Module1 CMOS Course
Module1 CMOS Course
CMOS VLSI
Design
Si Si Si
Si Si Si
Si Si Si
p-type n-type
anode cathode
n+ n+
p bulk Si
0
n+ n+
S D
p bulk Si
1
n+ n+
S D
p bulk Si
p+ p+
n bulk Si
g=0 g=1
d d d
nMOS g OFF
ON
s s s
d d d
pMOS g OFF
ON
s s s
A Y VDD
0
1
A Y
A Y
GND
Fabrication and Layout CMOS VLSI Design Slide 12
CMOS Inverter
A Y VDD
0
1 0 OFF
A=1 Y=0
ON
A Y
GND
Fabrication and Layout CMOS VLSI Design Slide 13
CMOS Inverter
A Y VDD
0 1
1 0 ON
A=0 Y=1
OFF
A Y
GND
Fabrication and Layout CMOS VLSI Design Slide 14
CMOS NAND Gate
A B Y
0 0
0 1 Y
1 0 A
1 1
B
Y
A
B
C
n+ diffusion
p+ diffusion
n+ n+ p+ p+
polysilicon
n well
p substrate
metal1
p+ n+ n+ p+ p+ n+
n well
p substrate
GND VDD
– n-well
– Polysilicon
Polysilicon
– n+ diffusion
– p+ diffusion n+ Diffusion
– Contact p+ Diffusion
– Metal Contact
Metal
p substrate
SiO2
p substrate
Photoresist
SiO2
p substrate
Photoresist
SiO2
p substrate
Photoresist
SiO2
p substrate
SiO2
p substrate
n well
n well
p substrate
Polysilicon
Thin gate oxide
n well
p substrate
Polysilicon
Polysilicon
Thin gate oxide
n well
p substrate
n well
p substrate
n+ Diffusion
n well
p substrate
n+ n+ n+
n well
p substrate
n+ n+ n+
n well
p substrate
p+ Diffusion
p+ n+ n+ p+ p+ n+
n well
p substrate
Contact
n well
p substrate
Metal
Metal
Thick field oxide
p+ n+ n+ p+ p+ n+
n well
p substrate
A
B
C
D
Y
nMOS
pull-down
network
Pull-up OFF Pull-up ON
Pull-down OFF Z (float) 1
Pull-down ON 0 X (crowbar)
❑
g2
pMOS: 0 = ON b
0
b
1
b
0
b
1
b
(a) OFF OFF OFF ON
0
0
1
1
0
1
1
b b b b b
(b) ON OFF OFF OFF
a a a a a
g1 g2 0 0 0 1 1 0 1 1
b b b b b
(c) OFF ON ON ON
a a a a a
g1 g2 0 0 0 1 1 0 1 1
b b b b b
(d) ON ON ON OFF
A
B
C
D
Y
pMOS
pull-up
network
inputs
output
nMOS
pull-down
network
a a a a a
0 0 1 1
g1
g2
0 1 0 1
b b b b b
(b) ON OFF OFF OFF
a a a a a
g1 g2 0 0 0 1 1 0 1 1
b b b b b
(c) OFF ON ON ON
a a a a a
g1 g2 0 0 0 1 1 0 1 1
b b b b b
(d) ON ON ON OFF
Y
A
B
C D
A B C D
A B
(c)
(d)
C D
A
A B
B
Y Y
C
A C
D
B D
(f)
(e)
EN A Y A
0 0
B
0 1
1 0 C D
1 1 Y
D
A B C
EN A Y A
0 0 Z
B
0 1 Z
1 0 0 C D
1 1 1 Y
D
A B C
s d
s d
g g g
a b a b a b
gb gb gb
EN
A Y
S D1 D0 Y
0 X 0 EN
0 X 1 A Y
1 0 X EN
1 1 X
EN
A Y
S D1 D0 Y
0 X 0 0 EN
0 X 1 1 A Y
1 0 X 0 EN
1 1 X 1
❑ A
EN
Y
❑ A
EN
Y
A
EN
Y
EN
EN = 0 EN = 1
Y = 'Z' Y=A
D0 0
Y
D1 1