Module 3-WS25-26
Module 3-WS25-26
Functional Materials
&
Deposition techniques
What are nanomaterials?
• Nano size:
One nanometre is a millionth part of the size of the tip of a needle.
1 nm = 10-6 mm = 10-9 m
Table 1. Some examples of size from macro to molecular
Size Examples Terminology
(nm)
0.1-0.5 Individual chemical bonds Molecular/atomic
Bulk Gold
0.5-1.0 Small molecules, pores in Molecular
zeolites
1-1000 Proteins, DNA, inorganic Nano
nanoparticles From: USDA’s
103-104 living cells, human hair Micro roadmap of
nanotechnology.
>104 Normal bulk matter Macro
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Link
Categories of Nanomaterials
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• Nanomaterials show unusual
⮚ Mechanical
⮚ Electrical
⮚ Optical
⮚ Magnetic properties.
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BAND GAP IN NANO AND BULK MATERIALS
⮚ Band Gap
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Gold : Bulk vs. Nano
Bulk Gold Nano Gold
1 Lustrous–they have a shiny surface Are never gold in colour but found in a
when polished range of colours
2 Malleable–they can be hammered, bent Size & Shape of the nanoparticles
or rolled into any desired shape determines the colour
3 Ductile–they can be drawn out into wires For example, Gold particles in glass
25 nm > red reflected
50 nm > green reflected
100 nm > orange reflected
4 Is metallic, with a yellow colour when in Are not “metals” but are semiconductors
a mass (Band gap energy = 3.4 eV)
5 Good conductors of heat and electricity Are very good catalysts
6 Generally have high densities
7 Have high melting point (~1080oC) Melts at relatively low temp (~940º C)
8 Are often hard and tough with high
tensile strength
9 Having high resistance to the stresses
of being stretched or drawn out
10 Not easily breakable
11 Inert-unaffected by air & most reagents
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Size and shape dependent colors of Au and Ag nanoparticles
Gold NPs in Glass Silver NPs in Glass
25 nm
100 nm
Sphere
Sphere
reflected
reflected
50 nm 40 nm
Sphere Sphere
reflected reflected
100 nm
100 nm prism
Sphere reflected
reflected
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Size and shape dependent colors of Au and Ag nanoparticles
WC coated
50 µm powder ball
Ball_mill
220px-8000M_Mixer_Mill_%28open%29_incl_accessories
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Mineral, ceramic processing, and powder metallurgy industry
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❖ Advantages
• Synthesizing nonmetallic inorganic materials like glasses, glass ceramics or
ceramic materials at very low temperatures compared to melting glass or
firing ceramics
• Monosized nanoparticles possible by this bottom up approach.
❖ Disadvantages
• Controlling the growth of the particles and then stopping the newly
formed particles from agglomerating.
• Difficult to ensure complete reaction so that no
unwanted reactant is left on the product
• Completely removal of any growth aids
• Also production rates of nanopowders are very slow by this process
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Principle and applications
of X-Ray Diffraction (XRD) technique
XRD is a versatile, non-destructive characterization technique widely used in materials science
and engineering for identifying known/ unknown crystalline materials.
XRD works by irradiating a material with incident X-rays, and then measuring the intensities
and diffracting angles of the X-rays that leave the material.
XRD is also used to determine structural properties like lattice parameters, strain, grain size,
epitaxy, phase composition, preferred orientation, to measure thickness of thin films and
multi-layers and to determine atomic arrangement.
XRD also yields information on how the actual structure deviates from the ideal one, owing to
internal stresses and defects.
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Constructive and Destructive Interference of Waves
Crystals are regular arrays of atoms/ ions / molecules. Hence X-rays are diffract periodically by
them.
The arrangement of the atoms/ ions/ molecules can be determined by Bragg’s law:
equated as
nλ = 2dsinθ
where “n” is an integer, and “λ” is the beam wavelength, “d” is the spacing between diffracting
planes and “θ” is the incident angle.
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As per the law the diffractions are associated with the set of periodically spaced planes
consist of respective sets of atoms.
Orientation of a particular set of planes is identified by its three Miller indices (h, k, l), and
their spacing (or inter-planar distance) is noted by “d”.
X-rays are used to produce the diffraction pattern because their wavelength, λ, is often the
same order of magnitude as the spacing “d” between the crystal planes (1-100 Ǻ).
Deriving Bragg’s Law: nλ = 2dsinθ
X-ray 1
Constructive interference X-ray 2
occurs only when
n λ = AB + BC AB+BC = multiples of nλ
AB=BC
n λ = 2AB
Sinθ=AB/d
AB=dsinθ
n λ =2dsinθ
λ = 2dhklsinθhkl
What is X-ray Diffraction ?
Modern X-ray Diffractometer
2
Sample stage
Planes in Crystals-2 dimension
λ = 2dhklsinθhkl
Different planes have different spacings
z
z z c
c c
(110)
a y y y
b a
Intensity (relative)
x a b b
x x (211)
(200)
Diffraction angle 2
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XRD patterns for 3 different forms of SiO2
Q. 2. Estimate the crystallite size of the given nanomaterial using p-XRD data:
Peak position 2θ = 21.61o, FWHM of sample = 2.51o, k = 0.9 and λ = 1.5406 Å (degree to
radian = Degree × π/180).
Ans.: 2θ = 21.61o (θ = 10.805o) and FWHM = 2.51o (0.043825 radian)
Crystalline grain size calculation by Scherrer’s equation: k*λ/β*cosθ
k = 0.9, λ = 1.5406 Å (0.15406 nm), β = FWHM in radian and 2θ = Bragg’s angle in o obtained from
p-XRD data.
Crystallite size = (0.9*0.15406)/(0.043825*0.982257) nm = 3.22 nm
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Overview of Scanning Electron Microscopy (SEM)
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Limitations of using Light Microscope (LM):
▪ LM has a magnification of 1000x with a resolution of 200 nm.
▪ Resolving power of LM is limited by the number and quality of the lenses but also by the
wavelength of the light used for illumination.
▪ Using light with a short wavelength (blue or ultraviolet) gave a small improvement.
▪ Immersing the specimen and the front of the objective lens in a medium with a high refractive
index (oil) gave another small improvement leading upto 100 nm.
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Signals of Interest
Auger electron:
Xray:
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Signals of Interest
Secondary electrons are primarily used for topographical images because they are generated
closer to the surface of the sample. A secondary electron is emitted because of inelastic
scattering, or interactions that involve energy transfer from a primary beam electron to an
atom in the sample. The energy of secondary electrons is defined as being less than 50 eV.
Images collected with secondary electrons will also possess the best lateral resolution due to
the relatively small interaction volume that is approximately the size of the beam diameter.
Elastic scattering at high angles (> 90°) results in the emission of backscattered electrons
above the surface of the sample. When the primary beam approaches the nucleus of an atom
in the sample, the positive charge causes a deflection of the fast electron causing it to be
remitted from the surface. The yield of backscattered electrons depends upon the average
atomic number wherein heavier elements, possessing more positive charge, result in higher
yield. Therefore, the contrast in images acquired with backscattered electrons provides
information on surface composition.
Characteristic X-rays are emitted when an ionized atom relaxes to a ground state by filling an
inner shell electron hole with an electron from a higher orbital. The energy difference between
the two electron shells is equivalent to the characteristic X-ray energy and can be used to
fingerprint the specific element that it originated from. Compared to backscattered electrons,
characteristic X-rays that result from inelastic scattering allow for precise identification of
elements present in the sample. In addition to the characteristic X-ray peaks that are observed
in EDS data, a continuum (background) signal is generated by the deceleration of incident
electrons as they interact with the sample.
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SEM basics
o Imagine yourself alone in an unknown darkened room with only a fine beam torch. You
might start exploring the room by scanning the torch beam systematically from side to
side gradually moving down so that you could build up a picture of the objects in the
room in your memory.
o SEM uses an electron beam instead of a torch, an electron detector instead of eyes
and a fluorescent screen and camera as memory.
▪ Accelerated electrons behave in vacuum just like light. They travel in straight lines and
have a wavelength which is about 100 000 times smaller than that of light.
▪ Furthermore, electric and magnetic fields have the same effect on electrons as glass
lenses and mirrors have on visible light.
▪ The first electron microscope used two magnetic lenses and later added a third lens to
achieve a resolution of 100 nm, twice as good as that of the light microscope.
▪ Now, the electron microscope uses five magnetic lenses in the imaging system, a
resolving power of 0.1 nm at magnifications of over 1 million times.
Essential components of SEM
1. Electron gun as Source
2. Electron Lenses
3. Sample Stage
4. Detectors for all signals of interest
5. Display/Data output devices
6. Infrastructure Requirements: (a). Power Supply, (b). Vacuum System, (c). Cooling system, (d).
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Vibration-free floor and (e). Room free of ambient magnetic and electric fields.
Vacuum
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1. Electron gun as Source:
Electron gun consists of 3 important
components:
(i). Filament made from hair-pin shaped
Tungsten (or Lanthanum Hexaboride)
functioning as Cathode. Voltage applied
to the filament heats it up to 2700 oC;
(ii). Wehnelt cylinder (also known as
grid cap or cylinder) made from
platinum or tantalum foil. It is used for
focusing and controlling the electron
beam and has the shape of a hollow
cylinder. The bottom side of the cylinder
has an opening at its centre with 200 to
1200 μm diameter; and
(iii). Anode, which is positive with
respect to the filament, forms powerful
attractive forces for electrons. This
causes electrons to accelerate (several
hundred thousand km/sec) toward the
anode. Some accelerate right by the
anode and down by the column onto These 3 components together form a triode electron
the sample. gun which is a very stable source of electrons.39
2. Electron lenses - Magnification and resolution
o Magnification is entirely determined by electronic circuitry that scans the beam over the
specimen (and simultaneously over fluorescent screen of monitor where the image appears).
o Magnification can be as high as 3,00,000x. Increasing the magnification is achieved by
reducing the size of the area scanned on the specimen.
o Resolution of 1 nm can be attained depending on:
a) Diameter of electron beam on the specimen surface
b) Specimen properties
c) Specimen preparation technique
d) Instrumental parameters such as
i. beam intensity
ii. accelerating voltage
iii. scanning speed
iv. distance from the last lens to specimen (referred to as the working distance) and
v. angle of the specimen surface with respect to the detector.
3. Sample stage: What happens to the specimen during electron bombardment?
Electron beam scan the specimen in a rectangular spot less than 4 nm in diameter.
a) Specimen itself emits secondary electrons.
b) Some of the primary electrons are reflected (back-scattered electrons).
c) Electrons are absorbed by the specimen.
d) Specimen emits X-rays, and sometimes emits photons (light).
All these phenomena are interrelated and depends on the specimen topography, its chemical
state and atomic number. The number of backscattered electrons, secondary electrons and
absorbed electrons at each point of the specimen depends on the specimen’s topography
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to a
much greater extent than the other properties mentioned above.
Specimen orientation and manipulation
o SEM image quality depends on specimen orientation and distance from detectors and lens.
o Specimen stage allows the specimen to be moved in a horizontal plane (X and Y direction)
and up and down (Z direction) and rotated and tilted as required. These movements are
often motorized and controlled by the PC.
o SEM models differ in size of their specimen chambers allowing various sizes of specimens to
be introduced and manipulated. Maximum specimen size also determines the price because
larger the specimen chamber, larger the goniometer movement needed and larger the
pumping system needed to maintain a good vacuum.
o The simplest model accepts specimens of a few cm in diameter and can move them 50 mm
in the X and Y directions. Largest chamber accepts samples up to 200 mm in diameter and
can move them 150 mm in each direction.
o All models allow samples to be tilted up to high angles and rotated through 360o.
o There are special stages for heating, cooling and straining specimens.
4. Detectors for all signals of interest
▪ Detectors for backscattered electrons and secondary electrons are either a scintillation
detector or a solid state detector.
▪ In the case of scintillation detector, electrons strike a fluorescent screen, which then emits
light that is amplified and converted into an electrical signal by photomultiplier tube.
▪ In the case of solid state detector, it works by amplifying the minute signal produced by the
incoming electrons in a semiconductor device.
▪ Amplified signal of the electron beam is also impacted on a cathode ray tube. Both the beam
in the microscope and the one in the CRT are scanned at the same rate and the41 1-to-1
5. Display/Data output devices
o SEM is usually equipped with two image monitors, one for observation by operator and
other a high resolution monitor, equipped with ordinary photo camera (or Polaroid)
o To facilitate the observation and correct choice of the parameters mentioned above, SEM
have an image store in which the image is built up scan by scan and displayed at TV speed so
that there is a steady, flicker-free image on the viewing monitor.
o Digital images are stored electronically for subsequent enhancement and analysis.
o Since the SEM image is electronically produced, it can be subjected to contrast
enhancement, inversion (black becomes white), mixing of images from various detectors,
subtraction of the image from one detector from that produced by a different detector,
colour coding and image analysis.
o All these techniques may be applied if it suits the primary aim of extracting the best possible
information from the specimen.
6. Importance of Vacuum in SEM column:
• In SEM, the column through which electron beam passes through must always be at vacuum.
• If the sample is in a gas filled environment, the electron beam cannot be generated or
maintained because of a high instability in the beam. Also, gases could react with the
electron source, causing it to burn out, or cause electrons in the beam to ionize, which
produces random discharges and leads to instability in the beam.
• Transmission of beam through electron optic column would also be hindered by the presence
of other molecules from the sample or the microscope itself, and could form compounds and
condense on the sample. This would lower the contrast and obscure detail in the image.
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• Sufficiently low vacuum in SEM column is produced by either an oil diffusion pump or a
Strengths of SEM
▪ Gold as conductive coating: A heavy element like gold is preferred for use as conductive
coating as it gives a good yield of secondary electrons and thereby a good quality image. In
addition, it gives a fine grain coating and is easily applied in a sputter coater. The layer
required to ensure a conducting layer is quite thin (about 10 nm).
▪ Operational features: Most SEM models are easier to operate, with user-friendly interfaces,
minimal sample preparation and rapid data acquisition (less than 5 min/image).
▪ SEM generate data in digital formats, which are highly portable.
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Conducting Polymers
CONDUCTING POLYMERS
[Link]
The Nobel Prize in Chemistry 2000 was awarded jointly to Alan J. Heeger, Alan G.
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MacDiarmid and Hideki Shirakawa "for the discovery and development of conductive
Conducting Polymers
A conducting polymer is an organic polymer that can
conduct electricity, act as a semiconductor, or a conductor.
The most widely studied organic polymers are
Polyacetylene, polyaniline (PANI), polypyrroles,
polythiophenes, and polyphenylene vinylenes.
Conducting polymers
Electrical conductivity of conducting polymers ranges from insulators (10-10
S/cm) to semiconductor (~10-5 S/cm) to those near (104 S/cm) to good
conductor such as copper (5 x 105 S/cm).
σ
Advantage of conducting polymer is that they can Energy diagram of polym
be fabricated into light, flexible sheets. which has saturated bac
bone PTFE, PE, PS
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▪ Conducting polymers (CPs) are extensively conjugated molecules:
they have alternating single and double bonds. In these molecules,
electrons are able to move from one end of the polymer to the
other through the extended p-orbital system.
▪ Hence CPs are known to be either semiconductors or conductors
giving them unique optical and electrical properties.
▪ Most polymers are poor conductors due to non-availability of large
number of free electrons in the conduction process.
▪ However, conducting polymers are synthesized which possess
electrical Conductivity similar to metal conductors.
Energy bands
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Criteria for polymers to be conducting
The polymer should be in extensive conjugation
and
Certainly, if polymer has to conduct electricity it should have e- in
conduction band i.e in Lowest Unoccupied Molecular Orbital (LUMO)
or
It should have positive hole in valence band i.e Highest Occupied
Molecular Orbital (HOMO)
Conducting
polymers
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1. Intrinsically Conducting Polymers
Polymer consisting of alternating single and double bonds is
called conjugated double bonds.
In conjugation, the bonds between the carbon atoms are
alternately single and double. Every bond contains a localised
“sigma” (σ) bond which forms a strong chemical bond.
In addition, every double bond also contains a less strongly
localised “pi” (π) bond which is weaker.
Conjugation of sigma and pi-electrons over the entire
backbone, forms valence bands and conduction bands.
Eg: Poly-acetylene polymers like poly-p-phenylene, polyaniline,
polypyrrole
Intrinsic Conducting Polymers (ICP)
ICP are conjugated polymers (i.e) alternate single and double
bond.
Eg. Polyacetylene
Polypyrrole
Polydialkylfluorene
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Intrinsic Conducting Polymers (ICP)
Poly-p-phenylene
Poly-p-phenylenesulphide
Polyanthrylene
Polythiophene Polyphenylvinylidene
Poly(3,4-ethylene-dioxythiophene) (PEDOT) 55
Intrinsic Conducting Polymers (ICP)
Hybridization of carbon in polyacetylene – sp2 σ*
Equivalent to
conduction band π*
Equivalent to
Conjugated π-bond - valence band π
delocalized π e-
σ
σ-bond for mechanical strength and delocalized π e- Relative energies of
for electrical and optical properties MOs of bonding and
antibonding of σ and π
bonds of polyacetylene
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Intrinsic Conducting Polymers (ICP)
Overlapping of orbitals over entire backbone (i.e) extended delocalization
results in formation of valence bands as well as conduction bands.
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Intrinsic Conducting Polymers (ICP)
ICP – possess low conductivity
10-5 Ω-1 cm-1
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Intrinsic Conducting Polymers (ICP)
ICPs have low ionization potential and high e- affinity i.e it can be easily
oxidized or reduced.
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DOPED CONDUCTING POLYMERS
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2. Doped Conducting Polymers
It is obtained by exposing a polymer to a charge transfer agent in either
gas phase or in solution. ICPs possess low conductivity (10-10/[Link]), but
they possess low ionisation potential and high electron affinity. So they can
be easily oxidised or reduced.
DOPING:
The conductivity of ICP can be increased by creating positive charges
(oxidation) or by negative charges (reduction) on the polymer backbone. This
technique is called DOPING .
In otherwords….
The polymer structure has to be disturbed - either by removing
electrons from (oxidation), or inserting them into (reduction), the
material. The process is known as Doping.
There are two types of doping:
1. Oxidation with halogen (or p-doping).
2. Reduction with alkali metal (called n-doping).
Intrinsic Conducting Polymers (ICP)
Doping, increases electrical conductivity of ICP dramatically
addition of e- (charge
carrier)
to conduction band (n-
doping)
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(i) p-Doping:
It involves treating an intrinsically conducting polymer with a
Lewis acid which leads to oxidation process and positive charges
on the polymer backbone are created.
Some of the p-dopants are I2, Br2, AsF5, PF5 etc.
(ii) n-Doping:
It involves treating an ICP with a Lewis base which leads to
reduction process and negative charges on the polymer backbone
are created.
Some of the n-dopants are Li, Na, Ca, FeCl3, naphthylamine etc.
_
…-CH=CH-CH=CH-… + C10H7NH2 …-CH=CH-CH=CH- + C10H8
I
+NH
p-Doped Intrinsic Conducting Polymers
When polyacetylene doped with Lewis acid – oxidation takes
place and positive charge created on polymer backbone.
p-dopant – I2, Br2, AsF5, PF6, naphthylamine etc.
Conductivit
y of
polyacetyle
ne
Vs
I2
concentrati
on
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p-Doped Intrinsic Conducting Polymers
The I2 molecule attracts e- from the polyacetylene chain and becomes I3ֿ.
The polyacetylene molecule, now positively charged with unpaired e-
termed as radical cation or polaron.
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• In p-type doping, the dopant (Iodine, I2) attracts an
electron from the polyacetylene chain to form (I3-) leaving
a positive soliton (carbenium ion) in the polymer chain
that can move along its length.
• The lonely electron of the double bond, from which an
electron was removed, can move easily.
• As a consequence, the double bond successively moves
along the molecule, and the polymer is stabilized by
having the charge spread over the polymer chain.
Doping in Trans-Polyacetylene 66
Mechanism of Conduction in Polyacetylene
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n-Doped conducting polymers
ICP with Lewis base – reduction takes place and negative charge created
on polymer backbone.
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Conductivity Mechanism in Polyacetylene:
• The mechanism followed by polyacetylene for the transfer of charge from one
chain to another is called intersoliton hopping.
• What is a soliton? The soliton is a charged or a neutral defect in the
polyacetylene chain that propagates down the chain, thereby reducing the
barrier for interconversion.
• In n-type doping (This can be
done by dipping the film in
THF solution of an alkali
metal) soliton is a resonance-
stabilized polyenyl anion of
approximately 29-31 CH
units in length, with highest
amplitude at the centre of the
defect.
• The solitons (anions)
transfer electrons to a neutral
soliton (radical) in a
neighboring chain through an
isoenergetic process.
• The charged solitons are
responsible for making
polyacetylene a conductor.69
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Polyaniline (PANI)
These have good bulk conductivity and are low in cost, light weight,
strong and durable. They can be in different forms, shapes and sizes.
Corrosion Inhibitors
Compact Capacitors
"Smart Windows"
Transistors
Solar cells
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Working principle of OLEDs
⮚ The holes lie in the valence band, while the free electrons are in the conduction
band of material.
⮚ When there is a forward bias in the p-n junction, the electron which is a part of the
n-type semiconductor material would overrun the p-n junction and join with the
holes in the p-type semiconductor material. Therefore, regarding the holes, the free
electrons would be at the higher energy bands.
⮚ When this movement of free electron and hole takes place, there is a change in the
energy level as the voltage drops from the conduction band to the valance band.
⮚ There is a release of energy due to the motion of the electron.
⮚ In standard diodes, the release of energy in the manner of heat. But in LED the
release of energy in the form of photons would emit light energy.
⮚ This entire process is known as electroluminescence, and the diodes are known
as a light-emitting diode.
Deposition Techniques
Deposition methods refer to techniques used to apply a thin layer of material
onto a substrate. These methods are crucial in various industries, including
semiconductors, medical devices, and coatings. There are two main categories:
Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD)
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Physical Vapour Deposition
o This is a process of depositing some material by atom by atom or
molecule by molecule or ion by ion.
Applications:
1. This process is widely used to produce decorative coatings on plastic
parts those are resembling shiny metal.
Sputtering is done either using DC voltage (DC sputtering) for metals or using AC voltage
(RF sputtering) for dielectric materials and polymers.
The gas atoms are ionized and they
bombard the material to be coated.
• The argon ion (Ar+) will move toward to cathode with high speed and sputter the
target material (use target as cathode).
• The target atom or molecular will be hit to substrate surface and condense as a
film.
• Instead of heat melting in evaporation method, the plasma Ar+ ion hit and sputter
the target is the main mechanism in plasma sputtering method.
• The target atom is knocked out by Ar+ ion, the knock force is so big and can
accelerate target atom a high speed. With such velocity, the target atom can hit
and attach to substrate surface deeply.
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Sputtering offers the following advantages over other PVD methods used in
VLSI fabrication:
1) Sputtering can be achieved from large-size targets, simplifying the deposition of
thins with unifrom thickness over large wafers;
2) Film thickness is easily controlled by fixing the operating parameters and simply
adjusting the deposition time;
3) Control of the alloy composition, as well as other film properties such as step
coverage and grain structure, is more easily accomplished than by deposition
through evaporation;
4) Sputter-cleaning of the substrate in vacuum prior to film deposition can be
done;
5) Device damage from X-rays generated by electron beam evaporation is
avoided.
5. Sputter and ion plated coatings are used in design for very thin
films for electrical, optical and wear-resistant applications.
PVD differs in that the precursors are solid, with the material to be deposited
being vaporised from a solid target and deposited onto the substrate
Precursor gases (often diluted in carrier gases) are delivered into the reaction
chamber at approximately ambient temperatures. As they pass over or come
into contact with a heated substrate, they react or decompose forming a solid
phase which and are deposited onto the substrate. The substrate temperature is
critical and can influence what reactions will take place.
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CVD Apparatus
A CVD apparatus will consist of several basic components:
Gas delivery system – For the supply of precursors to the reactor chamber
Energy source – Provide the energy/heat that is required to get the precursors to
react/decompose.
Vacuum system – A system for removal of all other gaseous species other than those
required for the reaction/deposition.
Exhaust system – System for removal of volatile by-products from the reaction
chamber.
Exhaust treatment systems – In some instances, exhaust gases may not be suitable for
release into the atmosphere and may require treatment or conversion to safe/harmless
compounds.
Process control equipment – Gauges, controls etc to monitor process parameters such
as pressure, temperature and time. Alarms and safety devices would also be included
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in this category
Advantages of CVD over PVD:
One of the primary advantages is that CVD films are generally quite
conformal, i.e., that the film thickness on the sidewalls of features is
comparable to the thickness on the top.
In, contrast, physical vapor deposition (PVD) techniques, such as sputtering
or evaporation, generally require a line-of-sight between the surface to be
coated and the source
Another advantage of CVD is that, in addition to the wide variety of
.
materials that can be deposited, they can be deposited with very high purity.
This results from the relative ease with which impurities are removed from
gaseous precursors using distillation techniques.
Other advantages include relatively high deposition rates, and the fact that
CVD often doesn’t require as high a vacuum as PVD processes
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CVD also has a number of disadvantages:
2. CVD precursors can also be highly toxic (Ni(CO)4 ), explosive (B2H6), or corrosive (SiCl4).
3. The byproducts of CVD reactions can also be hazardous (CO, H2, or HF).
4. Some of these precursors, especially the metal-organic precursors, can also be quite
costly.
5. The other major disadvantage is the fact that the films are usually deposited at
elevated temperatures. This puts some restrictions on the kind of substrates that can
be coated.
8. Separate process and reaction must be developed for each coating. Some of the gases
are toxic and dangerous. 21
Applications of CVD
1. A newer process known as plasma assisted chemical vapour deposition. This
process is used to apply diamond and diamond like carbon coatings.
2. used largely in the production of semiconductors
3. Silicon carbide barrier coatings are applied on plastic films and
semiconductors.
4. Chemical Vapour Deposition is used to produce bulk shapes of high purity
silicon carbide. Reactants are deposited on a chamber wall to a thickness in
terms of millimeters.
5. Thin-film coatings are key to the manufacture of many electronic devices. They
involve the application of dopant, sealant and other microelectronic paste.
6. Thermal evaporation is a low cost process, but all these processes are normally
batch processes because of vacuum chamber requirements.
7. CVD is also used to produce synthetic diamonds.
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