Magnetic

Fluid Seal

CAT No.N004E-11122
Design specifications tailored to client requirements
The NOK group produces the full range of vacuum seal components including O-rings,
bellows, bearing lubrication grease and magnetic fluids (see diagram).
This enables us to tailor our products to the precise design requirements of individual clients.

Typical configurations ■ Multi-axial (two or three shafts)

■ Reciprocating (bellows seal)
■ Pressurized

Typical twin-axial reciprocating vacuum seal

Magnetic fluid seals (EKK) Vacuum

O-rings (NOK)
Metal seals (EKK)

Welded metal bellows (EKK)

Magnetic fluid (NOK)

Bearing lubrication grease

(KLM・NKL) Atmosphere

EKK： EAGLE INDUSTRY CO.,LTD

NOK： NOK CORPORATION
KLM： KLÜBER LUBRICATION MÜNCHEN SE & CO. KG
NK L： NOK KLÜBER CO.,LTD

1
Uses of the magnetic fluid seal

LPCVD Roll coaters

Spin chucks Turntables

Substrate
transport robots Ion implanters

Vacuum heat
treatment systems Silicon pullers

Magnetic fluid seals from Eagle Industry are employed in a wide range of industrial applications including
manufacturing (typically semiconductors, LCD panels, solar panels and LED devices) as well as industrial machinery,
analyzers and clean robots. Our high-performance and high-reliability seals have been adopted throughout the world.

2
What is magnetic fluid?
Essentially, magnetic fluid is a liquid that is attracted to magnets—in other words,
a magnetized liquid.
Magnetic fluid consists of three components:
(1) magnetic particles, (2) surfactant and (3) a base liquid.
The performance of a magnetic fluid seal is largely dependent on the properties of the magnetic fluid.
Without surfactant, the very small magnetite (Fe3O4) particles (approximately 0.01μm) tend to separate and
settle and do not remain evenly mixed with the base liquid. The surfactant envelops the magnetic particles and
causes them to oppose one another within the base liquid. This prevents settlement and maintains a uniform
distribution of particles (see diagram below).
Eagle Industry boasts an extensive understanding of the many parameters of magnetic fluids including
particle size, surfactant structure, molecular weight and particle absorption, base liquid purity, surfactant
compatibility and dispersion characteristics. These parameters are carefully tailored to produce optimized
magnetic fluids for different applications.
Base liquids are designed and manufactured within the NOK group.
One of the major strengths of Eagle Industry magnetic fluids is that all of the constituent components are
designed and manufactured within the NOK group. Our products offers superior high-temperature durability,
corrosion resistance, plasma resistance and very low-temperature outgassing performance compared to
competitors' products.
Magnetic fluid seals from Eagle Industry utilize magnetic fluids that have passed a stringent final quality
testing process prior to delivery.

Fe3O4 Fe3O4

Fe3O4

Fe3O4
Fe3O4

(2)Surfactant (1)Magnetic
particles
(3)Base liquid

Spiking
When a magnet is brought close to magnetic
fluid, the magnetic fluid attempts to orient
itself with the magnetic force lines. This acts
in opposition to interfacial tension,
resulting in the phenomenon known as
spiking (see photograph).

3
 Magnetic fluid selection table
Product code 3019 3512 3551 3576
Base liquids Alkyl naphthalene Perfluoropolyether

Saturation magnetization
32 35 35 35
（at 25℃） mT
Viscosity
mPa・s 220 3500 ＜10000 ＜10000
（at 25℃）
Vapor pressure
Pa 3.0 E−7 6.0 E−8 4.0 E−13 7.5 E−15
（at 20℃）
Ultra higt vacuum
Application General purpose For activated gases
environments/Heat resistant
Dust seals/
Common uses Dust seals Vacuum seals Vacuum seals
Vacuum seals
* Magnetic fluid is not sold High performance
as a stand-alone product.

Vapor Pressure Chart of Magnetic Fluid

10 -4

10 -6
Vapor pressure

10 -8
EKK 3551
Features of Eagle Industry
10 -10 magnetic fluids
（Pa）
・Excellent heat resistance ̶ no need to
10 -12 provide cooling equipment/structures*
EKK 3576 This also helps to minimize by-products
10 -14
associated with localized cooling of CVD
equipment.
・Allows extremely high vacuum
10 -16
0
environments to be generated via direct
20 50 100 150 200
exhaust (i.e. without differential pumping)
Temperature（℃）
・Low outgassing
・Excellent corrosion and plasma resistance

* Eagle Industry will be happy to recommend the best

process setup and magnetic fluid for your particular
operating environment and objectives. To apply, simply
fill in the Magnetic Fluid Seal Design Request attached
to this catalog (general specifications are acceptable)
and present it to your nearest dealer or distributor.

4
What is a magnetic fluid seal?
Pole Piece Magnet The term magnetic fluid seal is a generic term used to
describe all seals that employ magnetic fluids.
Magnetic Housing A magnetic fluid seal is filled with magnetic fluid that is
Flux Lines
oriented with the magnetic force lines created by the
Shaft shaft, magnet and pole pieces. The sealing action is
provided by a sealing skin called the liquid O ring that
Magnetic is formed by the magnetic fluid.
Fluid
Magnetic fluid seals have superior longevity to solid
seals as well as lower torque due to the absence of
abrasion. However they are not suitable for use with
liquids such as water.

About magnetic fluid vacuum seals

Pole Piece
A magnetic fluid vacuum seal is a special type of
Atmosphere
magnetic fluid seal used to keep a vacuum.
Magnetic fluid vacuum seals are used for delivering
rotational power to vacuum chambers, typically
in electronic manufacturing systems (such as
semiconductors) and analysis equipment.
Since pressure resistance of one atmosphere
Magnetic (101.3 kPa) cannot be achieved via a single stage,
Flux Lines a multi-stage design is used. Where the pressure
Vacuum Magnet differential exceeds the resistance of a stage, gas
Magnetic Fluid passes through the magnetic fluid, which then
repairs itself. As this process occurs at successive
stages, the pressure is apportioned between the
stages, creating an equilibrium that maintains the
seal. Note that if vacuum pumping is performed too
Magnet
quickly, the self-repair function cannot keep up and
Housing Static O-Ring Pole Piece
the magnetic fluid bursts.
Bearing
Some seals feature multiple shafts in a coaxial or
Vacuum Atmosphere parallel configuration.

Shaft Projection

Magnetic Magnetic Fluid

Air
Flux Lines
P1 P2 P3 P4

Initial state Start of evacuation

P1＝ P２ P3 ＜ P4

5
About magnetic fluid seals
Magnetic fluid is a colloidal liquid consisting of nano-sized magnetic particles distributed through
a liquid body. As the name suggests, magnetic fluid is attracted to magnetic bodies.

Magnetic fluid was originally developed in 1965 by S. S. Papell from NASA (National Aeronautics
and Space Administration) as a rocket fuel propulsion technology for weightless environments(1).
Subsequent modifications and enhancements have seen magnetic fluids adopted in a wide range
of applications from the everyday to the cutting-edge.

A magnetic fluid seal is a type of seal that utilizes magnetic fluid.

Dust seals and vacuum (or hydraulic) seals generate minimal levels of dust, friction and
contamination and provide excellent heat and plasma resistance. As such, they are extensively
used in clean production environments, typically for manufacturing semiconductors, LCD panels,
solar panels and LED components.

Timeline of magnetism research and

magnetic fluid seals at Eagle Industry
1984 NOK Corporation launches research on in-house production of
magnetic fluid products.

1988 Commences production and distribution of dust seals.

1990 Commences production and distribution of vacuum seals.

1996 Develops magnetic fluid 3551 featuring low vapor pressure and
high heat resistance. Announces vacuum seals rated to E-8Pa.
(see page 4)

1999 Announces magnetic fluid 3576, an improved version of 3551.

Commences production and distribution of vacuum seals for
extremely high vacuum environments (E-13Pa).

2002 NOK Corporation transfers production operations to group

company Eagle Industry Co., Ltd..
Eagle Industry commences production and distribution of
magnetic fluid 3576.

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General purpose through to extremely high vacuum specifications
Table of dimensions (for reference)
Features
■ Pressure (vacuum): E− 6Pa (at R.T.)
■ Allowable He leakage:
less than 9.9E−11Pa・m3/s
■ Operating temperature:
from room temperature to 160 °C
■ Usage environment: reactive gases/inert gases

Table of dimensions (for reference)

ISF type
L H Symbol ISF010 ISF020 ISF030 ISF040
A 10h7 20h7 30h7 40h7
B 115 139 167 194
C 65 70 77 84
J
D 44 58 73 84
E 25 35 45 55
φF

K
φD

F 80 105 120 145

(x 2)
φA

G 10 10 10 12
H 4-φ10 4-φ10 4-φ10 6-φ10
（PCD60） （PCD85） （PCD100） （PCD120）
Coolant
screw holes I 14 25 32 45
J 1.8 3.5 4 5
G M K 3 6 8 12
E C I L V34 V55 V70 V85
B
M 14 16 21 23
* W suffix on model number denotes water-cooled type.
Example: ISF010W
* Dimensions subject to change without notice.

IHF type
L H

Symbol IHF010 IHF020 IHF030 IHF040 IHF050 IHF075

N A 10H7 20H7 30H7 40H7 50H7 75H7
B 75 80 92 94 96 113
C 63 68 80 80 82 96
D 51 63 78 88 103 143
φD

E 34 44 54 69 79 118
φE
φF

F 90 105 120 145 160 210

(x 2)
φA

G 10 10 10 10 12 12
H 4-φ10 4-φ10 4-φ10 6-φ10 6-φ12 8-φ12
（PCD70）（PCD85） （PCD100） （PCD120） （PCD135） （PCD185）
Coolant L V40 V55 V70 V85 V100 V150
screw holes
M 14 15.5 23 23 21 28
N S10 S20 S30 S40 S50 S75
G M
* W suffix on model number denotes water-cooled type.
C
Example: IHF010W
B * Dimensions subject to change without notice.

7
Extremely high vacuum specifications
Table of dimensions (for reference)
Features
■ Pressure (vacuum): E−9Pa (at R.T.)
■ Allowable He leakage:
less than 9.9E−12Pa・m3/s
■ Operating temperature:
from room temperature to 220 °C
■ Usage environment: reactive gases/inert gases

Table of dimensions (for reference)

ASF type
L H

J
φF

K
φD
(x 2)
φA

Coolant screw holes

G M
E C I
B

Symbol ASF010 ASF020 ASF030 ASF040 ASF050

A 10h7 20h7 30h7 40h7 50h7
B 129 164 191 217 241
C 79 94 101 107 112
D 44 63 78 91 106
E 25 35 45 55 65
F 70 114 152 152 152
G 13 18 21 21 21
H 6-φ6.6 8-φ8.4 16-φ8.4 16-φ8.4 16-φ8.4
（PCD58.7） （PCD92.1） （PCD130.2） （PCD130.2） （PCD130.2）
I 14 25 32 45 55
J 2.5 3.5 4 5 6
K 4 6 8 12 16
L ICF70 ICF114 ICF152 ICF152 ICF152
M 9 9 9 9 9
* W suffix on model number denotes water-cooled type. Example:ASF010W
* Dimensions subject to change without notice.

Vacuum seals can be designed to other configuration or specifications as required.

Contact your local dealer or distributor for more information.

8
Dust seal
Dust seals are used to shut out dirt and
contaminants from the atmosphere, as well as
contaminants generated by bearing grease. A
dust seal consists of a magnet, two pole pieces
and a shaft, which form a magnetic circuit that
holds magnetic fluid in the gaps between the shaft
and the pole pieces.

Features
Pole Piece Magnet
■ Pressure differential: 1kPa（10kPa）
■ Operating temperature:
Magnetic
from room temperature to 160°C ( 220°C ) Flux Lines
■ Circumferential velocity: ∼ 3m/s ( ∼ 6m/s)
Magnetic
Fluid
■ Usage environment:
reactive gases/inert gases Shaft

Table of dimensions (for reference)

Shaft diameter Dust seal Seal thickness

outer diameter
φA（mm） φB（mm） C（mm）
10 20 4
20 30 4
30 40 4
40 50 5
50 60 5
φB
φA

60 70 5
70 80 5
80 90 5
90 100 5
100 120 6
110 130 6
120 140 6
C 130 150 6
140 160 6
150 170 6
160 180 6
170 190 6
180 200 6
* Dimensions subject to change without notice.

9
Use and handling of dust seals

Dust Seal

Syringe Magnetic Fluid

Shaft
Needle

1. Dust seals and magnetic fluids should be stored in a cool location with low humidity and not in direct
sunlight.
2. Do not mix magnetic fluid with other liquids.
3. Take care to avoid oil, grease and magnetic particle spills during use.
4. Use a suitable solvent to remove any grease or oil on the shaft surface.
5. Attach dust seals to housing using O-rings or adhesive to ensure a secure fit and a good seal.
6. Extract magnetic fluid from the container using the magnetic fluid syringe (optional).
Take care to prevent air from entering the syringe.
Air can affect measurement accuracy, which in turn can compromise the performance of the dust seal.
If the magnetic fluid does not draw easily into the syringe, try warming the container first.
7. Apply magnetic fluid to the gaps between the shaft and the dust seal (or pole pieces).
The correct quantities are indicated on the delivery drawings.
8. Use a suitable solvent to clean the syringe.

[Option] Magnetic fluid syringe

The magnetic fluid syringe (optional extra) provides a clean, easy, accurate and efficient means of applying
the magnetic fluid.
■ Quantity: 500 μ3
■ Scale increments: 5 μ3
■ Needle (outer x inner diameter):
ø0.71×ø0.41mm
■ Needle length: 51mml

10
Comparison Properties
Particle necessity
Temperature Rotation Torque generation of bearing
Vacuum
(degree C) speed transmi- Rate Longevity support in Basic Structure
Level (size more vacuum
*No Cooling Level ssion
than 0.1μm) chamber

Ultra high Very

High
Vacuum Long
Magnetic
up to 200℃ High (depends Very Low ̶
Fluid Seal (depends (depends
on Shaft
on magnetic on Bearing
atrenght)
fluid spec.) spec.)

High
Vacuum up to 850℃ Low High
Magnet
Low Long Necessary
Coupling (depends (depends (Lost (depends
on Bearing on Bearing motion) on Bearing
spec.) spec.) spec.)

High High Short

High
Oring Seal Vacuum
up to 50℃ Low (depends (depends (depends ̶
on Shaft on Bearing on Bearing
atrenght) spec.) spec.)

High
High
Oil Seal Vacuum
up to 50℃ Low (depends High Short ̶
on Shaft
atrenght)

11
Usage and handling tips for magnetic fluid seals
Usage and handling tips
1. Solvents or other fluids (such as acetone, 8. Keep seals away from magnets and magnetized
alcohol, water and oils) or contaminants (such devices such as speakers, since magnetism
as solids and dust particles) inside a magnetic can affect sealing performance.
fluid seal can impact on performance. Take
care to protect the seals from contamination. To 9. When using a vacuum seal for the first time,
or when generating a vacuum after a long
clean the exterior of the seal, use a clean room
period of non-use, there may be a slight initial
wiper impregnated with a small quantity of
increase in pressure. Also, starting torque
ethyl alcohol. Note that too much ethyl alcohol
and loss torque tends to increase with the
on the wiper can cause drips, which could length of time that the seal is unused or in
contaminate the seal and affect performance. storage. These phenomena are associated with
partial pressure balance and segmentation of
2. Leak testing should be performed using an He magnetic fluid. For best results, the seal should
leak tester. Never use alcohol or solvents for be acclimatized with at least 20 rotations prior
leak tests. Solvents can contaminate the seal to generating a vacuum.
and affect performance.
10. W h e re t h e c h a m b e r o f a re a c t i ve g a s
3. Do not exceed the rated pressure (98 kPa vacuum seal is released to the environment,
for vacuum seals, or for pressurized seals, a cycle purge with N2 gas is recommended
the maximum pressure stated on the delivery in order to improve the consistency of sealing
specifications or delivery drawings). performance.

4. Magnetic fluid seals designed for inert gases 11. Seals should not be stored in locations that
should not be used with reactive gases. are humid, dusty, or subject to extremes of
temperature. Ideally, seals should be kept
Reactive gases may affect performance and/
in a clean room or other environment with
or cause damage to structural components.
temperature and humidity control. Do not open
Similarly, seals designed for use with reactive
the vacuum packaging until ready to install the
gases should only be used with the gases seal.
listed on the delivery specifications or delivery
drawings. Non -listed gases may have an
adverse effect on magnetic fluid and sealing Operating instructions
performance.
1. Do not touch the product while in operation.
5. Magnetic fluid seals must not be subjected to
shock, such as being dropped or struck with [Link] a vacuum seal is suspected of causing
a hammer, since sudden shock can cause abnormal pressure, stop the equipment and
damage to the internal bearings and structural perform an He leak test. If the vacuum seal
is found to be faulty, remove and replace
components. If a seal is dropped, check
immediately.
carefully for signs of damage. A damaged seal
should be replaced immediately. Remember 3. In the event of bad rotation, stop the equipment
that internal damage and deformation may not and turn the shaft by hand. If the rotation is
be externally visible. found to be faulty, replace the seal.

6. When attaching a seal to equipment, center 4. Ifthe seal is dropped or otherwise subjected
the seal first and use a coupling mechanism to to a strong external force, stop the device
connect it. When a seal is poorly centered, load immediately and perform a leak test. Also turn
imbalance may affect performance. the shaft by hand. If rotation is found to be
faulty, replace the seal.
7. Water-cooled seals should be cooled using 1
- 3 liters per minute of ordinary mains water or ・Do not modify or dissemble magnetic fluid seals.
equivalent coolant at normal temperature, taking ・In the event of a fault or defect, do not attempt to
care to avoid condensation. Condensation on dissemble the seal. Contact Eagle Industry directly
the seal can affect performance and prevent for advice.
・Any attempt to modify or dissemble a seal will void
normal rotation.
the warranty.

12
Design Information Form for EKK Magnetic Fluid Seals
Date:

Your Name

Title

Company

Address

Phone FAX

Email Address

Equipment （                       ）  Number of pieces per an equipment（    ）

SOP From（    ）year（    ）month  （    ）pieces per  □ a month ・ □ a lot

Seal for □ Vacuum  □ Pressure  □ Dust（What kind of dust?                   ）
Temperature range of seal device（          ∼          ）℃ Usual（       ）℃

Gas （What kind of Gases?                    ） □ Inert gas ・ □ Active gas

Mouting direction □ Vertical（Vacuum side □ up side ・ □ down side ） ・ □ Horizontal
Number of axis □ One ・ □ Two ・ □ Three ・ □ More（                   ）
Rota ti on

Motion □ Rotation ・ □ Angular Deflection（Angle:                      ）

Rotation speed （        ,       ,        ） □ rpm ・ □ Hz
Start time （                      ）rpm/sec

Stroke （                      ）mm
Reciprocation

Motion speed （                      ）/    □ min ・ □ Hr

Life （                      ）cycles

Pressure Ultimate pressure（                   ）    □ Pa  ・ □ Torr

Operation Pressure（                   ）    □ Pa  ・ □ Torr
Differential Pressure （                      ）    □ kPa ・ □ kgf/cm2
Permitted Helium Leaking Volume（                  ）    □ Pa・m3/sec ・ □ Torr・l/sec
Water Cooling System □ Need  ・  □ Not Need
Starting Torque  （                      ）    □ N・m ・ □ kgf・cm
Material (if special material required)（                                       ）

Surface coating(If special coating required)（                                     ）

•Please complete as much of the form as possible.

13
Diagrammatic illustration of measurement and loading

mm Radial load Shaft type

N □ Hollow shaft
mm □ Solid shaft

Flange Dia. mm

Shaft Dia. mm
mm
Axial load
Shaft
N
mm

mm

Housing

mm

Shaft

mm
mm

Shaft Dia. mm

Radial load

Memo

14
 Please contact below for any questions regarding our MFS.
If technical or design information is required please fill out the design information sheet.

Niigata (JAPAN)
Tokyo (JAPAN) San Jose (USA)

-For Semiconductor, FPD and PV industry- -For other industries-

〈Japan & Korea〉
EagleBurgmann Japan Co., Ltd.
Eagle Industry Co., Ltd.
Global Sales Control Department.
SI Corporate Planning Department.
K BLDG, 514, Nakagawashin, Gosen, Niigata, 959-1693, Japan
1-12-15, Shiba-Daimon, Minato-ku, Tokyo, 105-8587, Japan
TEL: +81-250-47-1172
TEL: +81-3-3438-2394
FAX: +81-250-47-1173
FAX: +81-3-3438-2294
URL: [Link]

〈USA & outside of Japan for Semiconductor〉

EKK Eagle Semicon Components, Inc.
1731 Technology Drive Suite 760 San Jose, CA 95110 USA
TEL: +1-408-573-9004
FAX: +1-408-573-9015

15
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Tobago · Tunisia · Turkey · Turkmenistan · Ukraine · United Arab Emirates · Uruguay · USA · Uzbekistan · Venezuela · Vietnam · [Link]/world

EagleBurgmann is one of the internationally leading companies for industrial sealing technology.
Our products are used everywhere where safety and reliability are important:in the oil and gas industry, EagleBurgmann Japan Co.,Ltd.
refining technology, the petrochemical, chemical and pharmaceutical industries, food processing, power, Head Office
water, mining, pulp & paper, aerospace,semiconductor and many other spheres. 1-12-15, Shiba-Daimon, Minato-ku, Tokyo, 105-8587, Japan
Every day, more than 6,000 employees contribute their ideas, solutions and commitment towards Phone: +81-3-3432-0188 Fax: +81-3-3432-5448
ensuring that customers all over the world can rely on our seals. [Link]
Our modular TotalSealCare service underlines our strong customer orientation and offers tailor-made
services for every application.