Scribd
Upload
7 views2 pages

X-ray and Electron Diffraction Techniques

This document discusses several techniques for determining crystalline structure and thin film properties, including x-ray diffraction, low energy electron diffraction (LEED), reflection high energy electron diffraction (RHEED), stylus profilometry, and quartz crystal monitoring (QCM). X-ray diffraction uses x-rays around 1 Angstrom in wavelength that can diffract from crystal lattices to determine structure and spacing. LEED and RHEED use electron beams to study thin film crystal structure. Stylus profilometry uses a physical stylus to measure thin film thickness and roughness, while QCM monitors frequency shifts in a quartz crystal from deposition to determine film thickness.

Uploaded by

Putul Chakravorty
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as DOC, PDF, TXT or read online on Scribd
7 views2 pages

X-ray and Electron Diffraction Techniques

This document discusses several techniques for determining crystalline structure and thin film properties, including x-ray diffraction, low energy electron diffraction (LEED), reflection high energy electron diffraction (RHEED), stylus profilometry, and quartz crystal monitoring (QCM). X-ray diffraction uses x-rays around 1 Angstrom in wavelength that can diffract from crystal lattices to determine structure and spacing. LEED and RHEED use electron beams to study thin film crystal structure. Stylus profilometry uses a physical stylus to measure thin film thickness and roughness, while QCM monitors frequency shifts in a quartz crystal from deposition to determine film thickness.

Uploaded by

Putul Chakravorty
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as DOC, PDF, TXT or read online on Scribd

Crystalline Structure: Diffraction Techniques

X-ray Diffraction
wavelength of X-rays is around 1 => can diffract from crystal lattices

Uses

o o o
Samples

determine crystal structure and lattice spacings identify phases present measure crystal defects

o o o

must by crystalline need a minimum of about 0.001 gram sampling depth is 10 - 100 m

Diffraction (reflection): constructive interference only occurs at some incident angles

2d sin

We know the wavelength, we measure the angle at which we see diffraction and find the lattice spacing.

Diffraction of transmitted beam

o
note: get diffraction from many sets of planes as you rotate

=> complicated sets of peaks

X-rays penetrate many microns into sample. => hard to see thin films (mainly see substrate)

Use glancing angle primary beam without sample rotation for thin films.

Low Energy Electron Diffraction (LEED)


see handouts

Reflection High Energy Electron Diffraction (RHEED)

see handouts

Film thickness and roughness


Stylus profilometer (Dektak, Alphastep, Talystep)

electro-magnetic sensors detect the vertical motion of the stylus as it is moved horizontally across the sample. measure

film thickness (step height)

o o
roughness

changes of 200 to 65 m vertical resolution of about 10

horizontal resolution depends on tip radius

problem: stylus penetrates soft films

Quartz Crystal Monitor (QCM)


use piezoelectric properties of quartz crystal

put electrodes on thin (0.3 mm) disk of quartz alternating voltage deforms crystal periodically (vibrates) resonant vibration frequency between 5 and 6 MHz deposition of film on crystal shifts frequency to lower values relate film thickness to frequency shift IF film density is known crystal can be used for up to about 50,000 of material caution: stress and heat can also change vibration frequency

Previous Lecture - - - INDEX OF LECTURES - - - Next Lecture

You might also like