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Nanostructured Coatings Synthesis Techniques

The document discusses novel techniques developed in India for synthesizing nanostructured coatings and thin films, including combustion chemical vapor deposition, laser assisted atmospheric CVD, laser pyrolysis, pulsed laser deposition, and magnetron sputtering. It provides details on the facilities and procedures for depositing coatings of materials like alumina, yttria stabilized zirconia, and anatase titania using these techniques.

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Danesh Az
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0% found this document useful (0 votes)
4 views2 pages

Nanostructured Coatings Synthesis Techniques

The document discusses novel techniques developed in India for synthesizing nanostructured coatings and thin films, including combustion chemical vapor deposition, laser assisted atmospheric CVD, laser pyrolysis, pulsed laser deposition, and magnetron sputtering. It provides details on the facilities and procedures for depositing coatings of materials like alumina, yttria stabilized zirconia, and anatase titania using these techniques.

Uploaded by

Danesh Az
Copyright
© All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd

SCIENCE-35

Novel Techniques for Synthesis of


Nanostructured Coatings and Thin Films
n EXECUTIVE SUMMARY
State of the art facilities for synthesis and characterization of nano-structured coatings have been set up in Surface
Science Section, Materials Science Division, IGCAR. The facilities for synthesis include Combustion Chemical Vapour
Deposition (CCVD), Laser Assisted Atmospheric CVD (LAACVD), Laser Pyrolysis, Pulsed Laser Deposition (PLD) and
Magnetron Sputtering. Among these CCVD, LAACVD, Laser Pyrolysis and PLD are indigenously designed and developed.
Various characterization facilities like micro and nano-indenters, scratch tester and atom force microscope (AFM) have
also been established.

n OUTLINE

Using the indigenously developed


CCVD, LAACVD and Laser Pyrolysis
facilities nano-structured coatings of
alumina, yttria stabilized zirconia
and anatase titania were fabricated
on various substrates viz. Quartz,
Silicon, Mild Steel and Stainless
Steel. Adherent coatings were
obtained when completely volatile
metal-organic compounds like acetyl
acetonates were used as the
precursor in case of CCVD. On the
other hand, LAACVD and Laser
Pyrolysis techniques adherent
coatings were obtained with all
precursors from metal nitrates to
metal-organic compounds. Surface Fig. 1 : SEM image of Al2O3 coating by CCVD
topography of the films is strongly
affected by solution precursor
concentration, with smoother films
observed at lower concentrations.
The advantages of laser over flame as
energy source are; it is
environmentally friendly and since
laser can be focused to very fine spot,
patterning is feasible. The
microstructures of coatings obtained
using the techniques are shown in
Figures 1, 2 and 3.
Adopting the two variants of PLD viz
reactive PLD (RPLD) and plasma
assisted PLD (PAPLD) metal nitrides
thin films were fabricated. Metal
nitrides like ZrN, NbN and AlN which
could not be synthesized by RPLD Fig. 2 : SEM image of Al2O3 coating by Laser Pyrolysis
were made by PAPLD. In PAPLD, for (insert)magnified image
generating plasma a DC coil was
incorporated into the system. Since
sputtering can occur from the coil,
under certain conditions, we have
indigenously fabricated a microwave
assisted ECR plasma source for
coupling with the PLD system to
generate plasma inside the
deposition chamber. Since a better
ion density in the plasma is obtained
with ECR, metal nitrides can be
synthesized effectively. One
significant achievement of the study
is that we could synthesize cubic AlN
using the technique.

Fig. 3 : SEM image of Al2O3 coating by Atmospheric Laser CVD

70
SCIENCE-35

n WHAT IS COMBUSTION - CVD?


Combustion-Chemical Vapour Deposition (CCVD) is an open air, flame mediated coating process that employs aerosol to
transport coating precursors to the deposition region. The coating precursors are dissolved in a suitable solvent and then
atomized and combusted to provide the energy necessary for the chemical reaction to occur. The precursors interact with
the flame and form a coating on a substrate held in or near the flame. The aerosol of size 1 to 5 microns were generated
using an ultrasonic particle generator and/or an indigenously developed compressed air nebulizer.

n LASER PYROLYSIS AND LAACVD


In laser pyrolysis technique, the aerosols, generated using
an ultrasonic particle generator or compressed air
nebulizer, (metal nitrate solution droplets) were passed
through a quartz tube (Fig. 4). The laser was coupled in to
the quartz tube in a coaxial manner and the laser beam a
along with the aerosol were directed towards the substrate
kept very close to the focal point of the focusing lens. The
laser interacted with the aerosol during its transit through
the tube as well as at the substrate, leading to reaction with
atmospheric oxygen at the substrate forming an oxide
coating. By adjusting the process parameters, localized
novel nanostructures were obtained. These localized
structures are produced because of the Gaussian c
distribution of laser power coupled with non-equilibrium
nature of surface reaction. b
d
In laser assisted atmospheric CVD the coating precursor
used is a suitable metal organic compound dissolved in
ethanol. The precursor is atomized using an ultrasonic
particle generator to produce aerosols of 1 to 5 micron size.
Upon laser – precursor aerosol interaction, the metal
organic compound underwent vaporization without
decomposition and the vapors reacted with the oxygen
present in the atmosphere at the laser focused spot on the Fig. 4 : Laser Pyrolysis - cum - LAACVD system
substrate surface to give oxide coating. Uniform large a) Fiber optic coupled CW Nd:YAG laser
surface area coatings were obtained by rastering. A b) Laser focusing system
computerized raster stage is used for this purpose. c) Ultrasonic particle generator
Photograph of the Laser Pyrolysis cum LAACVD setup is d) Computerised rastering stage
shown

n PULSED LASER DEPOSITION (PLD)


PLD is a thin film deposition technique (Fig. 5) where a high power pulsed laser beam is focused inside a vacuum chamber
to strike a target of the desired composition. Material is then vaporized from the target and deposited as a thin film on a
substrate. This process can occur in ultra high vacuum or in the presence of a background gas, such as nitrogen which is
used when depositing nitrides. When the laser pulse is absorbed by the target, energy is first converted to electronic
excitation and then into thermal, chemical and mechanical energy resulting in evaporation, ablation, plasma formation
and even exfoliation. The ejected species expand into the surrounding vacuum in the form of a plume containing many
energetic species including atoms, molecules, electrons, ions, clusters, particulates and molten globules, before
depositing on the typically hot substrate.

Fig. 5 : Nitrogen plasma generated for nitride film synthesis, PAPLD of TiN and indigenously developed ECR plasma generator

n PUBLICATIONS ARISING OUT OF THIS STUDY AND RELATED WORK


[Link], [Link], Tom Mathews, [Link], [Link], [Link] and Baldev Raj, Surface Engineering (In Press)

Further inquiries:
Dr. Tom Mathews, Materials Science Division
Metallurgy and Materials Group, IGCAR, e-mail: tom@[Link]

71

Common questions

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An ultrasonic particle generator produces aerosols of 1 to 5 micron size, ensuring uniform distribution of precursor particles, which are crucial for consistent interaction with the laser in techniques like Laser Pyrolysis and LAACVD. This uniformity aids in controlling the reaction kinetics on the substrate surface, leading to precise formation of nanostructured coatings .

Lasers provide several advantages over flame-based energy sources: they are environmentally friendly, offering precise control over the deposition due to focused energy delivery, which enables fine patterning . Unlike flame-based techniques, which rely on broader energy distribution, lasers can target specific areas with high precision, reducing unwanted thermal damage and achieving uniformity in large area coatings through rastering .

CCVD uses open air flame as an energy source where the coating precursors interact with the flame, and flame-mediated processes help form the coating . In contrast, LAACVD employs a focused laser beam as an energy source, which allows for more localized interactions between the laser and precursor aerosol, vaporizing the precursor without decomposition and reacting it with atmospheric oxygen directly on the substrate's surface .

Combustion-CVD is effective for synthesizing nano-structured coatings with volatile metal-organic precursors under atmospheric conditions, providing a cost-efficient and environmentally friendly option . However, it may lack the precision and patterning capability of laser-based techniques like PLD and LAACVD, which allow for more controlled deposition and spatial precision, making them preferable for applications requiring highly uniform thin films or intricate patterns .

Rastering is crucial in LAACVD for achieving uniform coatings over a large surface area, as it ensures the laser covers the entire substrate systematically. This prevents localized overheating and excessive deposition at any single point, allowing for consistent interaction with the precursor aerosol and formation of an even oxide layer .

A higher ion density in PAPLD results in more effective synthesis of metal nitrides, as it enhances the reactions within the plasma and provides better energy transfer to the material being deposited. The incorporation of an ECR plasma source in PAPLD ensures superior ion densities compared to other methods, thereby achieving synthesis of difficult nitrides like cubic AlN .

Using metal nitrates as precursors in Laser Pyrolysis ensures rapid formation of oxide coatings due to their ready reaction with atmospheric oxygen upon laser interaction. They decompose at different rates compared to metal-organic precursors, providing more control over the phase and stoichiometry of the resulting oxide layers. This can be crucial for achieving desired microstructural properties in the coatings .

Laser Pyrolysis utilizes a focused laser beam to directly interact with aerosols, leading to electron excitation and thermal reactions that differ from traditional pyrolysis reliant on thermal energy alone. This leads to the formation of oxide coatings on substrates, allowing for precise control over localized structures due to the Gaussian laser distribution and non-equilibrium surface reactions .

Microwave assisted ECR plasma sources offer advantages such as high ion density, improved plasma uniformity, and enhanced energy efficiency, which are critical in achieving successful synthesis of hard-to-fabricate compounds like cubic AlN . However, limitations may include complex system setup and the need for precise control of process parameters to maintain consistent plasma conditions and avoid non-uniform growth .

In LAACVD, the precursor, typically a metal organic compound in ethanol, undergoes vaporization and reacts at the substrate surface, where concentration variations influence smoothness—lower concentrations yield smoother films . In CCVD, completely volatile metal-organic compounds ensure adherent coatings, but precursor characteristics like volatility and interaction with the flame affect the final microstructure and uniformity of the coatings .

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