Height distribution is seen to be of Gaussian shape see above left image. HHCF fit on the right.
3D fit :
Plotting in origin :
Height height plot
Log H (nm)^2
0.1 1 10 100
Log r (nm)
Calculation using the SPM roughness characterization document and origin : rms amplitude w : 22 = 3.10 2 = 1.245 correlation length : = 9.0 roughness/scaling exponent : 2 = 0.324 = 0.162