SiC IGBT: Advances and Applications
SiC IGBT: Advances and Applications
fully edited. Content may change prior to final publication. Citation information: DOI 10.1109/TPEL.2020.3005940, IEEE
Transactions on Power Electronics
Abstract- Along with the increasing maturity for the material are helpful for a good trade-off between Vf and switching loss.
and process of the wide bandgap semiconductor Silicon Carbide Although the bulk mobility of SiC IGBT is lower than that of
(SiC), the IGBT representing the top level of power devices could Si IGBT, the Vf of SiC IGBT is lower than that of Si IGBT
be fabricated by SiC successfully. This paper presents a thorough under the same blocking capability. It is worth noting that the
review of development of SiC IGBT in the past 30 years. The
problems in terms of SiC/SiO2 interface properties,
progresses of models, structure design and performance in SiC
IGBT are summarized. The challenges resulting from fabrication electromagnetic interference (EMI) and short circuit withstand
process and switching characteristics are discussed and analyzed capability impede the utilization of SiC IGBTs.
in detail. The experimental results and existing problems in SiC Although the SiC IGBTs have not been commercialized so
IGBT based applications are summarized in the end. far, great progress has been made in the past 30 years, as
Index Terms- silicon carbide, IGBT, device models, structure shown in Fig. 1. From 1996 when the first SiC IGBT was
designs, characteristics, applications, review. fabricated [5], to 2010, the SiC p-channel IGBT has been
studied extensively, because of the available n+ substrate with
I. INTRODUCTION low resistivity and defect density. The performance of p-IGBT
has been improved continually, especially after the
The insulated gate bipolar transistor (IGBT) combining introduction of charge storage layer (CSL) [6]. The fabricated
high input impedance of MOSFET and high current density of n-channel IGBT during this period exhibits very poor
bipolar devices shows great advantages in the medium- performance due to immature technology and p-type substrate
frequency high-power fields [1]. Si IGBT with high voltage with high resistivity and defect density [7]. Until the free-
and current are mainly targeted for use in traction systems, standing technology proposed by Cooper in 2010 [8], the
industrial applications, high voltage direct current research focus of SiC IGBT turned to SiC n-channel IGBT
transmission (HVDC) and emerging pulsed power application. because the free-standing technology provides a method to
In these fields, ultra-high voltage is designed to reduce the grow p+ collector on n+ substrate. After that, SiC n-IGBT
number of devices in series and simplify the converter shows more and more excellent static and dynamic
topologies [2]. The maximum voltage of Si IGBT has been characteristics. The blocking voltage of SiC IGBT has also
reported to reach 8.4 kV [3], which is close to the limit of Si exceeded 27 kV [9], becoming the promising device in high
devices. Frequency and operating temperature greatly limit the voltage fields. The SiC IGBT could reduce the differential
further development of Si IGBT in these fields as well. As the specific on-resistances (Ron,sp,diff) by more than one order of
wide bandgap material, SiC has higher breakdown field magnitude, compared with the SiC MOSFET of the same
strength, higher intrinsic temperature, higher thermal rated voltage. Therefore, it is encouraging for power
conductivity, and higher carrier saturation drift velocity [4]. conversion systems with transmission power greater than 100
Therefore, SiC IGBT device shows stronger competitiveness kW, although the switching loss (Esw) of SiC IGBT is higher
in high voltage, high temperature, and high power fields, as than that of SiC MOSFET. Recently, the 12-15 kV SiC IGBT
shown in TABLE I. The excellent static and dynamic modules have been developed [10]-[12], based on which the
performances of SiC IGBTs make up for the shortcomings of prototypes of the first solid-state transformer and the first
SiC MOSFETs and SiC GTOs. Among SiC polytypes and Marx generator have been built as well [13]-[14].
channel types, the SiC IGBT with 4H-polytype and n-channel The paper is organized as follows. Section II summarizes
is preferred due to the low forward voltage (Vf), fast switching the SiC IGBT models developed in different circuit simulator.
and wide safe operating area. The high bulk mobility and low In section III, the critical factors limiting the
current gain of wide-base pnp-transistor in 4H-SiC n-IGBT commercialization of SiC IGBT are analyzed. In addition, new
design concepts or technologies implemented in SiC IGBT
structure are also summarized to enhance the performance of
This work was supported by National Key R&D Program of China
(2018YFB0905700, 2018YFB0905705). (Corresponding author: Lin Liang). them. In Section IV, the Ron,sp,diff of high voltage power
L. Han, L. Liang and Y. Kang are with School of Electrical and Electronic devices are compared. The unique switching characteristics
Engineering, Huazhong University of Science and Technology, Wuhan, are analyzed in detail according to the waveforms variations.
430074, China. (email: lianglin@[Link], han_lubin@[Link], In addition, the gate drivers customized according to
ykang@[Link]).
Y. Qiu is with Global Energy Interconnection Research Institute, Beijing, characteristics of SiC IGBT are surveyed as well. Finally,
China. (email: qiuyufeng@[Link]). several typical applications of SiC IGBT are illustrated in
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TABLE I
COMPARISONS OF PERFORMANCE BETWEEN HIGH VOLTAGE DEVICES
(1)
Bulk mobility (2)
Vf @35A/cm2 (3)
dv/dt Gate oxide Channel mobility (4) RBSOA
Device type Stored Charge SCWT
(cm 2/V·s) (V) (kV/μs) reliability (cm2/V·s) /FBSOA
Si N-IGBT 1350 (P) 2*4.5 (2*8.4kV) 5 High High 350-400 Long Narrow
4H-SiC N-IGBT 940 (N) 5 (15kV) 300 Medium Low Wide
4H-SiC P-IGBT 120 (Al) 5.5 (15kV) / Low Medium Medium
6H-SiC N-IGBT 410 (N) / / Medium Medium 0.5-100 Wide
Short
6H-SiC P-IGBT 100 (Al) 7.5 (550V) / Low High Medium
4H-SiC NMOSFET 940 (N) 7.2 (15kV) 70 Near Zero Low /
4H-SiC N-GTO 940 (N) <4 (15kV) 15 High / / Widest
(1)
P = Phosphorus, N = Nitrogen, Al = Aluminum.
(2)
The voltage in “()” is rated blocking voltage of devices.
(3)
The values of dv/dt is the maximum value in the reported researches.
(4)
The SCWT is short-circuit withstand time.
1996 1997 1998 1999 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015
section V. It is followed by the conclusion of the whole paper. simulation models also transfer from the original p-channel to
n-channel. The physical model of non-punch-through (NPT)
II. SIC IGBT MODEL RESEARCH SiC IGBT is proposed for the first time in [1]. The static and
dynamic behaviors of p-channel SiC IGBT and static
SiC IGBT devices are at the stage of development, and behaviors of n-channel SiC IGBT are verified in Saber and
cannot be commercialized on a large scale. The application of Pspice. Because the developed model has no buffer layer and
this high-voltage and high-temperature devices is faced with is essentially a Hefner model, the model cannot simulate SiC
challenges of immature packaging (cooling, insulation, etc.), IGBT devices with buffer layer, which are widely used
driver (EMI) and protection (overvoltage (OV), overcurrent nowadays. However, the relatively simple NPT structure
(OC), overheating (OT)). Therefore, for the device enables the model to simulate the static and turn-off behaviors
manufacturers and circuit designers, the appropriate SiC IGBT accurately. The p-channel SiC IGBT model is also developed
model is helpful to understand its working principle, optimize in [17] and is verified by numerical simulation results. The
the structure and predict the performances. model does not use Hefner’s base carrier distribution model
In this paper, all the SiC IGBT models developed in the based on the ambipolar diffusion equation, but uses a
circuit simulators are mathematical model [15]. Hefner IGBT piecewise function to simulate the base carrier distribution, as
model is the most classical mathematical model based on shown in Fig. 2 (a). This abrupt carrier distribution results in
semiconductor physics. The model mainly includes equivalent the simulation of the model in SPICE3F5 400 times faster than
circuits of MOSFET and ambipolar diffusion theory to explain the numerical simulation [18]. However, it also causes three-
bipolar transistor. It also includes the non-quasi-static effect slope voltage transition with moderate accuracy in the 2013
and non-linear capacitance effect to analyze the transient version. The model is further improved and verified under
process accurately [16]. The SiC IGBT models in Table II various temperature in 2019 version, when the interface traps
follow Hefner Si IGBT model, but the SiC IGBT models still model and temperature dependence model of intrinsic carrier
need further improvement to simulate its unique density and carrier lifetime are incorporated [19].
characteristics. The change of material from Si to SiC makes Reference [20] simplifies the Hefner IGBT model greatly,
the models more difficult to converge. Therefore, it needs to which uses the drain current of the MOSFET (ID) and the
be simplified properly. In addition, the two-slope voltage current gain of BJT (β) in (1) to obtain the collector current of
transition during switching process needs to be taken into IGBT (IC). The main contribution of [20] is the electro-thermal
account in the models. model of SiC IGBT, which was developed by the simplified
Table II summarizes all SiC IGBT models since 2012. As electrical model and 3D-finite element based thermal model.
n-channel SiC IGBT gradually replaces p-channel, the However, the electro-thermal model ignores the heavy
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TABLE II
CHARACTERISTICS OF SIC IGBT MODELS
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D. Termination Technologies
Reliable and robust edge terminations should be carefully
designed to sustain the high voltage of SiC IGBT devices.
Terminations allow device to support more than 90% of the
bulk breakdown voltage [43]. To date, junction termination
extension (JTE) and field limiting rings (FLRs) are two main
Fig. 5 Relationship between the maximum switching frequency and
termination technologies applied to SiC IGBT. Furthermore, thermal resistance of 15kV SiC IGBT module under different maximum
terminations used in available SiC IGBT devices are rated Tj.
summarized in Fig. 4 [26], [44]-[49]. In order to alleviate the
crowded edge electric field effect, the termination length of At present, the SiC IGBT is still packaged in the wire-
SiC IGBT is much longer than that of the Si counterparts. bonding module [2], [10], [13], [52], in which the failure of
Termination area accounts for more than 50% of the chip area, bonding wires and solder failure are the common lifetime
resulting in enlarged chip area and, therefore, a non-optimal limiting factors. In addition, voltage breakdown and partial
cost/area ratio. discharge caused by ultra-high voltage bring a greater
Accurate control of the implantation doses and significant challenge to the insulating material. The intersection point of
area consumption are necessary for JTE technology to achieve conductor, dielectric and encapsulation is the weak point
a uniform electric field. Therefore, JTE technology is mainly exposed to high electric field, which may exceed the
used in lower voltage devices, while FLR technology targets breakdown electric field strength of the materials. Therefore,
for high voltage devices. However, FLR technology used in the selection of high breakdown electric field materials,
high voltage devices consumes a large area as well. To solve smooth electrodes and enough electrodes clearance need to be
this problem, FLRs technologies with linearly or regionally focused on. Even so, there are still a series of problems, such
optimizing the distances and JTE rings technology combining as the extra displacement current caused by the high dielectric
JTE and FLR are proposed [43], [50]-[51]. The former constant of the insulating layer, the complexity of processing
technology reduces the termination length by 30% and and the increased module size.
increases the breakdown voltage by 23%. The latter reduces To realize the insulation capability between the chip and
the termination area by 20% - 30% to achieve the same the heatsink in SiC IGBT module, several millimeters of
breakdown voltage. insulating layer is required when the Al2O3 or AlN ceramic is
used. It is no doubt that a large thermal resistance and thermal
E. Packaging Technologies capacity are introduced, which leads to a larger junction
temperature (Tj) of SiC IGBT module, thus threatening the
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P+ N+ P+ diverter P+ diverter
Middle technologies Advantages N+ N+
P-body Gate
P-body P-body
Faster switching P+ buried layer
Buffer layer thickness [58] Lower current bump N-drift-1
Lower current overshoot N-drift
P-pillar N-pillar
Better tradeoff between Vf and
N-drift-2
P+ buried layer [59] saturation current
Better tradeoff between Eon and di/dt N+ buffer N+ buffer N+ buffer
Carrier storage layer (CSL)
Lower Vf P+ P+ P+
[25]
Superjunction [60], [61] Better tradeoff between Vf and BV Collector Collector Collector
Depletion-controlled (DC) (a) (b) (c)
Suppression of dv/dt and EMI
structure [62] Fig. 7 Middle technologies. (a) Superjunction. (b) P+ buried layer. (c)
Depletion-controlled (DC) structure.
TABLE V
ADVANTAGES OF LOWER TECHNOLOGIES Emitter Emitter Emitter1 Gate1 Emitter1
P+ N+ P+ N+
N+
Lower technologies Advantages P-body Gate P-shield P-body Gate P-shield N+
Bi-directional conduction
Bi-directional IGBT N+ buffer
Adjustable Vf and Esw by gate N+ buffer P-base P-base
(BD-IGBT) [63] P+
signals P+ P
N+ N+
N+ P+
Schottky
Collector Collector Emitter2 Gate2 Emitter2
solder and bonding wires lifetime. In the SiC IGBT module, Contact
(a) (b) (c)
the thermal resistance of ceramics accounts for nearly one Fig. 8 Lower technologies. (a) Backside npn-collector (npn-IGBT). (b)
third of the total thermal resistance [53]. Fig. 5 shows the Collector side schottky contact (SC-IGBT). (c) Bi-directional IGBT (BD-
relationship between the maximum switching frequency and IGBT).
thermal resistance of 15kV SiC IGBT module under different
maximum rated Tj. 175 °C is the highest Tj that the wire-
bonding module could withstand. Due to the large thermal 2
8kV Si IGBT @35A/cm
resistance of SiC IGBT module, only several kilohertz could
guarantee the Tj below the maximum value. Therefore, it is
important to improve the temperature withstand capability and
@20A/cm2
reduce the thermal resistance of the module. New packaging 2
@31A/cm
technologies such as free bonding-wire connection, nano- Filled- conventional
silver sintering and double-sided cooling may be the key Open- new IGBT
technologies to solve the above problems related to SiC IGBT
module.
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+
Lload D C2
iL
iD iC2 +
iT iC1 VDC
Vdriver +
C1
(a)
v, i v, i
I II III IV V VI VII VIII
Current
Fig. 12 Comparison of maximum controllable current for the 15 kV 4H-
SiC MOSFETs and the 15 kV 4H-SiC n-IGBTs in a hard switching
Voltage
application [68].
Time Time
controlled by VGE, once the channel is formed.
t1 t2 t3 t4 t5 t 6 t7 t8 t9 Phase VII: reverse recovery of diode. After collector
Turn off Turn on
(b)
current reaches to load current, the extreme high dv/dt results
Fig. 11 (a) DPT equivalent circuit. (b) The typical switching waveforms in the high current overshoot.
of SiC IGBT during hard switching. Phase VIII: After punch-through. The low depletion
capacitance becomes the high diffusion capacitance, which
common-emitter current gain. With the increase of voltage, leads to slower dv/dt [10]. It is easy to produce oscillation
although capacitance and dv/dt decrease, the current gain of after current overshoot because of parasitic inductance and
PNP transistor increases due to the reduced un-depleted region, parasitic capacitance of diode and load. In particular, a larger
as shown in (2). These three factors determine the magnitude common-emitter parasitic inductance may aggravate the
of current bump. oscillation process [52].
1 In resistive-inductive load, the turn-on process is basically
= (2)
cosh(Wun -depleted / La ) 1 the same as that of inductive load. However, in resistive load,
zero current switching and great damping lead to the reduction
Phases I and II are also known as sweep-out phases. In of the current overshoot [53].
this process, the electric field generated by reverse biased PN
junction of the depletion region clears the excess carriers, C. Competitions between SiC IGBT and SiC MOSFET
which exponentially distribute in the drift region. The charge The lower Vf and fast switching are always compromised
to be swept out is determined by (3), where C is the diffusion by each other. Lower Vf and fast switching are preferred in
capacitance [67]. low and high switching frequency fields, respectively. Since
Q (3) both on-state loss and switching loss increase with increasing
C
V current, the current capability is closely related to switching
Phase III: after punch-through. The charges are mainly frequency, as shown in Fig. 12 [68]. The maximum current
cleared by the combination of buffer layers [57]. Here, C in (3) decreases with increasing switching frequency due to
becomes depletion capacitance with a small value [10], [46]. switching loss dominating the power dissipation under high
Therefore, the charges that need to be removed are few, which switching frequency. SiC IGBT exhibits higher current
causes a rapid rise in voltage. And the current bump decreases capability over SiC MOSFET, when switching frequency is
due to the drastic decrease of C and the dramatic increase of lower than 5 kHz. Even in high switching frequency, current
dv/dt. In addition, the displacement current increases, so the capability of SiC MOSFET is slightly greater than SiC IGBT,
collector current begins to decrease. which shows SiC IGBT is a promising device used in high
Phase IV: diode turn-on. Once the VCE reaches to the bus voltage, high current and high frequency applications.
voltage, the diode turns on and the current transfers from SiC
IGBT to the diode. Voltage overshoot is typically negligible D. Gate drivers for SiC IGBT
due to lower current. Gate drivers for SiC IGBT is still not commercialized,
Phase V: tail current. The recombination of minority considering high insulation capability, low coupling
carriers removes charge, while the stored charge is still very capacitance, low cost, reasonable size, high efficiency, high
small. reliability, etc. At present, the topology and control strategies
2) Turn-on process. of Si IGBT or MOSFET are still used for the gate driver
Phase VI: current increase after gate voltage (VGE) prototype of SiC IGBT/MOSFET [69]-[73], which includes
reaching threshold voltage (VTH). The current increase is isolated power supply, signal isolation, power amplification
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TABLE VI
GATE DRIVERS FOR SIC IGBT.
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Leakage Current
Voltage Static Parallel
Device Capacitance
Sharing Dynamic Resistor
Delay Time
EON
Power RC
Thermal Damage EOFF
Loss Snubber
Snubber Resistor
Fig. 16 The control strategy of SiC IGBT devices in series from [77].
(a)
Fig. 17 The voltage sharing of 15kV SiC IGBT with RC snubber (15Ω,
2.2nF) [78].
(b)
Fig. 15 Switching waveforms of ZVS. (a) Turn-off. (b) Turn-on. [66] external snubber capacitor will be fed back to source during
turn-off. Therefore, the real device loss can be calculated by
TABLE VII
COMPARISON OF DC-AC OPERATION OF 15KV SIC IGBT WITH SOFT thermal resistance of heatsink. The calculation and
SWITCHING AND HARD SWITCHING experimental results of soft switching and hard switching are
compared in Table VII [76]. Compared with hard switching,
Soft switching Hard switching
soft switching not only reduces device loss significantly, but
Total power loss (W) 68.89 – 80 355
Junction temperature (°C) 46.87 – 49.16 130.5 – 135.65 also greatly reduces dv/dt stress, thus reducing common mode
AC pole dv/dt (kV/μs) 6.02 30.77 current.
Common mode current (A) 1.8 9.23
B. Series Connected SiC IGBT
Modular multilevel converter is used to enable a single
temperature of SiC IGBT bring great challenges to the whole device to handle a higher grid voltage. However, devices with
converter and peripheral auxiliary circuits. higher blocking voltage are needed in the applications of high
voltage two-level converter, or three-level converter with
A. Soft Switching
higher voltage or HVDC. Therefore, the devices in series are
Ultra-high voltage and fast switching generates high dv/dt
necessary. When devices are connected in series, device
and switching losses on SiC IGBT. The simple zero voltage
inconsistency and drive inconsistency will cause voltage
switching (ZVS) with external snubber capacitors can realize
imbalance of devices [77], [78]. Paralleling large resistance,
full ZVS turn-on and near ZVS turn-off [66], [74], [75]. In
RC snubber and active drive control are effective methods to
fact, the SiC IGBT without external snubber capacitor
solve the problem of voltage sharing and high dv/dt of SiC
achieves partially ZVS turn-off, as shown in Fig. 15. The
IGBT devices. Nevertheless, RC snubber needs tradeoff
displacement current flowing through parasitic capacitance
between Esw and snubber loss. Active gate control is complex.
(C1 and C2) reduces the collector current at the beginning of
In order to utilize these methods effectively, these strategies
turn-off. However, the current bump in phase II prevents the
are implemented in corresponding states of SiC IGBT, as
ZVS process. Therefore, the parallel snubber capacitor makes
shown in Fig. 16.
the turn-off closer to ZVS, as shown in Fig. 15 (a). During the
Firstly, for the voltage balancing control in the blocking
turn-on of ZVS, due to conductance modulation lag in the drift
state, resistors with resistance lower than blocking resistance
region, the turn-on voltage overshoot related to di/dt stress and
of SiC IGBT are paralleled with device to realize static
temperature may trigger spurious short-circuit protection, as
voltage balancing. Secondly, RC snubber is used to limit the
shown in Fig. 15 (b).
turn-off dv/dt and ensure turn-off voltage balancing. Turn-off
It is noteworthy that the energy of parasitic capacitor and
voltage sharing of two series connected SiC IGBT with RC
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Fig. 19 Schematic of TIPS with 15kV SiC IGBT and 1.2kV SiC
MOSFET [79].
22.7%
18.5%
15.7%
13.5%
12%
9.1%
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