane roughness of
any specified area on the
screen.
Features excellent capabilities
such as noncontact measurement,
magnification analysis of any
measurement point and plane
surface measurement. These
features give the VK-9700 an edge
over traditional contact roughness
gauges.

Catheter (1000x) Metal surface (1000x)

4
3D measurement
Measures volume, surface
area and ratio of area to
Volume measurement Surface area measurement
surface area* of objects in any
specified area on the screen.

* Ratio of area to surface area = ratio of area

of a specified area to surface area of surface
shape of an object

Enables analyses unique to 3D

measurement instruments.

Bump (2000x) Color CCD (3000x)

,
Comparative measurement Industry s First

Displays cross-sectional
profiles of two objects one on
Profile comparative measurement
top of the other. Differences
in width, height and cross-
sections of two objects can be
measured.

Enables comparative evaluation of

objects before and after testing,
whose variation with time or
manufacturing conditions differ
from each other.

LED pad (1000x)

5
 Advanced 3D Imaging
3D display [Virtual trackball method]

Data under examination appears on

the screen in the 3D mode. The
Virtual Trackball
mouse can completely control the Change the angle of
viewing angle, lighting angle, zoom an object by moving
level and Z-axis height. the mouse.

[Virtual trackball method]

Method that controls the virtual trackball

(spherical body) whose center and
diameter correspond with the center and
diameter of an object displayed in the 3D
mode. Clicking a computer mouse fixes
the cursor on the object and dragging the
mouse rotates the virtual trackball. The
virtual trackball enables fine movement of
the object.

Bump (1000x)

Scale change and zooming 360-degree examination from any direction. Examination at the most appropriate angle.

Textured image display

Combines Light intensity and High-low images to provide a composite image which is easy to analyze.

Textured 3D image
that combines
Light intensity
and High-low
images.

CMP pad (1000x)

Light intensity image High-low image

Displays high definition images of Displays height information for an
surface condition of an object object visually in color shades so that
an object can be easily examined.

6
Lighting display
3D images can be illuminated with pseudo-light when displayed on the screen. Adjusting the angle of the light in
accordance with an object shades microscopic irregularities on the surface of an object. Lighting display makes the
examination easy and enables the examination of a surface in the specified direction.

Solar battery (1000x)

No lighting. Lighted.

,
2D plus 3D measurement Industry s First

The measurement area of an object displayed on the screen using the 3D measurement method can be
adjusted or set for both 2D and 3D images. Since the settings and adjustments are reflected on both
images in real time, measurement data for the desired area can be obtained.
2D image
3D image

LED pad (1000x)

The measurement area can be

adjusted both on 2D and 3D
images. Adjusting the
measurement area moves the
measurement point on both
images in real time.

7
 Examination and measurement principles of the VK-9700

Measurement principle
Color CCD camera
Half mirror
The VK-9700 employs two light sources: a Short
waveform laser light source and a White light source.
Laser light source
Information about color, light intensity and height
necessary to set color ultra-depth, light intensity
ultra-depth and high-low images can be obtained by Collecting lens
employing these two types of light sources.
X-Y scan
Half optical system Pin hole
[Short waveform laser beams detect mirror White light source
reflecting light intensity and height.] for lighting
The VK-9700 scans the field of the microscope using a
laser beam and an X-Y scan optical system. The light Half Light receiving element
receiving element detects reflecting light from each mirror

pixel in the field of view. Driving the objective lens in

the Z-axis and scanning repeatedly obtains reflecting
light intensity based on the Z position. Height
information is obtained and reflecting light intensity is
detected while focusing on the peak position.
Consequently, the VK-9700 obtains data for omnifocal
light intensity ultra-depth images and high-low images.

[CCD camera obtains color information.] Objective lens

Reflecting light from the white light source is detected
with a color CCD camera. The CCD camera obtains Object of examination
color information at the peak (focus point) detected with
the laser light source on a pixel basis. The VK-9700
enables real color examination that SEMs are not
capable of.

Pattern diagram of the measurement principle

Short waveform laser light

1024 X 768 pixels

Scan with the laser

in the X and
1 Y directions.

Drive the objective

Measurement range

lens in the
2 Z-axis direction
and scan with the
laser again.

Repeat scanning
3 to the
measurement
range.

4 Measurement
complete.

Omnifocal image

8
Description of obtained data High accuracy measurement with
the pin hole confocal optical system
As the graph below shows, each pixel on a single plane Conventional pseudo-confocal optical systems that use a
(1024 X 768 pixels) obtains data for the reflecting light CCD as the light receiving element enable neither high
intensity (Intensity) based on the Z position. The reflecting accuracy measurement nor high definition examination
light intensive Z position (the peak), the reflecting light owing to the reflecting light from points other than the
intensity at the Z position and its color information are peak (focal spot) or ambient light to adjacent pixels. The
obtained. Three types of image data; Color ultra-depth, pin hole confocal optical system has enabled high accuracy
Light intensity ultra-depth and High-low are built based on measurement and high definition examination by
the above information. eliminating reflecting light from points other than the peak
(focal spot) entirely.
information
High-low

Lens CCD Lens PMT

Mirror Mirror
Color information

Lens Lens
Position
Laser light Laser light
in the Pin hole
Z axis Focal
[Z position Target Target
position]

Received reflecting light intensity [Intensity] Light intensity

information Conventional system VK-9700 system

Three types of images built after the measurement Difference between the pin hole confocal optical system and conventional systems

The peak (Focal spot) detection of the pin hole confocal

Color + light intensity optical system and that of conventional systems.
information
Position
in the Z-I curve of conventional optical system
Color ultra-depth Z axis
image [Z
position]
Peak of the light intensity in
Omnifocal color Conventional optical systems
image that neither Focal enlarges owing to the lack of a
spot pin hole.
SEMs nor optical
microscopes can Ambient light from points other than
provide. the peak (focal spot) and flare
Z-I curve of the pin hole
confocal optical system
Light intensity information
Received reflecting light intensity [Intensity]
Light intensity
Conventional optical systems receive reflecting light from
ultra-depth image
points other than the peak (focal spot) and defocus
Black and white images. The pin hole confocal optical system receives
high contrast reflecting light from the focal spot only. The pin hole
image that SEMs confocal optical system pinpoints the peak (focal spot) with
provide. Shows the high accuracy and provides focused, clear images only.
reflectance
Optical film (1000x)
differential on the
surface of a target.
High-low information

High-low image
Image in which
irregularity of a
target is Image that a commonly used Confocal image that VK-9700
optical microscope provides system provides
highlighted.
Neither defocused light Provides focused image only while
nor flare can be removed. completely eliminating defocused light.
Bump (1000x)

9
 User-friendly operation 1

Measurement with the VK-9700 requires no special knowledge.

Examination and measurement

software [VK-Viewer]

Just three steps to complete the measurement!

e Guidance shows the operation procedure and AAG automatically adjusts laser
sensitivity. The VK-9700 simplifies complex operations of convenional laser
microscopes. All that is required is to simply perform the basic operations of an
optical microscope; Examination positioning, Adjustment of the peak and Pressing
the measurement start button; just three steps. VK-Viewer allows beginners to obtain
accurate measurement results easily.

,
e Guidance (Beginners mode) Industry s First

Three panel configuration: Flow chart panel, Guide panel and Operation panel.
Just follow the flow chart. It only takes three steps to complete the measurement.

Flow chart panel

Shows the three
measurement steps in a
flow chart.

Guide panel
Instructions for the
three steps appear.
Instructions change
according to the
selected step.

Operation panel
Panel for actual
operation
Instructions change
according to the
selected step.

TFT pattern (X 1000)

Ideal for experienced operators

Expert mode
Graphical user interface arranges each setting item .
This is the ideal operation mode for experts who have
intimate knowledge of each setting item and operation
procedures.
Electronic component (1000X)

10
Step1 In order to get the view of a target
to be examined, move the stage
for targets and adjust the focal
Examination spot.

positioning

Move the peak (focal spot) to the

Step2 top and the bottom of a target and
save the peak information in
memory.
Adjustment of
the peak

Press the measurement start button.

Step3 The measurement will start. It
automatically performs Laser
Measurement start sensitivity adjustment that once a
troublesome task and affected the
data accuracy. Additionally, this
performs the measurement.

* Laser sensitivity can also be set

manually.

World's Automatically AAG detects laser reflection in the

first adjusts the specified height range on high speed and
laser sensitivity. sets this unit at the most appropriate light
receiving sensitivity. Since AAG has
automated conventional manual work,
AAG
AAG=Advanced Auto Gain
beginners can easily and accurately
measure data.

Just three steps completes the

Measurement measurement. Beginners easily
complete. measure data at high speed.

11
 User-friendly operation 2

Improve work efficiency with easy and useful functions.

N e w - g e n e r a tio n a na l ysi s soft wa re

[ V K - A n a ly z e r ]

New document interface and WYSIWIG simplify the analyses.

The document interface allows multiple analysis results to be controlled and
displayed within a single window. WYSIWIG allows a user to output the currently
working Window and simplify a series of operations. Work efficiency has been
dramatically improved.

,
Tab document interface Industry s First

Allows multiple analyses results of a single image to be

controlled within a single window. Clicking a tab changes
Click a tab to change the view.

the view.

Profile analysis

Line roughness
analysis
HDD components (1000X)

,
WYSIWYG Industry s First Output of image and numerical data

WYSIWYG prints the analysis window to paper as it is displayed on the screen.

Information and design to be included on paper can be set and saved as desired.

Image file CSV file

Outputs image data JPG, BMP Outputs height or light intensity
What is WYSIWYG?
and TIFF. information as numerical data.
What You See Is What
You Get. What a
viewer sees on the
screen is what a viewer
gets on the printed
paper.

CAD file Video files

Printed paper as a report Outputs height data in STEP or ASC Saves 3D images as consecutive
formats. CAD software compatible. file (AVI file).

12
 Te mp la te s NEW

Saves all the operations that relate to images as templates. Applying the templates to other objects enables an identical
analysis. Templates makes the comparative evaluation of multiple objects easy to perform.

Line roughness measurement Measures plane roughness

1 of object A. 2 over any area. 3 Printed paper as a report 4

Save the
steps
1 to 3 above
as templates.

Apply the templates Measurement identical to object A

5 to object B. 6 will be completed instantaneously.

,
B e g in n e rs mo d e Industry s First

Just follow the procedure to analyze image data in the same way as the examination and measurement software VK-
VIEWER. Only the operations essential to each procedure appear on the screen. No operational problems should occur for
beginners.

Step 1 Image Preparation for data analysis

Perform processing such as
processing correction of measurement data
slope.

Perform measurement according

Step 2 Measurement to a selected analysis such as
analysis the cross-sectional profile or the
roughness measurement.

Outputs the analysis results.

Step 3 Output and Select Print or Save.
completion
of analysis
13
 Advanced Measurement Systems

High resolution 0.00004 Mil(0.001 µm) measurement capability

available for any type of target.

RPD algorithm RPD=Real Peak Detection NEW

Detects the real peak with a unique algorithm based on the Z-I curve. High
resolution and reduction of measurement time has been achieved.

❙ Z-I curve after the measurement Conventional method

Detected peak

Cannot detect the real peak.

RPD method

Z position

RPD method provides accuracy more

precise than steps in the Z position. Detected peak
Highly accurate measurement results
can be obtained in less time. Can detect the real peak.

0.021 Mil(0.53 µm) standard height difference measurement result (Comparison with conventional measurement)

Conventional method RPD method

Traceability compatible Best in the industry

0.00004 Mil(0.001 µm) linear scale module

The VK-9700 utilizes an ultra-high Linear scale module
accuracy linear scale module to
determine extremely reliable height
measurements. The scale is traceable to
national standards.

❙ Ultra-high accuracy linear scale module (Comparison with traditional linear scale module)

[Conventional model]
0.0004 Mil(0.01 µm)

[VK-9700]
0.00004 Mil(0.001 µm)
10x accuracy when
compared with a
conventional product

14
High N.A. Apo ( a p o c h r o m a t i c ) l e n s
The higher the N. A. (Numerical aperture) of an
objective lens, the shallower the focal depth and the
more likely to create a small beam spot. This results in
high accuracy measurement and high definition
examination. Additionally, the VK-9700 detects
reflecting light from steep surface angles and
improves angular tracking characteristics. The
VK-9700 employs the N.A.0.95 Apo lens, the first
class in optical lenses.

Apo lenses (50x / 150x)

14 bit photo mu l t i p l i e r
Employing a photo multiplier as the light receiving
element has enabled the best dynamic range in laser
scanning microscopes. The VK-9700 has achieved
accurate measurement of targets whose reflectance
differential varies a lot or precipitous targets whose
reflecting light becomes weak.

Conventional model VK-9700 HDD components (1000X)

Horizontal installation design provides high resistance to vibration.

The main body of the VK-9700 consists of the measuring
head section that has examination and measurement features,
and the stage. The weight of the measuring head section has
been reduced and a horizontal installation design supports Weight saving
the measuring head from the base plane. This allows the measuring head
section
VK-9700 to be installed in any environment and enables
high accuracy measurement. The foot of the VK-9700
employs aseismic gel exclusively for the VK-9700.
Horizontal
installation design
that supports the
measuring head
MD disk bit (12000x) by the base plane

Aseismic gel

No aseismic design Aseismic design

(VK-9700)

15
 New methods to combine real color and high definition
Combines an optical microscope’s color reproducibility with a laser scanning microscope’s
high definition and ultra-depth examination.

HD real color ultra-depth examination system NEW

The VK-9700 blends high definition and high contrast examination images obtained by scanning a short
wavelength point light source with real color images obtained with a white light source. Each image can be
viewed independently or combined for examination.

Light intensity image from laser light source Color CCD unprocessed image from white light source

Conventional method
Commonly employed color ultra-
depth examination combines all
color information obtained with a
color CCD camera. Since this
method does not detect the
confocal peak position, defocus
light or false color might be mixed
in an image. Additionally, if
images of whitish targets have
color information obtained with a
color CCD camera only,
the contrast examination
will be weak when
displayed.

HD real color ultra-depth images Color printing (1000x)

Conventional method

HighDefinition Real color High definition High contrast

The HD real color ultra-depth examination system of the VK-9700 obtains color
information for each pixel using the color CCD camera. The color information is aquired
by using the confocal laser focus position. The VK-9700 incorporates the aforementioned
color information into high definition and highly contrasted laser light intensity images.
High definition real color ultra-depth examination images can be obtained that combine
real color, high definition and highly contrasted characteristics .

16
Ultra-high precision mode NEW

Ultra-high precision mode performs a

2048 X 1536 pixel laser scan over the
field of the microscope. (Conventional
high definition mode: 1024 X 768 pixel
laser scan.) High definition
examination and high resolution
measurement in the X-Y direction are
possible.

Reference chart (400x) High definition mode Ultra-high precision mode

408 nm short waveform semiconductor laser

The VK-9700 employs the short waveform 408 nm
semiconductor laser (optical waveform limit) as its
light source. Incorporating an Apo lens (N.A.: 0.95) of
50x or 150x magnification with the short wavelength
408 nm semiconductor laser has enabled ultra high
definition examination.

The following formula determines resolution in the X-

Y direction of the microscope.
Constant X λ/N.A
(λ: waveform of light source, N.A.: Numerical
aperture of objective lens) Pits on disk (9000x)

Optical zoom
Performs laser scanning (1024 X 768 pixels) over a CMOS pattern (1000x)
narrow area in the field of the microscope. The optical
zoom of the VK-9700 zooms in on a target without
deteriorating resolution as opposed to the digital zoom
that deteriorates image quality.

Optical zooming (6x)

17
 Wide range 3D measurement
High speed and high accuracy image assembly

Image assembly software [VK-Assembler] Optional

Joins together image areas that extend beyond the microscope’s field of view.
If a desired image area extends beyond the field of the microscope, obtain multiple image data and unite them with
high accuracy. The united image can be handled as a single image.

Solar battery (1000x)

23.4 Mil
600µm

8.58 Mil
202 µm

31.2 Mil 800µm

10.53 Mil 270 µm

Performing wide area measurement while implementing All the data including ultra-
Example high definition examination (magnification: 1000x) depth color , light intensity
High-low image
and high accuracy measurement: and height are united with
high accuracy. The result is
Uniting nine pieces of 3 x 3 images enables wide range, high definition a high-definition, wide area
and high accuracy examination and measurement image. All inspections can
(approximately 31.2 x 23.4 Mil 800 x 600 µm). Light intensity
be performed on the
image combined image.
(1000x microscopic field: 10.53 x 8.58 Mil 270 x 202 µm)
Number of unitable images: 400 pieces in total

FAST algorithm employed FAST=Fast Accurate Seamless Technology NEW

Ultra-fast high accuracy image unification Metallic parts (1000x / 3 x 3 image unification)

In order to improve the accuracy of image unification,

FAST algorithm assigns overlapping areas to each of
the images to be united for image unification
processing. High accuracy image unification is
performed based on the light intensity and height data
of the overlapping areas. The speed of image
unification is 30-fold when compared to conventional
image unification. The synergistic effect of shortened
measurement time and the speed of image unification
dramatically shortens the time from data collection of
images to be united to the completion of image
assembly.

Conventional image unification generates seams in height

data at the image joining lines. FAST algorithm corrects XYZ
data for the image joining lines. United images are handled
as high accuracy 3D data. Conventional image unification Image unification of VK-9700 system

18
Versatile data acquisition using the electric stage
Using the optional electric stage enables wide range image assembly
data acquisition and automatic continuous measurement when the
number of measurement targets is large.
Electric stage (Optional)

Automatic assembly
Automatically unites images using the electric stage. Setting a
measurement area and starting the measurement automatically performs
the image assembly.

Wire bonding (1000x)

Teaching
Teaching automatically moves the electric stage to focus coordinates
(100 coordinates maximum) that are set within the movable range of the
stage and measures the data. Teaching is a useful function to analyze the
measurement data of a large number of targets.

LED pad (400x)

Image assembly without the electric stage

Image assembly by manual operation

Image assembly is possible without the electric stage. Manual
operation is very simple. Just drag and drop multiple measurement
images on the screen. The VK-9700 automatically completes the
image unification.

19
 Thickness measurement of transparent films
The peak (focal point) on transparent or translucent films is difficult to detect with a non-confocal microscope. However,
the VK-9700 accurately detects the peak. The thickness of a transparent or translucent body is measured non-destructively.

In the case of
Laser light Position in the transparent targets,
Z axis [Z position]
Front face transmitted light goes
Front face through the peak (focal
spot) on the front face
and detects the peak
Film (focal spot) on the rear
thickness face. The difference in
both peak positions can
Rear face be measured. (film
Rear face thickness)
Received reflecting light intensity [Intensity]

Automatic pattern width measurement

Automatically measures the width and height of regular patterns on targets such as semiconductor, display or optical parts.
The automatic pattern width measurement eliminates errors owing to manual operations and shortens the measurement time.

Resist pattern (6000x)

Traceability compatible
Measurement results obtained using the VK Series are highly reliable measurement data that comply with the national
standard traceability. The VK-9700 is a highly capable measurement device.

❙ Traceability diagram
Z X-Y
National standards National standards
Independent administrative agency / National Institute of National Institute of Standard and Technology (NIST)
Advanced Industrial Science and Technology (AIST)

JCSS Accredited Laboratories

Height difference gauge Coordinate measurement instrument

Calibration block Calibration chart

COLOR 3D Laser Scanning Microscope (VK Series)

20
Histogram / Binarization
Color, Light intensity and High-low of the measured image data appear in histograms. Area or area ratio data relevant to an
arbitrarily set threshold can be measured. Additionally, various measurements are possible on binarized images with an
arbitrarily set threshold.

Color CCD (3000x)

Histogram display Binarized measurement results

Particle analysis Optional

Automatically performs circular form separation, expansion and degeneracy on targets that have lots of
particles (circles) within the microscope field. After performing measurement preprocessing such as
automatic separation of adjacent circular forms, measurements of quantity, particle diameter, major and
minor axes can be performed.

Metal surface (1000X)

21
 Analysis examples

Semiconductor / Electronic parts

Roughness measurement of rear face of silicon wafer (1000x) Height, width and cross-section measurements of patterns on electronic devices (1000x)

Displa

Color filter roughness measurement (1000x) Optical sheet shape and angle measurement (1000x)
22
 Transportation / Metal

Roughness measurement of steering parts (400x / assembly of two images) Roughness measurement on tool blade edge (1000x)

Precision / Chemical

Microlens R measurement (1000x) Height and width measurements of carrier tape (400x / assembly of two images)
23
 Enhanced optional items that increase the versatility of the laser
scanning microscope.
The structure of the VK-9700 separates
the measuring head from the base.
Measurement of tall objects is possible.
Stand for
(Max 3.94"(100 mm)) VK Series

❙ Adjustable stand NEW

A high stiffness exclusive stand attaches to the rear side of Turning the
the VK microscope. The measuring head is adjustable to any knob adjusts
height. Inserting a spacer between the measuring head and the height as
desired.
the base improves the stability and enables high accuracy
3.94"
measurement. 100 mm The spacer
improves the
stability.

Wide selection of lenses Objective lens Supports larger wafer sizes 11.81"(300 mm) wafer stage

Wide variety of lenses based on the type of object including the high N.A. An entire 11.81"(300 mm) wafer can be examined and analyzed
Apo lens, long-focal-distance lens, and low magnification lens. without blind spots. Easy-to-mount design.

Automatic image assembly Teaching Electric stage Non-destructive examination of large-sized targets Separate measuring head

The electric stage is essential to automatic image assembly and Non-destructive examination and analysis of any point on large-sized
teaching. Easy-to-mount design. targets (PCB and PDP PCB) by mounting the head on a 3rd-party stage.

24
Related products

Standard model with outstanding system performance

COLOR 3D Laser Scanning Microscope Red semiconductor laser employed. (658 nm)
Magnification of observation: 200x to 12000x
VK-8700 NEW
Measurement resolution: 0.0004 Mil (0.001 µm)

Features simplicity and usability similar to the VK-9700

Newly developed Next-generation analysis software

VK-Viewer VK-Analyzer

Follow the three steps to Tab document interface and

complete the measurement! simplify the analyses.
e Guidance shows the operation procedure and AAG
automatically adjusts laser sensitivity to simplified
the operation of the laser microscope that had
conventionally been complicated. All that is
required is to perform the basic operations of an
optical microscope; Adjust the examination point,
Adjust the focal spot and Press the measurement
start button; just three steps. VK-Viewer allows
beginners to obtain accurate measurement results
easily.
Prints out the analysis window as it appears on the screen.

New interface allows multiple analyses results to be controlled and

displayed within a single window. WYSIWIG allows a user to output the
Step 1 Step 2 Step 3
current working Window and simplify a series of operations. Work
Observation Adjustment Measurement efficiency has been dramatically improved.
positioning of the peak start

25
 Dimensions
Unit : inch mm

94 77.5
Measurement 3.70" 3.05" 10.65" 270.5 VK-9700
90
unit 0.29" 3.54" 6.28"
7.3 159.5
VK-9710

16.35" 415.4

171.3 6.74" 14.3

0.56"

150
5.91" 53.5 2.11" 11.63" 295.4 0.87" 22 15.94"
405
9.84" 249.9 15.33" 398.4
6.10" 155

14.19" 360.5
10.65" 270.5 4 x M6 Depth
12.5 130
6.52" 20.5 0.39" 10 0.49" 5.12" 1.14" 29 119.2
165.5 0.81" 4.69" 2.05" 11.22" 285
Measuring head 52
6.30"160 14.02" 356 0.24"
6
6.61" 6.07"
168 7.48" 190 172
13
0.51"

90 7 0.28"
3.54" (1.57")(40) 2.76" 70.2
165.5
6.52"
2 x M6 Heli-Coil, 1.5D 2 x ø0.26" ø6.6 through hole
20.5 0.81"
(Depth 8) 0.31"

3.05" 77.5
3.15"
80

95.5
Measurement 3.76" 2.50" 63.5 13.90" 353 Controller VK-8700
unit 0.28" 7 3.27" 6.26" 159
83
VK-8710

16.39" 416.4

6.74"
171.3
0.52" 13.3

150
5.91" 52.2 2.06" 11.63" 295.4 0.87" 15.94"
405
9.84" 15.63" 397.1 22
249.9 6.10" 155

13.90" 353
6.56" 166.5 4 x M6
Depth 0.39"10 4.41"
2.62"
66.5 0.93" 23.5 112 119.2
4.69" 2.05" 11.22" 285
Measuring head 52
7.48" 190 6.30" 160 14.02" 356 0.24"
6
7.17"
182 183 17.20"
7 6
0.28" 3.15" 80 0.24"

(40)
83 (1.57") 2.22" 56.5
3.27"
5.71" 145
2 x M6 Heli-Coil 1.5D 2 x ø0.26" ø6.6 through hole
20.5 0.81"
(Depth 0.31" 8)

2.50" 63.5
3.15"
80

$
 Specifications

Microscope VK-9710 VK-8710

Model
Controller VK-9700 VK-8700
Magnification of a 15" monitor 200 400 1000 3000 200 400 1000 2000
Magnification of objective lens 10x 20x 50x 150x 10x 20x 50x 100x
Horizontal (H): Mil µm 52.65" 1350 26.33" 675 10.53" 270 3.51" 90 52.65" 1350 26.33" 675 10.53" 270 5.27" 135
Observation/measuring range 1.
Vertical (H): Mil µm 39.47" 1012 19.92" 506 7.88" 202 02.61" 67 39.47" 1012 19.92" 506 7.88" 202 3.94" 101
Operating distance: inch mm 0.65" 16.5 0.12" 3.1 0.01" 0.35 0.008" 0.2 0.65" 16.5 0.12" 3.1 0.02" 0.54 0.01" 0.3
Numeric Apertures (N.A) 0.3 0.46 0.95 0.95 0.3 0.46 0.8 0.95
Optical system for observation/measurement Pinhole confocal optical system Pinhole confocal optical system
Measuring range 0.28" 7 mm 0.28" 7 mm
Height measurement Display resolution 0.00004 Mil 0.001 µm 0.0004 Mil 0.01 µm
Repeatability σ 0.0008 Mil 0.02 µm 2. 0.001 Mil 0.03 µm 3.
Display resolution 0.00004 Mil 0.001 µm 0.0004 Mil 0.01 µm
Width measurement
Repeatability 3σ 0.0008 Mil 0.02 µm 4. 0.001 Mil 0.03 µm 5.
Pixel count 2048 x 1536, 1024 x 768 2048 x 1536, 1024 x 768
For monochrome image 14 bit 14 bit
Frame rate (Hz)
For color image 8 bit for RGB each 8 bit for RGB each
For height measurement 24 bit 20 bit
Optical zoom 1 x to 6 x 1 x to 6 x
Auto function AAG (Auto gain), Auto focus, RPD AAG (Auto gain), Auto focus, RPD
Waveform Violet laser, 408 nm Red laser 658 nm
Laser beam light
Maximum output 0.9 mW 0.9 mW
source for measurement
Class JIS Class 2 (C6802) JIS Class 2 (C6802)
Light-receiving element PMT (Photoelectron Multiplier Tube) PMT (Photoelectron Multiplier Tube)
Light source for optical observation Lamp 100 W halogen lamp 100 W halogen lamp
Image pickup device Color CCD image sensor Color CCD image sensor
Color camera for optical observation
Auto adjustment Gain, Shutter speed Gain, Shutter speed
Dedicated PC, supplied by KEYENCE Dedicated PC, supplied by KEYENCE with the
Data processing unit
with the VK-9700 (OS: Windows XP) 6. VK-8700 (OS: Windows XP) 5.
Microscope Approx. 26 kg (Measuring head detached: approx. 10 kg) Approx. 25 kg (Measuring head detached: approx. 8.5 kg)
Weight
Controller Approx. 11 kg Approx. 11 kg

1. The observation/measuring range is the minimum visual field range.

2. When a standard height difference of 0.08 Mil (2 µm) is measured with the 50x objective lens.
3. When a standard height difference of 0.08 Mil (2 µm) is measured with the 100x objective lens.
4. When the KEYENCE reference chart line width of 0.04 Mil (1 µm) is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
5. When the KEYENCE reference chart line width of 0.04 Mil (1 µm) is measured with the 100x objective lens in line peak mode (image averaging: 8 times).
6. WindowsXP is registered trademarks of Microsoft, U.S.A.

System configuration

High adjustment stand (Optional, not pictured)

External
media

Measuring unit Monitor (Optional) Controller Control PC

VK-9710/8710 VK-9700/8700

•Electric XY stage for image assembly (Optional) •Software application for observation
•Stage for 11.81"(300 mm) wafer (Optional) •Software application for image assembly (Optional)
*Please contact KEYENCE for large-sized sample stage. •Software application for analysis
•Software application for particle analysis (Optional)

27
 Ease of operation superior to conventional optical microscopes

NEW
Digital Microscope
VHX-600
❙ Built-in Display
❙ 54,000,000-pixel handheld camera with the highest resolution in
its class
❙ Highest speed in the industry
❙ Real-time depth composition
❙ Various measurements on the 3D image
❙ Professional observation with the push of a button
❙ Observation at all angles

Specifications are subject to change without notice.

CALL
TOLL
TO CONTACT YOUR LOCAL OFFICE
[Link]
FREE 1 - 8 8 8 - 5 3 9 - 3 6 2 3 Fax : 201-930-0099
KEYENCE CORPORATION OF AMERICA
Corporate Office 50 Tice Blvd., Woodcliff Lake, NJ 07677 Phone:201-930-0100 Fax:201-930-0099 E-mail:keyence@[Link]
■ Regional offices California [Link] Illinois Chicago Michigan Detroit New Jersey New Jersey Ohio Cleveland Tennessee Knoxville
Los Angeles Indiana Indianapolis Grand Rapids North Carolina Charlotte Oregon Portland Texas Dallas
Florida Tampa Kentucky Louisville Minnesota Minneapolis Raleigh Pennsylvania Philadelphia Virginia Richmond
Georgia Atlanta Massachusetts Boston Missouri St. Louis Ohio Cincinnati Tennessee Nashville Washington Seattle

KEYENCE CANADA INC. KEYENCE MEXICO S.A. DE C.V.

Head Office Phone:905-696-9970 Fax:905-696-8340 E-mail:keyence@[Link] Phone:+1-201-590-6000 Fax:+52-81-5000-9229
Montreal Phone:514-694-4740 Fax:514-694-3206 Email:keyencemexico@[Link]
KA1-0037

© KEYENCE CORPORATION, 2007 VK97-KA-C-E 0047-1 000847 Printed in Japan