Carrier Concentration in Doped Silicon
Carrier Concentration in Doped Silicon
ℏ 𝜕 ℏ𝜕
Quantum Operator (Qop): 𝑥 𝑓 𝑥 − 𝑤ℎ𝑟𝑒𝑟 ℎ = 6.63 × 10−34 𝐽𝑠
𝑗 𝜕𝑥 𝑗 𝜕𝑡 ℏ = ℎൗ2𝜋 = 1.054 × 10−34 𝐽𝑠
• The average value <Q> of any variable Q is calculated from the wave function by using the
operator form Qop defined in the above postulate.
Q * Qop dV ∞
& −∞ Ψ ∗ Ψ 𝑑𝑥𝑑𝑦𝑑𝑧 = 1: 𝑛𝑜𝑟𝑚𝑎𝑙𝑖𝑧𝑎𝑡𝑖𝑜𝑛 𝑐𝑜𝑛𝑑𝑖𝑡𝑖𝑜𝑛
𝑛 2 𝜋 2 ℏ2
⟶ 𝐸𝑛 = 2 ∶ 𝑘𝑖𝑛𝑒𝑡𝑖𝑐 𝑒𝑛𝑒𝑟𝑔𝑦 𝑖𝑠 𝑞𝑢𝑎𝑛𝑡𝑖𝑧𝑒𝑑
𝐿 2𝑚
∞
• Normalized condition: න ΨΨ ∗𝑑𝑥 = 1
−∞
∞ 𝐿
න ΨΨ ∗ 𝑑𝑥 = න 𝐴2 𝑠𝑖𝑛2 𝑛𝜋ൗ𝐿 𝑥𝑑𝑥 = 𝐴2 𝐿ൗ2 = 1
−∞ 0
⟶𝐴= 2/𝐿
2
Potential Well Problem
• compared with Free Space Quantum mechanical Tunneling
𝑛𝜋 𝑛 2 𝜋 2 ℏ2
𝑃𝑜𝑡𝑒𝑛𝑡𝑖𝑎𝑙 𝑊𝑒𝑙𝑙: 𝑘𝑛 = , 𝐸𝑛 = 2
𝐿 𝐿 2𝑚
E
E3
E2
E1
−3𝜋 −2𝜋 −𝜋 𝜋 2𝜋 3𝜋
k
𝐿 𝐿 𝐿 𝐿 𝐿 𝐿
2𝑚𝐸 𝑝2 ℏ2 𝑘 2
𝐹𝑟𝑒𝑒 𝑆𝑝𝑎𝑐𝑒: 𝑘= , 𝐸= = ,
ℏ 2𝑚 2𝑚
E
Ψ(𝑥) = 𝐴 sin 𝑘𝑥 + 𝐵𝑐𝑜𝑠 (𝑘𝑥)
k or p
3
Periodic Table
4
Electronic Structure of Si atom
5
Energy Bands
6
Energy Bands
Figure 3–3 Energy levels in Si as a function of interatomic spacing. The core levels (n = 1, 2) in Si are
completely filled with electrons. At the actual atomic spacing of the crystal, the 2N electrons in the 3s subshell
and the 2N electrons in the 3p subshell undergo sp3 hybridization, and all end up in the lower 4N states
(valence band), while the higher-lying 4N states (conduction band) are empty, separated by a band gap.
7
Energy Bands
8
Direct and Indirect Semiconductors
• The space-dependent wave function
for the electron is given by
9
E-k diagram and E-x diagram
• The E-k diagram and the (simplified) Energy band (E-x) diagram complement each other.
• The E-k diagram has no information about the position of a given electron.
• The E-x diagram does not reveal anything about the wave vector ( direction of motion).
10
E-k diagram and E-x diagram
Figure 3–9 Superimposition of the (E, k) band structure on the E-versus-position simplified band
diagram for a semiconductor in an electric field. Electron energies increase going up, while hole
energies increase going down. Similarly, electron and hole wavevectors point in opposite directions and
these charge carriers move opposite to each other, as shown.
11
Direct and Indirect Semiconductors
12
Electrons and Holes
• For T > 0 K, some valence electrons may gain enough thermal
energy to be excited to the conduction band.
- EHP(electron-hole pair) generation
- The empty state in the Ev is referred to as a hole.
• In a filled band( all states are occupied), from the E-k plot for the
Ev, for every electron moving with a given velocity, there is an
equal and opposite electron motion.
- For electron j moving with velocity vj , there is a
corresponding electron j’ with velocity -vj .
- The net current density in a volume is zero, given by
N
J (q) vi 0 (filled band)
i
13
Effective Mass
• Electron motion in a crystal: affected by the periodic potential of the lattice crystal
different from its motion in free space
• Remember
ℏ2 2
𝑝Ԧ = ℏ𝑘 𝑎𝑛𝑑 𝐸= 𝑘
2𝑚∗
∗
ℏ2
⇒𝑚 = 2 : curvature of the band in (E,k) diagram determines the effective mass.
𝑑 𝐸 Τ𝑑𝑘 2
Intrinsic Semiconductor
• A perfect semiconductor crystal with no impurities
or lattice defects.
14
Silicon
• Atomic density: 5 x 1022 atoms/cm3
• Si has four valence electrons: forming covalent bonds with four of its nearest neighbors.
15
Carrier Concentration in Intrinsic-Si
• When a conduction electron is thermally generated, a “hole” is also generated
• A hole is associated with a positive charge, and is free to move about the Si lattice.
• Band-gap energy, Eg : the amount of energy needed to remove an electron from a covalent
bond.
16
Doping: Extrinsic Semiconductor
• Si can be “doped” with other elements to change its electrical properties.
• Notation: n = electron concentration,
p = hole concentration
• Examples:
– doped with phosphorus (P): each P atom can contribute a conduction electron, so that
the Si lattice has more electrons than holes; “N type”
– doped with boron (B): each B atom can contribute a hole, so that the Si lattice has more
holes than electrons; “P type”
17
Extrinsic Semiconductor: doped semiconductor
Semiconductor Ge Si GaAS
Bandgap, Eg(eV) 0.67 1.12 1.42
Dopant P As B In
Ionization energy (meV) 45 54 45 160
Ec-Ed or Ea-Ev
Equilibriu m Concentration
n0 p0 ni : mass action law
2
(notice n0 p0 ni )
18
Charged Carriers in Si
19
Electron and Hole concentrations
• Under thermal equilibrium conditions, the product of the electron density(n0) and the hole
density(p0) is equal to the square of ni:
n0 p0 ni
2
Terminology
• Interstitial impurity: impurity atom may be located between lattice sites
• Substitutional impurity: impurity atom may be located at normal lattice sites
• Vacancy: an atom may be missing from a lattice site
• Donor: impurity atom that increases n
• Acceptor: impurity atom that increases p
• N-type material: contains more electrons than holes
• P-type material: contains more holes than electrons
• Majority carrier: the most abundant carrier
• Minority carrier: the least abundant carrier
• Intrinsic semiconductor: no impurities, no defects, n0 = p0 = ni
• Extrinsic semiconductor: doped semiconductor
• Thermal equilibrium: no net flows of matters or of energy, no phase change, and no
20
unbalanced potentials ( or driving forces)
Carrier Concentration
• Density of States(DOS):
− N(E)dE ( or g(E)dE ) = Number of states per cm3 in the energy range between E and E+dE
𝑚𝑛∗ 2𝑚𝑛∗ (𝐸 − 𝐸𝑐 )
𝐸 ≥ 𝐸𝑐
𝜋 2 ℏ3
𝑁 𝐸 =
𝑚𝑝∗ 2𝑚𝑝∗ (𝐸𝑣 − 𝐸)
𝐸 ≤ 𝐸𝑐
𝜋 2 ℏ3
21
Carrier Concentration
• Fermi-Dirac distribution:
− The statistics of indistinguishable particles obeying the Pauli exclusion principle
1
− Fermi-Dirac distribution function: f (E)
E EF
1 exp
kT
− The probability that an available energy state E is occupied by an electron at absolute
temperature T.
− EF: Fermi level, an energy state at the Fermi level has a probability of ½ being occupied
by an electron
22
Carrier Concentration: Doping Effect
24
Carrier Concentration
Represent all the distributed electron states in the conduction band by NC located at the C. B. edge so that
n0=NCf(EC): total electron concentration in Ec
1
𝑓 𝐸 = ≈ exp −(𝐸 − 𝐸𝐹 /𝑘𝑇] if(𝐸 − 𝐸𝐹 ) ≫ 𝑘𝑇 = 25.9𝑚𝑒𝑉 𝑎𝑡 300𝐾
1 + exp (𝐸 − 𝐸𝐹 /𝑘𝑇]
𝐸𝑐 →∞ 3/2
1 𝑚𝑛∗
𝑛 = න 𝑓 𝐸 𝑁 𝐸 𝑑𝐸 = න 𝐸 − 𝐸𝑐 𝑒 −(𝐸−𝐸𝐹 )/𝑘𝑇 𝑑𝐸 ← 𝑙𝑒𝑡 𝑥 = (𝐸 − 𝐸𝐹 )/𝑘𝑇
𝐸𝑐 2𝜋 2 ℏ2
∞
4𝜋 2𝑚𝑛∗ 𝑘𝑇 3/2
1 (𝐸𝐹 −𝐸𝑐 )/𝑘𝑇
= 𝑒 න 𝑥 1/2 𝑒 −𝑥 𝑑𝑥 = 𝑁𝐶 𝑒 (𝐸𝐹 −𝐸𝑐 )/𝑘𝑇 ,
ℏ3 0
3/2
2𝜋𝑚𝑛∗ 𝑘𝑇
𝑤ℎ𝑒𝑟𝑒 𝑁𝐶 = 2 : 𝑒𝑓𝑓𝑒𝑐𝑡𝑖𝑣𝑒 𝑑𝑒𝑛𝑠𝑖𝑡𝑦 𝑜𝑓 𝑠𝑡𝑎𝑡𝑒 𝑎𝑡 𝐸𝑐
ℏ2
- Gamma Function and Indefinite Integrals
( n) x n 1e x dx
0
(1 / 2) x 1/ 2 e x dx 2 exp(u 2 )du (by letting x u 2 , dx 2udu)
0 0
(1 / 2) (2 exp(u 2 )du)(2 exp(u 2 )du) 4 exp((u 2 v 2 ))dudv
2
0 0 0 0
changing to polar coordinate systems.t.u cos , v sin
/2 /2
4 exp( 2 ) dd 4 (1 / 2) exp( 2 ) d
0 0 0 0
(1 / 2)
Similarly,
1 1 1
0
x1/ 2 e ax dx
a a
0
y1/ 2 e y dy
a a
(3 / 2)
2a a
(1 / 2)
2a a
1 3 5 (2m 1)
(m 1 / 2) , m 1,2,3,...
2m
25
Carrier Concentration
- Equilibrium Concentrations
Electrons : n0 N C exp[( EC EF ) / kT ]
Holes : p0 NV [1 f ( EV )] NV exp[( EF EV ) / kT ]
3/ 2
2m*p kT
NV 2 : Effective density of state at V.B. edge E V .
h2
Let the intrinsic Fermi level as E i . Then, for intrinsic material, the intrinsic carrier concentrations are
ni N C exp[( EC Ei ) / kT ]
pi NV exp[( Ei EV ) / kT ]
n0 N C exp[( EC EF ) / kT ] ni exp[(EF Ei ) / kT ]
p0 NV exp[( EF EV ) / kT ] ni exp[(Ei EF ) / kT ]
26
Carrier Concentration: ni
27
Equilibrium Concentrations
• Intrinsic Fermi level, Ei :
− Derivation: in an intrinsic semiconductor, n0=p0
𝑛0 = 𝑁𝐶 𝑒 (𝐸𝐹 −𝐸𝑐 )/𝑘𝑇 = 𝑁𝑉 𝑒 −(𝐸𝐹 −𝐸𝑣 )/𝑘𝑇 = 𝑝0
𝐸𝑐 + 𝐸𝑣 𝑘𝑇 𝑁
⇒ 𝐸𝐹 = + ln 𝑉ൗ𝑁 ≡ 𝐸𝑖
2 2 𝐶
𝐸𝑐 + 𝐸𝑣 3𝑘𝑇 𝑚𝑝∗ 𝐸𝑐 + 𝐸𝑣
⇒ 𝐸𝑖 = + ln ൘ ∗ ≅
2 4 𝑚𝑛 2
• Determination of EF
n
n0 ni exp[(EF Ei ) / kT ] EF Ei kT ln 0
ni
p
p0 ni exp[(Ei EF ) / kT ] EF Ei kT ln 0
ni
• Example: ND=1017/cm3
28
Equilibrium Concentrations
• Nondegenerate/degenerate semiconductor
− calling back that the expressions of n and p were derived using the Boltzmann approximation
Ev 3kT E F EC 3kT
− Terminology:
• n+ : degenerately n-type doped, EF ≈ EC .
• p+ : degenerately p-type doped, EF ≈ EV .
29
Equilibrium Concentrations: Temperature Dependence
ni>ND: intrinsic carrier dominates (thermal EHP generation)
Electrons donated to Ec
30
Space Charge Neutrality and Compensation
• ND : donor concentration and NA : acceptor concentration
31
Invariance of the Fermi Level at Equilibrium
1 to 2 N1 ( E ) f1 ( E ) N 2 ( E )[1 f 2 ( E )]
f1 f1 f 2 f 2 f1 f 2 f1 f 2 EF1 EF2
2 to 1 N 2 ( E ) f 2 ( E ) N1 ( E )[1 f1 ( E )]
32
Drifts of Carriers in Electric Field
• The carriers and atoms are always in random thermal motion
− Lattice scattering ( or phonon scattering) : electrons collide
with the vibrating atoms, increase as the temperature
increases.
− Thermal velocity, vth : ~ 2.3107 cm/s at 300K.
3 1
kinetic energy
kT mn*vth2
2 2
3kT 3 0.026 eV 1.6 1019 J / eV
vth *
2.3 107 cm/s
mn 0.26m0
33
Drifts of Carriers in Electric Field
• : the average mean free time between the scattering events
• dt / : The probability that a carrier will be scattered in time
interval dt
• Between collisions, electrons are accelerated by : E
vd vd 0 (qE / m) vd q * E : drift velocity
mn
vd
n q * n : electron mobility (cm 2 /V s)
mn E
vd p
p q * : hole mobility (cm 2 /V s)
m E
p
• Electron and hole mobilities of intrinsic semiconductors at 300 K:
34
Effects of Temperature and Doping on Mobility
• If these two scattering events are independent;
dt dt dt 1 1 1
I L I L
35
Effects of Temperature and Doping on Mobility
• (ionized) Impurity scattering
− scattered by a charged ion.
− dominant at low temperature
− as the impurity concentration increases, the
number of impurity scattering centers
increases, thus reducing mobility.
36
Drifts Currents
• Current: the amount of charge crossing a plane per unit time.
• Drift current is proportional to the carrier velocity and carrier concentration:
v p tA volume whereall holes crossplane in time t
p v p tA # of holes crossing plane in time t
qp v p tA charge crossing plane in time t
qp v p A charge crossing plane per unit time hole current
qp v p
hole current/unit area(i.e. hole current density) J p ,drift
J p ,drift qp p E (hole current density), J n ,drift (q)n( n E ) (electron current density)
Jx 1
E y v x Bz Bz RH J x Bz RH : Hall Coefficient
qp0 qp0
J ( I / wt ) Bz I B
p0 x B z x x z
qE y q (VAB / w) qtVAB
Rwt VCD / I x
ρ ( 1 / 1 / q p p0 )
L L / wt
R
μp H : measurement of R H and ρ
qp0 ρ
38
Terminology
• Allowed energy band: a band or range of energy levels that an electron in a crystal is allowed to
occupy based on quantum mechanics.
• Density of states function: the density of available quantum states as a function of energy [# /eVcm3 ]
• Electron(hole) effective mass: the parameter that relates the acceleration of an electron in the
conduction (valence) band of a crystal to an external force; a parameter that takes into account the
effect of internal forces in the crystal.
• Fermi-Dirac probability function: the function describing the statistical distribution of electrons
among available energy states and the probability that an allowed energy state is occupied by an
electron
• Fermi energy: the energy below which all states are filled with electrons and above which all states
are empty at T=0K.
• Compensated semiconductor: a semiconductor that contains both donors and acceptors in the same
region.
• Drift velocity: the average velocity of charged carriers in the presence of electric field.
• Ionized impurity scattering: the interaction between a charged carrier and an ionized impurity atoms.
• Lattice scattering: the interaction between a charged carrier and a thermally vibrating lattice atom.
39
Generation and Recombination
40
Direct Recombination of Electrons and Holes
• Carrier Lifetime : Direct recombination of electrons and holes:
Assume n(t) and p(t) are given
- Thermal generation rate of EHP : αr ni2
- Recombination rate : αr n(t )p(t )
dn (t )
Then, α r ni2 α r n(t )p(t )
dt
41
Indirect Recombination: Trapping
42
Quasi-Fermi Level: in case of steady state carrier generation
• The Fermi level EF is meaningful only under the thermal equilibrium condition.
n0 ni ex p[(E F E i ) / kT ], EC E i E g / 2 if NC NV
p0 ni ex p[(E i E F ) / kT ]
• Under steady state, introduce a quasi-Fermi level, Fn or Fp to express the steady state
concentrations such that
n
n ni exp[(Fn Ei ) / kT ] Fn Ei kT ln
ni np n 2 exp[(F F ) / kT ]
p i n p
p ni exp[(Ei Fp ) / kT ] Fp Ei kT ln
ni
43
Quasi-Fermi Level: in case of steady state carrier generation
44
Diffusion Current
•Due to thermally induced random motion, mobile particles tend to
move from a region of high density to a region of low density.
•Current flow due to mobile charge diffusion is proportional to the
carrier concentration gradient.
•The proportionality constant is the diffusion constant, D.
Let : as a mean free time, l : as a mean free path;
l / vth
The flux 1 ( rate of electron flow passing x0 from left) in time
1 (1 / 2)nL l / (1 / 2)nL vth
The flux 2 (rate of electrons passing x0 from right) in time
2 (1 / 2)nR l / (1 / 2)nR vth
The flux (rate of electrons passing x0 from left to right) in time
1 1 dn( x)
n ( x0 ) (nL nR ) vth vth l
2 2 dx
1 l2
Diffusion coefficient D vth l [cm 2 / s]
2 2
dn dn
• The diffusion current density: J n (diff .) (q) Dn qDn qDnn
dx dx
dp dp
J p (diff .) (q) D p qDp qDpp
dx dx
45
Diffusion Current: profile dependence
x
Linear profile : p N0 1
L
0 dp N
J p ,diff qDp qDp 0 : constant diff. current
dx L
0
dp qDp N 0 x
J p ,diff qDp exp : varying diff. current
dx Ld d
L
46
Diffusion and Drift of Carriers: Built-in Fields
• In the presence of the carrier gradient and an electric field, drift and diffusion components are
contributed to the total current :
dn dp
J ( x) J n ( x) J p ( x) q( n n p p) E q( Dn Dp )
dx dx
dn dp
J n ( x) q n nE qDn , J p ( x) q p pE qDp
dx dx
47
Diffusion and Drift of Carriers: Band-bending
• Potential vs. kinetic energy: EC represents the electron potential energy.
• The potential energy of a particle with charge -q and the electrostatic potential V(x): P.E. = - qV
K.E. E
Ev
hole K.E. V(x)
1V
ERef x
0
1
P.E. EC ERef qV V ( ERef EC )
q
dV ( x) 1 dEC 1 dEV 1 dEi
E ( x)
dx q dx q dx q dx
48
Diffusion and Drift of Carriers: Einstein Relationship
•Assume: nondegenerate, nonuniformly doped semiconductor under equilibrium conditions.
•Note: The built-in fields accompany gradients in Ei. Such gradients in the bands at equilibrium (i.e.
EF const.) can arise when the band gap varies due to changes in alloy composition. More
commonly, built-in fields result from doping gradients.
49
Continuity Equation
• Rate of hole build up between x and x+x: (p / t )
• Recombination rate: p / p
p 1 J p ( x) J p ( x x) p
t x x x q x p
50
Minority Carrier Diffusion Equation
•Minority carrier diffusion equation:
- If the current is solely by diffusion and under steady state condition,
p 2p p x / L
2 p( x) pe p
D p p x 2
Lp
x / Lp
e
x x dx L p : the average distance that a hole diffuses before recombination
0 Lp
dp Dp x / L Dp
J p ( x) qD p q pe p q p( x)
dx Lp Lp
51
Gradients in the Quasi-Fermi Levels
dn( x)
• J n ( x) q n n( x) E ( x) qDn
dx
1 dEi
E( x )
q dx
D kT
: Einstein Relation
q
n ni exp[(Fn Ei ) / kT ], where Fn : quasi - Fermi level for electrons
dF dE
J n ( x) q n n( x)E( x) n n( x) n i
dx dx
dF d F d F
n n( x) n q n n( x) n n ( x) n : modified ohm's law
dx dx q dx q
d Fp d Fp
J p ( x) q p n( x) p ( x)
dx q dx q
52
Terminology
• Generation: The process of elevating electrons from the valence band into the conduction band, creating an
electron-hole pair.
• Recombination: The process whereby an electron falls into an empty state in the valence band (a hole) so that an
electron-hole pair is annihilated.
• Direct band gap semiconductor: the minimum conduction band energy and maximum valence band energy occur at
the same k value; transitions between the two allowed bands can take place with no change in crystal momentum.
• Indirect band gap semiconductor: the minimum conduction band energy and maximum valence band energy do not
occur at the same k value; a transition have to include an interaction with the lattice so that crystal momentum is
conserved.
• Low-level injection: The condition in which the excess-carrier concentration is much smaller than the thermal
equilibrium majority carrier concentration.
• Quasi Fermi-level: The quasi-Fermi level for carriers relate to nonequilibrium carrier concentration to the intrinsic
carrier concentration and the intrinsic Fermi level.
• Minority carrier diffusion length: The average distance a minority carrier diffuses before recombining, a parameter
equal to (D)1/2 where D and are the minority carrier diffusion coefficient and lifetime, respectively.
• Minority carrier lifetime: The average time that an excess minority carrier exists before it recombines.
• Thermal equilibrium: There are no net flows of matters or of energy, no phase change, and no unbalanced potentials
( or driving forces)
53
Unit of energy: eV
• Consider a parallel plate capacitor with an applied voltage as shown in the figure.
• Assume that an electron is released at x=0 and at t=0.
dv qEt qEt 2
F m0 a m0 qE v and x - V +
dt m0 2m0
• Assume that at t=t0 the electron reaches the positive plate so that x=d;
2 E
qEt0 2m0 d qEt0 2qEd
d t0 v(t0 )
2m0 qE m0 m0
• The kinetic energy of the electron at this time is x=0 x=d
1 1 2qEd
K .E. m0v(t0 ) 2 m0 qEd qV
2 2 m0
• If an electron is accelerated through a electrostatic potential differential of 1V, then the K.E. is
K .E. qV 1.6 10 19 C 1V 1.6 10 19 J
• The electron-volt (eV) unit of energy is defined as
K .E. 1.6 10 19 J 1 eV
54