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Module VI Case Study 2

The document presents a case study on the characterization of dimensional features of a mesoscale component using a capacitive sensor. It includes details about the experimental setup, cut-off voltage estimation, and measurement techniques for evaluating channel dimensions. The study aims to validate the proposed measurement setup and its effectiveness in capturing dimensional data.
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0% found this document useful (0 votes)
7 views8 pages

Module VI Case Study 2

The document presents a case study on the characterization of dimensional features of a mesoscale component using a capacitive sensor. It includes details about the experimental setup, cut-off voltage estimation, and measurement techniques for evaluating channel dimensions. The study aims to validate the proposed measurement setup and its effectiveness in capturing dimensional data.
Copyright
© All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd

4/9/2026

CHARACTERIZATION OF DIMENSIONAL
FEATURES OF MESOSCALE
COMPONENT USING CAPACITIVE
SENSOR

Case Study - 2

Meso scale component

1
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Meso scale component

Experimental setup – Schematic representation

2
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Actual experimental setup

Specification of capacitive sensor and linear stage

3
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Cut-off voltage estimation - Change in the movement of the


sensor or target and area focused on the surface by the sensor.

Cut-off voltage estimation - Change in the movement of the


sensor or target and area focused on the surface by the sensor.

4
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Cut-off voltage estimation - Change in the movement of the


sensor or target and area focused on the surface by the sensor.

Depth of channel within the Depth of the channel beyond the


measuring range of the sensor measuring range of the sensor

Schematic diagram of measurement of hole/circular


feature using capacitive sensor

5
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Schematic view for evaluation of nominal width of the


channel

6
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Gauge block arrangement

Schematic view of
measurement of
channel using
gauge blocks

Measured output
voltage gain

7
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Validation of the proposed setup

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