4/9/2026
CHARACTERIZATION OF DIMENSIONAL
FEATURES OF MESOSCALE
COMPONENT USING CAPACITIVE
SENSOR
Case Study - 2
Meso scale component
1
4/9/2026
Meso scale component
Experimental setup – Schematic representation
2
4/9/2026
Actual experimental setup
Specification of capacitive sensor and linear stage
3
4/9/2026
Cut-off voltage estimation - Change in the movement of the
sensor or target and area focused on the surface by the sensor.
Cut-off voltage estimation - Change in the movement of the
sensor or target and area focused on the surface by the sensor.
4
4/9/2026
Cut-off voltage estimation - Change in the movement of the
sensor or target and area focused on the surface by the sensor.
Depth of channel within the Depth of the channel beyond the
measuring range of the sensor measuring range of the sensor
Schematic diagram of measurement of hole/circular
feature using capacitive sensor
5
4/9/2026
Schematic view for evaluation of nominal width of the
channel
6
4/9/2026
Gauge block arrangement
Schematic view of
measurement of
channel using
gauge blocks
Measured output
voltage gain
7
4/9/2026
Validation of the proposed setup