Tutorial – 10

U24CI302: SENSORS AND ACTUATORS

TOPICS: Capacitive Acceleration Sensor, Angular Velocity Sensor (Gyroscope), Capacitive

Fingerprint Sensor, Electrostatic Loudspeaker, Electrostatic MEMS Actuator

Faculty name: B. SHASHIKANTH

Date posted on: [27/10/2025]

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[Link]. PROBLEM Marks CO

1. Capacitive acceleration sensors are widely used in consumer electronics, automotive 10 CO4
safety systems, and industrial monitoring due to their high sensitivity, low power
consumption, and ability to measure static and dynamic acceleration. (10M – An) – CO4

 Explain the working principle of a capacitive acceleration sensor based on the

change in capacitance. (2M) – (R)
 Describe one automotive application where a capacitive accelerometer is
essential for safety or performance. (2M) – (U)
 What are the major advantages and limitations of capacitive acceleration
sensors? (2M) – (U)
 A capacitive accelerometer has two parallel plates separated by 2 μm. If the
movable plate displaces by 0.1 μm due to acceleration, and the initial
capacitance is 10 pF, calculate the change in capacitance. (Assume C = ε₀εᵣA/d
and linear approximation ΔC/C ≈ -Δd/d) (2M) – (Ap)
 Compare capacitive accelerometers with piezoelectric accelerometers in terms of
frequency response, power consumption, and ability to measure static
acceleration. (2M) – (An)

2. Angular velocity sensors (gyroscopes) are critical components in navigation systems, 10 CO4
smartphones, drones, and automotive stability control for measuring rotational motion
with high precision. (10M – An) – CO4

 What is the fundamental working principle of a MEMS vibratory gyroscope?

How does it detect angular velocity using the Coriolis effect? (2M) – (R)
 Describe an application in consumer electronics or automotive systems where a
gyroscope is used for motion detection or stabilization. (2M) – (U)
 List the main advantages and disadvantages of MEMS gyroscopes compared to
mechanical gyroscopes. (2M) – (U)
 A MEMS gyroscope has a sensitivity of 16.4 LSB/(°/s) (Least Significant Bit
per degree per second). If the sensor output reads 3280 LSB, calculate the
angular velocity being measured. (2M) – (Ap)
 Compare MEMS vibratory gyroscopes and fiber optic gyroscopes (FOG) in
terms of operating principle, accuracy, and typical applications. (2M) – (An)

3. Capacitive fingerprint sensors are widely used in smartphones, laptops, and access 10 CO4
control systems for biometric authentication due to their reliability, compact size, and
cost-effectiveness. (10M – An) – CO4

 State the working principle of a capacitive fingerprint sensor. How does it detect
fingerprint ridges and valleys? (2M) – (R)
 Explain how a capacitive fingerprint sensor differentiates between a live finger
and a fake/spoofed fingerprint. (2M) – (U)
 Describe one application for capacitive fingerprint sensors in mobile devices or
security systems. (2M) – (U)
  A capacitive fingerprint sensor has an array of 256 × 256 pixels with a pixel
pitch of 50 μm. Calculate the total sensing area of the sensor in mm². (2M) –
(Ap)
 Compare capacitive fingerprint sensors and optical fingerprint sensors in terms
of working principle, image quality, and resistance to spoofing. (2M) – (An)

4. Electrostatic loudspeakers use electrostatic forces between charged plates to produce 10 CO4
sound with exceptional clarity and minimal distortion, making them popular in high-
fidelity audio systems. (10M – An) – CO4

 What is an electrostatic loudspeaker and how does its operating principle differ
from conventional electromagnetic loudspeakers? (2M) – (R)
 Describe the structure and operation of an electrostatic loudspeaker, focusing on
how the diaphragm produces sound waves. (2M) – (U)
 List the main advantages and disadvantages of electrostatic loudspeakers
compared to dynamic (moving coil) loudspeakers. (2M) – (U)
 An electrostatic loudspeaker has two stator plates separated by 0.5 mm with a
voltage of 5 kV applied. If the diaphragm area is 0.1 m², calculate the
electrostatic force on the diaphragm. (Use F = ½ε₀AV²/d², where ε₀ = 8.85 ×
10⁻¹² F/m) (2M) – (Ap)
 Compare electrostatic loudspeakers and piezoelectric speakers in terms of sound
quality, power requirements, and typical frequency range. (2M) – (An)

5. Electrostatic MEMS actuators are fundamental components in micro-robotics, optical 10 CO4

switches, and adaptive optics systems, providing precise micro-scale displacement using
electrostatic forces. (10M – An) – CO4

 Explain the working principle of an electrostatic MEMS actuator. How does it

generate mechanical motion? (2M) – (R)
 What is pull-in voltage in electrostatic actuators? Describe what happens when
the applied voltage exceeds this threshold. (2M) – (U)
 State the main advantages and disadvantages of electrostatic MEMS actuators
compared to other actuation principles (thermal, piezoelectric). (2M) – (U)
 An electrostatic comb-drive actuator has 50 finger pairs, each with an overlap
length of 20 μm, gap spacing of 2 μm, and thickness of 10 μm. If a voltage of
50V is applied, calculate the electrostatic force generated. (Use F = nε₀tV²/g,
where n is number of finger pairs, t is thickness, g is gap) (2M) – (Ap)
 Compare electrostatic MEMS actuators and thermal MEMS actuators in terms of
power consumption, response time, and displacement range. (2M) – (An)

6. Capacitive sensors are widely used for displacement, proximity, and level sensing in 10 CO4
industrial automation, touchscreens, and environmental monitoring due to their non-
contact operation and high resolution. (10M – An) – CO4

 What is the principle of capacitive sensing? State how capacitance varies with
distance, area, and dielectric properties. (2M) - (R)
 Describe one industrial scenario where capacitive proximity sensors are
commonly used for object detection or level measurement. (2M) - (U)
 A parallel plate capacitive sensor has plates of area A = 100 cm² separated by
distance d = 5 mm in air (εᵣ = 1). Calculate the capacitance. (Use C = ε₀εᵣA/d,
where ε₀ = 8.85 × 10⁻¹² F/m) (4M) - (Ap)
 Compare capacitive proximity sensors with inductive proximity sensors in terms
of working principle and ability to detect metallic vs. non-metallic materials.
(2M) - (An)

7. MEMS gyroscopes based on the Coriolis effect enable precise angular rate measurement 10 CO4
in compact form factors, revolutionizing applications in consumer electronics,
 automotive ESP systems, and drone stabilization. (10M – An) – CO4

 What is the Coriolis effect? Explain the basic principle by which a vibratory
MEMS gyroscope measures angular velocity. (2M) - (R)
 Describe the operation of a tuning fork gyroscope, focusing on how the drive
and sense modes interact to detect rotation. (2M) - (U)
 In which high-performance applications is a MEMS gyroscope preferred over a
traditional mechanical gyroscope? (2M) - (U)
 A MEMS gyroscope operates with a proof mass m = 1 × 10⁻⁹ kg vibrating at
velocity v = 0.1 m/s. If the device experiences an angular velocity Ω = 100°/s (≈
1.745 rad/s), calculate the Coriolis force. (Use Fᴄ = 2m·v·Ω) (2M) - (Ap)
 Compare MEMS gyroscopes with ring laser gyroscopes in terms of size, cost,
accuracy, and typical application domains. (2M) - (An)

1. Capacitive acceleration sensors are widely used in

consumer electronics, automotive safety systems, and
industrial monitoring due to their high sensitivity, low
power consumption, and ability to measure static and
dynamic acceleration. (10M – An) – CO4
• Explain the working principle of a capacitive acceleration sensor based on the change
in capacitance. (2M) – (R)

• Describe one automotive application whe re a capacitive accelerometer is essential for

safety or performance. (2M) – (U)

• What are the major advantages and limitations of capacitive acceleration sensors?
(2M) – (U)

• A capacitive accelerometer has two parallel plates separated by 2 μm. If the movable
plate displaces by 0.1 μm due to acceleration, and the initial capacitance is 10 pF,
calculate the change in capacitance. (Assume C = ε₀εᵣA/d and linear approximation
ΔC/C ≈ -Δd/d) (2M) – (Ap)

• Compare capacitive accelerometers with piezoelectric accelerometers in terms of

frequency response, power consumption, and ability to measure static acceleration.
(2M) – (An)
2. Angular velocity sensors (gyroscopes) are critical
components in navigation systems, smartphones, drones,
and automotive stability control for measuring rotational
motion with high precision. (10M – An) - CO3
• What is the fundamental working principle of a MEMS vibratory gyroscope? How
does it detect angular velocity using the Coriolis effect? (2M) – (R)

• Describe an application in consume r electronics or automotive systems where a

gyroscope is used for motion detection or stabilization. (2M) – (U)

• List the main advantages and disadvantages of MEMS gyroscopes compared to

mechanical gyroscopes. (2M) – (U)

• A MEMS gyroscope has a sensitivity of 16.4 LSB/(°/s) (Least Significant Bit per degree
per second). If the sensor output reads 3280 LSB, calculate the angular velocity being
measured. (2M) – (Ap)

• Compare MEMS vibratory gyroscopes and fiber optic gyroscopes (FOG) in terms of
operating principle, accuracy, and typical applications. (2M) – (An)

3. Capacitive fingerprint sensors are widely used in

smartphones, laptops, and access control systems for
biometric authentication due to their reliability, compact
size, and cost-effectiveness. (10M – An) - CO3
• State the working principle of a capacitive finge rprint sensor. How does it detect
fingerprint ridges and valleys? (2M) – (R)

• Explain how a capacitive fingerprint sensor differentiates between a live finge r and a
fake/spoofed fingerprint. (2M) – (U)

• Describe one application for capacitive fingerprint sensors in mobile devices or

security systems. (2M) – (U)

• A capacitive finge rprint sensor has an array of 256 × 256 pixels with a pixel pitch of 50
μm. Calculate the total sensing area of the sensor in mm². (2M) – (Ap)

• Compare capacitive fingerprint sensors and optical fingerprint sensors in terms of

working principle, image quality, and resistance to spoofing. (2M) – (An)

4. Electrostatic loudspeakers use electrostatic forces

between charged plates to produce sound with exceptional
clarity and minimal distortion, making them popular in
high-fidelity audio systems. (10M – An) - CO3
• What is an electrostatic loudspeaker and how does its operating principle diffe r from
conventional electromagnetic loudspeakers? (2M) – (R)

• Describe the structure and ope ration of an electrostatic louds peaker, focusing on how
the diaphragm produces sound waves. (2M) – (U)

• List the main advantages and disadvantages of electrostatic loudspeakers compared to

dynamic (moving coil) loudspeakers. (2M) – (U)

• An electrostatic loudspeaker has two stator plates separated by 0.5 mm with a voltage
of 5 kV applied. If the diaphragm area is 0.1 m², calculate the electrostatic force on the
diaphragm. (Use F = ½ε₀AV²/d², where ε₀ = 8.85 × 10⁻¹² F/m) (2M) – (Ap)

• Compare electrostatic loudspeakers and piezoelectric speakers in terms of sound

quality, powe r require ments, and typical frequency range. (2M) – (An)

5. Electrostatic MEMS actuators are fundamental

components in micro-robotics, optical switches, and
adaptive optics systems, providing precise micro-scale
displacement using electrostatic forces. (10M – An) - CO3
• Explain the working principle of an electrostatic MEMS actuator. How does it
generate mechanical motion? (2M) – (R)

• What is pull-in voltage in electrostatic actuators? Describe what happens when the
applied voltage exceeds this threshold. (2M) – (U)

• State the main advantages and disadvantages of electrostatic MEMS actuators

compared to other actuation principles (thermal, piezoelectric). (2M) – (U)

• An electrostatic comb-drive actuator has 50 finger pairs, each with an overlap length
of 20 μm, gap spacing of 2 μm, and thickness of 10 μm. If a voltage of 50V is applied,
calculate the electrostatic force generated. (Use F = nε₀tV²/g, whe re n is number of
finger pairs, t is thickness, g is gap) (2M) – (Ap)

• Compare electrostatic MEMS actuators and thermal MEMS actuators in terms of

powe r consumption, response time, and displace ment range. (2M) – (An)

6. Capacitive sensors are widely used for displacement,

proximity, and level sensing in industrial automation,
touchscreens, and environmental monitoring due to their
non-contact operation and high resolution. (10M – An) -
CO3
• What is the principle of capacitive sensing? State how capacitance varies with
distance, area, and dielectric properties. (2M) - (R)

• Describe one industrial scenario where capacitive proximity sensors are commonly
used for object detection or level measurement. (2M) - (U)

• A parallel plate capacitive sensor has plates of area A = 100 cm² separated by distance
d = 5 mm in air (εᵣ = 1). Calculate the capacitance. (Use C = ε₀εᵣA/d, whe re ε₀ = 8.85 ×
10⁻¹² F/m) (4M) - (Ap)

• Compare capacitive proximity sensors with inductive proximity sensors in terms of

working principle and ability to detect metallic vs. non-metallic mate rials. (2M) - (An)

7. MEMS gyroscopes based on the Coriolis effect enable

precise angular rate measurement in compact form
factors, revolutionizing applications in consumer
electronics, automotive ESP systems, and drone
stabilization. (10M – An) - CO3
• What is the Coriolis effect? Explain the basic principle by which a vibratory MEMS
gyroscope measures angular velocity. (2M) - (R)

• Describe the ope ration of a tuning fork gyroscope, focusing on how the drive and sense
modes interact to detect rotation. (2M) - (U)

• In which high-performance applications is a MEMS gyroscope preferred over a

traditional mechanical gyroscope? (2M) - (U)

• A MEMS gyroscope operates with a proof mass m = 1 × 10⁻⁹ kg vibrating at velocity v

= 0.1 m/s. If the device experiences an angular velocity Ω = 100°/s (≈ 1.745 rad/s),
calculate the Coriolis force. (Use Fᴄ = 2m·v·Ω) (2M) - (Ap)

• Compare MEMS gyroscopes with ring laser gyroscopes in terms of size, cost,
accuracy, and typical application domains. (2M) - (An)