Level 7 - Cleanroom and Contamination
Control Learning Notes
1. ISO Cleanroom Classes
• Cleanrooms are classified according to ISO 14644-1.
• ISO Class 1 is the cleanest environment.
• ISO Class 8 is commonly used in electronics manufacturing.
2. HEPA and ULPA Filters
• HEPA (High-Efficiency Particulate Air) filters remove 99.97% of particles larger than 0.3
microns.
• ULPA (Ultra-Low Penetration Air) filters provide even higher filtration efficiency.
• These filters maintain cleanroom air quality.
3. Temperature and Humidity Control
• Temperature is typically maintained between 20°C and 24°C.
• Relative humidity is usually maintained between 40% and 60%.
• Proper control reduces static electricity and contamination.
4. Particle Contamination
• Particles can come from people, clothing, dust and equipment.
• Even microscopic particles can damage semiconductor devices.
• Particle counters are used to monitor contamination.
5. Gowning Procedures
• Operators wear cleanroom suits, gloves, masks, caps and shoe covers.
• Proper gowning minimizes contamination from the human body.
6. Airflow Systems
• Laminar airflow moves clean air in a single direction.
• Positive pressure prevents outside contaminants from entering the cleanroom.
7. Chemical Safety
• Workers must use PPE when handling chemicals.
• Always follow Material Safety Data Sheets (MSDS).
• Common semiconductor chemicals include acids, solvents and gases.
Important Standards
• ISO 14644-1: Cleanroom classification.
• ISO 14644-5: Cleanroom operations.
• ANSI/ESD S20.20: Electrostatic discharge control.
Recommended Books
• Cleanroom Technology by William Whyte.
• Cleanroom Design by Bengt Ljungqvist.
• Semiconductor Manufacturing Handbook by Hwaiyu Geng.
• Introduction to Contamination Control and Cleanroom Technology by John T. Leonard.
Recommended YouTube Channels
• Neso Academy – [Link]
• Intel Newsroom – [Link]
• TSMC – [Link]
• Applied Materials – [Link]