Scanning Electron
Microscope
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Our Topics
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What is Scanning Electron Microscope (SEM)?
Principles of Scanning Electron Microscope.
How does the Scanning Electron Microscope
Work?
Parts of a Scanning Electron Microscope
Advantages & Disadvantage of Scanning Electron
Microscope.
Limitations of Scanning Electron Microscope.
Application of Scanning Electron Microscope.
M A Samad Azad, ACCE, NSTU
Scanning Electron Microscope
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A scanning electron microscope (SEM) is a type
of electron microscope that produces images of a
sample by scanning the surface with a focused
beam of electrons.
The electrons interact with atoms in the sample,
producing various signals that contain information
about the surface topography and composition of
the sample
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The Scanning electron microscope
works on the principle of applying
kinetic energy to produce signals on
Principles of the interaction of the electrons.
Scanning The electron beam follows a vertical
Electron path through the microscope, which
Microscope is held within a vacuum. The beam
travels through electromagnetic
fields and lenses, which focus the
beam down toward the sample. Once
the beam hits the sample, electrons
and X-rays are ejected from the
sample.
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How does the Scanning Electron Microscope Work?
At the heart of a scanning electron microscope is a
high-energy electron source positioned above a
series of condenser lenses and apertures which
focus these electrons into a beam. The position of
this beam is altered by sets of deflection or
scanning coils before the final lens aperture. A
sample is placed in the path of the electron beam
which is continuously deflected into a raster
scanning pattern by the deflection coils.
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When electrons impact a surface, they generate
secondary and backscattered electrons (BSE), as well
as x-rays. BSE and x-ray detectors in the sample
chamber acquire these signals, which are
characteristic of the sample’s elemental composition,
morphology, and crystalline structure. Scanning
electron microscopy can subsequently be used for
imaging the elemental composition of a sample
surface and determining topographical sample
features with a significantly increased resolving
power
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Scanning electron microscopy can generate 3D
chemical surface maps of a sample with a magnifying
capacity of up to 50,000x. This offers high lateral
resolution ranging from millimeters to nanometres
(>10nm), while energy dispersive x-ray (EDX)
analysis provides chemical detection limits of 1000 –
3000 parts per million
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Parts of a Scanning Electron Microscope
Components in a SEM
Electron Source. Tungsten (W)
electron filament. Lanthanum
hexaboride (LaB6) or Cerium
hexaboride (CeB6) Field Emission Gun
(FEG)
Lenses.
Scanning Coil.
Sample Chamber.
Detectors. Backscattered electron
detector (BSD) Energy Dispersive
Spectroscopy (EDS) Secondary
Electron Detector (SED
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Advantages of SEM Disadvantages of SEM
It's wide array of application. Expensive
The detailed three-dimensional
and topographical imaging. Large
The versatile information It must be housed in an
generated from different
detectors. area free of an possible
Easy to operate with proper electric,magnetic or
training.
It advances to computer vibration interferences.
technology. Maintenance arrangement
This instrument works fast.
Most SEM samples require is high
minimal preparation actions.
The technological advances in
modern SEM allows for the
generation of data in digital form.
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Limitations.
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Samples must be solid and they must fit into the
microscope chamber. Maximum size in
horizontal dimensions is usually on the order of
10 cm, vertical dimensions are generally much
more limited and rarely exceed 40 mm. For most
instruments samples must be stable in a vacuum
on the order of 10-5 - 10-6 torr.
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Application of SEM
SEM is the most versatile technique and can be used to:
Image morphology of samples.
Image compositional and some bonding differences.
Examine wet and dry samples while viewing them.
View frozen materials ( in a SEM with a cryostage).
Generate x-rays from samples for microanalysis (EDS).
View/map gain orientation /crystallographic orientation
and study related information like heterogeneity.
Gunshot residue analysis.
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Trace comparison.
Scanning Electron Microscopes (SEMs) are used across a
number of industrial, commercial, and research
applications.
Examination of paint particles and fibers.
Examination of non conducting materials.
Counterfeit bank notes.
Precise measurement of very small objects down to 50 nm
in size is also accomplished by using SEM.
Back scatted electron images can be used for rapid
discrimination of phases in multiple sample.
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