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AR-Coatings via Plasma Ion Deposition

PIAD uses plasma ion assisted deposition to coat surfaces. It involves electron beam evaporation combined with an argon plasma source, where argon ions densify the evaporated material to improve its properties. The argon plasma increases the reproducibility of the coating process.

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shameer basha
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5 views1 page

AR-Coatings via Plasma Ion Deposition

PIAD uses plasma ion assisted deposition to coat surfaces. It involves electron beam evaporation combined with an argon plasma source, where argon ions densify the evaporated material to improve its properties. The argon plasma increases the reproducibility of the coating process.

Uploaded by

shameer basha
Copyright
© All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd

AR-Coatings by PIAD

• Plasma Ion Assisted Deposition (PIAD)


– electron beam evaporation with
plasma support
– Ar-plasma
– argon-ions densify the layers to
improve their properties
– plasma increases reproducibility

Ar Plasma
source

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