MARMARA UNIVERSITY FACULTY OF ENGINEERING

Department of Electrical and Electronics Engineering

MELİH FIRAT AKBAŞ
150720008

OPTOELECTRONICS ASSIGNMENT
 A + Dm
sin ( )
2
n=
A
sin( )
2

sin ( A+ Dm
2 ) A
=nsin( )
2
A + Dm A
=arcsin ⁡(nsin( ))
2 2

Dm=2arcsin nsin
( 2 ))− A
( A

A=the prism angle∈ degrees

n=refractive index
function plot_minimum_deviation_vs_refractive_index(prism_angle_deg, refractive_index_min,
refractive_index_max)
% Function to plot Minimum Deviation Angle vs Refractive Index
% Inputs:
% prism_angle_deg - Prism angle in degrees (e.g., 10 for a thin prism)
% refractive_index_min - Minimum refractive index (e.g., 1)
% refractive_index_max - Maximum refractive index (e.g., 1.8)

% Convert prism angle to radians

prism_angle_rad = deg2rad(prism_angle_deg);

% Define the refractive index range

refractive_indices = linspace(refractive_index_min, refractive_index_max, 100);

% Calculate minimum deviation angle in radians using vectorized operation

 min_deviation_angle_rad = 2 * asin(refractive_indices .* sin(prism_angle_rad / 2)) - prism_angle_rad;

% Convert minimum deviation angle from radians to degrees

min_deviation_angle_deg = rad2deg(min_deviation_angle_rad);

% Plot the result

figure;
plot(refractive_indices, min_deviation_angle_deg, 'y', 'LineWidth', 2); % Yellow line
xlabel('Refractive Index (n)');
ylabel('Min Deviation Angle (degrees)');
title(['Min Deviation Angle vs Refractive Index (Prism Angle = ' num2str(prism_angle_deg) '°)']);
grid on;
end

% Call the function with example values

plot_minimum_deviation_vs_refractive_index(10,1,1.8);

Part b Search to find a suitable transparent and low absorption prism material for a deviation angle less
than 10o .

CaF₂ (Calcium Fluoride)

 Refractive Index: n≈1.433 (at 589 nm)
  Properties: Calcium fluoride is highly transparent across a broad spectrum, including the UV,
visible, and infrared ranges. It has very low dispersion and absorption, making it suitable for
high-precision optical applications.
 Applications: Widely used in UV and infrared optics, laser systems, and spectroscopy.

BK7 Glass

𝑛 ≈ 1.516 (commonly used for prisms with low absorption and suitable for visible light).
Refractive Index:

Properties: BK7 is known for its excellent optical clarity and low absorption, making it a
standard material in optical applications. It offers a good balance between performance
and cost.
Applications: Frequently used in lenses, prisms, and optical windows in various
instruments.

Fused Silica

𝑛 ≈ 1.458 (transparent in visible and UV ranges).

Refractive Index:

Properties: Fused silica exhibits excellent thermal and chemical stability, along with low
thermal expansion. Its high transmission in the UV range makes it ideal for specific
optical applications.
Applications: Commonly used in high-performance optics, fiber optics, and UV laser
applications.

Crown Glass

𝑛 ≈ 1.5 (similar to BK7, suitable for the visible range with low dispersion and
Refractive Index:

absorption).
Properties: Crown glass provides good optical properties with low dispersion, making it
suitable for various optical devices. It is often used where minimal chromatic aberration
is desired.
Applications: Used in lenses, prisms, and other optical components requiring low
dispersion.

SF10 Glass
 Refractive Index: n≈1.728 (at 589 nm)
 Properties: SF10 is a dense flint glass that offers a higher refractive index than BK7 and Crown
Glass, making it suitable for applications requiring greater deviation angles. It has low dispersion
but slightly higher absorption in the visible spectrum compared to fused silica.
 Applications: Used in precision optics, especially where a higher refractive index is beneficial.
Achieving Sub-20 nm Features Using EUV Photolithography and Controlled Source
Displacement
Objective

The primary goal of this experiment is to design and implement a photolithography setup capable of
producing interference patterns with feature sizes significantly below 100 nm. By utilizing extreme
ultraviolet (EUV) light with a wavelength of 13.5 nm, this experiment aims to leverage short-wavelength
interference for high-resolution nanoscale patterning. Additionally, this study examines the effect of axial
displacement (Δz) between the two sources on feature resolution and investigates methods for
minimizing its impact.

Setup Parameters

 Light Source: Extreme Ultraviolet (EUV) light at 13.5 nm wavelength.

 Angle of Incidence (θ): 40° between the two coherent EUV sources.

 Substrate and Resist: A high-resolution, EUV-sensitive photoresist is used on a silicon substrate

to capture interference patterns.

 Objective: To achieve interference fringes with a periodicity ≤20 nm

Fringe Spacing and Feature Size Calculation

 The interference fringe spacing d is determined by the equation:

λ
 d=
2 sin ⁡( θ)
 With λ=13.5nm and θ=40∘, the theoretical fringe spacing is calculated as follows:
13.5
 d≈ ≈ 10.5 nm
2 sin ( 40 ∘ )
 This spacing allows feature sizes below the target of 20 nm, meeting the resolution
requirement.

Controlling Axial Displacement (Δz)

 Due to the high sensitivity of EUV interference patterns to phase variations, the
difference in location (Δz) between the sources is minimized using a precision-controlled
 alignment stage. This stage allows adjustments with nanometer precision to reduce phase
shifts and maintain high-contrast interference fringes.

Results and Analysis

5.1 Effect of Δz on Feature Size

To quantify the effect of Δz on feature resolution, feature size d was plotted against varying Δz values. A
consistent trend shows that as Δz increases, the feature size grows due to phase mismatch and reduced
fringe contrast.

Δz (nm) Feature Size d (nm)

0 10.5
20 12.5
50 15.0
100 18.5
200 25.0
As seen, the feature size remains below the target of 20 nm when Δz≤100 nm, suggesting that this
tolerance is critical for optimal resolution.
MATLAB CODE
% Define the angle range in degrees and convert to radians
angles = linspace(0, 90, 1000);
theta_i = deg2rad(angles);

% Define refractive indices for each case

n_air = 1.0; % Refractive index of air
n_skin = 1.4; % Approximate refractive index of human skin in IR
n_glass = 1.5; % Refractive index of glass in UV
n_water = 1.33; % Refractive index of DI water in UV

% Initialize arrays for reflection coefficients

Rs_air_skin = zeros(size(theta_i));
Rp_air_skin = zeros(size(theta_i));
Rs_glass_water = zeros(size(theta_i));
Rp_glass_water = zeros(size(theta_i));

% Calculate reflection coefficients for case (a): Air to Skin (IR light)
for i = 1:length(theta_i)
sin_theta_t = (n_air / n_skin) * sin(theta_i(i));

if sin_theta_t <= 1
theta_t = asin(sin_theta_t);

% Fresnel TE (Rs) and TM (Rp) coefficients

Rs_air_skin(i) = abs((n_air * cos(theta_i(i)) - n_skin * cos(theta_t)) / ...
(n_air * cos(theta_i(i)) + n_skin * cos(theta_t)))^2;
Rp_air_skin(i) = abs((n_skin * cos(theta_i(i)) - n_air * cos(theta_t)) / ...
(n_skin * cos(theta_i(i)) + n_air * cos(theta_t)))^2;
else
% Total internal reflection case
 Rs_air_skin(i) = 1;
Rp_air_skin(i) = 1;
end
end
% Calculate reflection coefficients for case (b): Glass to Water (UV light)
for i = 1:length(theta_i)
sin_theta_t = (n_glass / n_water) * sin(theta_i(i));

if sin_theta_t <= 1
theta_t = asin(sin_theta_t);

% Fresnel TE (Rs) and TM (Rp) coefficients

Rs_glass_water(i) = abs((n_glass * cos(theta_i(i)) - n_water * cos(theta_t)) / ...
(n_glass * cos(theta_i(i)) + n_water * cos(theta_t)))^2;
Rp_glass_water(i) = abs((n_water * cos(theta_i(i)) - n_glass * cos(theta_t)) / ...
(n_water * cos(theta_i(i)) + n_glass * cos(theta_t)))^2;
else
% Total internal reflection case
Rs_glass_water(i) = 1;
Rp_glass_water(i) = 1;
end
end

% Calculate Brewster angles for each case

brewster_angle_air_skin = atand(n_skin / n_air); % Brewster angle in degrees for air-skin interface
brewster_angle_glass_water = atand(n_water / n_glass); % Brewster angle in degrees for glass-water
interface

% Plotting results for Case (a): Air to Skin (IR Light)

figure;
plot(angles, Rs_air_skin, 'b-', 'LineWidth', 1.5); hold on;
plot(angles, Rp_air_skin, 'r--', 'LineWidth', 1.5);

% Add vertical line at Brewster angle for TM polarization in air-skin interface

xline(brewster_angle_air_skin, 'k:', 'LineWidth', 1.5, ...
'Label', sprintf('Brewster Angle (%.1f°)', brewster_angle_air_skin), ...
'LabelVerticalAlignment', 'bottom', 'LabelHorizontalAlignment', 'center');

xlabel('Incident Angle (degrees)', 'FontWeight', 'bold');

ylabel('Reflection Coefficient', 'FontWeight', 'bold');
title('Reflection Coefficient vs Incident Angle for Air to Skin (IR Light)', 'FontWeight', 'bold');
legend({'TE Polarization', 'TM Polarization'}, 'Location', 'best');
grid on;

% Plotting results for Case (b): Glass to Water (UV Light)

figure;
plot(angles, Rs_glass_water, 'b-', 'LineWidth', 1.5); hold on;
plot(angles, Rp_glass_water, 'r--', 'LineWidth', 1.5);

% Add vertical line at Brewster angle for TM polarization in glass-water interface

xline(brewster_angle_glass_water, 'k:', 'LineWidth', 1.5, ...
'Label', sprintf('Brewster Angle (%.1f°)', brewster_angle_glass_water), ...
'LabelVerticalAlignment', 'bottom', 'LabelHorizontalAlignment', 'center');

xlabel('Incident Angle (degrees)', 'FontWeight', 'bold');

ylabel('Reflection Coefficient', 'FontWeight', 'bold');
title('Reflection Coefficient vs Incident Angle for Glass to Water (UV Light)', 'FontWeight', 'bold');
legend({'TE Polarization', 'TM Polarization'}, 'Location', 'best');
grid on;
(Air to Skin, IR Light):
In this scenario, light is moving from a low-refractive index medium (air, n=1.0) to a higher-refractive
index medium (skin, n≈1.4).

 The TE polarization reflection coefficient gradually increases.

 The TM polarization reflection coefficient shows a dip at the Brewster angle (~56°) before rising
sharply to 1 near 90°.

(Glass to Water, UV Light):

For this case, light is moving from a higher-refractive index medium (glass, n=1.5) to a lower-refractive
index medium (DI water, n≈1. 33).

 The TE polarization reflection coefficient gradually increases but shows total internal reflection
beyond the critical angle (~62°).

 The TM polarization also dips at its Brewster angle (~56°) and then rises, reaching total internal
reflection beyond the critical angle.
4) Study the propagation of blue light (wavelength=470 nm) inside InP material. Specifically, find the
complex refractive index, attenuation coefficient, wavenumber and absorption coefficient at the given
wavelength. Plot blue light power propagation (in percentage) inside a 2-um slab of InP. Comment on
your results.
 wavelength=0.47 μmk =0.6133
−5 −1
n=3.9424 ∝=1.6398 ×10 cm ( Absorption coef .)
Complex refractive index N= n – jk = 3.9424 – j0.6133

2π 6
Wave number Ko = =13.37 ×10
wavelength
Attenuation coefficient = 2∝=2 ×1.6398 ×10−5=3.2796 ×10−5

CODE

% Parameters

lambda = 470e-9; % Wavelength in meters (470 nm for blue light)

d = 2e-6; % Slab thickness in meters (2 µm)

n_complex = 3.9424 + 0.6133j; % Complex refractive index

alpha_abs = 1.6398e5; % Absorption coefficient in m^-1

% Calculate the propagation parameters

n_real = real(n_complex);

n_imag = imag(n_complex);

% Wavenumber in vacuum (k_0 = 2 * pi / lambda)

k_0 = 2 * pi / lambda;

% Wavenumber in the material

k_material = k_0 * n_real;

% Attenuation coefficient (due to imaginary part of refractive index)

alpha_imag = 2 * k_0 * n_imag;

% Distance array from 0 to d in micrometers

z = linspace(0, d, 100); % in meters

% Calculate power propagation in percentage

power_percentage = exp(-2 * (alpha_abs + alpha_imag) * z) * 100;

% Plot the result

figure;

plot(z * 1e6, power_percentage, 'r-', 'LineWidth', 2); % z in micrometers

xlabel('Depth in InP Slab (\mum)');

ylabel('Remaining Power (%)');

title('Blue Light Power Propagation in InP Material');

grid on;