Transmission Electron Microscopy
Chapter 7
Fourier Optics and High Resolution TEM
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Fresnel and Fraunhofer Diffraction of Single Slit
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2
sin 𝑦𝑦
𝐼𝐼 ∝
𝑦𝑦
Uncertainly principle (1927 heisenbergs’ principle)
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Lens Aberrations
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Fresnel propagation P(x, y)
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(a) (b) (c)
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Influence of HRTEM by defocus
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Wave front is the perfect
spherical plane
Wave front is away from
the perfect spherical plane
The smallest nuclear plane
Gaussian
plane
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Lens contrast transfer function (CTF)
Pupil
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𝝀𝝀
𝒓𝒓𝒅𝒅𝒅𝒅𝒅𝒅 = 𝟎𝟎. 𝟔𝟔𝟔𝟔
𝜷𝜷
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Electron Wave
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Cs Corrector
w/o Cs correction
w/o Cs
correction
w/ Cs
correction
w/ Cs correction
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Cs Corrector
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Cs Corrector
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Nion Corrector CEOS System
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Spherical Aberration (Cs)
Probe Correction Image Correction
Specimen
CM: mini condenser lens
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Main Configuration of Cs TEM
Name: JEM-ARM200FTH
Accelerate Voltage: 80/200 kV
Electron Source: Cold type Field Emission Gun
(CFEG) with EDS detector (Oxford X-Max) and
CEOS aberration corrector(CESCOR)
Resolution
200KV
TEM Lattice resolution: 72 pm
STEM DF image: 78 pm
STEM BF image: 0.136 nm
80KV
TEM Lattice resolution: 0.102 nm
STEM DF image: 0.136 nm
STEM BF image: 0.136 nm
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Cs Corrector
Image Correction (TEM mode)
W/O Cs corrector W/ Cs corrector
The grain boundary in SrTiO3 imaged without and with Cs corrector.
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NiSi2 {115}/{111} Twin Boundary
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Si{115}/ NiSi2 {111} Twin Boundary
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